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| Number | Title | Issue Date |
| 7758238 | Temperature measurement with reduced extraneous infrared in a processing chamber Temperature measurement using a pyrometer in a processing chamber is described. The extraneous light received by the pyrometer is reduced. In one example, a photodetector is used to measure the intensity of light within the processing chamber at a defined wavelength... | 07/20/2010 |
| 7359804 | System and method for calibrating remote emissions sensing instruments A system and method is provided for obtaining calibration curves for CO and CO2 during laboratory calibration of one or more remote emissions sensing (RES) instruments, and for self-calibration of on-road RES instruments to compensate for changes in backg... | 04/15/2008 |
| 7356207 | Method and system for adjusting the sensitivity of optical sensors A method and a system for adjusting the sensitivity of an optical sensor are provided. A first beam of light in an optical fiber is separated into first and second portions propagating therethrough at a first speed. A second beam of light is directed into the optica... | 04/08/2008 |
| 7275414 | Extractive sampling system and method for measuring one or more molecular species A non-contact, extractive sampling system and method is provided for measuring the exhaust gas composition and fine particle composition of exhaust emissions of various types of vehicles under actual operating conditions. A portion (or sample) of an exhaust plume of... | 10/02/2007 |
| 7199869 | Combined Bragg grating wavelength interrogator and Brillouin backscattering measuring instrument A method and apparatus sense attributes of reflected signals in an optical sensing system. In one embodiment, a method for sensing in an optical sensing system comprising an interrogator coupled to a Bragg grating sensor by an optical cable includes the steps of pro... | 04/03/2007 |
| 7183945 | Method and system for video capture of vehicle information A system for collecting and managing information relating to vehicles includes a digital image collection system positioned to capture an image of a vehicle travelling along a roadway. The captured images are delivered to a computer program memory via a communicatio... | 02/27/2007 |
| 7164132 | Multilane remote sensing device A remote sensing device is provided to detect the emissions of passing vehicles. Preferably, the device detects the emissions of individual vehicles traveling on a roadway of more than one traffic lane. The remote sensing device may preferably detect the emissions d... | 01/16/2007 |
| 7141793 | Remove vehicle emission sensing device with single detector A remote sensing device for determining at least one characteristic of a vehicle emission plume includes a radiation source, a detector, and a plurality of filters. Either the filters or the detector are movable relative to the other such that different filters, eac... | 11/28/2006 |
| 7044610 | Method and apparatus for preventing debris contamination of optical elements used for imaging The imaging debris produced by imaging a media with a higher power laser is prevented from accumulating on an optical imaging element by establishing a substantially non-turbulent fluid flow across the optical element. The non-turbulent flow forms a barrier between ... | 05/16/2006 |
| 7034325 | Device for measuring gas concentration having dual emitter A device for measuring the concentration of a gas contained in a cavity and for checking the operation of a catalytic element in an exhaust line in an automobile vehicle. A first emitter (E1) composed of an optical pumped micro-cavity and for which the emissi... | 04/25/2006 |
| 7001067 | Pyrometer for measuring the temperature of a gas component within a furnance A pyrometer for use in measuring temperatures in a furnace, has a lens-tube for supporting an optical head in a port of the furnace for viewing an interior of the furnace along a line of sight. The optical head converts infrared radiation to electrical signals. A ph... | 02/21/2006 |
| 6952641 | Software architecture of an integrated host system for sensed vehicle data A system for processing sensed vehicle data includes a sensor for sensing data related to at least one characteristic of a passing vehicle and a host unit that receives sensed data from the sensor. The sensor and the host unit are integrated into a single housing. T... | 10/04/2005 |
| 6949081 | Sensing and interactive drug delivery An interactive drug delivery system includes a drug delivery module, an optical probe, a local controller, and an optional central controller. The drug delivery module is constructed and arranged to deliver selected amounts of a drug into a subject. The optical prob... | 09/27/2005 |
| 6847012 | Apparatus and method for measuring the temperature of substrates The invention relates to a device for measuring the temperature of substrates, notably semiconductor wafers. The device comprises at least one radiation sensor for measuring the radiation emitted by the substrate and an element (19) which restricts the field ... | 01/25/2005 |
| 6733173 | Pyrometer for measuring the temperature of a gas component within a furnace A pyrometer for use in measuring temperatures in a furnace, has a lens-tube for supporting an optical head in a port of the furnace for viewing an interior of the furnace along a line of sight. The optical head converts infrared radiation to electrical signals. A ph... | 05/11/2004 |
| 6292685 | Temporal artery temperature detector Body temperature measurements are obtained by scanning a thermal radiation sensor across the side of the forehead over the temporal artery. A peak temperature measurement is processed to compute an internal temperature of the body as a function of ambient... | 09/18/2001 |
| 6265696 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface A substrate to be processed on which a thin film is formed is supported by a support member. The substrate to be processed is heated by a heating section. The surface temperature is measured by a radiation thermometer, and the heating temperature of the h... | 07/24/2001 |
| 6222111 | Spectrally selective thermopile detector A thermopile radiation detector (10) has an optical filter layer (16) that supports a thermopile detector (22) and, in addition, filters undesired wavelengths. The filtering is accomplished by selectively absorbing electromagnetic radiation at predetermin... | 04/24/2001 |
| 6217212 | Method and device for detecting an incorrect position of a semiconductor wafer A method and device for detecting an incorrect position of a semiconductor wafer during a high-temperature treatment of the semiconductor water in a quartz chamber which is heated by IR radiators, has the semiconductor wafer lying on a rotating support an... | 04/17/2001 |
| 6082892 | Temperature measuring method and apparatus A method of remotely measuring the temperature of a body, such as a semiconductor wafer, whose transparency varies with both wavelength and temperature and is characterized by an optical absorption edge. The body is illuminated at wavelengths on either si... | 07/04/2000 |
| 6002113 | Apparatus for processing silicon devices with improved temperature control Apparatus for processing a silicon workpiece uses reflected UV light to measure and control the workpiece temperature. A linearly polarized beam including UV light is directed onto a silicon surface to produce a reflected beam. The reflected beam is cross... | 12/14/1999 |
| 5994701 | Infrared sensor device with temperature correction function A shutter 3 which can be momentarily held open and immediately closed, is disposed adjacent to an aperture stop 4 in an optical system, and a temperature sensor 5 is provided for measuring the temperature of the shutter 3. The blades of the shutter 3 can ... | 11/30/1999 |
| 5829877 | Method for measuring temperature of at least one of a gas and a flame in a combustion process A measuring technique and method are provided to simultaneously determine the molecular density of several molecular species and the temperature within a closed process room in a melting or combustion process. In such processes in the industry, e.g. in me... | 11/03/1998 |
| 5797682 | Device and method for measuring temperture of vehicle exhaust A system (10) for simultaneously measuring temperature and CO, CO2 and HC gas content of vehicle (11) exhaust detects and analyzes a beam of infrared electromagnetic radiation (21) projected through a plume (13) of vehicle exhaust to assess the... | 08/25/1998 |
| 5287183 | Synchronous imaging system The assembly (10, 10') is a real time imaging device for detecting radiation from an object field (12) which is periodic in time. A video camera (14) detects emitted and reflected radiation from the object field (12) and produces a video signal of the ima... | 02/15/1994 |
| 5271084 | Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used Method and apparatus for measuring the radiation originating from one side of a wafer of semiconductor material using a pyrometer, wherein non-blackbody compensation radiation is projected onto that side to compensate for the reflectivity of the wafer of ... | 12/14/1993 |
| 5258602 | Technique for precision temperature measurements of a semiconductor layer or wafer, based on its optical properties at selected wavelengths A method for sensitive and precise determination of the temperature of a thin layer or wafer of bandgap material, without requiring contact to the layer or to the wafer, is based on selection of optical wavelength or wavelengths and the measurements of tr... | 11/02/1993 |
| 5203631 | Narrow spectral band pyrometry A narrow-band pyrometric system measures the temperature of an object (1), such as a semiconductor wafer (1), that is coated with a film (2) having an absorption band. The thermal radiation emitted by the coated object (1) passes through a lens (3) and ap... | 04/20/1993 |
| 5170041 | Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation through the layer and the detection of optical absorption by the layer. The relationship be... | 12/08/1992 |
| 5161890 | Method and system for the optical measurement of the air temperature by laser excitation, particularly in front of an aircraft A method is disclosed for an optical remote measurement of the air temperature at a distance by laser excitation, in which, by means of a laser generator and by excitation of energy band transitions in the Schumann-Runge band of molecular oxygen, fluoresc... | 11/10/1992 |
| 5110217 | Method for optically and remotely sensing subsurface water temperature A method for remotely measuring an unknown temperature Ts of a transparent medium by comparison with the known temperature Tr of a transparent reference material consisting of the steps of combining the outputs of a continuous-wave (CW) laser and a high intens... | 05/05/1992 |
| 5098199 | Reflectance method to determine and control the temperature of thin layers or wafers and their surfaces with special application to semiconductors A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation reflected off the bandgap material and the detection of the reflected energy. The relations... | 03/24/1992 |
| 4984903 | Method of optically and remotely sensing subsurface water temperature To remotely measure the unknown subsurface temperature Ts of a bulk transparent medium such as ocean water, a laser beam having a high power or intensity is split into two parts, a probe beam and a reference beam. The probe beam is directed int... | 01/15/1991 |
| 4979133 | Pyrometer A pyrometer according to the present invention calculates a temperature of a target to be measured by means of light emitting device for emitting reference light having three wavelengths to the target, and light measuring portions for measuring the intens... | 12/18/1990 |
| 4956538 | Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors A first and second pyrometer (26-28) are optically coupled by a light pipe (24) to a wafer (30) in an apparatus (10). The light pipe (24) passes through a shroud (16) of a heating lamp module (14). A computer (74) is interconnected to the pyrometers (26-2... | 09/11/1990 |
| 4948958 | Remote subsurface water temperature measuring apparatus with brillouin scattering To remotely measure the unknown subsurface temperature Ts of a bulk transparent medium such as ocean water, a high intensity pulsed laser beam is split into two sub-beams, a probe beam and a reference beam. The probe beam is directed into a sam... | 08/14/1990 |
| 4900161 | System for measuring temperature of a filled vessel on a hot plate The invention involves a method for measuring the temperature in a heating system of the type having an electrically heated hot plate with a filled cooking vessel on it and a radiation pick-up located at varying distances from the side of the vessel and p... | 02/13/1990 |
| 4893924 | Method of remotely detecting submarines using a laser Subsurface waves in an ocean are created by the turbulence in a submarine's wake. These waves can be remotely detected by a search submarine by monitoring subsurface water temperatures using a laser. A pulsed laser beam is directed into the water to at le... | 01/16/1990 |
| 4890933 | Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation through the layer and the detection of optical absorption by the layer. The relationship be... | 01/02/1990 |
| 4883364 | Apparatus for accurately measuring temperature of materials of variable emissivity A temperature measuring apparatus is provided for determining the temperature of a target material to be measured as compared with the temperature of a spaced reference source which has a temperature control for controlling the temperature of the referenc... | 11/28/1989 |
