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Class 427/253 - Halogen containing compound


Subclass of Class 427 - Coating processes
Definition: Processes wherein the metallic compound contains fluorine,
No. of patents: 403
Last issue date: 02/03/2009


1                      
NumberTitleIssue Date
7485340Production of elemental films using a boron-containing reducing agent
The present invention relates generally to depositing elemental thin films. In particular, the invention concerns a method of growing elemental metal thin films by Atomic Layer Deposition (ALD) using a boron compound as a reducing agent. In a preferred embodiment th...
02/03/2009
7429403Gas distributor for vapor coating method and container
A method for introducing an inert carrier gas into a coating container used to provide a metallic coating on articles. The method includes introducing the inert carrier gas into the coating container as a plurality of carrier gas streams proximate the top of the coa...
09/30/2008
7422769Protective coating for application to a substrate and method for manufacturing a protective coating
A refractory, oxidation-resistant, and corrosion-resistant protective coating for application to a substrate, in particular for application to parts of turbines or aircraft propulsion engines, is described, including a spray coating made of a thermally sprayed, prim...
09/09/2008
7390535Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings
A chemical vapor deposition (CVD) system and method for applying an aluminide coating constituted by two or more extrinsic metal components on a jet engine component. The aluminide coating is capable of forming a protective complex oxide upon subsequent heating in a...
06/24/2008
7371428Duplex gas phase coating
Method of forming different diffusion aluminide coatings on different surface regions of the same superalloy substrate involves positioning the substrate in a coating chamber having a aluminum-bearing coating gas flowing therein with a first substrate surface region...
05/13/2008
7344757Method for treating or pretreating containers
A process for the treatment or pretreatment of containers made of aluminum, aluminum-containing alloys, magnesium-containing alloys, iron-containing materials such as steel, coated iron-containing materials such as galvanized steel, or aluminum alloys, tinplate, bra...
03/18/2008
7338645Method and system for reducing decomposition byproducts in a methanol to olefin reactor system
Disclosed is a method and system for reducing the formation of metal catalyzed side-reaction byproducts formed in the feed vaporization and introduction system of a methanol to olefin reactor system by forming and/or coating one or more of the heating devices, feed ...
03/04/2008
7332024Aluminizing composition and method for application within internal passages
An aluminizing composition includes an aluminum-based powder, an inert organic pyrolysable thickener, and a binder selected from the group consisting of colloidal silica, at least one organic resin, and combinations thereof. A method for aluminizing an internal pass...
02/19/2008
7311942Method for binding halide-based contaminants during formation of a titanium-based film
A method and apparatus are presented for reducing halide-based contamination within deposited titanium-based thin films. Halide adsorbing materials are utilized within the deposition chamber to remove halides, such as chlorine and chlorides, during the deposition pr...
12/25/2007
7310949Method and apparatus for arresting a crack within a body
An inseparable assembly includes a body having a first surface and a second surface. The body includes an oxide-based ceramic matrix composite material having a first predetermined ductility. The assembly further includes a crack extending through the body between t...
12/25/2007
7294361Method and device for gas phase diffusion coating of metal components
A process for gas diffusion coating of metallic components; in which a component surface which is to be coated is brought into contact with a metal halide as coating gas, to form a diffusion layer with a defined layer thickness and a defined coating metal content in...
11/13/2007
7273635Method of forming aluminide diffusion coatings
Method of forming an outwardly grown aluminide diffusion coating on a superalloy substrate disposed in a coating retort including the steps of heating the substrate to a temperature of 900 to 1200 degrees C., flowing a coating gas comprising aluminum trichloride and...
09/25/2007
7271038Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby
A ruthenium (Ru) film is formed on a substrate as part of a two-stage methodology. During the first stage, the Ru film is formed on the substrate in a manner in which the Ru nucleation rate is greater than the Ru growth rate. During the second stage, the Ru film is ...
09/18/2007
7264846Ruthenium layer formation for copper film deposition
A method of ruthenium layer formation for high aspect ratios, interconnect features is described. The ruthenium layer is formed using a cyclical deposition process. The cyclical deposition process comprises alternately adsorbing a ruthenium-containing precursor and ...
09/04/2007
7262125Method of forming low-resistivity tungsten interconnects
Methods and apparatus for preparing a low-resistivity tungsten film on a substrate are provided. Methods involve the formation of a tungsten nucleation layer on a substrate using pulsed nucleation layer (PNL) techniques and depositing a bulk tungsten layer thereon. ...
08/28/2007
7258900Magnetic planarization of pigment flakes
A magnetic field is applied to planarize magnetic pigment flakes relative to a surface. Pigment flakes, such as optically variable pigment flakes, are used in a variety of paints, inks, extrusions, powder coatings, and other forms for decorative and security applica...
08/21/2007
7256144Method for forming a metal oxide film
A method for forming a capacitor insulation film includes the step of depositing a monoatomic film made of a metal by supplying a metal source including the metal and no oxygen, and depositing a metal oxide film including the metal by using a CVD technique. The meth...
08/14/2007
7235482Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology
An atomic layer deposition method is used to deposit a TiN or TiSiN film having a thickness of about 50 nm or less on a substrat. A titanium precursor which is tetrakis(dimethylamido)titanium (TDMAT), tetrakis(diethylamido)titanium (TDEAT), or Ti{OCH(CH3)...
06/26/2007
7233053Integrated semiconductor product with metal-insulator-metal capacitor
To fabricate an integrated semiconductor product with integrated metal-insulator-metal capacitor, first of all a dielectric auxiliary layer (6) is deposited on a first electrode (2, 3, 5). This auxiliary layer (6) is then opened up (15) v...
06/19/2007
7220671Organometallic precursors for the chemical phase deposition of metal films in interconnect applications
Chemical phase deposition processes utilizing organometallic precursors to form thin films are herein described. The organometallic precursors may include a single metal center or multiple metal centers. The chemical phase deposition may be chemical vapor deposition...
05/22/2007
7201943Methods of forming atomic layers of a material on a substrate by sequentially introducing precursors of the material
A thin film is formed using an atomic layer deposition process, by introducing a first reacting material including tantalum precursors and titanium precursors onto a substrate. A portion of the first reacting material is chemisorbed onto the substrate. Then, a secon...
04/10/2007
7199023Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed
A dielectric film containing atomic layer deposited HfSiON and a method of fabricating such a dielectric film produce a reliable dielectric layer having an equivalent oxide thickness thinner than attainable using SiO2. The HfSiON layer thickness is contro...
04/03/2007
7163718Method of selective region vapor phase aluminizing
A process for forming diffusion aluminide coatings on an uncoated surface of a substrate, without interdiffusing a sufficient amount of aluminum into a coating layer to adversely affect the coating growth potential and mechanical properties of said coating layer. A ...
01/16/2007
7163747Component comprising a masking layer
Masking layers for components according to the prior art react with the base material of the component and/or are difficult to remove again. The component according to the invention has a masking layer which can very easily be removed following coating of the compon...
01/16/2007
7160752Fabrication of advanced silicon-based MEMS devices
A micro-electro-mechanical (MEM) device and an electronic device are fabricated on a common substrate by fabricating the electronic device comprising a plurality of electronic components on the common substrate, depositing a thermally stable interconnect layer on th...
01/09/2007
7146990Process for repairing sulfidation damaged turbine components
A process is provided for cleaning a surface of an internal cavity of a gas turbine component having sulfidation or sulfur bearing deposits comprising: inserting into the internal cavity a fluoride salt; and heating the fluoride salt and the component in an inert at...
12/12/2006
7144809Production of elemental films using a boron-containing reducing agent
The present invention relates generally to depositing elemental thin films. In particular, the invention concerns a method of growing elemental metal thin films by Atomic Layer Deposition (ALD) using a boron compound as a reducing agent. In a preferred embodiment th...
12/05/2006
7138014Electroless deposition apparatus
An apparatus and a method of depositing a catalytic layer comprising at least one metal selected from the group consisting of noble metals, semi-noble metals, alloys thereof, and combinations thereof in sub-micron features formed on a substrate. Examples of noble me...
11/21/2006
7115171Method for removing engine deposits from turbine components and composition for use in same
A method and cleaning composition for removing engine deposits from turbine components, in particular turbine disks and turbine shafts. This method comprises the following steps: (a) providing a turbine component having a surface with engine deposits thereon, wherei...
10/03/2006
7115304High throughput surface treatment on coiled flexible substrates
One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment chamber where substantially an entire surface of the one or more coiled s...
10/03/2006
7102229Capacitor containing high purity tantalum
Described is a method for producing high purity tantalum, the high purity tantalum so produced and sputtering targets of high purity tantalum. The method involves purifying starting materials followed by subsequent refining into high purity tantalum. ...
09/05/2006
7093335Coated article and method for repairing a coated surface
A method is provided for repairing a surface portion of an article including a metallic environmental resistant coating on a substrate. The coating includes a coating outer portion bonded with the substrate through a diffusion zone that includes at least one feature...
08/22/2006
7094691MOCVD of tungsten nitride thin films using W(CO)and NHfor copper barrier applications
A method of forming a tungsten nitride thin film in an integrated circuit includes preparing a silicon substrate on a silicon wafer and placing the silicon wafer in a heatable chuck in a CVD vacuum chamber; placing a known quantity of a tungsten source in a variable...
08/22/2006
7083827Nickel-base superalloy having an optimized platinum-aluminide coating
A nickel-base superalloy substrate includes a surface region having an integrated aluminum content of from about 18 to about 24 percent by weight and an integrated platinum content of from about 18 to about 45 percent by weight, with the balance components of the su...
08/01/2006
7071118Method and apparatus for fabricating a conformal thin film on a substrate
A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser p...
07/04/2006
7063740Process for strengthen grain boundaries of an article made from a Ni based superalloy
It is disclosed a method for strengthen the grain boundaries of an article (1) made from a Ni based superalloy while the article (1) is in the solid state and containing at least one grain boundary. A surface diffusion process is applied to the article...
06/20/2006
7060614Method for forming film
In a deposition method according to the present invention, a substrate (10) is first arranged in a processing vessel to carry out a heat-up step. Then, Si-containing gas, such as SiH4 gas, is supplied into the processing vessel to carry out an init...
06/13/2006
7048973Metal film vapor phase deposition method and vapor phase deposition apparatus
A copper film vapor phase deposition method includes the steps of exposing high-purity copper to a plasma of a gas containing chlorine gas to etch the high-purity copper, thereby generating active CuxCly, wherein x is 1 to 3, y is 1 to 3, gas, ...
05/23/2006
7037574Atomic layer deposition for fabricating thin films
An atomic layer deposition (ALD) process deposits thin films for microelectronic structures, such as advanced gap and tunnel junction applications, by plasma annealing at varying film thicknesses to obtain desired intrinsic film stress and breakdown film strength. T...
05/02/2006
7034196Method and apparatus for reducing decomposition byproducts in a methanol to olefin reactor system
Disclosed is a method and apparatus for reducing the amount of metal catalyzed side-reaction byproducts formed in the feed vaporization and introduction system of a methanol to olefin reactor system by monitoring and/or maintaining the temperature of at least a port...
04/25/2006
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