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Class 381/175 - Semiconductor junction microphone


Subclass of Class 381 - Electrical audio signal processing systems and devices
Definition: Subject matter having an element with conductivity intermediate
No. of patents: 50
Last issue date: 05/08/2012


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NumberTitleIssue Date
8175300Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufac...
05/08/2012
8103027Microphone with reduced parasitic capacitance
A MEMS microphone has an SOI wafer, a backplate formed in a portion of the SOI wafer, and a diaphragm adjacent to and movable relative to the backplate. The backplate has at least one trench that substantially circumscribes a central portion of the backplate. ...
01/24/2012
8045734Backplateless silicon microphone
A silicon based microphone sensing element and a method for making the same are disclosed. The microphone sensing element has a diaphragm with adjoining perforated plates on the front side of a conductive substrate. The diaphragm is aligned above a back hole in the ...
10/25/2011
7916879Electrostatic acoustic transducer based on rolling contact micro actuator
An acoustic transducer is disclosed, which comprises a micro fabricated, sound generating, or receiving, diaphragm, a conductive leaf cantilever actuator, and a counter electrode. In the acoustic transducer, the electrostatic attraction force between the counter ele...
03/29/2011
7912236Sound transducer structure and method for manufacturing a sound transducer structure
For manufacturing a sound transducer structure, membrane support material is applied on a first main surface of a membrane carrier material and membrane material is applied in a sound transducing region and an edge region on a surface of the membrane support materia...
03/22/2011
7860258Electro-acoustic transducer device
A transducer for transmitting and receiving ultrasonic waves to a diaphragm-based ultrasonic transducer device using silicon as a base material. An electro-acoustic transducer device which can have a first electrode formed on top of, or inside, a substrate and havin...
12/28/2010
7792315Silicon-based transducer for use in hearing instruments and listening devices
A silicon-based transducer assembly coupled to a movable structure in a hearing instrument. The transducer assembly includes at least one microphone chip and an ASIC having multiple integrated components such as any combination of a DSP, an A/D converter, an amplifi...
09/07/2010
7706554Electret condenser
An electret condenser 2 includes a fixed electrode 6, a vibrating electrode 5, an electretized silicon dioxide film 7 formed between the electrodes, and silicon nitride films 8 and 9 formed so as to cover the silicon dioxide...
04/27/2010
7620192Electret covered with an insulated film and an electret condenser having the electret
A silicon nitride film (103) and a silicon nitride film (106) are formed to cover a charged silicon oxide film (105) serving as an electret. ...
11/17/2009
7570773Sound detecting mechanism
A sound detecting mechanism capable of forming a diaphragm and a back electrode on a substrate by a simple process includes acoustic holes corresponding to perforations formed on a front surface of a substrate. A second protective film, a sacrificial layer and a met...
08/04/2009
7570772Microphone with adjustable properties
The invention concerns a microphone with a membrane. The membrane has a first side which is in fluid contact with the surroundings and a second side which is facing a back chamber, where a barometric relief opening or vent opening is provided between the back chambe...
08/04/2009
7502482Membrane and method for the production of the same
In a method for producing a membrane for a device, e.g. a microphone, first, a substrate is provided, whereon a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sa...
03/10/2009
7400737Miniature condenser microphone and fabrication method therefor
An acoustic pressure type sensor fabricated on a supporting substrate is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure cont...
07/15/2008
7386136Sound detecting mechanism
A sound detecting mechanism is provided which forms a diaphragm with a required thickness by thickness control and yet restrains distortion of the diaphragm to provide high sensitivity. The sound detecting mechanism comprises a pair of electrodes forming a ca...
06/10/2008
7362873Miniature condenser microphone and fabrication method therefor
An acoustic pressure type sensor fabricated on a supporting substrate is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure cont...
04/22/2008
7353585Method of poling ferroelectric materials
A method of producing an actuator includes shaping a block of ferroelectric material to provide an active element of the actuator. The element includes a stack of ferroelectric layers with adjacent layers separated by electrodes arranged parallel to end faces of the...
04/08/2008
7329933Silicon microphone with softly constrained diaphragm
A microphone sensing element and a method for making the same are disclosed. The sensing element has a diaphragm and an attached electrical lead-out arm preferably made of polysilicon that are separated by an air gap from an underlying backplate region created on a ...
02/12/2008
7317234Means of integrating a microphone in a standard integrated circuit process
A means of integrating a microphone on the same integrated circuit die as other electronics in the system is disclosed. The structure uses solder bump technology to form a gap between an electrode on the silicon and another electrode. Charge is stored on the capacit...
01/08/2008
7305096Dynamic pressure sensing structure
A dynamic pressure sensing structure used in a condenser microphone includes an upper electrode plate, a lower electrode plate, a spacer and a substrate, wherein the upper and lower electrode plates are separated by the spacer and form a resonance cavity with the su...
12/04/2007
7301213Acoustic sensor
A sound hole is provided in a silicon substrate. A diaphragm electrode is secured to the upper surface of the silicon substrate via at least one fixed end so as to cover the sound hole of the silicon substrate. The diaphragm electrode is provided with four projectio...
11/27/2007
7298856Chip microphone and method of making same
A chip microphone implemented as a single silicon-based chip includes a diaphragm which includes a vibration portion that vibrates in response to sound pressures, a support block which is formed on the diaphragm, excluding at least the vibration portion to provide a...
11/20/2007
7292696Electret capacitor microphone
The present invention is an electret condenser microphone that includes an electro-acoustic transducer (M) having an electret portion (E) including a diaphragm (6) acting as an electrode and a stationary electrode (2, 25) disposed in opposition to the ...
11/06/2007
7280436Miniature acoustic detector based on electron surface tunneling
An electronic surface tunneling acoustic detector or microphone with very high sensitivity is disclosed. A tunneling tip is mounted on a rigid perforated suspension plate, along with control electrodes, which are used to move a conductive membrane suspended above th...
10/09/2007
7269268SMD type biased condenser microphone
A surface mounted device (SMD) type biased condenser microphone includes two terminals for a surface mounting process. The SMD type biased condenser microphone includes a grounding terminal for connecting with an external circuit, a diaphragm/backplate set, one end ...
09/11/2007
7269267Method of mounting condenser microphone on main PCB and condenser microphone adapted for the same
A condenser microphone and a method of mounting a condenser microphone on a main PCB are provided. The method includes assembling the condenser microphone by assembling elements of the condenser microphone such that a vibration plate including a diaphragm and a back...
09/11/2007
7239712Inductor-based MEMS microphone
An inductor-based integrated MEMS microphone and a method of making the microphone is provided. The microphone structure includes a vibrating inductor that is suspended over another stationary inductor such that the magnetic field induced from one inductor induces a...
07/03/2007
7224812Condenser microphone and method for making the same
A condenser microphone includes a condenser housing defining an inner space therein, and a variable gap condenser enclosed in the condenser housing. The variable gap condenser includes an insulating substrate, a conductive fixed back plate mounted securely on the in...
05/29/2007
7218742Condenser microphone assembly
A microphone assembly comprising a housing, the housing including an upper lip, a silicon backplate having a top portion, a bottom portion, an annular side portion, a silicon spacer integrally formed with the backplate and comprising at least one protrusion extendin...
05/15/2007
7204009Manufacturing method of acoustic sensor
The present invention relates to a semiconductor electret condenser microphone capable of being reduced in size and including an acoustic sensor 100 and a case 200 for accommodating the acoustic sensor 100, the acoustic sensor 100 has a s...
04/17/2007
7202552MEMS package using flexible substrates, and method thereof
A MEMS package and a method for its forming are described. The MEMS package has at least one MEMS device located on a flexible substrate. A metal structure surrounds the at least one MEMS device wherein a bottom surface of the metal structure is attached to the flex...
04/10/2007
7190038Micromechanical sensors and methods of manufacturing same
A micromechanical sensor and, in particular, a silicon microphone, includes a movable membrane and a counter element in which perforation openings are formed, opposite to the movable membrane via a cavity. The perforation openings are formed by slots, the width of w...
03/13/2007
7146016Miniature condenser microphone and fabrication method therefor
An acoustic pressure type sensor fabricated on a supporting substrate is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure cont...
12/05/2006
7107665Method for manufacturing microphone assembly
A microphone assembly comprises a microphone, a connector secured to the underside of the microphone. A gasket has a sound collecting hole and is secured on the upper surface of the microphone. ...
09/19/2006
7080442Manufacturing method of acoustic sensor
The present invention relates to a semiconductor electret condenser microphone capable of being reduced in size and including an acoustic sensor 100 and a case 200 for accommodating the acoustic sensor 100, the acoustic sensor 100 has a s...
07/25/2006
7072482Microphone with improved sound inlet port
A microphone comprises a housing defining an inner volume and including a first exterior surface with an aperture leading to the inner volume. The microphone includes a transducing assembly within the housing for converting sound into an electrical signal. A sound i...
07/04/2006
7072479Capacitor microphone
The present invention relates to a capacitor microphone which is characterized that even in a microphone with a small diameter such as a lavalier microphone, the noneffective electrostatic capacitance enables to be decreased and a better signal-to-noise ratio enable...
07/04/2006
6963653High-order directional microphone diaphragm
The invention features a miniature, second-order, microcrystalline silicon microphone diaphragm formed using silicon microfabrication techniques. The diaphragm is composed of two or more rigid diaphragm elements hinged to one another providing second- or higher-orde...
11/08/2005
6947568Condenser microphone
A back plate having a stationary back electrode is secured to a substrate. A diaphragm electrode is mounted on the back plate interposing a spacer. A frame having a sound collecting hole is mounted on the diaphragm electrode. ...
09/20/2005
6928720Method of manufacturing a surface acoustic wave device
A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of α-tantalum. ...
08/16/2005
6928178Condenser microphone and method for making the same
A condenser microphone includes a housing having a bottom wall that is formed with a recess which is defined by a recess-defining wall. A condenser is disposed in the housing, defines a variable gap chamber, and covers the recess. The condenser includes a back plate...
08/09/2005
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