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| Number | Title | Issue Date |
| 7709062 | Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device A hole in a sample from which a sample piece has been extracted with a focused ion beam is filled at high speed using ion beam gas assisted deposition. A method of filling the hole by using the ion beam includes a step of irradiating the hole formed in a face of the... | 05/04/2010 |
| 7566481 | Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) A method is provided for making a coated article including an anti-etch layer(s) that is resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In certain example embodiments, an anti-etch layer(s) is provided on a glass subst... | 07/28/2009 |
| 7374642 | Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith A continuous, uninterrupted two-step treatment process capable of forming nanometer scale physical structures on the surface of articles fabricated from metallic, ceramic, glass, or plastic materials, and then depositing a thin conformal coating on the nanostructure... | 05/20/2008 |
| 7354482 | Film deposition device A film deposition device for depositing a film includes a depositing chamber for depositing the film with plasma. A plasma quantity monitoring device is disposed in the depositing chamber for monitoring a plasma quantity entering the depositing chamber at real time.... | 04/08/2008 |
| 7344760 | Wear-resistant electrically conductive body A method for making a wear-resistant electrically conductive body having an electrically conductive diamond-like carbon coating, by ion-accelerating copper ions from a copper ion source onto a negatively charged electrically conductive body, and simultaneously ion-a... | 03/18/2008 |
| 7300684 | Method and system for coating internal surfaces of prefabricated process piping in the field The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum sou... | 11/27/2007 |
| 7234541 | DLC coating for earth-boring bit seal ring An earth-boring bit has a seal assembly with a seal face having a DLC coating. The seal assembly locates between a bearing pin and a cone of the bit. The seal assembly has at least one rigid ring that rotates against a mating surface. The DLC coating is diamond-like... | 06/26/2007 |
| 7176039 | Dynamic modification of gap fill process characteristics A method for process optimization to extend the utility of the HDP CVD gap fill technique modifies the characteristics of the HDP process (deposition and sputter components) in a dynamic mode in the course of filling a trench with dielectric material. As a result, t... | 02/13/2007 |
| 7097745 | Method of forming a tunneling magnetoresistive head A method of forming a tunneling magnetoresistive head begins by forming a tunneling magnetoresistive stack having a tunnel barrier. An air bearing surface is formed of the tunneling magnetoresistive stack. The air bearing surface is ion etched causing a deficiency o... | 08/29/2006 |
| 6872289 | Thin film fabrication method and thin film fabrication apparatus A thin film is fabricated while causing ions in a plasma P to be incident by effecting biasing relative to the space potential of the plasma P by imparting a set potential to the surface of a substrate 9. A bias system 6 causes the substrate surface po... | 03/29/2005 |
| 6808606 | Method of manufacturing window using ion beam milling of glass substrate(s) This invention relates to a method of making a window (e.g., vehicle windshield, architectural window, etc.), and the resulting window product. At least one glass substrate of the window is ion beam treated and/or milled prior to application of a coating (e.g., sput... | 10/26/2004 |
| 6797339 | Method for forming thin film with a gas cluster ion beam A method of forming a thin film on the surface of a substrate such as silicon, in which a gas cluster (which is a massive atomic or molecular group of a reactive substance taking the gaseous form at room temperature under atmospheric pressure) is formed and then ion... | 09/28/2004 |
| 6599492 | Onion-like carbon film and its production An onion-like carbon thin film is provided which contains carbon as a main component, has a film thickness of at least 20 nm or more, and has clusters of an onion-like structure. Specifically, there is provided the onion-like carbon thin film satisfying t... | 07/29/2003 |
| 6517688 | Method of smoothing diamond coating, and method of manufacturing diamond-coated body A method of smoothing a surface of a diamond coating of a diamond-coated body, by using an arc-type ion plating device in which at least one target is disposed. The method includes: (a) a step of causing arc discharge between an anode, and a cathode which... | 02/11/2003 |
| 6500496 | Hollow cathode for plasma doping system A plasma doping apparatus includes a hollow cathode to increase throughput and uniformity of ion implantations in a target. The hollow cathode is located adjacent an anode and a target cathode on which a target is placed. An ionizable gas is provided in a... | 12/31/2002 |
| 6495224 | Functionally enhanced protective shrink-wrap coverings and methods for their manufacture and use Functionally enhanced shrink-wrap materials having protective coatings composed of mixtures of a water-compatibilized, modified polyolefin resins (Component A) and a mixture of a water-compatibilized acrylic resin (Component B) and a water-compatibilized ... | 12/17/2002 |
| 6428659 | Process of coating super fine particles of multi-element thin film A process for coating super fine ion particles of multiple elements on the surface of a micro route substrate includes a coating step operated under low temperatures and vacuums. First, raw micro routers are cleaned by electron beams under atmospheric pre... | 08/06/2002 |
| 6410101 | Method for scrubbing and passivating a surface of a field emission display A method for scrubbing and passivating an anode plate (100) of a field emission display (120) includes the steps of providing a scrubbing passivation material (127); imparting to scrubbing passivation material (127) an energy selected to cause removal of ... | 06/25/2002 |
| 6387012 | Metal complex solution, photosensitive metal complex solution, and method for forming metallic oxide films A metal complex solution comprising an organic solvent, and a complex composed of an organic acid salt of at least one metal and an organic amine or organic ketone compound, dissolved in the organic solvent; a photosensitive metal complex solution compris... | 05/14/2002 |
| 6348238 | Thin film fabrication method and thin film fabrication apparatus A thin film is fabricated while causing ions in a plasma P to be incident by effecting biasing relative to the space potential of the plasma P by imparting a set potential to the surface of a substrate 9. A bias system 6 causes the substrate surface poten... | 02/19/2002 |
| 6270857 | Method of modifying a surface of an insulator When an insulator is irradiated with an electron beam, a pulse-shape voltage is applied to the insulator from a pulse power source. As a result, a charge-up state of the insulator can be prevented. If an object which must be subjected to surface modificat... | 08/07/2001 |
| 6217951 | Impurity introduction method and apparatus thereof and method of manufacturing semiconductor device An impurity solid including boron as impurity and a solid sample to which boron is introduced are held in a vacuum chamber. Ar gas is introduced into the vacuum chamber to generate plasma composed of the Ar gas. A voltage allowing the impurity solid to se... | 04/17/2001 |
| 6217724 | Coated platen design for plasma immersion ion implantation A plasma treatment system (200) for implantation with a novel susceptor with a silicon coating (203). The system (200) has a variety of elements such as a chamber, which can have a silicon coating formed thereon, in which a plasma is generated in the cham... | 04/17/2001 |
| 6103010 | Method of depositing a ferromagnetic film on a waveguide and a magneto-optic component comprising a thin ferromagnetic film deposited by the method A thin ferromagnetic film is deposited directly onto the surface of a waveguide. The crystalline orientation of the ferromagnetic film is restricted to a predetermined orientation by pulverizing nuclei that do not have the predetermined orientation.... | 08/15/2000 |
| 6094292 | Electrochromic window with high reflectivity modulation A multi-layered, active, thin film, solid-state electrochromic device having a high reflectivity in the near infrared in a colored state, a high reflectivity and transmissivity modulation when switching between colored and bleached states, a low absorptiv... | 07/25/2000 |
| 5900126 | Method for manufacturing austenitic stainless steel substrate for magnetic-recording media An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. A precision cold-rolled authentic stainless steel is the substrate for a magnetic-recording disk. The surface of the substrate may be hardened by p... | 05/04/1999 |
| 5858471 | Selective plasma deposition A deposition process provides selective areal deposition on a substrate surface having separate areas of different materials comprises forming a plasma over the substrate, injecting coating species into the plasma by either of sputtering or gaseous inject... | 01/12/1999 |
| 5855966 | Method for precision polishing non-planar, aspherical surfaces A method for precison polishing non-planar, aspherical surfaces in substrates, particularly surfaces of molding tool substrates for molding optical surfaces therewith, which is accomplished by coating the non-planar, aspherical surface with a layer of mat... | 01/05/1999 |
| 5654043 | Pulsed plate plasma implantation system and method Method and apparatus for treating a workpiece implantation surface by causing ions to impact the workpiece implantation surface. An implantation chamber defines a chamber interior into which one or more workpieces can be inserted. A support positions one ... | 08/05/1997 |
| 5573798 | Method of manufacturing an electrode for measuring pH This invention relates to a pH measuring electrode having a sensor film which is sensitive to a hydrogen ion (H+) in the solution. The pH measuring electrode of this invention has a sensor film of a metal oxide deposited on an electrically insu... | 11/12/1996 |
| 5556519 | Magnetron sputter ion plating A magnetron sputter ion plating system has two or more magnetron assemblies spaced around a substrate centrally located relative to the magnetrons. The magnetrons are arranged so that adjacent magnetrons have outer magnetic assemblies of opposite polarity... | 09/17/1996 |
| 5437729 | Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy A method for tailoring or patterning the surface of ceramic articles is provided by implanting ions to predetermined depth into the ceramic material at a selected surface location with the ions being implanted at a fluence and energy adequate to damage th... | 08/01/1995 |
| 5389195 | Surface modification by accelerated plasma or ions The present invention is a surface modification process which provides a means of rapidly heating a thin layer of a polymer surface or a thin coating of material on a coated substrate and various surfaces produced by such a process.... | 02/14/1995 |
| 5346600 | Plasma-enhanced magnetron-sputtered deposition of materials Plasma-enhanced magnetron-sputtered deposition (PMD) of materials is employed for low-temperature deposition of hard, wear-resistant thin films, such as metal nitrides, metal carbides, and metal carbo-nitrides, onto large, three-dimensional, irregularly s... | 09/13/1994 |
| 5273849 | Mask repair Repair of transparent errors in masks utilized for lithographic processes in the manufacture of devices is accomplished by a particularly expedient procedure. In this procedure a metal ion beam such as a gallium ion beam is directed to the region that is ... | 12/28/1993 |
| 5246741 | Method for surface modification and apparatus therefor A substrate to be modified is placed in a vacuum vessel, a reducing atmosphere is provided over the substrate and simultaneously therewith the substrate is irradiated with accelerated ions, whereby oxygen which bonds to the substrate is freed from the sub... | 09/21/1993 |
| 5246576 | Cathode in a layered circuit and electrochemical cell for a measurement of oxygen in fluids The electrode of the present invention has metallic surface within a laser produced opening where the metallic surface extends into an electronic metallic conductive pathway and the pathway is covered for electric insulation by an encapsulant layer. The e... | 09/21/1993 |
| 5234560 | Method and device for sputtering of films A method and apparatus for controlling thin layer sputtering, especially titanium-nitride-type hard, abrasion-proof layers. Ionization current on substrates, especially at greater distances from cathode, is increased and layers are more homogenous. Densit... | 08/10/1993 |
| 5180690 | Method of forming a layer of doped crystalline semiconductor alloy material A method for the low temperature fabrication of doped polycrystalline semiconductor alloy material. The method includes the steps of exposing a body of semiconductor alloy material to a reaction gas containing at least a source of the dopant element, and ... | 01/19/1993 |
| 5158931 | Method for manufacturing an oxide superconductor thin film A laser beam 5 is directed to a target made of an oxide superconductor to allow a target spot which is irradiated with the beam to be evaporated and a matter which is evaporated to be deposited as a thin film on the surface of a substrate 3 at which time ... | 10/27/1992 |
