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| Number | Title | Issue Date |
| 7503690 | Temperature measurement apparatus and method for measuring temperatures by using RF signals of different frequencies Disclosed are a temperature measurement apparatus and method for measuring temperature by using RF signals having different frequencies. The temperature measurement apparatus includes a parameter generation unit for generating a first parameter based on a radio freq... | 03/17/2009 |
| 7416330 | Method and apparatus for measuring temperature of substrate The temperature of the surface and/or inside of a substrate is measured by irradiating the front surface or rear surface of the substrate, whose temperature is to be measured, with light and measuring the interference of a reflected light from the substrate and a re... | 08/26/2008 |
| 7234862 | Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy An apparatus (295) using specular reflection spectroscopy to measure a temperature of a substrate (135). By reflecting light (100) from a substrate, the temperature of the substrate can be determined using the band-edge characteristics of the su... | 06/26/2007 |
| 7091254 | Analytical instruments for monitoring photopolymerization An apparatus for continuously monitoring a photopolymerization reaction in real time by optical pyrometry includes a housing having a chamber; a sample mount that may be disposed within the chamber; a light source for supplying light to induce a photopolymerization ... | 08/15/2006 |
| 7063991 | Methods of determining characteristics of doped regions on device wafers, and system for accomplishing same Disclosed herein are various methods of determining characteristics of doped regions on device wafers, and a system for accomplishing same. In one illustrative embodiment, the method includes providing a device substrate comprising a plurality of masked areas, a plu... | 06/20/2006 |
| 7052175 | Laser instrument The invention relates to instruments, such as radiometers, which generate a laser beam for striking a target at a distance to assist in aiming the instrument at a selected area of a target. Provision is made for splitting a single beam, used for instance for centeri... | 05/30/2006 |
| 7001068 | Method and apparatus for the estimation of the temperature of a blackbody radiator Remote sensing of the temperature of a greybody or blackbody radiator is effected by passing its radiation (24) through a modulated infrared filter spectrometer. The infrared filter comprises, in sequence, a band pass filter (20), a first polariser ( | 02/21/2006 |
| 6918283 | System and method for demonstrating and investigating brownian motion effects on a diamagnetically suspended particle An apparatus for demonstrating, investigating and observing Brownian motion and temperature of a medium, such as gas or liquid, uses a small particle which is diamagnetically suspended in the medium. The tiny magnetized particle having a known mass is levitated usin... | 07/19/2005 |
| 6817758 | Temperature distribution measuring method and apparatus Method and apparatus for measuring a surface temperature of an object body, by calculating a temperature at each picture element of an image of the object body, on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a... | 11/16/2004 |
| 6786634 | Temperature measuring method and apparatus A method of measuring a temperature of an object body in an electric furnace, based on an intensity of a radiant energy emitted from the object body, the electric furnace being provided with an electric heater operable by application of a drive voltage thereto to he... | 09/07/2004 |
| 6756591 | Method and device for photothermal imaging tiny particles immersed in a given medium A method and device for photothermal imaging tiny metal particles which are immersed in a given medium like a living cell deposited onto a transparent glass slide. The given medium and immersed tiny metal particles are illuminated through separate phase reference la... | 06/29/2004 |
| 6738724 | Two-stage multiwavelength thermal radiation analyzer The invention provides a passive two-stage multiwavelength approach for measuring temperature, emissivity and stray-light levels. The first stage comprises the steps of, (1) acquiring spectral intensity measurements over a predetermined spectral width of a thermal r... | 05/18/2004 |
| 6542853 | Life estimation device for engine and machine having heat source A life estimation device which numerically measures the damage to a machine such as an engine accurately to estimate, the life of the machine accurately without requiring skill. A load map (B) of the two-dimensional distribution of the operation parameter... | 04/01/2003 |
| 6357910 | Multiwavelength pyrometer for measurement in hostile environments A pyrometer for measuring the temperature of an object with high accuracy and fast response time that uses both multi-wavelength pyrometry techniques and nanotechnology. Radiance from an object is transmitted through a fiber optic cable, is received by a ... | 03/19/2002 |
| 6299346 | Active pyrometry with emissivity extrapolation and compensation A method and apparatus for active pyrometric measurement of the temperature of a body whose emissivity varies with wavelength. The emissivity is inferred from reflectivity measured at two wavelengths in an irradiation wavelength band and extrapolated to a... | 10/09/2001 |
| 6293696 | System and process for calibrating pyrometers in thermal processing chambers A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the radiation sensing devices and a calibrating light source which... | 09/25/2001 |
| 6222111 | Spectrally selective thermopile detector A thermopile radiation detector (10) has an optical filter layer (16) that supports a thermopile detector (22) and, in addition, filters undesired wavelengths. The filtering is accomplished by selectively absorbing electromagnetic radiation at predetermin... | 04/24/2001 |
| 6074087 | Non-contact method for measuring the surface temperature distribution of a melt during growth of ionic crystals The subject invention relates to a technique employing a calibrated thermal radiometer, and the radiation characteristics of ionic crystals to measure the temperature distribution of crystals during crystal growth. When in high temperature, the ionic crys... | 06/13/2000 |
| 5815410 | Ratio type infrared thermometer An improved ratio type infrared thermometer utilizes integrating amplifiers for each waveband having the integration time automatically set so that the output voltage utilizes the full range of an analog to digital convertor. The gain and offset of the am... | 09/29/1998 |
| 5797682 | Device and method for measuring temperture of vehicle exhaust A system (10) for simultaneously measuring temperature and CO, CO2 and HC gas content of vehicle (11) exhaust detects and analyzes a beam of infrared electromagnetic radiation (21) projected through a plume (13) of vehicle exhaust to assess the... | 08/25/1998 |
| 5772323 | Temperature determining device and process The present invention relates to a totally novel device and process useful for the measurement of the temperature of a radiating body. More particularly, the present invention relates to a device that enhances the resolution and repeatability of the measu... | 06/30/1998 |
| 5769540 | Non-contact optical techniques for measuring surface conditions Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measur... | 06/23/1998 |
| 5764684 | Infrared thermocouple improvements The output stability of an infrared thermocouple is improved by filtering the radiation received by the infrared thermocouple to pass only short wavelengths. The stability is further increased by providing a second infrared thermocouple having its input f... | 06/09/1998 |
| 5730527 | Method and apparatus for measuring temperature using an optical fiber A method and apparatus for measuring a true temperature using a consumable optical fiber, wherein received light emitted from a high temperature liquid is divided into two light beams through a branching filter. A light of a first wave band from a first l... | 03/24/1998 |
| 5704712 | Method for remotely measuring temperatures which utilizes a two wavelength radiometer and a computer A method for remotely measuring the temperature of a target maintained at a first relatively low temperature while at the same time the target is heated by thermal radiation from a source spaced from the target and maintained at a second relatively high t... | 01/06/1998 |
| 5690442 | Metal tip for ball-point pen This invention provides a metal tip for a ball-point pen, having an ink guide hole (2) formed at the center of the bottom surface of a ball holding portion (1) and radial grooves (3) arranged around the ink guide hole. The ink guide hole has a diameter 30... | 11/25/1997 |
| 5690429 | Method and apparatus for emissivity independent self-calibrating of a multiwavelength pyrometer Self calibrating a pyrometer includes taking two different temperatures thereby generating two voltage spectra, calculating the spectra ratio R of the two voltage spectra, determining the slope of the plot of the logarithm of the spectrum ratio versus c | 11/25/1997 |
| 5549756 | Optical pyrometer for a thin film deposition system A temperature measurement system for use in a thin film deposition system is based on optical pyrometry on the backside of the deposition substrate. The backside of the deposition substrate is viewed through a channel formed in the susceptor of the deposi... | 08/27/1996 |
| 5507576 | Bichromatic pyrometer A bichromatic pyrometer for detecting the high temperature of a surface element of an object comprises two photodiodes (18, 19) receiving radiation from the object, each of the photodiodes having a large forbidden band and being sensitive to radiation in ... | 04/16/1996 |
| 5490728 | Non-contact optical techniques for measuring surface conditions Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measur... | 02/13/1996 |
| 5372426 | Thermal condition sensor system for monitoring equipment operation A thermal condition sensor system monitors equipment such as aircraft engines. The thermal condition sensor system includes a collector which collects radiation from the equipment and a detector assembly which detects collected radiation over a discrimina... | 12/13/1994 |
| 5355845 | Temperature measurement in power generator boilers Temperatures along the surfaces of water tubes in an operating steam boiler are determined by detecting infrared radiation emitted from the tube surfaces in one or more narrow pass-bands founds to be available despite the presence of hot and turbulent flu... | 10/18/1994 |
| 5326171 | Pyrometer apparatus and method A method for sensing the temperature of a remote object within a chamber that is heated from outside the chamber, includes sensing radiation from the object within the chamber through a window in the wall of the chamber that exhibits different transmissiv... | 07/05/1994 |
| 5326173 | Apparatus and method for remote temperature measurement An apparatus and method for remotely measuring emissivity and hence temperature of a surface of an object. The apparatus includes a detector having a radiation receptor for measuring infra-red radiation, an integrating cavity surrounding the receptor for ... | 07/05/1994 |
| 5265036 | Turbine pyrometer system for correction of combustor fireball interference A pyrometer system for use in measuring the temperature of components in an operating jet engine corrects for random interference in the pyrometer temperature signal caused by radiation from the combustor flame. An optical beam from a periodically moving ... | 11/23/1993 |
| 5203631 | Narrow spectral band pyrometry A narrow-band pyrometric system measures the temperature of an object (1), such as a semiconductor wafer (1), that is coated with a film (2) having an absorption band. The thermal radiation emitted by the coated object (1) passes through a lens (3) and ap... | 04/20/1993 |
| 5188458 | Pyrometer apparatus and method Dual pyrometric detectors and method measure the temperature of a remote heated object in the presence of ambient radiation. One detector measures emitted radiation from both the remote object and from the environment, and the other detector measures radi... | 02/23/1993 |
| 5180226 | Method and apparatus for precise temperature measurement In one embodiment, a system for measuring the temperature of a first object, such as wafer 112, in the presence of a second radiating object, such as a heating lamp 118, is disclosed herein. A heating lamp 118 is provided for heating the wafer 112 for dev... | 01/19/1993 |
| 5165796 | Bichannel radiation detection apparatus Apparatus for optically determining the temperature of an object in an environment at elevated temperature provides enhanced measurement accuracy by sensing radiation from the object in two or more different wavebands of radiation. The information derived... | 11/24/1992 |
| 5110217 | Method for optically and remotely sensing subsurface water temperature A method for remotely measuring an unknown temperature Ts of a transparent medium by comparison with the known temperature Tr of a transparent reference material consisting of the steps of combining the outputs of a continuous-wave (CW) laser and a high intens... | 05/05/1992 |
