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| Number | Title | Issue Date |
| 8061950 | Container packer system and method A container packer system includes a transfer base, which receives a container packer adapted for movement longitudinally between retracted and extended positions with respect to the transfer base. The transfer base includes a power subsystem with a motor or engine ... | 11/22/2011 |
| 7744330 | Container packer system and method A container packer system includes a transfer base, which receives a container packer adapted for movement longitudinally between retracted and extended positions with respect to the transfer base. The transfer base includes a power subsystem with a motor or engine ... | 06/29/2010 |
| 7717661 | Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer A compact multiple diameter wafer testing device with a footprint of about 33 by 34 inches features on-chuck wafer calibration and integrated cassette-chuck transfer. It includes a five axes wafer handling system, a quick exchange chuck and a fixed through beam sens... | 05/18/2010 |
| 7682123 | Compact apparatus and method for storing and loading semiconductor wafer carriers An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport... | 03/23/2010 |
| 7618225 | Six-bar linkage positioning mechanism Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be ... | 11/17/2009 |
| 7607881 | Compact apparatus and method for storing and loading semiconductor wafer carriers An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport... | 10/27/2009 |
| 7547175 | Transfer device for substrate and storing device and hand therein, and substrate handled by the device A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite direct... | 06/16/2009 |
| 7377737 | Storage lift A storage lift has two shelving columns that support storage goods carriers (5). A vertical conveyor is located between the two shelving columns and at least one of the shelving columns has a loading and removal opening. A light grille (9, 10) and face... | 05/27/2008 |
| 7351291 | Semiconductor processing system A semiconductor processing system includes a load lock chamber and first to third process chambers connected to an airtight transfer chamber. The second process chamber is disposed below the first process chamber and overlaps with the first process chamber. The thir... | 04/01/2008 |
| 7335277 | Vacuum processing apparatus A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and a mass flow con... | 02/26/2008 |
| 7329079 | Semiconductor wafer processing machine A semiconductor wafer processing machine comprising a cassette-placing mechanism having a cassette-placing table for placing a cassette storing a semiconductor wafer, a workpiece take-in/take-out mechanism for taking out the semiconductor wafer stored in the cassett... | 02/12/2008 |
| 7317311 | Wafer handling checker A plurality of wafers each having a conductive film on each face thereof are housed in slots of a cassette, and a potential of “H” level is applied from a control box to each wafer via an electrode. A conductive suction part of a vacuum pincette is connected to ... | 01/08/2008 |
| 7311488 | System and method for conveying flat panel display A panel conveying system includes a panel cassette for receiving a plurality of panels, and a conveying vehicle for conveying the panel cassette. The conveying vehicle includes a loading/unloading unit installed on the main body to load and/or unload the panel casse... | 12/25/2007 |
| 7296963 | Multi-row passive component carrier tape A carrier tape for a tape and reel machine includes at least one edge having a plurality of sprocket openings therein. The carrier tape also includes a first row of aperture cavities and a second row of aperture cavities. Electrical components are contained in the f... | 11/20/2007 |
| 7284651 | Conveyor system and method of conveying elements The method of conveying elements on a conveyor system of this invention includes conveying an element on a first continuously moving conveyor in a first direction at a first height, then lifting the element from the first conveyor upwardly to a second height and sim... | 10/23/2007 |
| 7278813 | Automated processing system An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process... | 10/09/2007 |
| 7273408 | Paired pivot arm The present invention relates to an apparatus and method for polishing semiconductor substrates. In one embodiment, two polishing heads are mounted on two independent pivoting arms that share one pivot point. Each of the pivoting arms enable the corresponding polish... | 09/25/2007 |
| 7274464 | Position measuring device A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that me... | 09/25/2007 |
| 7270510 | Device and method for transporting wafer-shaped articles An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least on... | 09/18/2007 |
| 7255524 | Substrate cassette mapper A mechanism for mapping the contents of a cassette which is used for delivering substrates to a system for processing semiconductor and similar materials which is independent of load port or loading robot movement. The mapping mechanism includes a U-shaped probe hav... | 08/14/2007 |
| 7256132 | Substrate centering apparatus and method A semiconductor substrate centering mechanism includes a plurality of substrate support pins, each pin having a top surface. The top surfaces of the pins define a plane in which the substrate is supported. Each pin has a tab mounted eccentrically at the top surface ... | 08/14/2007 |
| 7249691 | Product extractor for valve bags The invention pertains to a device for removing the contents of a valve bag using suction. The invention further pertains to a method of removing the contents of a valve bag using the device. ... | 07/31/2007 |
| 7249992 | Method, apparatus and system for use in processing wafers The present embodiment provides for methods and systems for use in processing objects such as wafers, including polishing and/or grinding wafers. Some embodiments provide systems that include a front-end module and a processing module. The front end module couples w... | 07/31/2007 |
| 7201551 | Vacuum processing apparatus and semiconductor manufacturing line using the same A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plural... | 04/10/2007 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat tran... | 04/03/2007 |
| 7179044 | Method of removing substrates from a storage site and a multiple substrate batch loader A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector i... | 02/20/2007 |
| 7172382 | Loading assembly for transport containers, and related method of use A loading assembly is provided that is configured to load transport containers with bulk material quickly and efficiently. The assembly includes a load bin having a cross section conforming to an open end of a container and a drive mechanism configured to urge the l... | 02/06/2007 |
| 7172981 | Semiconductor integrated circuit device manufacturing method including static charge elimination A sealed type container accommodating a semiconductor substrate is positioned to a load port of a semiconductor manufacturing apparatus. The semiconductor substrate is taken out of the container. An ionizer is used for static-charge-eliminating the semiconductor sub... | 02/06/2007 |
| 7156602 | Mechanism for exchanging chip-carrier plates for use in a hybrid chip-bonding machine A mechanism for exchanging chip-carrier plates in a hybrid chip-bonding machine having a plurality of chip-carrier plates, a magazine to store the plurality of chip-carrier plates, and a transport arrangement having a first and second clamping device that are dispos... | 01/02/2007 |
| 7153079 | Automated guided vehicle In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if... | 12/26/2006 |
| 7134825 | Device for handling substrates inside and outside a clean room A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room condi... | 11/14/2006 |
| 7134827 | Reduced footprint tool for automated processing of microelectronic substrates The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool desig... | 11/14/2006 |
| 7133273 | Electrostatic device for holding an electronic component wafer A device for holding a wafer, an electronic component comprises a system for transporting without deformation a wafer of electronic components. The device also enables the transport by one or the other of the passive or active faces. The device comprises a planar an... | 11/07/2006 |
| 7131478 | Component supply system An apparatus for supplying a component carrier in the form of a tape is provided. The component carrier has a number of cavities formed on one surface thereof for containing components. A pair of spaced first and second guide plates that function to guide one surfac... | 11/07/2006 |
| 7115891 | Wafer mapping device and load port provided with same A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and ho... | 10/03/2006 |
| 7108476 | Method and device for changing a semiconductor wafer position A mechanical apparatus and method are disclosed for orienting and positioning semiconductor wafers while avoiding contamination of elements on the faces thereof, by only contacting the peripheries thereof. The apparatus may include a frame for wafer supports and a s... | 09/19/2006 |
| 7109509 | Device for the detection of substrates stacked with a specific spacing For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the... | 09/19/2006 |
| 7108474 | Apparatus for transporting plate-shaped work piece It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing... | 09/19/2006 |
| 7104578 | Two level end effector An end effector alternately (or simultaneously) transports susceptors and wafers. Separate contact surfaces are provided for wafer transport and for susceptor transport. In one embodiment, the wafer contact surface is spaced above the susceptor contact surface, and ... | 09/12/2006 |
| 7092779 | Automated material handling system for a manufacturing facility divided into separate fabrication areas An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indic... | 08/15/2006 |
