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| Number | Title | Issue Date |
| 7848483 | Magnesium silicide-based multilayer x-ray fluorescence analyzers The present invention provides a multilayer structure including a substrate having formed on a surface thereof at least one period of individual layers, the period having at least two layers including a first layer which includes magnesium silicide and a second laye... | 12/07/2010 |
| 7656996 | Device and method for mapping the distribution of an X-ray fluorescence marker The invention relates to a method and a device for determining the distribution of an X-ray fluorescence (XRF) marker (16) in a body volume (14). The body volume (14) is irradiated with a beam of rays (12) from an X-ray source (10)... | 02/02/2010 |
| 7432501 | Ionising particle analyser enabling for example the separation of the fluorescent yield (FY) and the total electron yield (TEY) in EXAPS (extended X-ray absorption fine structure) measurements An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and th... | 10/07/2008 |
| 7358494 | Material composition analysis system and method The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition an... | 04/15/2008 |
| 7356114 | X-ray fluorescence spectrometer An X-ray fluorescence spectrometer includes an X-ray source 7 for irradiating a sample 1 at a predetermined incident angle ø with primary X-rays 6, and a detecting device 9 for measuring an intensity of fluorescent X-rays 8 genera... | 04/08/2008 |
| 7352845 | Energy dispersion type X-ray diffraction/spectral device A white X-ray generating means and an X-ray detecting means are respectively moved to a first position and a second position that are separated, X-ray intensities, for each energy, detected at respective positions by the X-ray detecting means are obtained as first d... | 04/01/2008 |
| 7313220 | Design for realizing an online element analysis A device for realizing an online element analysis for a substance (S) that is conveyed past or flows past a measuring station is provided with a device for conveying the substance to be measured, a measuring station with an X-ray source (10), and an X-ray flu... | 12/25/2007 |
| 7312446 | Methods and systems for process monitoring using x-ray emission Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein. ... | 12/25/2007 |
| 7260178 | Diffractometer and method for diffraction analysis Diffractometer and method for diffraction analysis making use of two Euler cradles, a primary and a secondary Euler cradle. The primary Euler cradle supports a source of a radiation beam, having a collimation axis, and a radiation beam detector, having a reception a... | 08/21/2007 |
| 7254212 | Particulate matter analyzer, collecting filter and system for analyzing and collecting samples from fluids A system, including a particulate matter analyzer and collecting filter, provides a method of analyzing and collecting samples from fluids, such as collecting particulate matter from air. A mass measuring unit and composition analyzing unit can be provided for eithe... | 08/07/2007 |
| 7236566 | In-situ X-ray diffraction system using sources and detectors at fixed angular positions An x-ray diffraction technique for measuring a known characteristic of a sample of a material in an in-situ state. The technique includes using an x-ray source for emitting substantially divergent x-ray radiation—with a collimating optic disposed with respect to t... | 06/26/2007 |
| 7202475 | Rapid defect composition mapping using multiple X-ray emission perspective detection scheme Disclosed are methods and apparatus for characterizing defects by using X-ray emission analysis techniques. The X-rays are emitted in response to an impinging beam, such as an electron beam, directed towards the sample surface where a defect resides. It may also be ... | 04/10/2007 |
| 7197110 | Method for determining chemical content of complex structures using X-ray microanalysis A method for identifying hazardous substances in a printed wiring assembly having a plurality of discrete components, using micro X-ray fluorescence spectroscopy. A micro X-ray fluorescence spectroscopy (μ-XRF) and/or X-ray Absorption Fine Structure (XAFS) spectros... | 03/27/2007 |
| 7187753 | Monochromator for an X-ray radiator allowing modification of the X-ray spectral composition A monochromator to be used in an X-ray device having an X-ray source is formed by a crystal for spectral restriction of X-rays produced by the X-ray source. The monochromator includes a positioning device that can move the crystal so that it changes the spectral com... | 03/06/2007 |
| 7130370 | Method and apparatus for producing an image of the internal structure of an object Inventions related to the intra-vision means, designed for production of visually sensed images of the internal structure of an object, in particular, of a biological object, are aimed at higher accuracy of determining the relative density indices of the object's su... | 10/31/2006 |
| 7095822 | Near-field X-ray fluorescence microprobe This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to gene... | 08/22/2006 |
| 7065174 | Measurement arrangement for X-ray fluoresence analysis A portable measurement apparatus is presented for inducing and measuring fluorescent X-ray radiation. It comprises an X-ray source (303, 902, 1005, 1105) adapted to controllably irradiate a sample (301, 803) with X-rays, and a detector (305, 406, 10... | 06/20/2006 |
| 7039158 | Multi-technique thin film analysis tool A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measuremen... | 05/02/2006 |
| 7023954 | Optical alignment of X-ray microanalyzers A method for X-ray analysis of a sample includes aligning an optical radiation source with an X-ray excitation source, so that a spot on the sample that is irradiated by an X-ray beam generated by the X-ray excitation source is illuminated with optical radiation gen... | 04/04/2006 |
| 7006596 | Light element measurement A spectrometer for detecting and quantifying elements in a sample. An exciter ionizes atoms in the sample, and the atoms thereby produce characteristic x-rays. A detector receives the x-rays and produces signals based on the x-rays. A filter system selectively block... | 02/28/2006 |
| 6850593 | Fluorescent X-ray analysis apparatus In a fluorescent X-ray analysis apparatus, a diffraction X-ray is removable from a sample even if it is formed of a mixture of fine crystals. A movable collimator mechanism capable of detecting only a collimate component of an X-ray optical flux is provided in a sec... | 02/01/2005 |
| 6765205 | Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same An electron microscope including an apparatus for x-ray analysis, is capable of performing elemental analysis with X-rays emitted from a specimen by electron beam irradiation, that is, inspection of foreign particles, for enhancement of yields in manufacturing, at h... | 07/20/2004 |
| 6765986 | X-ray fluorescence analyzer An x-ray fluorescence analyzer and method. The analyzer and method use a single radio-active source, such as, 241Am to determine the composition of a metal alloy or precious metal. The method compensates for Rayleigh scattering by first determining a scal... | 07/20/2004 |
| 6763086 | Method and apparatus for detecting boron in x-ray fluorescence spectroscopy The present invention consists of a multilayer structure having at least one triad of layers where each of the three layers is a predetermined material. One of the materials is from a group including lanthanum, lanthanum oxide, or lanthanum-based alloys. A second ma... | 07/13/2004 |
| 6710341 | Electron microscope equipped with X-ray spectrometer An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally... | 03/23/2004 |
| 6650728 | Apparatus and method for the analysis of atomic and molecular elements by wavelength dispersive X-ray spectrometric devices In an apparatus and a method for the analysis of atomic or molecular elements contained in a sample by wavelength dispersive X-ray spectrometry, wherein primary x ray or electron radiation is directed onto the sample whereby fluorescence radiation is emit... | 11/18/2003 |
| 6563902 | Energy dispersive X-ray analyzer In order provide an energy dispersive X-ray analyzer that can perform efficient measurement by optimizing signal processing time of an X-ray counting section, an energy dispersive X-ray analyzer is provided with an energy dispersive X-ray detector, an X-r... | 05/13/2003 |
| 6546069 | Combined wave dispersive and energy dispersive spectrometer The invention provides device which is capable of performing both wave dispersive and energy dispersive x-ray fluorescence spectrometry on a single sample, and utilizing a single radiation detector, such as a PIN diode detector.... | 04/08/2003 |
| 6510200 | Multi-layer structure with variable bandpass for monochromatization and spectroscopy A grating that includes a multilayer structure that has alternating layers of materials, a plurality of grooves formed between a plurality of lands, wherein at least one structural parameter of the plurality of grooves and plurality of lands is formed ran... | 01/21/2003 |
| 6453002 | Differential measurement of X-ray microfluorescence A method of X-ray analysis includes irradiating a spot on a sample with X-rays along an X-ray beam axis. X-rays emitted from the sample, responsive to irradiating the spot, are simultaneously detected at a plurality of different azimuthal angles relative ... | 09/17/2002 |
| 6370220 | Method of and device for fluorescent X-ray analysis of a sample The invention relates to a method for fluorescent X-ray analysis of a sample, which sample includes: a substrate (5) containing a chemical element b; a thin layer (6) which is deposited on the substrate and contains the chemical element b and a chemical e... | 04/09/2002 |
| 6314158 | Data processor for fluorescent x-ray spectroscopy A data processor for fluorescent x-ray spectroscopy calculates theoretical x-ray intensity which is theoretically expected to be obtained by a fluorescent x-ray spectroscopy measurement of a standard sample with known composition by taking into account th... | 11/06/2001 |
| 6310935 | Fluorescent x-ray analyzer A fluorescent x-ray analyzer has a light-dispersing crystal and a detector which are rotatable while maintaining a specified angular relationship between them such that fluorescent x-rays from a sample are scanned. A first-order profile and a higher-order... | 10/30/2001 |
| 6292532 | Fluorescent X-ray analyzer useable as wavelength dispersive type and energy dispersive type A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus inclu... | 09/18/2001 |
| 6263042 | Apparatus for X-ray analysis in grazing exit conditions In order to achieve suitable positional resolution for an angular scan in Grazing Exit X-ray Fluorescence (GEXRF), the sample (2) should be irradiated with a small spot (14). Consequently, the fluorescent radiation yield is low so that the duration of a m... | 07/17/2001 |
| 6028911 | X-ray analyzing apparatus with enhanced radiation intensity An X-ray analyzing apparatus includes a drive unit for moving a sample, a plurality of field-limiting slits each having a slit size corresponding to the size of a measuring area of the sample, a selector unit for selectively bringing the field-limiting sl... | 02/22/2000 |
| 5978442 | Fluorescent x-ray spectroscopes A fluorescent x-ray spectrometer, which can be used selectably both as a wavelength-dispersion type and an energy-dispersion type, includes an irradiation chamber and a detection chamber provided with both a first detector and a second detector respective... | 11/02/1999 |
| 5898752 | X-ray analysis apparatus provided with a double collimator mask A Soller slit 16 in an X-ray spectrometer can parallelize fluorescent radiation which emanates from a specimen 4 and is to be analyzed according to wavelength by an analyzer crystal 18. Because the aim is to irradiate an as large as possible surface of th... | 04/27/1999 |
| 5778039 | Method and apparatus for the detection of light elements on the surface of a semiconductor substrate using x-ray fluorescence (XRF) A method and apparatus are presented which provide non-intrusive detection of atoms of light elements (atomic numbers 3-13) on a surface of a semiconductor substrate using X-ray fluorescence (XRF). The present technique may be economically performed routi... | 07/07/1998 |
| 5742658 | Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer An apparatus and method are presented for determining the elemental compositions and relative locations of particles on a surface of a semiconductor wafer. An exposed region of the surface of the semiconductor wafer is subjected to a beam of primary X-ray... | 04/21/1998 |
