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| Number | Title | Issue Date |
| 7431551 | Substrate distribution system and a method using the same A glass substrate distribution system includes a cassette, a first transmission mechanism, and a second transmission mechanism. The first transmission mechanism transmits the glass substrate to several standby positions outside the cassette. The second transmission ... | 10/07/2008 |
| 7422406 | Stacked process modules for a semiconductor handling system Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically... | 09/09/2008 |
| 7396199 | Substrate processing apparatus and substrate processing method A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group dispose... | 07/08/2008 |
| 7393172 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device In a wafer transfer system wherein a wafer transfer robot linearly reciprocates by a linear motor, dust is prevented from adhering to a wafer. A fixed base 9, on which the secondary side 11 of a linear motor M for linearly reciprocating a wafer ... | 07/01/2008 |
| 7363107 | Substrate transfer system A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ... | 04/22/2008 |
| 7357846 | Substrate processing apparatus and substrate processing method In a resist-removing process system 1 for removing a resist film formed on a wafer W, the resist film is denatured so as to make the resist film soluble in water and, then, the resist film is removed from the wafer by applying a water-wash processing to the d... | 04/15/2008 |
| 7335090 | Substrate processing apparatus and substrate handling method A substrate processing apparatus includes: a carrier holding unit for holding a carrier which houses a substrate; a substrate holding mechanism for holding a substrate when a predetermined process is executed on the substrate; and a substrate transfer mechanism for ... | 02/26/2008 |
| 7334979 | Adjustable substrate transfer apparatus A substrate transfer apparatus (100) includes a base (40), first and second cassettes (1, 2), a adjustable cassette (6), and a push unit (50). The adjustable cassette (6) is between the first and second cassettes, and has a ... | 02/26/2008 |
| 7334826 | End-effectors for handling microelectronic wafers End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of abutments and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutmen... | 02/26/2008 |
| 7278813 | Automated processing system An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process... | 10/09/2007 |
| 7279067 | Port structure in semiconductor processing system In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the tab... | 10/09/2007 |
| 7275905 | Method and device for controlling position of cassette in semiconductor manufacturing equipment A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the device has a cassette moving section and a control section. The contr... | 10/02/2007 |
| 7260448 | Substrate holding device A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding membe... | 08/21/2007 |
| 7207766 | Load lock chamber for large area substrate processing system A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration... | 04/24/2007 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat tran... | 04/03/2007 |
| 7179044 | Method of removing substrates from a storage site and a multiple substrate batch loader A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector i... | 02/20/2007 |
| 7140655 | Precision soft-touch gripping mechanism for flat objects A precision soft-touch gripping mechanism has a mounting plate attached to a robot arm. The plate supports a stepper motor. The output shaft of the stepper motor is connected through a spring to an elongated finger that slides in a central longitudinal slot of the p... | 11/28/2006 |
| 7141120 | Manufacturing apparatus of semiconductor device having introducing section and withdrawing section A manufacturing apparatus of a semiconductor device includes an introducing section, a process section, and a withdrawing section. The introducing section introduces a transfer box therein. The process section takes in the semiconductor substrate put in the introduc... | 11/28/2006 |
| 7139640 | Substrate transfer system A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ... | 11/21/2006 |
| 7134825 | Device for handling substrates inside and outside a clean room A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room condi... | 11/14/2006 |
| 7115891 | Wafer mapping device and load port provided with same A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and ho... | 10/03/2006 |
| 7114908 | Method and apparatus for stacking semiconductor wafers An apparatus for stacking semiconductor wafers comprises a housing configured to releasably maintain a plurality of semiconductor wafers in fixed positions relative to the housing. The apparatus also includes a transfer guide proximate to the housing, the transfer g... | 10/03/2006 |
| 7109509 | Device for the detection of substrates stacked with a specific spacing For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the... | 09/19/2006 |
| 7104579 | Detection and handling of semiconductor wafers and wafer-like objects An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors detects a wafer and the other one does not, an alarm is generated to ale... | 09/12/2006 |
| RE39241 | Modular SMIF pod breather, adsorbent, and purge cartridges Modular cartridges which may be inserted into and removed from a well or receptacle on the bottom of a pod. The cartridges may be configured to include various types and combinations of valves, filters, and/or conditioning agents. A standalone cartridge replacement ... | 08/22/2006 |
| 7077173 | Wafer carrier, wafer conveying system, stocker, and method of replacing gas When atmosphere inside a wafer carrier is replaced by introducing a gas into the wafer carrier from a gas inlet provided to the wafer carrier that can accommodate wafers. At the same time, the atmosphere inside the wafer carrier is sucked to make an inside pressure ... | 07/18/2006 |
| 7070379 | Semiconductor fabrication apparatus having FOUP index in apparatus installation area A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and an engineering FOUP index and multiple processing chambers. The FOUP ... | 07/04/2006 |
| 7066707 | Wafer engine An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The ... | 06/27/2006 |
| 7062344 | Fabrication system and fabrication method Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafers are tran... | 06/13/2006 |
| 7044703 | Automatic guided vehicle, automatic guided vehicle system and wafer carrying method Improvement of the workability in an automatic guided vehicle which carries and transfers a semiconductor wafer between stations in a semiconductor manufacturing plant etc. An automatic guided vehicle 1 is moved to an objective station after storing a ... | 05/16/2006 |
| 7042553 | Apparatus for conveying substrates Disclosed herein is an apparatus for conveying substrates, which is capable of efficiently conveying large substrates and has a function to temporarily store the substrate in a buffer unit. The apparatus includes a substrate support unit, a conveying unit, and the b... | 05/09/2006 |
| 7039501 | Method for determining a position of a robot Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of t... | 05/02/2006 |
| 7033126 | Method and apparatus for loading a batch of wafers into a wafer boat A receiver frame loads and unloads a batch of semiconductor wafers onto wafer holders in a wafer boat. The wafer holders extends continuously about the perimeter of an overlying wafer. The receiver frame is provided with a plurality of supporting arms which are immo... | 04/25/2006 |
| 7032739 | Intermediate product carrying apparatus, and intermediate product carrying method An intermediate product carrying apparatus is provided for loading a carrier, which is carried between a plurality of process systems and stores a plurality of intermediate products, into the corresponding process system, and then transferring the plurality of inter... | 04/25/2006 |
| 7014415 | Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate A substrate transfer apparatus, for removing a substrate from a substrate accommodating tray accommodating the substrate in a horizontal state, includes a plurality of support pins for raising the substrate accommodated in the substrate accommodating tray above the ... | 03/21/2006 |
| 7011483 | Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter A load port includes an adapter-detecting sensor arranged at an upper portion of an opener. When the opener opens a lid of a FOUP, the adapter-detecting sensor detects whether a wafer adapter is mounted in the FOUP, and notifies a control unit of a semiconductor man... | 03/14/2006 |
| 7011484 | End effector with tapered fingertips An apparatus for transporting a flat object from one position to another position. The apparatus includes an end effector having a base portion and at least one finger extending from the base portion. The finger having a top surface and a bottom surface, and the fin... | 03/14/2006 |
| 7008884 | Transfer robot and inspection method for thin substrate A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), comprising an i... | 03/07/2006 |
| 7004708 | Apparatus for processing wafers Systems and methods are described for wafer processin. A wafer processing apparatus includes: a first wafer transporter; a process station coupled to the first wafer transporter, the process station including: a first plurality of wafer processing stacks, each of th... | 02/28/2006 |
| 6984839 | Wafer processing apparatus capable of mapping wafers A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector ar... | 01/10/2006 |
