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| Number | Title | Issue Date |
| 7922440 | Apparatus and method for centering a substrate in a process chamber The present invention comprises an apparatus and method for centering a substrate in a process chamber. In one embodiment, the apparatus comprises a substrate support having a support surface adapted to receive the placement of a substrate and a reference axis subst... | 04/12/2011 |
| 7918640 | Position correcting apparatus, vacuum processing equipment and position correcting method A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to mo... | 04/05/2011 |
| 7695238 | Center-of-mass lift mechanism A lift mechanism includes a balance structure configured to hold an object, wherein the balance structure is rotateably connected to an arm structure at a pivot point. The pivot point is configured, and the object is positioned, such that the pivot point is substant... | 04/13/2010 |
| 7462011 | Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without i... | 12/09/2008 |
| 7433759 | Apparatus and methods for positioning wafers A method for calibrating a controller of a robotic arm in a microelectronics manufacturing apparatus that includes storing a default position for an edge detector, moving a blade on the robotic arm based on the default position of the edge detector such that at leas... | 10/07/2008 |
| 7367442 | Device for transferring continuously transported printing products from a flat lying position into an upright position or vice versa A device (1) for transferring continuously transported printing products (2 a . . . g), e.g., book blocks, books or sheet stacks consisting of folded and/or non-folded sheets, from an essentially flat lying position into an upright position or v... | 05/06/2008 |
| 7367096 | Equipment for mechanical machining, in particular for the turning and drilling of light alloy wheels Equipment for mechanical machining, especially the turning and drilling of mechanical workpieces, such as light alloy wheels and the like, includes at least one turning unit with a double chuck to support the workpieces being machined and a turning head designed to ... | 05/06/2008 |
| 7340323 | Industrial robot with controlled flexibility and simulated force for automated assembly An industrial robot that uses a simulated force vector to allow a work piece held by the robot end effector to be mated with a work piece whose location and orientation is not precisely known to the robot. When the end effector makes contact with the location and or... | 03/04/2008 |
| 7322787 | Devices and methods for reversing, transporting, and processing substrates A substrate is supported on a plurality of substrate supporting pins mounted to a second movable member. Next, so as to bring the plurality of substrate supporting pins close to a plurality of substrate supporting pins mounted to a first movable member, the first mo... | 01/29/2008 |
| 7312919 | Wide field of view and high speed scanning microscopy A wide field of view scanning microscope includes a light source, a light detector, optics, a scanning assembly, a translation system, and a data collection control and processing unit. The scanning assembly is constructed to provide from the light source a light be... | 12/25/2007 |
| 7300082 | Active edge gripping and effector The present invention generally relates to an end effector that utilizes a gripping mechanism to grip a peripheral edge of the wafer and secure the wafer to the end effector. In one embodiment, the gripping mechanism includes a pair of gripper arms that pivot betwee... | 11/27/2007 |
| 7287951 | Device and method for the harmonized positioning of wafer disks A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34 | 10/30/2007 |
| 7279067 | Port structure in semiconductor processing system In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the tab... | 10/09/2007 |
| 7274464 | Position measuring device A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that me... | 09/25/2007 |
| 7261512 | Machine for orienting aligning vessels or bottles made of plastics The invention falls within the field of machines for orienting and aligning vessels or bottles made of plastics randomly inserted into a load vessel and in particular to a type of orienting and aligning machine that provides a plurality of elevators (6) that ... | 08/28/2007 |
| 7256132 | Substrate centering apparatus and method A semiconductor substrate centering mechanism includes a plurality of substrate support pins, each pin having a top surface. The top surfaces of the pins define a plane in which the substrate is supported. Each pin has a tab mounted eccentrically at the top surface ... | 08/14/2007 |
| 7246987 | Solid motor transport trailer with rotatable chock supports Methods and apparatus are provided for transporting a solid rocket motor, rocket or other object. A transport for an object suitably includes a trailer having a longitudinal axis. A tail support coupled to the trailer has a notch configured to receive a pin affixed ... | 07/24/2007 |
| 7248942 | Airflow detection system having an airflow indicating device According to an embodiment, the present invention pertains to a system for detecting airflow in a room. The system includes an airflow indicating device having a movable component whose movement substantially corresponds to airflow in a vicinity of the airflow indic... | 07/24/2007 |
| 7233842 | Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A co... | 06/19/2007 |
| 7233841 | Vision system A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is p... | 06/19/2007 |
| 7224450 | Method and apparatus for position-dependent optical metrology calibration A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent qu... | 05/29/2007 |
| 7210589 | Transport apparatus The present invention provides an apparatus for suspending and transporting articles, and is provided with a wobble prevention member that is capable of moving between a support position where it abuts against a lateral surface of an article and a release position, ... | 05/01/2007 |
| 7207766 | Load lock chamber for large area substrate processing system A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration... | 04/24/2007 |
| 7180662 | Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage A stage assembly mountable on an optical microscope for orienting a sample into a desired focal position includes an X-axis plate operable for rectilinear shifting in the X-axis direction and a Y-axis plate mounted on the X-axis plate operable for rectilinear transl... | 02/20/2007 |
| 7181314 | Industrial robot with controlled flexibility and simulated force for automated assembly An industrial robot that has uses a simulated force vector to allow a work piece held by the robot end effector to be mated with a work piece whose location and orientation is not precisely known to the robot. When the end effector makes contact with the location an... | 02/20/2007 |
| 7153086 | High speed turnover apparatus and method A turnover apparatus and method for inverting articles such as lumber or board pieces being conveyed sideways on two or more conveyor chain loops in which each article is advanced on the conveyor chain loops by speed up belts engaging the underside of the articles t... | 12/26/2006 |
| 7153088 | Method and apparatus for transferring a semiconductor substrate A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to... | 12/26/2006 |
| 7153087 | Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method A centering unit comprises a plate, centering mechanism, link mechanism, and cylinder mechanism. The plate vertically divides the interior of a frame. The support table is located substantially on the center of the plate. The centering mechanism can center each wafe... | 12/26/2006 |
| 7150598 | Pallet handling apparatus and method Apparatus and methods for handling pallets, such as for inspection and sorting, are disclosed. In a disclosed embodiment, an up-ender includes a support frame, a pallet-tilting mechanism coupled in a pivotal manner to the frame, and first and second generally uprigh... | 12/19/2006 |
| 7142940 | Method of processing semiconductor wafer A method of processing a semiconductor wafer is provided. The semiconductor wafer is processed with a first process. After collecting the measured data that reflects the deviation of each part within the semiconductor wafer, the semiconductor wafer is processed with... | 11/28/2006 |
| 7109511 | Techniques for wafer prealignment and sensing edge positions A wafer prealignment apparatus comprising a CCD linear sensor and a wafer prealignment method which facilitate the sensing of wafer presence, improvement in precision of position sensing, and edge sensing adapted to the material of the wafer even of the material is ... | 09/19/2006 |
| 7108476 | Method and device for changing a semiconductor wafer position A mechanical apparatus and method are disclosed for orienting and positioning semiconductor wafers while avoiding contamination of elements on the faces thereof, by only contacting the peripheries thereof. The apparatus may include a frame for wafer supports and a s... | 09/19/2006 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true pos... | 09/12/2006 |
| 7089879 | Methods for manipulating air cells within avian eggs An egg is accelerated such that the inner and outer shell membranes separate and allow the air cell to move within the egg when the egg is repositioned. By separating the outer and inner shell membranes of an egg, the air cell will reposition itself at the upper por... | 08/15/2006 |
| 7085622 | Vision system Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor proces... | 08/01/2006 |
| 7083757 | Method of making semiconductor bonding tools Semiconductor wire bonding tools used in the assembly and interconnection of integrated circuits (ICs) are micromolded from a mixture of ultrafine particulate materials mixed with an organic binder. Following extraction of the binder the green bonding tools are sint... | 08/01/2006 |
| 7073834 | Multiple section end effector assembly Embodiments of an end effector assembly for a substrate robot are provided herein. In one embodiment, the end effector assembly includes a wrist and a first and a second end effector coupled to the wrist in a spaced apart relationship. The first end effector include... | 07/11/2006 |
| 7072739 | Data center robotic device A method for operating a data center with a robotic device. In the method, a condition is detected in a location of the data center. The robotic device, which includes a camera and a manipulator, is maneuvered to travel to the location of the data center. The locati... | 07/04/2006 |
| 7070379 | Semiconductor fabrication apparatus having FOUP index in apparatus installation area A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and an engineering FOUP index and multiple processing chambers. The FOUP ... | 07/04/2006 |
| 7068003 | System to determine proper wafer alignment An apparatus for aligning a wafer is provided, which normally senses a flat zone of the wafer by sensors regardless of an external light so that the wafer is aligned in a set mode, in order to increase or maximize production yield. A body has all kinds of drivers. A... | 06/27/2006 |
