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| Number | Title | Issue Date |
| 8173214 | Substrate processing method A substrate processing method for use in a substrate processing apparatus having a stocker therein which stores a multiplicity of dummy substrates; a reaction chamber for producing semiconductor products; and a transferring unit for transferring into the reaction ch... | 05/08/2012 |
| 7794789 | Multi-station deposition apparatus and method A multi-station deposition apparatus capable of simultaneous processing multiple substrates using a plurality of stations, where a gas curtain separates the stations. The apparatus further comprises a multi-station platen that supports a plurality of wafers and rota... | 09/14/2010 |
| 7553518 | Substrate processing method A substrate processing apparatus includes a reaction chamber for simultaneously processing a plurality of process substrates, a boat for loading the process substrates into the reaction chamber, and a stocker for storing a multiple number of dummy substrates, at lea... | 06/30/2009 |
| 7547465 | Multi-station deposition apparatus and method A multi-station deposition apparatus capable of simultaneous processing multiple substrates using a plurality of stations, where a gas curtain separates the stations. The apparatus further comprises a multi-station platen that supports a plurality of wafers and rota... | 06/16/2009 |
| 7521089 | Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers Method and apparatus for controlling the migration of reaction by-product gases from a chemical vapor deposition (CVD) process chamber to a transfer vacuum chamber shared by other process chambers. Separate regulated flows of purge gas are provided to the CVD proces... | 04/21/2009 |
| 7501155 | Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus In a method for coating a phosphor or a scintillator layer onto a flexible substrate, within a sealed zone maintained under vacuum conditions, by the step of vapor deposition, said phosphor or scintillator layer is, continuously or discontinuously, deposited onto sa... | 03/10/2009 |
| 7438948 | Method for coating a substrate with an undercoating and a functional coating A method for forming a coated substrate is disclosed. The method comprises depositing an undercoating layer and depositing a functional coating comprising a material which can be present in more than one crystal structure over the undercoating layer, wherein there i... | 10/21/2008 |
| 7410542 | Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates A roll to roll, film forming system overcoming the shortcomings of current roll to roll processing is presented; The roll to roll enabled cartridge is loaded with a bolt of fresh flexible substrate. A skate couples with a cartridge, forms a seal with the cartridge's... | 08/12/2008 |
| 7407686 | Optical film, polarizing plate and display device utilising the film, and production method of optical film An optical film is disclosed having minimal curl, minimal coating unevenness and no cracks. The optical film is obtained by casting a dope comprising a cellulose ester and a non-chlorinated solvent on a metal support, the cellulose ester having a total acyl substitu... | 08/05/2008 |
| 7404983 | Method and apparatus for open-air coating by laser-induced chemical vapor deposition The present inventions pertain to a method of applying a solid protective coating to articles, to a system capable of depositing a solid film layer on articles, and to hermetically sealed articles. In particular, films are deposited on fused quartz substrates, optic... | 07/29/2008 |
| 7359630 | Evaporation source for evaporating an organic electroluminescent layer The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from... | 04/15/2008 |
| 7341945 | Method of fabricating semiconductor device A method of fabricating a semiconductor device prevents agglomeration of a seed metal layer in a recess. A recess is formed in a dielectric layer formed on or over a wafer. A seed metal layer (e.g., Cu or Cu alloy) is then formed on a bottom face and an inner side f... | 03/11/2008 |
| 7323249 | Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby A method of making a photoactive coating includes depositing a first coating material containing zirconium oxide over at least a portion of a substrate and depositing a second coating material containing titanium oxide over at least a portion of the first coating ma... | 01/29/2008 |
| 7313262 | Apparatus for visualization of process chamber conditions An apparatus and method for visualization of process conditions in a process chamber or chambers, particularly during the fabrication of integrated circuits on substrates in the process chambers. The apparatus includes an inspection chamber which is installed adjace... | 12/25/2007 |
| 7311939 | Vacuum coating unit and a method for the differentiated coating of spectacle lenses Substrates, such as spectacle lenses for example, may be provided with a coating which is not uniform by way of screens. The screens are aperture rings, arranged concentric to a symmetry axis of the vaporising crucible in a vacuum coating unit, by way of a screen ho... | 12/25/2007 |
| 7294283 | Penning discharge plasma source The preferred embodiments described herein provide a Penning discharge plasma source. The magnetic and electric field arrangement, similar to a Penning discharge, effectively traps the electron Hall current in a region between two surfaces. When a substrate (10 | 11/13/2007 |
| 7291360 | Chemical vapor deposition plasma process using plural ion shower grids A chemical vapor deposition process is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower process region, each of the ion shower grids having plural orifices in mu... | 11/06/2007 |
| 7279432 | System and method for forming an integrated barrier layer An apparatus and method for forming an integrated barrier layer on a substrate is described. The integrated barrier layer comprises at least a first refractory metal layer and a second refractory metal layer. The integrated barrier layer is formed using a dual-mode ... | 10/09/2007 |
| 7270724 | Scanning plasma reactor A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant g... | 09/18/2007 |
| 7264741 | Coater having substrate cleaning device and coating deposition methods employing such coater A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a... | 09/04/2007 |
| 7244474 | Chemical vapor deposition plasma process using an ion shower grid A chemical vapor deposition process is carried out in a reactor chamber with an ion shower grid that divides the chamber into an upper ion generation region and a lower process region, the ion shower grid having plural orifices oriented in a non-parallel direction r... | 07/17/2007 |
| 7232615 | Coating stack comprising a layer of barrier coating A coating composition that contains at least one degradable coating layer and at least one layer of barrier coating is disclosed. The coating composition can be used to make a coated substrate having improved performance over conventional coated substrates after exp... | 06/19/2007 |
| 7229665 | Process of forming multilayered structures The present invention provides for a method of producing an integral multilayered porous membrane by simultaneously co-casting a plurality of polymer solutions onto a support to form a multilayered liquid sheet and immersing the sheet into a liquid coagulation bath ... | 06/12/2007 |
| 7217344 | Transparent conductive film for flat panel displays Substrates having films are used to produce flat panel displays and similar devices. Various embodiments of transparent conductive films and methods for the same for flat panel displays and similar devices are disclosed herein. ... | 05/15/2007 |
| 7211144 | Pulsed nucleation deposition of tungsten layers A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereaf... | 05/01/2007 |
| 7201803 | Valve control system for atomic layer deposition chamber A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication wi... | 04/10/2007 |
| 7192624 | Method for obtaining thermal diffusion coating Continuously operating furnace and method for obtaining thermal diffusion coating on the outside surface of metallic articles. The furnace is configured as a tunnel through which in succession are advanced closed containers filled with the processed articles and wit... | 03/20/2007 |
| 7192888 | Low selectivity deposition methods A deposition method includes forming a nucleation layer over a substrate, forming a layer of a first substance at least one monolayer thick chemisorbed on the nucleation layer, and forming a layer of a second substance at least one monolayer thick chemisorbed on the... | 03/20/2007 |
| 7192647 | Concentration-modulated coatings The invention provides a substrate bearing a low-emissivity coating. The low-emissivity coating comprises at least one graded film region. In certain embodiments, at least one graded film region is provided between the two infrared-reflective layers of a double-type... | 03/20/2007 |
| 7179397 | Plasma processing methods and apparatus To move an article in and out of plasma during plasma processing, the article is rotated by a first drive around a first axis, and the first drive is itself rotated by a second drive. As a result, the article enters the plasma at different angles for different posit... | 02/20/2007 |
| 7169234 | Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder A substrate support assembly positively secures a substrate holder support to a rotation shaft with respect to rotationally applied forces. A substrate holder support is configured to have an opening in a socket into which, when aligned with an indentation in the ro... | 01/30/2007 |
| 7166165 | Barrier coating for vitreous materials A chemical vapor deposition apparatus comprises a reaction chamber and one or more vitreous components having an outer surface that is covered at least in part by a devitrification barrier layer. In some arrangements, the one or more vitrious components can include ... | 01/23/2007 |
| 7161894 | Optical recording article Optical recording articles, such as tapes, and methods of making and using such articles are disclosed. ... | 01/09/2007 |
| 7141135 | Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus In a method for homogeneously and dust-free coating of a phosphor or a scintillator layer onto a flexible substrate, in order to obtain a plurality of phosphor or scintillator sheets or panels having flexible supports or substrates, a coating procedure within a seal... | 11/28/2006 |
| 7137276 | Process for coating glass A process for the production of durable photocatalytically active self-cleaning coating on glass by contacting a hot glass surface with a fluid mixture of titanium chloride, a source of oxygen and a tin precursor. The coating preferably comprises less than 10 atom %... | 11/21/2006 |
| 7138608 | Sealed line structure for use in process chamber A sealed line structure equipped with a heater block for a process chamber for use in manufacturing a semiconductor device is provided. The structure includes a housing member, a movement prevention member is constructed of a lock nut, a clamp ring and an elastic un... | 11/21/2006 |
| 7134197 | Plastic lead frames utilizing reel-to-reel processing Reel-to-reel manufacturing methods and systems are disclosed herein. In general, one or more plastic parts (e.g., plastic substrate) can be transported on a carrier for manufacturing of a final product based initially on the part or substrate. A reel-to-reel mechani... | 11/14/2006 |
| 7122736 | Method and apparatus for fabricating a thin-film solar cell utilizing a hot wire chemical vapor deposition technique A thin-film solar cell is provided. The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten (10) Å/second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a t... | 10/17/2006 |
| 7112804 | Ion implantation ion source, system and method An ion implantation device for vaporizing decaborane and other heat-sensitive materials via a novel vaporizer and vapor delivery system and delivering a controlled, low-pressure drop flow of vapors, e.g. decaborane, into the ion source. The ion implantation device i... | 09/26/2006 |
| 7105220 | Coated article having a sealed layered edge to impede corrosion of a coating at the edge and method of making same An article having a sealed layered edge, e.g. an automotive laminate and a multiple glazed unit includes a pair of glass sheet in a fixed relationship with one another. A sputtered coating is deposited on a major surface of one of the sheets and includes at least on... | 09/12/2006 |
