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Class 427/252 - By decomposing metallic compound (e.g., pack process, etc.)


Subclass of Class 427 - Coating processes
Definition: Processes wherein the metal is applied to the base by decomposition
No. of patents: 484
Last issue date: 07/26/2011


1                      
NumberTitleIssue Date
7985450Method for thin film vapor deposition of a dialkyl amido dihydroaluminum compound
A method for the vapor deposition of aluminum films is provided. Such method employs a dialkyl amido dihydroaluminum compound of the formula [H2AlNR1R2]n wherein R1 and R2 are the same or different al...
07/26/2011
7645485Chromiumm diffusion coatings
There is provided a method for applying an improved chromium diffusion coating on an industrial item such as a turbine blade of a gas turbine engine. Chromium and other active metals are combined to form an alloy coating. Active elements include silicon, hafnium, zi...
01/12/2010
7553517Method of applying a cerium diffusion coating to a metallic alloy
A method of applying a cerium diffusion coating to a preferred nickel base alloy substrate has been discovered. A cerium oxide paste containing a halide activator is applied to the polished substrate and then dried. The workpiece is heated in a non-oxidizing atmosph...
06/30/2009
7547464Organometallic precursor compounds
This invention relates to organometallic precursor compounds represented by the formula (L)M(L′)2(NO) wherein M is a Group 6 metal, L is a substituted or unsubstituted anionic ligand and L′ is the same or different and is a π acceptor ligand, a proce...
06/16/2009
7442417Method for reaction control coating
A method for reaction control coating includes: (a) a step of applying a reaction control material to a surface of an Ni-base superalloy before applying aluminum diffusion coating to the Ni-base superalloy, wherein the reaction control material is Co, Cr or Ru, or a...
10/28/2008
7439338Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including same
The present invention provides metal-containing compounds that include at least one β-diketiminate ligand, and methods of making and using the same. In certain embodiments, the metal-containing compounds include at least one β-diketiminate ligand with at least one...
10/21/2008
7429403Gas distributor for vapor coating method and container
A method for introducing an inert carrier gas into a coating container used to provide a metallic coating on articles. The method includes introducing the inert carrier gas into the coating container as a plurality of carrier gas streams proximate the top of the coa...
09/30/2008
7419699CVD process for forming a thin film
The present invention is a CVD process for forming a thin film which includes a step of recovering an organometallic compound component from an exhaust gas which has been conventionally discarded, and a purifying step of purifying the recovered organometallic compou...
09/02/2008
7416763Process for forming metal layers
A process in which a base metal film is formed on the surface of a plastic film using a dry plating process, and a liquid containing an organic monomer is then brought in contact with the base metal film, thereby selectively forming a conductive organic polymer coat...
08/26/2008
7378134Method of forming high temperature corrosion resistant film
Disclosed is a method of forming a high-temperature corrosion-resistant film, which comprises placing a container containing a film-forming fine powder and a target member capable of being heated by an electric current heating process, in an atmosphere-controllable ...
05/27/2008
7374701Organometallic precursor composition and method of forming metal film or pattern using the same
A composition of (i) an organometallic precursor containing a hydrazine compound coordinating with a central metal thereof and (ii) an organometallic compound of a main group metal and a method of forming metal film or pattern using this composition. ...
05/20/2008
7371428Duplex gas phase coating
Method of forming different diffusion aluminide coatings on different surface regions of the same superalloy substrate involves positioning the substrate in a coating chamber having a aluminum-bearing coating gas flowing therein with a first substrate surface region...
05/13/2008
7354622Method for forming thin film and apparatus for forming thin film
A shower head having a plurality of ejection holes for supplying an organic metal gas at uniform density to the surface of a substrate and a plurality of ejection holes for supplying an oxidizing gas at uniform density to the same is provided in a reaction furnace o...
04/08/2008
7348042Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant (low-k) films, high dielectric constant (high-k) films, and other conduct...
03/25/2008
7323581Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
A metalorganic complex composition comprising a metalorganic complex selected from the group consisting of: metalorganic complexes comprising one or more metal central atoms coordinated to one or more monodentate or multidentate organic ligands, and complexed with o...
01/29/2008
7323220Gas phase growth system, method of operating the system, and vaporizer for the system
A method of operating a gas phase growth system is disclosed. The method includes a processing stage and a stabilizer feeding stage. In a non-limiting embodiment of the disclosure, an organometallic complex is vaporized by a vaporizer, and subsequently fed to a reac...
01/29/2008
7323230Coating for aluminum component
A coated aluminum component for a substrate processing chamber comprises an aluminum component having a surface; a first aluminum oxide layer formed on the surface of the aluminum component, the aluminum oxide layer having a surface comprising penetrating surface fe...
01/29/2008
7311946Methods for depositing metal films on diffusion barrier layers by CVD or ALD processes
A process is described for depositing a metal film on a substrate surface having a diffusion barrier layer deposited thereupon. In one embodiment of the present invention, the process includes: providing a surface of the diffusion barrier layer that is substantially...
12/25/2007
7282445Multiple seed layers for interconnects
One embodiment of the present invention is a method for depositing two or more seed layers over a substrate, the substrate includes a patterned insulating layer which comprises at least one opening surrounded by a field, the at least one opening and the field being ...
10/16/2007
7282408Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer
A method for forming a ruthenium metal layer on a dielectric layer comprises forming a silicon dioxide layer, then treating the silicon dioxide with a silicon-containing gas, for example silicon hydrides such as silane, disilane, or methylated silanes. Subsequently,...
10/16/2007
7273635Method of forming aluminide diffusion coatings
Method of forming an outwardly grown aluminide diffusion coating on a superalloy substrate disposed in a coating retort including the steps of heating the substrate to a temperature of 900 to 1200 degrees C., flowing a coating gas comprising aluminum trichloride and...
09/25/2007
7271071Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms
The invention includes methods of forming a substrate having a surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms. In one implementation, a substrate is provided which has a first substrate surface comprising at least o...
09/18/2007
7265233Organometallic iridium compound, process for producing the same and process for preparing film
An organometallic iridium compound having low melting point, excellent vaporization characteristic and low film formation temperature on a substrate, a process for producing the compound, and a process for preparing iridium-based films using the organometallic compo...
09/04/2007
7253124Process for defect reduction in electrochemical plating
A pre-ECD surface treatment. After forming the barrier material (110) and seed layer (112), the surface of the seed layer (112) is treated with an H2 plasma to remove surface contamination (122), reduce any CuOx (...
08/07/2007
7250220Bond strength of coatings to ceramic components
An improved component for use in a deposition chamber is constructed from ceramic zirconia and a stabilizing compound. The zirconia is preferably in a partially stabilized form and is coated with a metallic layer such as thermally sprayed aluminum. The surface of th...
07/31/2007
7241350Corrosion resistant poly-metal diffusion coatings and a method of applying same
Diffusion metallic anticorrosive zinc-iron-aluminum coatings of iron and iron-based item surfaces, realized by heating of products at temperatures of 370–450° C. in a saturating powder mixture environment in a closed container. The coating compositions are multip...
07/10/2007
7238822Ruthenium compound and process for producing a metal ruthenium film
A ruthenium compound from which high-quality film-like metal ruthenium can be obtained and a process for producing a metal ruthenium film from the ruthenium compound by chemical vapor deposition. The ruthenium compound as a material for chemical vapor deposit...
07/03/2007
7232616Organic electroluminescent materials and devices made from such materials
A class of organic metal complexes with mixed ligands for organic light emitting diodes are designed and characterized as the formula:(L2L3M)n. In this formula: L2 is a bidentate ligand which has at least one coordinate atom of oxyge...
06/19/2007
7226640Method of fabricating iridium-based materials and structures on substrates
A method of forming an iridium-containing film on a substrate, from an iridium-containing precursor thereof which is decomposable to deposit iridium on the substrate, by decomposing the precursor and depositing iridium on the substrate in an oxidizing ambient enviro...
06/05/2007
7202167Method of forming a diffusion barrier
A barrier limits the diffusion of a metal, such as copper, into an insulating layer. The barrier may take the form of insulating layer made of a silicon carbide type material which has been exposed to ionised hydrogen subsequent to deposition. Preferably the materia...
04/10/2007
7199052Seed layers for metallic interconnects
One embodiment of the present invention is a method for making copper or a copper alloy interconnects, which method includes: (a) forming a patterned insulating layer over a substrate, the patterned insulating layer including at least one opening and a field surroun...
04/03/2007
7192624Method for obtaining thermal diffusion coating
Continuously operating furnace and method for obtaining thermal diffusion coating on the outside surface of metallic articles. The furnace is configured as a tunnel through which in succession are advanced closed containers filled with the processed articles and wit...
03/20/2007
7182979High efficiency method for performing a chemical vapordeposition utilizing a nonvolatile precursor
A method directed to the use of a nonvolatile precursor, either a solid or liquid precursor, suitable for CVD, including liquid source CVD (LSCVD). Using the method of the invention the nonvolatile precursor is dissolved in a solvent. Choice of solvent is typically ...
02/27/2007
7166323Method of coating catalyst carrier layer of metal-metal oxide, method of depositing active catalyst particles onto metal substrates for preparing metal monolith catalyst modules, and module thereby
Disclosed is a method of coating a porous carrier layer of metal-metal oxide and depositing an active catalyst component on metal substrates, and a monolith module useful as a catalytic reactor with low pressure drop prepared using the metal substrate having the dep...
01/23/2007
7163718Method of selective region vapor phase aluminizing
A process for forming diffusion aluminide coatings on an uncoated surface of a substrate, without interdiffusing a sufficient amount of aluminum into a coating layer to adversely affect the coating growth potential and mechanical properties of said coating layer. A ...
01/16/2007
7138013Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device
A method of manufacturing a ceramic film includes a step of forming a ceramic film 30 by crystallizing a raw material body 20. The raw material body 20 contains different types of raw materials in a mixed state. The different types of raw materi...
11/21/2006
7138189Heat-resistant Ti alloy material excellent in resistance to corrosion at high temperature and to oxidation
Disclosed is a heat-resistant Ti alloy material excellent in high-temperature corrosion resistance and oxidation resistance, which comprises a base made of a heat-resistant Ti alloy and a surface layer formed on the surface of the base. The surface layer has a multi...
11/21/2006
7132556Alkaline earth metal complexes and their use
Chelate complexes of calcium, strontium and barium formed with ligands that are beta-ketiminate compounds having a scorpion tail; intermediate compounds useful in producing the aforementioned complexes; a method for producing such complexes, and the use of such comp...
11/07/2006
7122221Method and apparatus for metal vapor coating
A method and apparatus for coating a substrate (4) with a metal coating by vaporizing the metal in an enclosure (1) containing a selected gas and the substrate. The vaporized metal is deposited on the surface of the substrate either in a solid or molte...
10/17/2006
7115326Thermal/environmental barrier coating with transition layer for silicon-comprising materials
An article comprising a substrate formed of a silicon-comprising material, such as an article exposed to the hostile thermal environment of a gas turbine engine. The article further comprises an environmental barrier layer, e.g., an alkaline earth metal aluminosilic...
10/03/2006
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