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| Number | Title | Issue Date |
| 7416405 | Vertical type of thermal processing apparatus and method of using the same A vertical type of thermal processing apparatus of the present invention includes a thermal processing furnace having a furnace opening at a lower portion thereof. A boat holding objects to be processed in a tier-like manner in a vertical direction is adapted to be ... | 08/26/2008 |
| 7236229 | Load lock chamber, processing system A load lock chamber provided between a port that accommodates an object to be processed and is maintained at an ambient pressure, and a process chamber that is maintained at a reduced pressure or vacuum environment and performs a predetermined process for the object... | 06/26/2007 |
| 7226512 | Load lock system for supercritical fluid cleaning A substrate is transferred from an environment at about vacuum into a load lock through a first door. The substrate is then sealed within the load lock. The pressure within the load lock is raised to a high pressure above vacuum. A second door coupling the load lock... | 06/05/2007 |
| 7134827 | Reduced footprint tool for automated processing of microelectronic substrates The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool desig... | 11/14/2006 |
| 7105847 | Semiconductor processing-purpose substrate detecting method and device, and substrate transfer system A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a dr... | 09/12/2006 |
| 7067018 | Automated system for handling and processing wafers within a carrier A workpiece handling and processing system has a interface section for loading wafers from cassettes into carriers. The wafers are lifted out of cassettes by a buffer elevator and moved into a position over an open carrier by a buffer robot. A comb elevator lifts co... | 06/27/2006 |
| 7008884 | Transfer robot and inspection method for thin substrate A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an i... | 03/07/2006 |
| 6960257 | Semiconductor processing system with wafer container docking and loading station A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section trans... | 11/01/2005 |
| 6927181 | Transfer robot and inspection method for thin substrate A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an i... | 08/09/2005 |
| 6878955 | Method and apparatus for accessing microelectronic workpiece containers An apparatus and method for handling microelectronic workpieces initially positioned in a container. The container can be changeable from a first configuration where the microelectronic workpiece is generally inaccessible within the container to a second configurati... | 04/12/2005 |
| 6854948 | Stage with two substrate buffer station A stage used, e.g., in semiconductor fabrication, includes a two substrate buffer station and a movable chuck. The buffer station, in one embodiment is fixed, i.e., non-movable relative to the stage. In another embodiment, the support elements of the buffer station ... | 02/15/2005 |
| 6848876 | Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embo... | 02/01/2005 |
| 6844242 | Method of manufacturing SOI wafer A boat (4) has a recess (5) for supporting a laminated wafer (50). The recess (5) has a first side surface (5a), a first bottom surface (5b), a second side surface (5c), a second bottom surface ( | 01/18/2005 |
| 6837663 | Loading and unloading station for semiconductor processing installations In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines ... | 01/04/2005 |
| 6833035 | Semiconductor processing system with wafer container docking and loading station A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section trans... | 12/21/2004 |
| 6828235 | Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus It is an object of the present invention to adjust the transfer environment of a substrate in order to prevent contamination of the substrate surface by impurities. A semiconductor manufacturing apparatus comprises a load-lock chamber 1 in which substrate exc... | 12/07/2004 |
| 6821912 | Substrate processing pallet and related substrate processing method and machine A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure adapted to contact a portion of a substrate seated in the recess and a p... | 11/23/2004 |
| 6817823 | Method, device and system for semiconductor wafer transfer The invention relates to a wafer transfer system that achieves high efficiency, as measured by throughput rate. This is accomplished in one instance by the combination of reliable transfer of single wafers between ports while being simultaneously rotated to accompli... | 11/16/2004 |
| 6817821 | Wafer handling for a reflow tool The invention is an improved reflow tool for performing a reflow process on a wafer. An input robot may be used to transport wafers from an input carrier to an oven where a reflow process is performed. After processing the wafers in the oven, the wafers are transpor... | 11/16/2004 |
| 6814573 | Vacuum heat-treatment apparatus A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell includes a hermetic chamber disposed at the center. A plurality of treating cells are disposed along the periphery of the hermetic chamber, and a workpiece transfer mechanism is dispo... | 11/09/2004 |
| 6769855 | Substrate processing apparatus and substrate processing method A substrate processing apparatus (1) includes a wafer loading/unloading and arraying part (14) to remove substrates W from a container (C) where a plurality of unprocessed substrates W to be processed are accommodated at regular intervals, substrate ar... | 08/03/2004 |
| 6759336 | Methods for reducing contamination of semiconductor substrates Methods for reducing contamination of semiconductor substrates after processing are provided. The methods include heating the processed substrate to remove absorbed chemical species from the substrate surface by thermal desorption. Thermal desorption can be performe... | 07/06/2004 |
| 6690993 | Reticle storage system A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in th... | 02/10/2004 |
| 6647641 | Device and method for the treatment of substrates in a fluid container A device for the treatment of substrates has a fluid container and two substrate transport devices positionable above the fluid container. Each substrate transport device is a hood for receiving multiple substrates. Each substrate transport device has at ... | 11/18/2003 |
| 6634847 | Method and an apparatus for picking up a module IC in a customer tray of a module IC handler A method and apparatus for picking up module ICs from customer trays utilizes a rotating table. In the apparatus and method, the customer tray is placed on the rotating table, and the rotating table is inclined a predetermined amount. The inclination of t... | 10/21/2003 |
| 6612801 | Method and device for arraying substrates and processing apparatus thereof A substrate arraying method, a substrate arraying device and a small-sized processing apparatus commonly includes a step of taking 26 sheets of wafers W out of one carrier C at regular intervals of L, a step of taking 26 sheets of wafers W out of another ... | 09/02/2003 |
| 6609876 | Loading and unloading station for semiconductor processing installations In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. The... | 08/26/2003 |
| 6580955 | Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme An apparatus, method and medium is provided for increasing the efficiency with which wafers are transferred among different processing chambers in a wafer processing facility. A multi-slot cooling chamber allows multiple wafers to be cooled while other wa... | 06/17/2003 |
| 6567725 | Method and apparatus for teaching robot station location Apparatus for teaching robot station location relative to a work piece apparatus includes an attachment that can be temporarily coupled to the apparatus and positioned in known relationship to the robot station location. A plurality of positional sensors ... | 05/20/2003 |
| 6537010 | Wafer boat support and method for twin tower wafer boat loader An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilever paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translat... | 03/25/2003 |
| 6532975 | Substrate processing apparatus and substrate processing method An outer covering wall (26) and an inner covering wall (27), which are capable of surrounding a rotor (24), can be horizontally moved. A wafer carrier waiting portion (30) is disposed right below the rotor (24). A wafer holding member (41) included in a w... | 03/18/2003 |
| 6520348 | Multiple inclined wafer holder for improved vapor transport and reflux for sealed ampoule diffusion process An apparatus and method for diffusion annealing impurities onto a plurality of wafers is described. A hollow wafer holder includes a plurality of first and second slots. The first slots are sized and shaped to receive a pair of wafers. The first slots are... | 02/18/2003 |
| 6517691 | Substrate processing system A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processin... | 02/11/2003 |
| 6493961 | Processing unit for a substrate A processing unit for a substrate has a vertical thermal processing furnace 4 having a bottom and an opening 4a provided at the bottom. A boat 3 holding substrates W in vertical multistairs can be placed on a first lid 17, and the first lid 17 can open an... | 12/17/2002 |
| 6457929 | Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be transferred. The apparatus includes a wafer transfer unit tha... | 10/01/2002 |
| 6447217 | Substrate transfer device and operating method thereof A substrate body transfer apparatus, and an operating method therefor, capable of inserting and extracting substrate body into and from a cassette using air conveyance without employing a transfer mechanism such as those in which direct contact is made wi... | 09/10/2002 |
| 6449520 | Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme An apparatus, method and medium is provided for increasing the efficiency with which wafers are transferred among different processing chambers in a wafer processing facility. A multi-slot cooling chamber allows multiple wafers to be cooled while other wa... | 09/10/2002 |
| 6439824 | Automated semiconductor immersion processing system A process system for processing semiconductor wafers includes a stocker module, and immersion module, and a process module. A process robot moves on a lateral rail to transfer wavers between the modules. The immersion module is separated from the other mo... | 08/27/2002 |
| 6431320 | Manual wafer lift A wafer lift for lifting a series of vertically oriented wafers arranged parallel to one another in a cassette. The wafer lift includes a vertically movable ramp and a cassette guide positioned over the ramp. The ramp is raised to engage wafers in a casse... | 08/13/2002 |
| 6423978 | System for detecting disk-shaped object such as semiconductor wafer or magnetic disk A disk-shaped object detecting system detecting the presence or absence and position of a disk-shaped object such as semiconductor wafers or magnetic disks includes a light emitting element emitting light toward a circumferential edge of the object while ... | 07/23/2002 |
