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Class 414/331.18 - Charging or discharging means is a reciprocating arm


Subclass of Class 414 - Material or article handling
Definition: Subject matter which includes a loading or unloading means
No. of patents: 53
Last issue date: 03/04/2008


1    
NumberTitleIssue Date
7337792Liquid processing apparatus and liquid processing method
A cleaning apparatus 1 includes a foup loading/unloading part 2 for mounting foups F each accommodating a plurality of wafers W at intervals of a constant pitch (normal pitch), a rotor 34 capable of holding the wafers W at half the normal pitch ...
03/04/2008
7327515Slide feeding unit for an automatic scanning microscope
A slide feeding unit for a microscope includes a slide magazine having a base plate; a toothed rack secured to a magazine side wall; and slide guiding elements perpendicular to an open magazine side. The unit further includes a magazine moving mechanism having a mag...
02/05/2008
7311488System and method for conveying flat panel display
A panel conveying system includes a panel cassette for receiving a plurality of panels, and a conveying vehicle for conveying the panel cassette. The conveying vehicle includes a loading/unloading unit installed on the main body to load and/or unload the panel casse...
12/25/2007
7312849Substrate alignment apparatus and method, and exposure apparatus
A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark ...
12/25/2007
7248362Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, ...
07/24/2007
7230441Wafer staging platform for a wafer inspection system
A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The sta...
06/12/2007
7156602Mechanism for exchanging chip-carrier plates for use in a hybrid chip-bonding machine
A mechanism for exchanging chip-carrier plates in a hybrid chip-bonding machine having a plurality of chip-carrier plates, a magazine to store the plurality of chip-carrier plates, and a transport arrangement having a first and second clamping device that are dispos...
01/02/2007
7158857Method and apparatus for aligning a cassette
An alignment tool, method and system are provided for aligning a cassette handler to a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by the cassette handler support surface, in which the frame has ...
01/02/2007
7158229Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, ...
01/02/2007
7136165Substrate alignment apparatus and method, and exposure apparatus
A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark ...
11/14/2006
7109509Device for the detection of substrates stacked with a specific spacing
For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the...
09/19/2006
7099081Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, ...
08/29/2006
7051653Image recording material separating/removing device
An image recording material separating/removing device which, by using a single lift-out mechanism section, can lift image recording materials out from plural cassettes along simple loci of movement, and in which a space for providing and withdrawing the cassettes i...
05/30/2006
7032739Intermediate product carrying apparatus, and intermediate product carrying method
An intermediate product carrying apparatus is provided for loading a carrier, which is carried between a plurality of process systems and stores a plurality of intermediate products, into the corresponding process system, and then transferring the plurality of inter...
04/25/2006
7008879Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry
An apparatus for the treatment of semiconductor wafers, comprising a supportive frame and a process table arranged on the supportive frame. The process table comprises a stationary upper platen and a stationary lower plate. An intermediate indexing plate is rotative...
03/07/2006
6999184Electronic component mounting apparatus and electronic component mounting method
Jig interchanging mechanism for supplying and carrying out a component holding jig to and from an electronic component supply portion is moved by a component image taking camera moving mechanism for moving the component image taking camera above the electronic compo...
02/14/2006
6979168Method and apparatus for transferring substrate
Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer transfer line 120 having a looped planar s...
12/27/2005
6971837Stack handling and handwork table
A part handling and handwork table including a lift assembly, a drive assembly, a stack support assembly, and a part support beam assembly. The lift assembly is raised/lowered to properly position the stack support assembly adjacent a cart containing a series of sta...
12/06/2005
6929259Compact bank note dispensing device to prevent duplication releases
A duplicate let off prevention device for sheets includes a first exit guide, a second exit guide which is spaced from the first exit guide at a distance that is larger than the thickness of one sheet and is smaller than the thickness of two sheets, and a pre-exit g...
08/16/2005
6846146Load storage equipment
Load storage equipment according to the present invention includes rotary racks 21, each of which is supported independently on a story 1 or 2, and which may not extend vertically through the slab 4 between the stories 1 and 2. ...
01/25/2005
6772032Semiconductor device manufacturing line
A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empt...
08/03/2004
6726429Local store for a wafer processing station
A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncha...
04/27/2004
6663334Random access storage and retrieval system for microplates, microplate transport and microplate conveyor
An apparatus for random access storage and retrieval of a plurality of microplates is provided. The apparatus includes a plurality of microplate racks arranged in a stack. Each of the racks is mechanically engaged with a plurality of support columns and e...
12/16/2003
6619903System and method for reticle protection and transport
A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer ...
09/16/2003
6524051Wafer positioning device with storage capability
The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and...
02/25/2003
6503043Multiple level loading apparatus and method
A loading apparatus for vertically stacking a plurality of articles includes a staging assembly. The staging assembly includes a staging platform configured to receive and support the articles. The staging platform is vertically movable to a plurality of ...
01/07/2003
6488778Apparatus and method for controlling wafer environment between thermal clean and thermal processing
An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temper...
12/03/2002
6473157Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate
An exposure method, which exposes a pattern of a mask carried on a mask stage onto a substrate, includes transferring the mask to the mask stage by a transfer device, and moving the transfer device to a position in which it does not hinder an exposure....
10/29/2002
6419439Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removi...
07/16/2002
6387441Optical lens coating apparatus and method
A method and apparatus are provided for batch, continuous, or semi-continuous coating of optical lenses. The method and apparatus use a plurality of carriages which are reciprocally moved in the apparatus to transfer jigs from a jig filled carriage to a l...
05/14/2002
6309163Wafer positioning device with storage capability
The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a storage location in close proximity to the wafer platform and...
10/30/2001
6236904Substrate conveying system
A conveying system for conveying a substrate is provided with a sensor for measuring information related to flexure of the substrate during conveyance or the vertical position of the substrate. Conveyance of the substrate is controlled on the basis of the...
05/22/2001
6208909Wafer transport device
Of a plurality of wafers (15) circumferential edge portions of which are held by slot grooves (14) of a wafer cassette (13), the positions of a wafer (15) to be transferred and the wafers (15) above and beneath it are detected by a first sensor (16) and a...
03/27/2001
6158944Automated laser bar transfer apparatus and method
A laser bar loading and unloading apparatus is disclosed. The apparatus includes a mounting surface, a movable coating fixture having a plurality of spacers, and at least a first vacuum source for providing a vacuum on a laser bar mounted on the mounting ...
12/12/2000
6149367End effector assembly for inclusion in a system for producing uniform deposits on a wafer
An end effector in a transport module includes a body and a web defined by a panel and first and second flanges at opposite panel ends. The first flange is attached to the body. The second flange is displaced from, and transverse to, the panel. Rods exten...
11/21/2000
6111637Apparatus and method for examining wafers
A method and an apparatus for examining wafers includes a wafer cassette having a capacity for holding a plurality of wafers located on each of first and second locaters. The wafer cassettes are fixedly held on the first and second locaters during the waf...
08/29/2000
6059507Substrate processing apparatus with small batch load lock
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support areas. The first one of the support areas is movable between th...
05/09/2000
6048154High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock
A dual stage load lock is provided for transfer of semiconductor wafers between an environment at atmospheric pressure and a high vacuum environment, such as a wafer processing system. The dual stage load lock includes a first load lock chamber and a seco...
04/11/2000
6036426Wafer handling method and apparatus
Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer shifting devices engage the wafers, simultaneously remove the en...
03/14/2000
5947677Cassette transfer mechanism
The cassette transfer mechanism of the present invention comprises a cassette chamber for housing a cassette storing a plurality of substrates, a liftable stand capable of moving up and down in the cassette chamber, a cassette holder having a bottom-surfa...
09/07/1999
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