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| Number | Title | Issue Date |
| 8150242 | Use of infrared camera for real-time temperature monitoring and control Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature pro... | 04/03/2012 |
| 8145045 | Filament lamp and light irradiation heat treatment device A filament lamp has a bulb comprised of a straight light emitting tube from which a pair of flat hermetically sealed portions extend, a plurality of coiled filaments arranged within the light emitting tube, in the tube axis direction a pair of internal leads are con... | 03/27/2012 |
| 8014652 | Filament lamp and light-irradiation-type heat treatment device A filament lamp includes multiple filament assemblies having filaments connected to paired leads, arrayed in order within a light emitting tube and following a tube axis thereof. Each lead is electrically connected in a seal area. Each filament is powered independen... | 09/06/2011 |
| 8000587 | Pulsed processing semiconductor heating methods and associated system using combinations of heating sources Pulsed processing methods and systems for heating objects such as semiconductor substrates feature process control for multi-pulse processing of a single substrate, or single or multi-pulse processing of different substrates having different physical properties. Hea... | 08/16/2011 |
| 7978963 | Thermal processing apparatus The present invention provides a thermal processing apparatus that conducts a thermal process such as an annealing process at a temperature of 400° C. or more to an object to be processed. The apparatus is provided with a processing vessel (4) having a trans... | 07/12/2011 |
| 7822324 | Load lock chamber with heater in tube Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a... | 10/26/2010 |
| 7570875 | Handheld heating tool A handheld heating tool has a pair of elliptical reflectors with the major axes of the ellipses being at an acute angle to each other and intersecting in a focal region including one focus of each ellipse. A pair of incandescent bulbs are mounted so that each bulb f... | 08/04/2009 |
| 7551846 | Infrared ray lamp, heating devices and electronic device The invention provides a heating apparatus which has a high heating efficiency, can locally heat a part to be heated, can achieve a rated temperature for an extremely short time after starting the heating, reduces a large rush current and flicker at a time of lighti... | 06/23/2009 |
| 7421194 | Quartz heater tube module Disclosed is a quartz heater tube module in which the individual quartz heater tube proper has a first and a second coverings covered on the outer surface of the glass tube. The first covering is provided with a first electrode in electrical connection with an elect... | 09/02/2008 |
| 7324745 | Seat trim heater The device is a seat trim heater. It employs electric infrared lamps to heat the seat trim before the trim is placed over the frame and cushion material of the seat. The device consists of a basic frame on which the trim is placed. The frame is made from a series of... | 01/29/2008 |
| 7283734 | Rapid thermal processing apparatus and method of manufacture of semiconductor device A rapid thermal processing apparatus comprises a processing chamber which subjects a semiconductor substrate to rapid thermal processing. A substrate support part is arranged in the processing chamber and supports the substrate. A lamp part optically irradiates the ... | 10/16/2007 |
| 7262116 | Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation A method of preparing a clean substrate surface for blanket or selective epitaxial deposition of silicon-containing and/or germanium-containing films. In addition, a method of growing the silicon-containing and/or germanium-containing films, where both the substrate... | 08/28/2007 |
| 7254319 | Heating system comprising at least two different radiations A heating system includes a reflector having a concave section symmetrical with respect to an axis of symmetry. In addition, a first radiation system having at least a first radiation member is capable of emitting a first type of radiation and a second radiation sys... | 08/07/2007 |
| 7248790 | Heating device for vehicle A heating device for a vehicle is provided with a radiation-heat generating unit for generating radiation heat, a first light-distributing unit for converting irradiation directions of the radiation heat into a substantial single irradiation direction, and a second ... | 07/24/2007 |
| 7239804 | Cooling device, and apparatus and method for manufacturing image display panel using cooling device A method for manufacturing an image display panel includes the steps of heating a substrate for the image display panel having a different-emissivity member on at least a part of one surface of the substrate, with the member having an emissivity different from that ... | 07/03/2007 |
| 7215879 | Defrosting heater with concentric glass tubes separated by end plugs A defrost heater, in which the strength of an insertion force needed for inserting a second glass tube in a plug is specified to be smaller than that needed for inserting a first glass tube in a plug. Thereby, dispersion in the insertion force needed for attaching t... | 05/08/2007 |
| 7183229 | Semiconductor thin film forming method, production methods for semiconductor device and electrooptical device, devices used for these methods, and semiconductor device and electrooptical device An object of the present invention is to provide a method for easily forming a polycrystalline semiconductor thin-film, such as polycrystalline silicon having high crystallinity and high quality, or a single crystalline semiconductor thin-film at inexpensive cost, t... | 02/27/2007 |
| 7164850 | Portable barbecue box A portable barbecue box includes a cooking chamber, a heating tube a plurality of sticks, a mechanical compartment and a motor. The heating tube is disposed inside the cooking chamber. A plurality of slots are provided on one side of the chamber so as to hold the st... | 01/16/2007 |
| 7159535 | Apparatus for heating and curing powder coatings on porous wood products An improved apparatus is provided for curing powdered coatings on the face of porous wood products, such as medium density fiberboard (MDF), wherein a pair of inclined infrared catalytic heaters are used to apply heat directly onto the side edges of the board. In ad... | 01/09/2007 |
| 7151060 | Device and method for thermally treating semiconductor wafers A device for thermally treating semiconductor wafers having at least one silicon layer to be oxidized and a metal layer, preferably a tungsten layer, which is not to be oxidized. The inventive device comprises the following: at least one radiation source; a treatmen... | 12/19/2006 |
| 7133606 | Pipe heating assembly with hingedly attached light emitters A pipe heating assembly includes a housing that has a pair of openings extending therethrough. The openings are axially aligned. A light emitter is hingedly attached to the housing and is selectively positioned in a first position facing inward of the housing or in ... | 11/07/2006 |
| 7081603 | Composite cooking apparatus A composite cooking apparatus having a body, a heating unit, an induction heating unit, and an insulating plate. The heating unit is positioned in the body to generate heat used to heat food. The induction heating unit is positioned adjacent to the heating unit to g... | 07/25/2006 |
| 7072579 | Light irradiation type thermal processing apparatus and method of adjusting light irradiation intensity A magnetic ring of ferromagnetic is attached to a wire for supplying electric power to a flash lamp. The magnetic ring is removable and is easily attachable to and detachable from the wire. When turning on the flash lamp, a high electrical current momentarily flows ... | 07/04/2006 |
| 7006763 | Method and apparatus for infrared welding of thermoplastic parts An infrared welder for thermoplastic materials comprising the combination of a halogen lamp producing illumination in the infrared band located at the focal point of a first parabolic reflector. The parabolic reflector is joined in a substantially continuous fashion... | 02/28/2006 |
| 7003217 | Infrared heating system for patio umbrella The present invention relates to heating systems for umbrella-shaped structures. The heating system may include a shroud or umbrella-shaped structure defining an inner volume, and a plurality of electrical infrared heating elements positioned generally downward faci... | 02/21/2006 |
| 6980734 | Lamp filament design An improved support is provided for locating a lamp filament axially within a lamp sleeve. The illustrated support is a spiral coil that includes a small diameter center portion that makes contact with the filament. On either side of the filament-contacting portion,... | 12/27/2005 |
| 6949718 | Frost removal device for thawing frozen ground in work areas A device used to thaw a volume of frozen ground where there is a need to dig a posthole, concrete footing, grave, or other cavity, essentially comprises an inverted housing having a closed top and open bottom and one or more light bulbs for providing heat, which are... | 09/27/2005 |
| 6947665 | Radiant heating source with reflective cavity spanning at least two heating elements A radiant source for heating a workpiece such as a semiconductor wafer includes a plurality of radiant heating elements, arranged in an array that is generally concentric about a source center axis. A reflector has a reflecting surface that bounds a cavity or channe... | 09/20/2005 |
| 6879777 | Localized heating of substrates using optics An apparatus for processing a semiconductor substrate, including a process chamber having a plurality of walls and a substrate support to support the substrate within the process chamber. A radiative heat source is positioned outside the process chamber to heat the ... | 04/12/2005 |
| 6876816 | Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment A heat treatment apparatus achieves a uniform and rapid temperature rise of an object to be processed. A plurality of double-end lamps heat the object to be processed so as to apply a heat treatment process to the object. A plurality of reflectors reflect radiation ... | 04/05/2005 |
| 6798142 | Flash emitting device and radiant heating apparatus In a flash emitting device, a flash from the plurality of flash discharge lamps is emitted on a work piece. The flash emitting device has a plurality of flash discharge lamps arranged in parallel including side flash discharge lamps located on sides of the flash emi... | 09/28/2004 |
| 6775472 | Radiant energy device for shrinking a thin film A radiant energy device for shrinking a thin film onto an open top of a container, the radiant energy device comprising: a source of power, to provide power to the radiant energy device; a plurality of fixed energy-emitting units, each of the units when energized be... | 08/10/2004 |
| 6775471 | Method and device for thermally treating objects The invention relates to a method and to a device for thermally treating objects. The aim of the invention is to facilitate a better control of the temperature profile of an object to be thermally treated. To this end, the invention provides a method and a device fo... | 08/10/2004 |
| 6759632 | Device for fast and uniform heating substrate with infrared radiation A heating device infrared radiation lamps 24, 26 designed to perform rapid thermal processing of the substrate 12 inside a reaction chamber 14 with a transparent window 34. The infrared lamps 24, 26 are arranged in two superposed s... | 07/06/2004 |
| 6740196 | RTA chamber with in situ reflective index monitor A rapid thermal anneal (RTA) chamber having one or multiple openings in a chamber wall and a reflective index monitor in the opening or openings, respectively. The reflective index monitor or monitors each measures the infrared reflective index of the reflector plat... | 05/25/2004 |
| 6718127 | Heating device of the light irradiation type A heating device of the light irradiation type in which uniform illuminance can be obtained without placing a single end lamp in the middle of the light source part is achieved providing a light source part in which circular lamps are arranged concentrically to one ... | 04/06/2004 |
| 6696672 | Heating lamp brackets for reaction chambers of evaporation coating machines A heating lamp bracket for reaction chambers of evaporation coating machines. The heating lamp bracket uses paired and insulation devices to mount heating lamps to a chamber wall of a reaction chamber. The bracket includes a mounting frame that has an ins... | 02/24/2004 |
| 6692576 | Wafer support system A wafer support system comprising a segmented susceptor having top and bottom sections and gas flow passages therethrough. A plurality of spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship wi... | 02/17/2004 |
| 6528772 | Speed cooking oven and control apparatus The present invention relates to an oven that includes both radiant cooking elements and a microwave cooking element. The cooking elements are controlled to provide reduced cooking time as compared to known radiant ovens, yet a wide variety of foods can b... | 03/04/2003 |
| 6491757 | Wafer support system An apparatus for processing a substrate comprises a susceptor for supporting the substrate, an upper heat source spaced above the susceptor, a lower heat source spaced below the susceptor, and a controller. The controller provides power to the heat source... | 12/10/2002 |
