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Class 414/806 - Of charging load-holding or -supporting element from source and transporting element to working, treating, or inspecting station


Subclass of Class 414 - Material or article handling
Definition: Process of charging a load-grasping device, load-securing
No. of patents: 183
Last issue date: 03/20/2012


1          
NumberTitleIssue Date
8137050Pickup device and pickup method
It is an object of the present invention to provide a device which can pick up a chip from an adhesive film while preventing damage to the chip. In addition, a device which can pick up a chip over an adhesive film with a high yield is provided. A pickup device inclu...
03/20/2012
8087869Method and apparatus for loading palletized articles for blast freezing
A method and apparatus for spacing apart layers of cartons containing animal parts (such as chicken parts). In one embodiment is provided a vacuum assist lift device to transfer layers of cartons from a packed condition to a palletized spaced apart condition. In one...
01/03/2012
8057156Transfer unit for test elements
The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises a transfer element. At least one aperture for receiving a test element...
11/15/2011
8047762Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools
By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby pro...
11/01/2011
7955044Method for processing substrates
A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when th...
06/07/2011
7942623Substrate supporting means having wire and apparatus using the same
An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame. ...
05/17/2011
7927062Methods and apparatus for transferring substrates during electronic device manufacturing
In one aspect, a first apparatus is provided that is adapted to transfer a substrate between a transfer chamber and a processing chamber. The first apparatus includes a robot having a first blade, a second blade spaced from the first blade, and a central hub coupled...
04/19/2011
7862289Vacuum processing apparatus and vacuum processing method
A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing s...
01/04/2011
7841824Method for transferring magnetic samples from a source to a target
A control system for transferring a sample from a source vessel to a target vessel generally includes a vessel unit, a primary transfer unit, an x-drive, a y-drive, a z-drive and a control unit for controlling the drives. The vessel unit includes a support plate for...
11/30/2010
7637714Apparatus and method for removing semiconductor chip
While a vicinity of a bottom surface-side region of a pressure-sensitive adhesive sheet, corresponding to an adhesion region of a semiconductor chip, is sucked and held, a plurality of protruding portions of a removing member are brought into contact with the bottom...
12/29/2009
7597530Method for conveying and apparatus using the same
A method for conveying an object and a conveying apparatus are provided. The method includes steps of loading a first object at a first position by a transmission apparatus, loading a second object onto a carrying platform, providing a supporter having a first holde...
10/06/2009
7597531Method of controlling mover device
Embodiments of the invention are directed to a method of controlling a mover device The method includes generating a moving force from a moving force generating unit to move a processing base with respect to a movable base, thereby moving the processing base with re...
10/06/2009
7578650Quick swap load port
Apparatus and method for reducing the load on an automated material handling system during processing of materials are disclosed. A materials processing tool with one or more load ports is equipped with at least one movable buffer attached to the tool front end. The...
08/25/2009
7563068Low cost high throughput processing platform
As part of a system for processing workpieces, a workpiece support arrangement, separate from a process chamber arrangement supports at least two workpieces at least generally in a stacked relationship to form a workpiece column. A transfer arrangement transports at...
07/21/2009
7407363Substrate transport apparatus and substrate transport method
A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an upper hand and a lower hand vertically arranged. The second substrate t...
08/05/2008
7371041Assembly station with rotatable turret which forms and unloads a completed stack of articles
Method and apparatus for forming and unloading a completed stack of articles. An assembly station includes a rotatable turret from which at least one stacker arm projects. The turret rotates to each of a number of article loading positions to sequentially load artic...
05/13/2008
7367773Apparatus for combining or separating disk pairs simultaneously
Various methods and apparatus are provided for merging and demerging pairs of disks. In one embodiment, pairs of merged disks are first separated and then transferred to separate cassettes such that all of the disks in the separate cassettes are oriented in the same...
05/06/2008
7366585Method and apparatus for moving a handling system
A method for moving a multi-axis or multi-axle handling system, particularly for orienting a hand of an industrial robot, with a gripping tool connected to a hand is characterized in that the movement is performed in such a way that movement-dependent moments on an ...
04/29/2008
7364922Automated semiconductor wafer salvage during processing
The present invention provides a recovery processing method to restore the substrate processing apparatus to an operating state after correcting an abnormality having occurred in the substrate processing apparatus in operation and having resulted in a stop in the op...
04/29/2008
7363195Methods of configuring a sensor network
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-seri...
04/22/2008
7278817Method for transferring and loading a reticle
An apparatus and method of transferring and loading a reticle onto a receiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end effector having a reticle plate coupled to a mounting plate. The mounti...
10/09/2007
7264436Robot-guidance assembly for providing a precision motion of an object
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end an...
09/04/2007
7264432Device and method for transferring objects
A device for transferring and characterizing objects positions the object on a horizontal work field. The device includes at least one rail extending parallel to the X direction and a displacement unit, movable back and forth in the X direction, having a motorized g...
09/04/2007
7257467Method of estimating the volumetric carrying capacity of a truck body
A method for estimating the effective volumetric capacity of a truck body is provided. The method includes the step of establishing a side-to-side profile of a generic load model. A front-to-rear profile of the generic load model is also established. Load plateau li...
08/14/2007
7244093Object handling apparatus
An object handling apparatus capable of securely holding an object and precisely transferring the held object from a first place to a second place without need of a specific jig for positioning the object on a pallet. A position of an object supplied to the first pl...
07/17/2007
7234913Fast swapping station for wafer transport
An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provi...
06/26/2007
7229240Substrate processing apparatus and substrate processing method
When the processing temperature in a heater should be changed between lots, for example, a foremost substrate in a subsequent lot is transported to a position close to the heater such as a substrate holding part, and is held in standby thereat until adjustment of a ...
06/12/2007
7229241Automatic printing plate feeding system
An automatic plate feeding system for loading plates of various sizes into a printing plate imaging device, which includes a plurality of trays staggered one on top of the other is provided. At least two of the trays contain plates of different sizes stacked with th...
06/12/2007
7214027Wafer handler method and system
Systems and methods for handling wafers include retrieving a first wafer from a wafer cassette using a first arm, transferring the first wafer from the first transfer arm to a second arm, delivering the first wafer for processing to a process chamber using the secon...
05/08/2007
7179044Method of removing substrates from a storage site and a multiple substrate batch loader
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector i...
02/20/2007
7179397Plasma processing methods and apparatus
To move an article in and out of plasma during plasma processing, the article is rotated by a first drive around a first axis, and the first drive is itself rotated by a second drive. As a result, the article enters the plasma at different angles for different posit...
02/20/2007
7156638Mold, molding system and molding machine for making ophthalmic devices
This invention provides a mold comprising a first mold half which works in conjunction with a second mold half for forming ophthalmic devices wherein said first mold half comprises at least one changeable cassette comprising inserts for forming said ophthalmic devic...
01/02/2007
7153083Material handling and transport process
A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor...
12/26/2006
7149643Integrated process condition sensing wafer and data analysis system
A process condition measuring device and a handling system may be highly integrated with a production environment where the dimensions of the process condition measuring device are close to those of a production substrate and the handling system is similar to a subs...
12/12/2006
7145459Systems and methods for manufacturing control using radio frequency identification
A system for manufacturing control using radio frequency identification (RFID). A trigger issues a trigger signal when activated by user contact. A RFID interrogator retrieves information from a RFID tag when activated. A controller is configured to activate the RFI...
12/05/2006
7108471Transporting tool for object to be tested, and object-to-be-tested transporting system
A transporting tool of this invention transports a cracked wafer between an unload table and a test position through fork, having a vacuum suction mechanism, and a main chuck. The transporting tool of this invention has a first groove formed in a first surface of th...
09/19/2006
7101138Extractor/buffer
An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extr...
09/05/2006
7099739Stocker utilization self-balancing system and method
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle...
08/29/2006
7078262Semiconductor wafer transport method and semiconductor wafer transport apparatus using the same
A wafer formed thin through a back grinding process is placed on a support table included in an alignment stage. When a faulty suction is caused by a warp of the wafer, a surface of wafer is pressed by a pressing plate to be corrected and held by suction. The wafer ...
07/18/2006
7056806Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first precursor gas is introduced to an enclosure at a first enclosure pressure....
06/06/2006
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