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Patent No. 6049912

Mountable Printable Placard With Headband

A resilient headband in a shape for being mounted on the head of the user. The headband is equipped with a longitudinal slotted member for holding a placard.

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Class 414/940 - Wafer cassette transporting


Subclass of Class 414 - Material or article handling
Definition: A collection of art for bodily moving a portable rack which
No. of patents: 565
Last issue date: 10/28/2008


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NumberTitleIssue Date
7441999Overhead travelling carriage system
An overhead buffer 24 is provided on a side of a running rail 4 for an overhead travelling carriage 8. The height level of an article on the overhead buffer 24 is slightly lower than that on the running overhead travelling carriage 8
10/28/2008
7422107Kinematic coupling with textured contact surfaces
A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces...
09/09/2008
7413396Article storage facility and system for the same
A storage shelf 4 is provided which has, for example, two rotatable mounts 18, 19. A notch 41 is formed in the mount 18 so that a cassette 34 can be freely transferred between the lower mount 19 and an overhead travelling ca...
08/19/2008
7410340Direct tool loading
The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate...
08/12/2008
7409257System and method for moving substrates in and out of a manufacturing process
Disclosed is a system for moving substrates in and out of a manufacturing process. The present invention comprises an automatic transfer device for automatically transferring a cassette that stores substrates, a manual transfer device for transferring the cassette a...
08/05/2008
7408615Lithographic apparatus and device manufacturing method
A lithographic apparatus having an improved transfer unit, is presented. The lithographic apparatus includes a processing unit that performs a lithographic process involving exchangeable objects in which the processing unit includes an illumination system that provi...
08/05/2008
7398801Apparatus and method for processing wafers
An apparatus and method for manufacturing semiconductor devices are disclosed. In accordance with the invention, a wafer transfer device for transferring wafers from wafer storage containers to wafer processing equipment includes a flow chamber designed to reduce th...
07/15/2008
7363107Substrate transfer system
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ...
04/22/2008
7349067Lithographic apparatus and device manufacturing method
A lithographic apparatus having an improved transfer unit, is presented. The lithographic apparatus includes a processing unit that performs a lithographic process involving exchangeable objects in which the processing unit includes an illumination system that provi...
03/25/2008
7329079Semiconductor wafer processing machine
A semiconductor wafer processing machine comprising a cassette-placing mechanism having a cassette-placing table for placing a cassette storing a semiconductor wafer, a workpiece take-in/take-out mechanism for taking out the semiconductor wafer stored in the cassett...
02/12/2008
7328812Overhead travelling carriage
A centering member 20 is pressed downward using an elastic member 28; the centering member 20 is provided at the bottom of a platform 14. A plate 26 receiving an upper end of the elastic member 28 is positioned high while th...
02/12/2008
7314068Apparatus for replacing gas in storage container and method for replacing gas therewith
While gas in a general storage container with no gas inlet and in the storage container with the gas inlet is replaced in a short time, the semiconductor wafer surface is cleaned. In an apparatus for replacing gas in a semiconductor wafer storage container which inc...
01/01/2008
7299831Substrate carrier having door latching and substrate clamping mechanisms
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3...
11/27/2007
7281623Transport system including vertical rollers
A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from th...
10/16/2007
7275905Method and device for controlling position of cassette in semiconductor manufacturing equipment
A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the device has a cassette moving section and a control section. The contr...
10/02/2007
7261510Overhead travelling carriage system
The present invention provides an overhead travelling carriage system in which an overhead travelling carriage 110 is run along a running rail to convey a cassette 14 between processing devices 111. The overhead travelling carriage system is pro...
08/28/2007
7261207Method for carrying a semiconductor device
A method for carrying a semiconductor device includes: (a) providing semiconductor devices each having a main surface, a back surface, and a plurality of external terminals; (b) providing a tray having a front surface, a rear surface, an electronic tag imbedded in t...
08/28/2007
7249925System and method for reticle protection and transport
A substrate protection and transport system and method for transitioning a substrate from atmospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes that support a substrate. The cassette can include...
07/31/2007
7232284Device for loading substrates into and unloading them from a clean room
The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed and which is fitted with a hermetically sealing lock opening, and a pro...
06/19/2007
7162326Mask identification database server
The physical movement of reticles and solder bump masks within a wafer processing plant are continually tracked and documented in a historical database for the useful life of the reticles or masks. In an example embodiment of the mask tracking method, the method inc...
01/09/2007
7156129Transportable container including an internal environment monitor
A system is disclosed allowing non-invasive, continuous local and remote sensing of the internal environmental characteristics of transportable containers. The system utilizes a variety of sensors inside the container to sense internal environmental conditions. ...
01/02/2007
7153083Material handling and transport process
A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor...
12/26/2006
7153081Self-propelled carriage
An article transfer method using a self-propelled carriage capable of supporting an article and travelling along a fixed path is provided in which an article supporting body forming a final operating section is turned without performing lateral movement and with mak...
12/26/2006
7141120Manufacturing apparatus of semiconductor device having introducing section and withdrawing section
A manufacturing apparatus of a semiconductor device includes an introducing section, a process section, and a withdrawing section. The introducing section introduces a transfer box therein. The process section takes in the semiconductor substrate put in the introduc...
11/28/2006
7139640Substrate transfer system
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ...
11/21/2006
7134825Device for handling substrates inside and outside a clean room
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room condi...
11/14/2006
7134826Substrate transfer apparatus, substrate processing apparatus and holding table
A loader includes a receiving section for receiving a FOUP (front opening unified pod), an opener for transporting substrates out of the FOUP, and a transport robot for transporting the FOUP between the receiving section and the opener. When the opener transports th...
11/14/2006
7108899Chip tray with tacky surface
A tray for handling and retaining a plurality of components, wherein the tray has a rigid body portion and an elastomeric contact layer. The contact layer has a planar upper surface for contacting and retaining the components, and may be formed from a thermoplastic ...
09/19/2006
7101138Extractor/buffer
An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extr...
09/05/2006
7099739Stocker utilization self-balancing system and method
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle...
08/29/2006
7092779Automated material handling system for a manufacturing facility divided into separate fabrication areas
An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indic...
08/15/2006
7089680Vacuum processing apparatus and operating method therefor
A vacuum processing apparatus which includes a means for transferring substrates from a loader, with a transferring device, to a double lock chamber; and, then to a selected vacuum processing chamber. The substrates are returned to a substrate, by the vacuum loader,...
08/15/2006
7083338Lithography equipment
A lithography equipment is provided, which includes: a coater coating a substrate with resist; a first buffer storing the substrate supplied from the coater; a baker baking the substrate supplied from the first buffer; a first turn table rotating the substrate suppl...
08/01/2006
7076326Proactive staging for distributed material handling
A system, method, and/or program that enables a material handling system to proactively stage lots at ideally located stockers. Input containing the lots to be processed on a process machine is entered into a manual order queue (“MOQ”). The system, method, and/o...
07/11/2006
7073999Receiving container body for object to be processed
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a plurality of second objects to be processed, the second objects to be proce...
07/11/2006
7074000Method and apparatus for undocking substrate pod with door status check
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A controller is coupled to the docking mechanism and the door opener a...
07/11/2006
7068351Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program
A method of controlling a track apparatus in a lithocell apparatus arrangement, is presented herein. The lithocell includes a lithographic exposure apparatus configured to expose substrates and a track apparatus configured to prepare substrates before exposure and d...
06/27/2006
7064512Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method
A positioning apparatus includes an X stage, a linear motor (X-axis) which drives the X stage along the X-axis, a linear motor (Y-axis) which drives a Y stage along the Y-axis, a laser interferometer which detects position information of the stages along the X and Y...
06/20/2006
7042553Apparatus for conveying substrates
Disclosed herein is an apparatus for conveying substrates, which is capable of efficiently conveying large substrates and has a function to temporarily store the substrate in a buffer unit. The apparatus includes a substrate support unit, a conveying unit, and the b...
05/09/2006
7008884Transfer robot and inspection method for thin substrate
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an i...
03/07/2006
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