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Class 417/51 - Getter heating, vaporizing, or regeneration


Subclass of Class 417 - Pumps
Definition: Subject matter provided with getter means and in which means
No. of patents: 71
Last issue date: 03/22/2011


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NumberTitleIssue Date
7909583Pump apparatus and pump unit thereof
A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a directi...
03/22/2011
7352128Gas injection port structure of flat fluorescent lamp
A gas injection port structure for a flat fluorescent lap (FFL) is provided. The FFL has a flat lower plate and an upper plate that form a channel therebetween, and at least one gas injection port in communication with the channel. The gas injection port may be form...
04/01/2008
7309269Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol...
12/18/2007
7301269Image display apparatus provided with an ion pump assembly arranged within an external container
Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container...
11/27/2007
7278838Inlet check valve with removable seat
An inlet check valve is mountable to a valve body that, in turn, is mounted to a high pressure pump. The inlet check valve has a removable inlet seat with a first through-hole forming an inlet path and functioning as a valve seat. A valve is positionable over the fi...
10/09/2007
7279846Image display apparatus
Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor...
10/09/2007
7156172Method for accelerating oil well construction and production processes and heating device therefor
Methods are described for providing localized heating in an oil well at precise depths to accomplish or expedite specific objectives. The methods involve the use of a heating tool which can be lowered into an oil well to apply heat at a precise depth to achieve a de...
01/02/2007
7153104Method for introducing and activating a getter in a vacuum vessel and getter unit
To prevent partial saturation of a getter by contact with absorbable atmospheric gases when the getter is introduced into a vacuum vessel, a method for introducing and activating the getter and a getter unit includes introducing the getter into the vacuum vessel pac...
12/26/2006
7141512Method of cleaning semiconductor device fabrication apparatus
A semiconductor device fabrication apparatus is cleaned after a conductive layer is formed on a metal oxide layer of a substrate. The substrate is disposed on a heater in a process chamber of the apparatus, and the conductive layer is formed by introducing source ga...
11/28/2006
7126276Non-evaporation type getter, display unit and production method for them
Disclosed are a non-evaporation type getter excellent in gettering effect, capable of maintaining the inside of a gas-tight container in a display apparatus, particularly a flat panel display apparatus or the like, in a high vacuum condition, easy to mount and less ...
10/24/2006
7083825Composition used in producing calcium-rich getter thin film
An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41....
08/01/2006
7066050Life counter for flywheel energy storage systems
A life counter that calculates and records the life utilized of the flywheel in a flywheel energy storage system and indicates when it should be removed from service, based on operational history instead of monitoring for symptoms of failure. The life counter can ef...
06/27/2006
7053589Long-life vacuum system for energy storage flywheels
The invention, intended primarily for use in a steel flywheel power source (30), provides a vacuum system and a method of maintaining a vacuum inside a flywheel chamber (32) for the life of the power source (30). The vacuum system combines the u...
05/30/2006
7045958Vacuum device having a getter
A vacuum device, including a substrate and a support structure having a support perimeter, where the support structure is disposed over the substrate. In addition, the vacuum device also includes a non-evaporable getter layer having an exposed surface area. The non-...
05/16/2006
7001535Polymer formulation for removing hydrogen and liquid water from an enclosed space
This invention describes a solution to the particular problem of liquid water formation in hydrogen getters exposed to quantities of oxygen. Water formation is usually desired because the recombination reaction removes hydrogen without affecting gettering capacity a...
02/21/2006
6979949Fluorescent luminous tube with getter mirror film
A fluorescent luminous tube is provided that has a getter mirror film formed in an arbitrary shape by illuminating a laser beam onto a getter. In order to form the getter film 32, the rectangular ring-less getter 31 mounted on the anode substrate 11...
12/27/2005
6923625Method of forming a reactive material and article formed thereby
A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that th...
08/02/2005
6888294Field emission device using a reducing gas and method for making same
The invention concerns a device comprising at least one field effect electron source within a sealed structure, which encompasses an internal space that contains a reducing gas whose purpose is to prevent oxidation of the emissive material of the electron source, wh...
05/03/2005
6884039Flywheel system with parallel pumping arrangement
A flywheel energy storage system, including a plurality of pumps arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high-speed operation, is disclosed. The plurality of pumps i...
04/26/2005
6873102Evaporable getter device with metallic nets
An evaporable getter device is provided for cathode-ray tubes (CRTs). The getter device is formed by a metallic container (101; 201) containing a mixture of powders (104; 205) of the compound BaAl4 and nickel (Ni), and by two different metal...
03/29/2005
6853135Apparatus for removing contaminants from a display device
An apparatus for removing contaminants from a display device is disclosed. In one embodiment, an auxiliary chamber is adapted to be coupled to a surface of a display device such that contaminants within the display device can travel from the display device into the ...
02/08/2005
6838822Electron tube with a ring-less getter
In a method for manufacturing an electron tube including a front substrate and a back substrate, a wiring and an electrode are formed on the front substrate and/or the back substrate. A component is mounted on the front substrate and/or the back substrate. A ring-le...
01/04/2005
6774555Cathode ray tube having a replaceable getter attachment assembly
A CRT including an evacuated envelope with a color selection electrode assembly disposed within the envelope, and an internal magnetic shield (IMS) secured to the color selection electrode assembly, and having a replaceable getter attachment assembly comprising a mo...
08/10/2004
6585490Vacuum regeneration method for a flywheel system
A vacuum management and regeneration apparatus and method for operating an energy storage flywheel system having a flywheel supported by a bearing system inside an evacuated chamber enclosed within a container. A motor/generator stores and retrieves energ...
07/01/2003
6541912Auxiliary chamber and display device with improved contaminant removal
An apparatus for removing contaminants from a display device is disclosed. In one embodiment, an auxiliary chamber is adapted to be coupled to a surface of a display device such that contaminants within the display device can travel from the display devic...
04/01/2003
6533951Method of manufacturing fluid pump
A method of manufacturing a pump [10] for pumping various primary fluids. A body is formed from silicon dies [102,104]. A primary fluid channel [110] is formed in the body and a primary fluid supply [122] is coupled to the primary fluid channel [110] to s...
03/18/2003
6422824Getting assembly for vacuum display panels
A getter assembly for use in a vacuum display panel is described. The novel getter assembly can be provided including both a non-evaporative getter and an evaporative getter which are uniquely positioned juxtaposed to each other such that ions emitted by ...
07/23/2002
6395100Method of improving vacuum quality in semiconductor processing chambers
Methods of removing gaseous phase contaminants from a processing chamber, such as a PVD chamber, are provided. In one aspect, a method of removing gaseous phase water from a processing chamber is provided that includes placing a heated substrate that has ...
05/28/2002
6388385Corrugated style anode element for ion pumps
An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal...
05/14/2002
6347925Flywheel system with parallel pumping arrangement
A flywheel energy storage system, including a plurality of pumps arranged in parallel for simultaneously drawing-off and absorbing substantially all of the gases that evolve from a flywheel assembly during high-speed operation, is disclosed. The plurality...
02/19/2002
6309184Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo pump (TMP) being in line to each other, capable of providing a complete shielding to the radiating heat transfer from the getter pump to the turbo pum...
10/30/2001
6241477In-situ getter in process cavity of processing chamber
An apparatus for removing an undesirable gas in a processing chamber includes one or more getter materials disposed between a process gas inlet and a substrate support member in the processing chamber, and one or more temperature control elements disposed...
06/05/2001
6165328Method for processing wafers with in situ gettering
A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump dispo...
12/26/2000
6149392Getter pump with high gas sorption velocity
A getter pump with high gas sorption velocity includes a cylindrical housing that has an open end and a closed end and defines a chamber with a central axis. Three to eight getter structures are disposed within the chamber. The getter structures are symme...
11/21/2000
6142742Getter pump module and system
A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are pro...
11/07/2000
6109880Getter pump module and system including focus shields
An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements an...
08/29/2000
6106237Getter pump with one-piece frame supporting nonevaporable getter elements
A getter pump includes a one-piece, substantially U-shaped frame having a bottom, a first sidewall, and a second sidewall opposing the first sidewall. The first and second sidewalls each have a plurality of slots formed therein. A plurality of getter elem...
08/22/2000
6074171Getter pump especially suitable for the use upstream, in proximity coaxially with respect to a turbomolecular pump
A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire having turns (18, ...
06/13/2000
5997255Method for pumping a chamber using an in situ getter pump
A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are pro...
12/07/1999
5993165In Situ getter pump system and method
A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump dispo...
11/30/1999
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