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| Number | Title | Issue Date |
| 7850413 | System and method for transporting inventory items An apparatus for transporting inventory items includes a housing, a drive module, a docking module, an elevating shaft, and a rotation module. The drive module is capable of propelling the apparatus in at least a first direction. The docking head is capable of coupl... | 12/14/2010 |
| 7426345 | Slide photograph data creation system, and slide photograph data A slide photograph data creation system includes a digital camera for making high-magnification photographs of samples, a sample transporter for holding and transporting samples, a controller for controlling the camera and the sample transporter so as to provide ove... | 09/16/2008 |
| 7396200 | Multiple loader adapted to operate as a magazine for vertically arranged panels A multiple loader, also adapted to operate as a magazine for storing vertically arranged panels, comprises, at a front head portion thereof, a step-by-step pushing device including a carriage driven by pneumatic cylinders causing the carriage to slide with a rectili... | 07/08/2008 |
| 7370581 | Changing station for printing press sleeves A changing station for sleeves of a printing machine has a conveyable magazine with at least one take-up device for the sleeves. The magazine is both vertically and horizontally conveyable alongside the printing machine. The horizontal movement can be provided by a ... | 05/13/2008 |
| 7360645 | Modular-conveyor-belt-based apparatus and method for the distribution of components which are disposed in strips A system (1, 6) for the distribution of components which are disposed in strips (8), using conveyor belts (12) in order to transfer components (8) to a point at which they can be grabbed by the head of a pick-and-place machine. The system... | 04/22/2008 |
| 7249925 | System and method for reticle protection and transport A substrate protection and transport system and method for transitioning a substrate from atmospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes that support a substrate. The cassette can include... | 07/31/2007 |
| 7248340 | Lithographic apparatus and patterning device transport A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing th... | 07/24/2007 |
| 7230441 | Wafer staging platform for a wafer inspection system A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The sta... | 06/12/2007 |
| 7123344 | Lithographic apparatus and device manufacturing method The invention relates to a lithographic apparatus including an illumination system for providing a projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to impart the projection beam with a pattern in its cro... | 10/17/2006 |
| 7117793 | Apparatus for the transportation of printing sleeves An apparatus for transporting printing sleeves is provided. The transport apparatus includes a housing with a bottom wall, a plurality of side walls, and at least one cover. A plurality of reception devices are mounted in the housing. Each reception device receives ... | 10/10/2006 |
| 7070832 | Sublimating process for cleaning and protecting lithography masks Spraying a surface of a reticle with carbon dioxide snow cleans the surface and removes particles. Further spraying the surface of the reticle with carbon dioxide snow at a temperature below a carbon dioxide sublimation temperature forms a solid carbon dioxide layer... | 07/04/2006 |
| 7051863 | Transferring apparatus, carrying apparatus, and transferring method A transferring apparatus is provided between a plurality of carrying apparatuses, each carrying apparatus comprising support means for supporting carried products Wf, guide means for controlling the moving direction of the support means, the guide means being provid... | 05/30/2006 |
| 7014415 | Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate A substrate transfer apparatus, for removing a substrate from a substrate accommodating tray accommodating the substrate in a horizontal state, includes a plurality of support pins for raising the substrate accommodated in the substrate accommodating tray above the ... | 03/21/2006 |
| 7000543 | Method and apparatus for loading and unloading flexographic plates for computer-to-plate imaging A method and apparatus to aid the loading and unloading of flexographic plates to and from an imager. The apparatus includes a magazine containing a plurality of compartments each for holding a single flexographic plate, the compartments arranged vertically, and mov... | 02/21/2006 |
| 6997340 | Ergonomic packs for production supply An apparatus is disclosed for providing easier, more ergonomic access to parts stored in a shipping container to be used in a manufacturing environment. Shipping containers having trays with packaging cells for containing production parts may be accessed by a person... | 02/14/2006 |
| 6994507 | Transport apparatus In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supp... | 02/07/2006 |
| 6991416 | System and method for reticle protection and transport A substrate protection and transport system and method for transitioning a substrate from atomospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes. Each cassette has at least one vent and at least... | 01/31/2006 |
| 6981447 | Method and apparatus for loading and unloading flexographic plates for computer-to-plate imaging A method and apparatus to aid the loading and unloading of flexographic plates to and from an imager. The apparatus includes a magazine containing a plurality of compartments each for holding a single flexographic plate, the compartments arranged vertically, and mov... | 01/03/2006 |
| 6968753 | Vibration-dampening base for ball-type lead screw of load port transfer system A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive moto... | 11/29/2005 |
| 6935828 | Wafer load lock and magnetically coupled linear delivery system A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 08/30/2005 |
| 6918732 | Changing station for printing machines A changing station for sleeves of printing machines with a lifting platform, disposed on the side of the printing machine, and with a wagon, in which a vertically adjustable shelf with carrying mandrels for receiving sleeves is received, whereby the shelf can be cou... | 07/19/2005 |
| 6905300 | Slide feeder with air bearing conveyor A slide loading mechanism utilizes compressed air as the transport medium to move the slides from a magazine to the stage of a microscope. The stage is provided with a carriage moving horizontally along a direct path between the stage and the magazine. A conveyor co... | 06/14/2005 |
| 6891341 | Aligning apparatus in semiconductor device test handler An aligning apparatus for a semiconductor device test handler is provided which reduces semiconductor device loading and unloading time. An exchange unit of the handler includes a pair of aligners which operate independently to continuously transfer devices to a tes... | 05/10/2005 |
| 6726429 | Local store for a wafer processing station A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncha... | 04/27/2004 |
| 6685419 | Mobile elevator transporter for semi-automatic wafer transfer A portable assembly allows semiconductor wafer boats to be transported safely from one semiconductor processing device to another semiconductor processing device at low cost using a small amount of the fabrication area without the need for complicated aut... | 02/03/2004 |
| 6663334 | Random access storage and retrieval system for microplates, microplate transport and microplate conveyor An apparatus for random access storage and retrieval of a plurality of microplates is provided. The apparatus includes a plurality of microplate racks arranged in a stack. Each of the racks is mechanically engaged with a plurality of support columns and e... | 12/16/2003 |
| 6644191 | Printing materials elevator Installed in a rotary press which is provided with an upper work floor T and a lower work floor U to accommodate multi-layered printing sections, there are included upper turning bodies B installed at a high level on an upper story W, opposing each other ... | 11/11/2003 |
| 6619903 | System and method for reticle protection and transport A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer ... | 09/16/2003 |
| 6591962 | Transporting apparatus for plate form body A transporting apparatus has two storage means with plate form body supporting members in a plurality of stages in vertical direction. Each plate form body supporting member is constructed with a plurality of string like members having widths to pass thro... | 07/15/2003 |
| 6540466 | Compact apparatus and method for storing and loading semiconductor wafer carriers An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factor... | 04/01/2003 |
| 6503043 | Multiple level loading apparatus and method A loading apparatus for vertically stacking a plurality of articles includes a staging assembly. The staging assembly includes a staging platform configured to receive and support the articles. The staging platform is vertically movable to a plurality of ... | 01/07/2003 |
| 6488463 | Elevator ice tray storage apparatus An elevator ice tray storage apparatus includes a storage bin and an elevator platform assembly overlying the bottom of the storage bin. The assembly includes a base member which slides on the bottom of the storage bin, and a platform for elevating an ice... | 12/03/2002 |
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temper... | 12/03/2002 |
| 6370765 | Component mounting apparatus with tray parts feeder Parts P are fed from a tray parts feeder 1 in which trays 3 loaded with parts P in rows thereon are accommodated. Mount head 18 mounts the parts P onto a substrate 5 that is carried in along guide rails 6 of a substrate transfer section 4. A tray 3 is dra... | 04/16/2002 |
| 6236904 | Substrate conveying system A conveying system for conveying a substrate is provided with a sensor for measuring information related to flexure of the substrate during conveyance or the vertical position of the substrate. Conveyance of the substrate is controlled on the basis of the... | 05/22/2001 |
| 6208909 | Wafer transport device Of a plurality of wafers (15) circumferential edge portions of which are held by slot grooves (14) of a wafer cassette (13), the positions of a wafer (15) to be transferred and the wafers (15) above and beneath it are detected by a first sensor (16) and a... | 03/27/2001 |
| 6168366 | Method of and apparatus for manipulating cigarette trays Trays for temporary reception of accumulations of parallel cigarettes are being introduced into and withdrawn from open-sided containers for groups of trays. The containers are provided with partitions defining tray-receiving compartments in a predetermin... | 01/02/2001 |
| 6158944 | Automated laser bar transfer apparatus and method A laser bar loading and unloading apparatus is disclosed. The apparatus includes a mounting surface, a movable coating fixture having a plurality of spacers, and at least a first vacuum source for providing a vacuum on a laser bar mounted on the mounting ... | 12/12/2000 |
| 6142723 | Transfer apparatus A carrier transfer apparatus for automatically unloading and/or loading semiconductor device packages from and/or to printed circuit boards loaded into a carrier. The apparatus includes a housing, an input portion, an elevator portion and an output portio... | 11/07/2000 |
| 6036426 | Wafer handling method and apparatus Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer shifting devices engage the wafers, simultaneously remove the en... | 03/14/2000 |
