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| Number | Title | Issue Date |
| 7792177 | Method and furnace for electrical calcination enabling utilization of volatile matters A method and a furnace for electrical calcination enables utilization of volatile matters of petroleum coke or anthracite during electrical calcination, i.e. conventional calcination or semi-graphitization. The furnace includes an anode, a cathode, and a furnace bod... | 09/07/2010 |
| 7357011 | Method and apparatus for manufacturing metal strips The invention concerns a method for producing metal strip (1) in an installation (2), in which a metal strand, especially a thin slab, is brought to a desired temperature and/or is maintained at a desired temperature in a furnace (3, 3a, ... | 04/15/2008 |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7255772 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 08/14/2007 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat... | 07/31/2007 |
| 7246984 | Method and apparatus for transferring an article to be processed and processing apparatus A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring appa... | 07/24/2007 |
| 7140393 | Non-contact shuttle valve for flow diversion in high pressure systems A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf... | 11/28/2006 |
| 7060422 | Method of supercritical processing of a workpiece An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical ... | 06/13/2006 |
| 7052182 | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surf... | 05/30/2006 |
| 7003985 | Method and apparatus for removing polymeric coatings from optical fiber in a non-oxidizing environment In accordance with the invention, the polymeric coating is removed from a coated optical fiber by disposing the fiber within a non-oxidizing environment and applying sufficient heat to volatilize at least a portion of the polymeric coating. The result is that the co... | 02/28/2006 |
| 6926012 | Method for supercritical processing of multiple workpieces An apparatus for supercritical processing of multiple workpieces comprises a transfer module, first and second supercritical processing modules, and a robot. The transfer module includes an entrance. The first and second supercritical processing modules are coupled ... | 08/09/2005 |
| 6921456 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 07/26/2005 |
| 6919539 | Substantially-uniform-temperature annealing A system for heating optical members includes a thermally-conductive inner housing defining an interior volume for receiving an optical member to be heated, a thermally-insulative outer housing at least partially containing the thermally-conductive inner housing, an... | 07/19/2005 |
| 6910614 | Vacuum compression brazing furnace and method of using same A vacuum heat treating furnace for brazing a large metallic part is disclosed. The vacuum furnace includes a pressure vessel having a cylindrical wall and a door dimensioned and positioned for closing an end of the cylindrical wall. A workpiece handling system is mo... | 06/28/2005 |
| 6895032 | High-pressure processing apparatus A high-pressure processing apparatus for supplying a pressure medium into a high-pressure processing chamber 4, which is formed in a pressure vessel 1 to treat a workpiece at a high pressure, is provided. The pressure vessel 1 includes a first v... | 05/17/2005 |
| 6834072 | Method, furnace shell, and furnace for rebaking and graphitizing carbon bodies A method rebakes and graphitizes pitch-impregnated carbon bodies in an encapsulated Castner-type lengthwise graphitization furnace in one step. A furnace shell is constructed of element modules and can carry out the method. A furnace utilizes the furnace shell. The ... | 12/21/2004 |
| 6349108 | High temperature vacuum furnace An electric resistance high temperature vacuum furnace having radiant heating units evenly spaced around the sides and ends of the furnace hot zone. Pairs of units are automatically regulated both radially and longitudinally according to the temperature r... | 02/19/2002 |
| 6160836 | Electro-smokeless extraction/recovery system An electro-smokeless extraction/recovery system for converting shredded scrap tires to carbon black and steel and fluid discharge of oil, gas and solvent chemicals. A reaction vessel is formed with a side wall and a bottom plate. The bottom plate is provi... | 12/12/2000 |
| 6111227 | Furnace exhaust method and apparatus An electrically heated furnace wherein electrical heating elements are mounted and supported so that they face the inner furnace walls and are isolated from direct communication with articles being treated within the furnace such that clean air flows over... | 08/29/2000 |
| 5993202 | Baking furnace and control method therefor The present invention prevents a lowering of the baking quality of a baked product due to a variation in the temperature distribution in a baking furnace due to the inflow of air into the baking furnace. A baking furnace has an inlet disposed in a clean r... | 11/30/1999 |
| 5987053 | High temperature air cooled vacuum furnace A high temperature vacuum furnace which has an internal thermal insulation system to reduce heat losses and an external vacuum vessel which is designed to safely dissipate all heat generated within the furnace to the surrounding air. The vacuum vessel wal... | 11/16/1999 |
| 5898727 | High-temperature high-pressure gas processing apparatus The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least ... | 04/27/1999 |
| 5838716 | Leak check procedure for a dry oxidation furnace tube A method of testing a dry oxidation furnace for leaks which permit the entry of moisture into the oxidizing ambient is described. Such moisture, when present in sufficient concentration, can cause a high degree of boron depletion in silicon at p-type cont... | 11/17/1998 |
| 5708678 | Method to equalize the temperature in a heating furnace with a controlled-oxidization ambient and heating furnace carrying out the method Method to equalize the temperature in a heating furnace (10) with a controlled-oxidization ambient, the furnace (10) comprising at least one insulated chamber (11) cooperating with a supporting and conveying surface defined by a plurality of rollers (12),... | 01/13/1998 |
| 5550858 | Heat treat furnace with multi-bar high convective gas quench An improved cooling arrangement is disclosed for an industrial heat treat furnace. The furnace includes a closed end cylindrical heat treat chamber in which a plenum plate is suspended adjacent the rear end thereof. The plenum plate has a central underpre... | 08/27/1996 |
| 5524020 | Vacuum furnace with movable hot zone A high temperature vacuum heat treating furnace has a hot zone, including heating elements and thermal insulation, which is movable between a heating location at least partly surrounding a load space and a cooling location remote from the load space. A co... | 06/04/1996 |
| 5473628 | Device for ring section furnace A ring section furnace device for the calcination of carbon bodies includes a number of serially connected chambers with or without lids on top. Each chamber contains a number of cassettes the walls of which have therein vertical and/or horizontal flue ga... | 12/05/1995 |
| 5461214 | High performance horizontal diffusion furnace system Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and h... | 10/24/1995 |
| 5414927 | Furnace elements made from graphite sheets A high strength graphite material is fabricated into a sheet, the sheet is bent into a tube, and the tube is retained in that shape for use in a high temperature furnace. The retained tube is rigid and can replace prior art machined blocks of lower streng... | 05/16/1995 |
| 5267257 | Vacuum furnace with convection heating and cooling A high temperature vacuum furnace has a circulating path external to the heating chamber for facilitating inert gas circulation during initial convection heating of a high temperature vacuum furnace. The heating chamber of the furnace and a surrounding co... | 11/30/1993 |
| 5228052 | Plasma ashing apparatus A plasma ashing apparatus has a vacuum treatment chamber for receiving therein a substrate coated with a resist film, a reactive gas introduction pipe equipped with a plasma applicator, a vacuum exhaust pipe, a heating means for heating the substrate, and... | 07/13/1993 |
| 5190901 | Method for producing active carbon using carbon-containing material A method and an apparatus for producing an active carbon using a carbon-containing material inclusive of an used active carbon as a raw material wherein the carbon-containing raw material is carbonized in a carbonizing unit to produce a carbonized materia... | 03/02/1993 |
| 5187771 | Heat processing apparatus utilizing a plurality of stacked heater holders A heat processing apparatus comprises a reactor tube in which matters to be processed are housed, a wire-shaped heating unit enclosing the reactor tube, a support device for supporting the heating unit at plural positions, and reinforcing members for rein... | 02/16/1993 |
| 5173919 | Manipulation of the exit gas flow in a melting furnace In a melting furnace (1), toxic, volatile chemical compounds from introduced filter dust from industrial incineration units are vaporized at about 1300° C. and forced to leave the reaction space. The non-vaporizing residue forms a glassy melt which is di... | 12/22/1992 |
| 5173921 | Apparatus and process for activation of carbon by electrical resistance heating in the presence of steam In an apparatus and process for the activation of carbon from carbon feedstocks by electrical resistance heating in the presence of steam, which comprises preheating particles of the carbon feedstock in a preheater, having the particles descend by gravity... | 12/22/1992 |
| 5097114 | Low-voltage heating device A low-voltage electric heating device for application in a carburizing furnace is provided with an outer housing or sleeve for replaceable disposition within the furance, the outer housing radiating heat directly into said furnace; at least one current pa... | 03/17/1992 |
| 4907245 | Furnace with convection-free hot zone In the high pressure furnace disclosed herein, convection currents in the furnace hot zone are minimized by bringing electrical feedthroughs for the heating element through a horizontal spacer ring which separates a pressure body and cover. A heat zone de... | 03/06/1990 |
| 4668287 | Process for producing high purity zirconium and hafnium This is a process for producing high quality zirconium or hafnium sponge. It is especially useful for producing the very high purity zirconium which may be used to line the inner surface zirconium of Zircaloy tubing for nuclear fuel rods. The process uses... | 05/26/1987 |
| 4612651 | Heat treating furnace with heating element hangers and radiation shield spacers The electric resistance heating elements of a heat treating furnace are suspended within a work chamber by hanger rods threaded into nuts which are welded to the inside of the outer wall of the chamber to avoid the need for forming holes through the outer... | 09/16/1986 |
| 4523321 | Vertical carbonizing furnace for use in the production of carbon fibers A vertical carbonizing furnace for use in the production of carbon fibers is provided with a vertically extending conduit of hollow rectangular parallelepiped. The lower end of the conduit is immersed in water thereby making a water seal from environmenta... | 06/11/1985 |
