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| Number | Title | Issue Date |
| 7993704 | Protective coating systems for gas turbine engine applications and methods for fabricating the same Protective coating systems for gas turbine engine applications and methods for fabricating such protective coating systems are provided. An exemplary method of fabricating a protective coating system on a substrate comprises forming a bond coating on the substrate, ... | 08/09/2011 |
| 7618682 | Method for providing an anti-stiction coating on a metal surface A method for providing an anti-stiction coating on a metal surface includes reacting a vapor of perfluorooctylhydroxamic acid with the metal surface in a reaction chamber. ... | 11/17/2009 |
| 7442412 | Hydrophobic coating for oxide surfaces The disclosure relates to hydrophobic coatings for oxidized surfaces and methods of producing the same. Such coatings may be produced by applying a compound of the general formula AXn or A(R1)mXn to an oxidized surface fol... | 10/28/2008 |
| 7431998 | Tool and method for the chemical vapor deposition of a two-phase layer on a substrate member The invention relates to a tool, especially a cutting tool, comprising a substrate member onto which at least one layer is deposited by means of CVD, and a method for the chemical vapor deposition of a two-phase layer on a sintered part. According to the invention, ... | 10/07/2008 |
| 7357846 | Substrate processing apparatus and substrate processing method In a resist-removing process system 1 for removing a resist film formed on a wafer W, the resist film is denatured so as to make the resist film soluble in water and, then, the resist film is removed from the wafer by applying a water-wash processing to the d... | 04/15/2008 |
| 7351291 | Semiconductor processing system A semiconductor processing system includes a load lock chamber and first to third process chambers connected to an airtight transfer chamber. The second process chamber is disposed below the first process chamber and overlaps with the first process chamber. The thir... | 04/01/2008 |
| 7347656 | Vacuum processing apparatus and semiconductor manufacturing line using the same A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plural... | 03/25/2008 |
| 7331751 | Vacuum processing method A vacuum processing method includes an atmospheric transfer step of transferring a wafer in atmospheric air to a vacuum transfer chamber using atmospheric transfer equipment disposed in atmospheric air, a vacuum transfer step of transferring the wafer received from ... | 02/19/2008 |
| 7271082 | Method of manufacturing a semiconductor device A substrate processing apparatus includes a plurality of evacuable treatment chambers connected to one another via an evacuable common chamber, and the common chamber is provided with means for transporting a substrate between each treatment chamber. More specifical... | 09/18/2007 |
| 7229484 | Pre-coated particles for chemical mechanical polishing The present invention relates to the manufacture and use of novel pre-coated abrasive particles and particle slurries for the chemical mechanical polishing (CMP) of semiconductor wafers, thin films, inter-layer dielectric, metals, and other components during integra... | 06/12/2007 |
| 7135369 | Atomic layer deposited ZrAlO dielectric layers including ZrAlO An atomic layer deposited ZrAlxOy dielectric layer and a method of fabricating such a dielectric layer produce a reliable dielectric layer having an equivalent oxide thickness thinner than attainable using SiO2. Pulsing a zirconium-c... | 11/14/2006 |
| 7112453 | Retentate chromatography and protein chip arrays with applications in biology and medicine This invention provides methods of retentate chromatography for resolving analytes in a sample. The methods involve adsorbing the analytes to a substrate under a plurality of different selectivity conditions, and detecting the analytes retained on the substrate by d... | 09/26/2006 |
| 7077907 | Coating head and coating apparatus The coating head according to the present invention comprises a slit facing the supporting member along a width direction of the supporting member, the coating fluid being ejected through an opening of the slit, a front edge surface provided on an upstream side of t... | 07/18/2006 |
| 6929831 | Methods of forming nitride films A silicon nitride film, for example, is deposited by introducing into a plasma region of a chamber a silicon containing gas, molecular nitrogen and sufficient hydrogen to dissociate the nitrogen to allow the silicon and nitrogen to react to form a silicon nitride fi... | 08/16/2005 |
| 6881447 | Chemically and electrically stabilized polymer films Preparation methods and stabilization processes for low k polymers that consist of sp2C—X and HC-sp3Cα—X bonds. A preparation method is achieved by controlling the substrate temperature and feed rate of the polymer precursors. O... | 04/19/2005 |
| 6808745 | Method of coating micro-electromechanical devices A method for coating a micro-electromechanical systems device with a silane coupling agent by a) mixing the silane coupling agent with a low volatile matrix material in a coating source material container; b) placing the micro-electromechanical systems device in a v... | 10/26/2004 |
| 6805909 | Oxidation-protected brake disk and method of making same An oxidation-protected brake disk is made of a fiber-reinforced ceramic material. A method of producing such a brake disk comprises applying at least one paint layer to a brake disk. In order to reduce damage to the brake disk under extreme thermal stress, the brake... | 10/19/2004 |
| 6797340 | Method for depositing refractory metal layers employing sequential deposition techniques A method for forming a tungsten layer on a substrate surface is provided. In one aspect, the method includes positioning the substrate surface in a processing chamber and exposing the substrate surface to a boride. A nucleation layer is then deposited on the substra... | 09/28/2004 |
| 6756322 | Method for evenly coating semiconductor laser end faces and frame used in the method A method with which all semiconductor lasers can be used as products is provided by regulating reflectance variations of all the semiconductor laser end faces arranged in an electron beam deposition apparatus after completion of deposition to a predetermined range w... | 06/29/2004 |
| 6750110 | Continuous good step coverage CVD platinum metal deposition A method of depositing a platinum based metal film by CVD deposition includes bubbling a non-reactive gas over an organic platinum based metal precursor until the non-reactive gas is saturated with the precursor. The platinum based metal film is deposited onto a sub... | 06/15/2004 |
| 6679951 | Metal anneal with oxidation prevention The invention relates generally to the prevention of copper oxidation during copper anneal processes. In one aspect of the invention, copper oxidation is prevented by carrying out the anneal in the presence of one or more organic reducing agents.... | 01/20/2004 |
| 6627323 | Thermal barrier coating resistant to deposits and coating method therefor A protective coating system and method for protecting a thermal barrier coating from CMAS infiltration. The coating system comprises inner and outer alumina layers and a platinum-group metal layer therebetween. The outer alumina layer is intended as a sac... | 09/30/2003 |
| 6521294 | Aluminiding of a metallic surface using an aluminum-modified maskant, and aluminum-modified maskant A metallic substrate has a substrate surface having a substrate surface of nickel, a substrate aluminum content, and other alloying elements. A maskant is applied overlying the substrate surface to produce a masked substrate surface having an exposed regi... | 02/18/2003 |
| 6485791 | Method for improving the performance of oxidizable ceramic materials in oxidizing environments Improved adhesion of thermal barrier coatings to nonmetallic substrates using a dense layer of ceramic on an underlying nonmetallic substrate that includes at least one oxidizable component. The improved adhesion occurs because the application of the dens... | 11/26/2002 |
| 6469189 | Liquid double alkoxide of niobium or tantalum and alkaline earth metal, production method thereof, and production method of complex metal oxide dielectric using it A novel compound shown by M[N(OC2 H5)5 (OC2 H4 OCH3)]2, wherein M represents Sr or Ba, N represents Nb or Ta, which is a liquid at room temperature, is hard to be thermally disso... | 10/22/2002 |
| 6423373 | Surface treated aluminum nitride and fabricating method thereof The present invention relates to a surface-treated aluminum nitride and fabrication method thereof. The flexural strength of a surface-treated aluminum nitride at a high temperature is improved by restraining an oxidation behavior. The restraint of oxidat... | 07/23/2002 |
| 6417014 | Method and apparatus for reducing wafer to wafer deposition variation A processing line includes a processing tool and an automatic process controller. The processing tool is adapted to deposit a layer of material on a semiconductor wafer based on an operating recipe. The automatic process controller is adapted to identify ... | 07/09/2002 |
| 6323129 | Process for maintaining a semiconductor substrate layer deposition equipment chamber in a preconditioned and low particulate state A process for maintaining a semiconductor substrate layer (e.g. a TiN, W or TEOS) deposition equipment chamber in a preconditioned and low particulate state between successive layer depositions. The first step is determining that the equipment chamber has... | 11/27/2001 |
| 6299971 | Ceramic coatings containing layered porosity Layered ceramic coatings in which some layers contain porosity as described as are methods for producing such coatings. The different layers have different compositions and/or are applied under different conditions. As applied, some of the layers have a Z... | 10/09/2001 |
| 6200671 | Coated turning insert and method of making it A coated turning insert particularly useful for turning in stainless steel is disclosed. The insert is characterized by a WC--Co-based cemented carbide substrate having a highly W-alloyed Co-binder phase and a coating including an inner layer of TiCx... | 03/13/2001 |
| 6174490 | Method for producing an exchanger Method for producing a high temperature resistant exchanger. The exchanger is made from a number of tubes sealingly connected to a pipe plate which is further connected to an enclosure. The pipe plate is realised by positioning enclosure and tubes in a mo... | 01/16/2001 |
| 6126996 | Metal complex source reagents for chemical vapor deposition A metalorganic complex of the formula: MAY X wherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAY with X; y is an integer having a value of 2, 3 or 4; each of the A ligands may ... | 10/03/2000 |
| 6126995 | Process for producing stable divalent scandium A method for producing divalent scandium includes heating, at a mildly elted temperature above 20° C. under reduced pressure, a calcium difluoride crystal sample doped with scandium trifluoride to drive off atmospheric impurities, heating at an intermed... | 10/03/2000 |
| 6106898 | Process for preparing nitride film A process for preparing a nitride film by a chemical vapor deposition method, which entails reacting a material gas including tert-butyl hydrazene as the main component as the main component of a nitrogen source with a material gas of an organometallic co... | 08/22/2000 |
| 6103072 | Piezoelectric thin-film device, process for manufacturing the same, and ink-jet recording head using the same A piezoelectric thin-film device includes: a substrate; and a piezoelectric thin film formed on the substrate, wherein a thickness of the piezoelectric thin film is 1 to 10 μm, a crystal grain size of the piezoelectric thin film is 0.05 to 1 μm, and a s... | 08/15/2000 |
| 6077561 | Metal material formed with fluorocarbon film, process for preparing the material and apparatus made with use of the material A metal material characterized in that the material comprises a substrate metal, a film comprising a nickel fluoride layer and formed on the substrate metal, and a film comprising a carbon layer and formed on the film.... | 06/20/2000 |
| 6040020 | Method of forming a film having enhanced reflow characteristics at low thermal budget A method of forming a film having enhanced reflow characteristics at low thermal budget is disclosed, in which a surface layer of material is formed above a base layer of material, the surface layer having a lower melting point than the base layer. In thi... | 03/21/2000 |
| 6033727 | Method for strengthening and aging-prevention of TZP by formation of silica/zircon layer on the surface thereof A method for strengthening and aging-prevention of a TZP ceramics includes the steps of: introducing TZP ceramic and Si-based ceramic powders into a furnace in which a water vapor pressure is controlled; and exposing the TZP ceramic next to Si-based ceram... | 03/07/2000 |
| 6025094 | Protective coatings for negative electrodes Disclosed is an alkali metal negative electrode having a protective layer. Specifically, the disclosed negative electrode includes a glassy or amorphous surface protective layer which conducts alkali metal ions but effectively blocks the alkali metal in t... | 02/15/2000 |
| 5980988 | Alumina coated cutting tool A body with a coating comprising one or more refractory layers of which at least one layer is a layer of -Al2 O3 textured in the (110) direction is disclosed. Said alumina layer which is essentially free of cooling cracks, com... | 11/09/1999 |
