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Class 378/119 - SOURCE


Subclass of Class 378 - X-ray or gamma ray systems or devices
Definition: Subject matter including methods and means for generating
No. of patents: 572
Last issue date: 05/01/2012


1                      
NumberTitleIssue Date
8170179Debris reduction in electron-impact X-ray sources
A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the ...
05/01/2012
8102968High brightness X-ray generating device and method
A high brightness X-ray generator and a high brightness X-ray generating method are provided which are able to promote an increase in X-ray brightness (i.e., an increase in an X-ray output) while suppressing an excessive increase in the cost of optical elements such...
01/24/2012
8073107Betatron with a contraction and expansion coil
A betatron, especially in X-ray testing apparatus is provided, that includes a rotationally symmetrical inner yoke having two interspaced parts, an outer yoke connecting the two inner yoke parts, at least one main field coil, a toroidal betatron tube arranged betwee...
12/06/2011
8019046Apparatus for generating shortwave radiation
An apparatus providing a source of shortwave electromagnetic radiation utilizing a tape having a first side and a second side and a laser beam focused and impinging on the first side of the tape. The apparatus utilizes a tape storage unit which delivers or feeds tap...
09/13/2011
8000448Device and method for adjusting collision timing between electron beam and laser light
An electron beam detection device (34) is arranged on an electron beam passing path so that a beam delay time tB from a passing moment of an electron beam (1) to a moment when the beam reaches a predicted collision point (9a) i...
08/16/2011
8000447Co-axial, high energy gamma generator
A gamma ray generator includes an ion source in a first chamber. A second chamber is configured co-axially around the first chamber at a lower second pressure. Co-axially arranged plasma apertures separate the two chambers and provide for restricted passage of ions ...
08/16/2011
7929667High brightness X-ray metrology
An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal collector for acquiring the liquid metal jet, a liquid metal circulation...
04/19/2011
7894577Method for downhole, non-isotopic generation of ionised radiation and an apparatus for use when practising the method
A method and apparatus for downhole generation of non-radioactive, ionized radiation arranged so as to be able to generate reverberation, particularly X-ray and/or gamma radiation, from the surroundings of a borehole, wherein the method includes the steps of: exciti...
02/22/2011
7885385Tunable X-ray source
A method for the production of X-ray bunches tunable in both time and energy level by generating multiple photon, X-ray, beams through the use of Thomson scattering. The method of the present invention simultaneously produces two X-ray pulses that are tunable in ene...
02/08/2011
7869570Electromagnetic apparatus and methods employing coulomb force oscillators
A Coulomb force oscillator comprising a power supply having a closed primary winding circuit and an open secondary winding that produces charge differential within the secondary winding to separate positive charges and negative charges therein, and which effects cha...
01/11/2011
7817781High voltage X-ray generator and related oil well formation analysis
An apparatus and method for determining the density and other properties of a formation surrounding a borehole using a high voltage x-ray generator. One embodiment comprises a stable compact x-ray generator capable of providing radiation with energy of 250 keV and h...
10/19/2010
7787595Electron source
An electron source has an electron emitter, an anode, a voltage source connected between the electron emitter and the anode, as well as a switch connected with the electron emitter. The switch is fashioned as a optoelectronic switching element. ...
08/31/2010
7783010X-ray radiation sources with low neutron emissions for radiation scanning
A method of manufacturing a radiation source in one example comprises selecting at least one of a target, a collimator, or target shielding consisting essentially of at least one isotope having a neutron production threshold greater than a peak acceleration energy o...
08/24/2010
7734014Extreme UV and soft X ray generator
A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening th...
06/08/2010
7724876Multi-color X-ray generator
A multi-color X-ray generator includes an electron beam generator 10 which accelerates an electron beam to generate a pulse electron beam 1 and which transmits the beam along a predetermined rectilinear orbit 2, a composite laser generator 20...
05/25/2010
7702076Linear x-ray laser generator
A small X-ray laser generator including a device (1) for generating and accelerating an electron beam, a plurality of targets (2) placed on the transport trajectory of a generated electron beam (4), and X-ray mirrors (3) for monochromatiz...
04/20/2010
7688948Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology
A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A working gas is provided between two electrodes. Plasma is ignited in the wo...
03/30/2010
7630475Gas discharge source, in particular for EUV radiation
A gas discharge source for EUV radiation and/or soft X-ray radiation is arranged in a vacuum chamber and includes at least two electrodes, each with a circular periphery and rotatably mounted for rotation. At one spatial position, the electrodes have a small spacing...
12/08/2009
7599470Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
The invention is directed to an arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency, particularly for application in radiation sources for EUV lithography. It is the object of the inventi...
10/06/2009
7596208Apparatus system, and method for high flux, compact compton x-ray source
A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, th...
09/29/2009
7577236Device for switching/generating x-rays for diagnosis and curing
There is disclosed a device including: an electron beam generation device 10 which accelerates a pulse electron beam 1 to transmit the beam through a predetermined rectilinear orbit 2; a laser generation device 20 which generates a pulse ...
08/18/2009
7558373X-ray generator employing hemimorphic crystal and ozone generator employing it
An x-ray generator comprising a vessel 1 in which a low pressure gas atmosphere is maintained, hemimorphic crystal supporting means 3a and 3b provided in the vessel, at least a pair of hemimorphic crystals 5a and 5...
07/07/2009
7502446Soft x-ray generator
A soft x-ray generator includes a unique pulse trigger assembly which reliably and reproducibly provides a plasma to initiate the discharge between a cathode and an anode, and having a cone-shaped geometry. The soft x-ray generator of the present invention also incl...
03/10/2009
7492868Source of x-rays
A charged particle beam including charged particles (e.g., electrons) is generated from a charged particle source (e.g., a cathode or scanning electron beam). As the beam is projected, it passes between plural alternating electric fields. The attraction of the charg...
02/17/2009
7492867Nanoparticle seeded short-wavelength discharge lamps
Methods, systems and apparatus for using nanoparticle seeded short-wavelength discharge generator sources discharge sources, for use with X-ray, XUV and EUV light emissions. Applications can include EUV lithography. Additional embodiments can use the generator sourc...
02/17/2009
7483517Device for generating X-rays having a liquid metal anode
The invention relates to a device for generating X-rays (18) comprising an electron source (3) for emitting electrons accommodated in a vacuum space (2), a liquid metal circuit including a liquid metal for emitting X-rays as a result of the inci...
01/27/2009
7469039Device and method for generating an x-ray point source by geometric confinement
A device for generating an x-ray point source includes a target, and an electron source for producing electrons which intersect with the target to generate an x-ray point source having a size which is confined by a dimension of the target. ...
12/23/2008
7460644X-ray generating method and x-ray generating apparatus
An energy beam is irradiated onto a target from an energy beam source, thereby generating an X-ray with an irradiating area to be irradiated onto an object. Then, the X-ray is introduced into a spectrometer, thereby generating an X-ray with parallelism through the s...
12/02/2008
7443956X-ray transmissive optical mirror apparatus
A mirror is reflective to light and transmissive to x-rays. The mirror has a continuous mirror surface and an x-ray aperture within a body portion of the mirror proximate the continuous mirror surface that is transmissive to x-rays. ...
10/28/2008
7439530LPP EUV light source drive laser system
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive la...
10/21/2008
7436932X-ray radiation sources with low neutron emissions for radiation scanning
In one example, a radiation source comprises a housing and an acceleration chamber within the housing, with a peak acceleration energy greater than the lowest neutron production threshold of tantalum. A source of charged particles is supported by the housing to emit...
10/14/2008
7433447X-ray generator and exposure apparatus
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths. ...
10/07/2008
7428298Magnetic head for X-ray source
An X-ray source includes a magnetic appliance to provide electron beam focusing. The magnetic appliance can provide variably focused and non-focused configurations. The magnetic appliance can include one or more electromagnets and/or permanent magnets. An electric p...
09/23/2008
7424095Modular X-ray tube and method of production thereof
Modular X-ray tube (10) and method for the production of such an X-ray tube, in which an anode (20) and a cathode (30) are arranged in a vacuumized inner space (40) situated opposite each other, electrons (e−) being produced ...
09/09/2008
7424096Systems and methods for tape advancement in laser produced plasma equipment
Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a first positioning surface perpendicular to further positioning devices...
09/09/2008
7421064Rotatable, water-cooled X-ray source
The invention describes an X-ray source in which a cooling plate (36) for water-cooling the anode (28) of an X-ray tube (26) is firmly mounted on a radiation protection casing (20) and the X-ray tube (26) is rotatably borne relativ...
09/02/2008
7420191Discharge radiation source, in particular UV radiation
The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas...
09/02/2008
7411203EUV light source
An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprising a target delivery system adapted to deliver moving plasma initiation targets a...
08/12/2008
7399981Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting ...
07/15/2008
7391851EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions
Metallic solutions at room temperature used a laser point source target droplets. Using the target metallic solutions results in damage free use to surrounding optical components since no debris are formed. The metallic solutions can produce plasma emissions in the ...
06/24/2008
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