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| Number | Title | Issue Date |
| 7326021 | Device for loading and unloading silicon wafers in an oven from a multiple-cassette station Device for automatically loading and unloading a feed to be treated in a heat treatment unit (1) such as a diffusion oven, comprising at least a cantilever (2) designed to receive the whole feed and to introduce the feed in the oven. The feed can consi... | 02/05/2008 |
| 7280935 | Dual sensor assemblies for positional output feedback A system for precisely determining a position with resolution on the order of nanometers or sub-nanometers is described. In particular, a system is described that utilizes a first and a second sensor assembly to determine a position of a movable element over a dista... | 10/09/2007 |
| 7196419 | Transport speed monitoring apparatus and semiconductor processing system utilizing the same A semiconductor processing system utilizing transport speed monitoring of a wafer boat. The semiconductor processing comprises a process chamber, loading device, and transport speed monitoring device. The loading device transports a boat of wafers into and out of th... | 03/27/2007 |
| 7104394 | Conveying apparatus with piezoelectric driver A conveying apparatus comprises an elongated conveying bed which includes a proximal end and a distal end. A support structure for the conveying bed accommodates vibratory motion of a portion of the conveying bed extending from the proximal end a substantial distanc... | 09/12/2006 |
| 7100396 | Climatic cabinet and, in particular, a climatic cooling cabinet The invention concerns a climatic cabinet, in particular, a climatic cooling cabinet, whose interior is loaded or unloaded with specimen slides, with the aid of a transporting device. The loading and unloading take place through a loading opening which can be closed... | 09/05/2006 |
| 7004306 | Conveying apparatus with piezoelectric driver A conveying apparatus comprises an elongated conveying bed which includes a proximal end and a distal end. A support structure for the conveying bed accommodates vibratory motion of a portion of the conveying bed extending from the proximal end a substantial distanc... | 02/28/2006 |
| 6565304 | Wafer boat elevator system and method An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat pla... | 05/20/2003 |
| 6537010 | Wafer boat support and method for twin tower wafer boat loader An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilever paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translat... | 03/25/2003 |
| 6352399 | Twin tower wafer boat loading system and method An apparatus for automatically and simultaneously loading a single long wafer boat or a plurality of wafer boats onto a cantilever paddle includes a stationary first track aligned with a first opening of a diffusion furnace and a first carriage moveable o... | 03/05/2002 |
| 6264404 | System and method for hydrodynamic loading and unloading of objects into and out of substantially touchless hydrodynamic transport systems A system for hydrodynamically loading objects into a manufacturing system is disclosed. The system comprises a receptacle for retaining fluid, the receptacle having an aperture for egress to a manufacturing system. At least one cassette is supported withi... | 07/24/2001 |
| 6065201 | Method of transferring conductive balls onto work piece A method of transferring conductive balls via a suction head without picking up errors and mounting errors includes moving a suction head with pores towards the conductive balls located in a case and applying a vacuum pressure to the pores to suck and pic... | 05/23/2000 |
| 5957266 | Feeder The present invention relates to an apparatus for feeding solid fuels in a space limited by a plane bottom plate, side walls and a pusher device arranged adjacent the bottom surface. A drive is located outside the walls and is attached to the pusher in or... | 09/28/1999 |
| 5941680 | Transverse conveying means and continuous furnace equipped therewith A transverse conveying apparatus for a continuous furnace comprises a gripper, which is arranged such that it can be displaced along a transporting rail and is mounted such that it can pivot around an axis of rotation parallel to the transporting rail, th... | 08/24/1999 |
| 5915308 | Discharge apparatus A discharge apparatus includes a housing into which a discharge pipe of a carbonization drum opens. A residue discharge chute which starts from the housing opens into a conveying device ending at an outlet. A filling-level meter is disposed at the residue... | 06/29/1999 |
| 5888048 | Automatic wafer boat loading A system for automatic loading of wafer boats onto a cantilever paddle for insertion of the wafer boats into a furnace tube includes an end effector carriage moving on a track and supporting an end effector having spaced, parallel pads to engage opposed o... | 03/30/1999 |
| 5839870 | Transfer system for use with a horizontal furnace An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of ... | 11/24/1998 |
| 5816798 | Conveying apparatus and continuous furnace equipped therewith A conveying apparatus for a continuous furnace comprises at least one conveying-beam pair and at least one retaining-beam pair, which are located opposite one another in each case with the conveyable object between them, and which makes it possible to cho... | 10/06/1998 |
| 5765982 | Automatic wafer boat loading system and method A system for automatic loading of wafer boats onto a cantilever paddle for insertion of the wafer boats into a furnace tube includes an end effector carriage moving on a track and supporting an end effector having spaced, parallel pads to engage opposed o... | 06/16/1998 |
| 5733116 | Heat treatment apparatus A heat treatment apparatus having a heat treatment furnace into which a hydrocarbon gas and an oxidization gas are introduced, wherein an outlet opening of a valve through which a pusher for pushing a work to be heat treated in the heat treatment furnace ... | 03/31/1998 |
| 5729892 | Component feeding system A first printed board transferred from a prior process on an inlet conveyer is placed on a moving unit at a first switching position. The moving unit moves to a second switching position while mounting the first printed board with electronic components fr... | 03/24/1998 |
| 5653586 | Curing device A curing device for drying bonding material used for bonding, for example, chips to a lead frame for semiconductor devices including reciprocatory motion drive pulleys provided on the drive shafts of a conveyor. A plurality of wire ropes are installed on ... | 08/05/1997 |
| 5582649 | Wafer transfer apparatus for use in a film deposition furnace A boat, carrying wafers to be processed, is pushed into a furnace by a substantially elongated and cantilevered actuator arm having a lug that pushes by first rotating the arm, to cause the lug to traverse a vertical rod attached to against a plate affixe... | 12/10/1996 |
| 5558691 | Cullet feeder An adjustable vibrating plate cullet feeder for feeding recycle glass to melting furnaces. Independent control of the rate of cullet feed is obtained by adjustment of at least one of: the angle of the feeder plate, the intensity of the vibration, and the ... | 09/24/1996 |
| 5551984 | Vertical heat treatment apparatus with a circulation gas passage A circulation duct with a blow fan and a shutter is provided to form gas flows in a transfer chamber below a heat treatment furnace, and a dust removing filter unit is provided in a blowout port of the circulation gas passage. Three, for example, gas supp... | 09/03/1996 |
| 5435686 | Bearing race hardening line A pusher furnace for heating workpieces has an elongate and generally horizontally extending chamber housing a plurality of trays to receive workpieces thereon to be heated within the chamber. The chamber is divided into at least two generally parallel ro... | 07/25/1995 |
| 5391034 | Furnace with refractory longitudianl members and with central charging for heating and storing hot products Furnace with refractory longitudinal members and with central charging for heating and storing hot products, whereby the central charge arrives from a continuous casting plant or from previous hot processes, the furnace (10) comprising a first furnace por... | 02/21/1995 |
| 5269287 | Furnace grate A furnace grate for use in a combustion furnace includes rows of grate bars positioned one behind the other, moveable and stationary grate bar supports, side plates, drive shafts and fluid cylinders. The grate bars are seated on the grate bar supports wit... | 12/14/1993 |
| 5180273 | Apparatus for transferring semiconductor wafers An apparatus for transferring a predetermined number of semiconductor wafers to a wafer boat charging/discharging unit or to one of an array of vertical type dispersing furnaces via the wafer boat charging/discharging unit. The apparatus is operated by ac... | 01/19/1993 |
| 5139418 | Device for discharging and transferring steelworks products Independent installation for discharging, storing and transferring products, such as steelworks products, which comprises fixed beams on which rest the products to be handled, and moveable beams placed between the fixed beams and driven in a rectangular c... | 08/18/1992 |
| 5069591 | Semiconductor wafer-processing apparatus A semiconductor wafer-processing apparatus has a plurality of support members provided respectively for the processing units of a processing apparatus, and designed for supporting wafer receptacles each containing semiconductor wafers, and receptacle-inse... | 12/03/1991 |
| 5044860 | Analysis of organic material This invention relates to apparatus for quantitatively analyzing a gaseous mixture for its components. A predetermined volume of a gaseous mixture of combustion products component is collected in a gas mixer up to a preselected pressure. A portion of the ... | 09/03/1991 |
| 5030056 | Substrate transfer device A substrate transfer device containing an arm support member for supporting plural substrate support arms at one ends thereof, said arms having substrate housing areas at the other ends thereof, a structure arranged on a base to freely move in the longitu... | 07/09/1991 |
| 4975048 | Heating apparatus A heating apparatus comprising a heating chamber the inside of which is heated to a fixed temperature and which is provided with an entrance and an exit through which articles to be heated are taken in and out of the heating chamber, a support on which th... | 12/04/1990 |
| 4954034 | Vibratory fuel feeder for furnaces A vibratory feeder in combination with a fuel fired furnace such as a coal fired steam generating boiler is disclosed. The vibratory feeder has a tray with a flat bottom in one embodiment and a step bottom in another and a hopper having vertical sides sup... | 09/04/1990 |
| 4944383 | Furnace charger apparatus For use with a reheating furnace for reheating blooms for rolling, in which for charging the furnace with blooms a series of longitudinal moveable arms are provided, for each arm a arm supporting and lifting mechanism comprising two pair of freely rotatab... | 07/31/1990 |
| 4938691 | Heat-treating apparatus A heat-treating apparatus includes a furnace for heat-treating wafers, installed so as to set its longitudinal direction vertically and having an opening which is formed in its lower end so as to allow a boat having semiconductor wafers mounted thereon to... | 07/03/1990 |
| 4909185 | Cantilever and cold zone assembly for loading and unloading an oven Apparatus for heating product with the product during heating subjected to a controlled, nonatmospheric gas environment. The apparatus includes a double-walled cold zone assembly adapted to be placed against an oven opening, the assembly having a deposito... | 03/20/1990 |
| 4901653 | Hearth for a furnace, notably a furnace for urban waste, including a grate made up of alternately fixed and reciprocating bars, with increased flexiblity of adjustment The grate comprises, within its length, two consecutive beds (41, 42) with substantially the same general slope joined together at a point in substantial vertical alignment with the altar wall (7), each bed having its own mobile frame (45d, 46d) with its ... | 02/20/1990 |
| 4820150 | Walking beam type reheating furnace A walking beam type reheating furnace which is provided with a furnace housing, stationary beams fixedly mounted in the furnace housing, first movable beams arranged on the charge side in the furnace housing, second movable beams arranged separately from ... | 04/11/1989 |
| 4793471 | Furnace grate structure A furnace grate structure for a furnace or incinerator on which solid fuel advances in an advancing direction has at least two parallel grate beams extending substantially transversely to the advancing direction, the beams being mounted on a substructure ... | 12/27/1988 |
