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| Number | Title | Issue Date |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ... | 05/15/2007 |
| 7215697 | Matched impedance controlled avalanche driver Controlled avalanche driver circuits and apparatuses for gas lasers. One embodiment typically delivers short, rapid, high voltage ionizing pulses in combination with an electric field whose magnitude is too low to sustain a normal glow discharge. The plasma is typic... | 05/08/2007 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a... | 03/27/2007 |
| 7180083 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac... | 02/20/2007 |
| 7141806 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation method and apparatus for a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials creat... | 11/28/2006 |
| 5117434 | Metal vapor laser apparatus A metal vapor laser has a discharge tube with electrodes at opposite ends. A power source is electronically connected to the electrodes and generates a discharge in a discharge region within the discharge tube. The discharge generates laser light which em... | 05/26/1992 |
| 5090021 | Discharge exciting pulse laser device A discharge exciting pulse laser device such as an exima laser device. The laser device is capable of accelerating the timing of rise of the voltage between an auxiliary electrode and one of main electrodes without decreasing a discharge start voltage bet... | 02/18/1992 |
| 5050178 | Multichannel pseudo-spark switch and excitation circuit for gas lasers having the switch An excitation circuit for TE lasers serves to generate a homogeneous high pressure glow discharge between laser electrodes within a gas space of a laser chamber. A fast acting high voltage switch of a pulse forming network is a multi-channel pseudo-spark ... | 09/17/1991 |
| 5043995 | Process to electrically excite a laser gas The invention relates to a process to electrically excite a laser gas, especially a CO2 --He--N2 mixture, which is admitted at an angle, preferably perpendicular, to the axial laser gas discharge gap, and which is ignited by means of... | 08/27/1991 |
| 5040185 | Large volume gaseous electric discharge system A control circuit for a laser system having a first and second power supply connected in parallel. A mode selector is available to the laser operator to change the operational mode of the laser system from continuous to pulse mode or vice versa, and any c... | 08/13/1991 |
| 4956848 | Electrodes for gas apparatus and method of making the same In a gas laser, an anode of discharge electrodes is formed from stainless steel. Alternatively, the anode is formed from a metallic base material and chromium coating is applied on the surface of the metallic base material. A cathode is formed from titani... | 09/11/1990 |
| 4956847 | Electrodes for a gas laser apparatus and method of making the same In a gas laser, the surface of either or both of discharge electrodes are formed from titanium oxide which provides fine sputtering proof. The discharge electrodes are formed from titanium as a base material having an oxidized surface. Alternatively, the ... | 09/11/1990 |
| 4945545 | Cold electrode metal vapor laser A metal vapor laser intended to be excited by an electrical discharge pulsed through a metal vapor, consisting of a tubular chamber terminated at each end by a terminating flange, the terminating flange (1) having formed integrally with it a cold cathode ... | 07/31/1990 |
| 4894838 | Electron beam preionization of a high pressure self-sustaining gas laser A high pressure self-sustained gas laser operating at a high specific energy loading and long pulselength. The laser comprises an endless duct for circulating a laser generating gaseous medium and two discharge electrodes for exciting the molecules of the... | 01/16/1990 |
| 4864586 | Hollow cathode glow discharge ring laser block and electrode structure for ring laser angular rate sensors The present invention provides a ring laser gyro which utilizes a gas impervious block containing at least three tunnels which meet to form a closed-loop, gas containing, cavity, and allow passage of laser beams therethrough. A pair of electrodes are posi... | 09/05/1989 |
| 4841540 | Gas laser arrangement A gas laser arrangement includes a discharge tube arranged between a cathode and anode and including a central discharge channel and at least one gas return channel. An auxiliary electrode for pre-discharge is allocated to the cathode, the auxiliary elect... | 06/20/1989 |
| 4841538 | CO2 gas laser device A CO2 gas laser device comprises a plurality of divided cathode electrodes disposed in a linear row extending transversely across a high-speed flow of a gas containing CO2, and parts of the cathode electrodes producing negative glow ... | 06/20/1989 |
| 4821281 | Hollow cathode glow discharge ring laser angular rate sensor A ring laser angular rate sensor construction utilizes an anode-cathode configuration which generates a glow discharge region in the propagation path of the laser beams. The anode-cathode construction provides a hollow cathode and effect for a ring laser.... | 04/11/1989 |
| 4771437 | Integrated laser/FLIR rangefinder A laser transmitter is comprised of a power converter connected to a power conditioner for converting the preregulated dc power to high voltage dc required for laser discharge. A pulse forming network is connected to the power converter, for generating sh... | 09/13/1988 |
| 4755764 | Electromagnetic wave amplifiers and generators In a method and apparatus for amplifying and/or generating electromagnetic wave radiation, a gas plasma region having a non-Maxwellian electron distribution is produced by effecting collisions between scattering particles in the gas with free electrons wh... | 07/05/1988 |
| 4755999 | Laser apparatus utilizing a magnetically enhanced electrical discharge In laser apparatus, an amplification section of a laser apparatus, including a cavity bounded by first and second opposing surfaces, closely spaced relative to the dimensions of the surfaces, electrodes for generating an electric field within the cavity a... | 07/05/1988 |
| 4745614 | Silent discharge type laser device A silent discharge type laser device which comprises a detector for detecting the amount of electric charges passed between electrodes and controlling means for controlling an output current or voltage of a power supply so that a charge amount detected by... | 05/17/1988 |
| 4745613 | Laser flash lamp triggering circuit A laser flash lamp triggering circuit is connected in parallel with the flash lamp and between the flash lamp and the flash lamp power supply. A impedance element is connected between the parallel trigger circuit network and the pulse forming network in t... | 05/17/1988 |
| 4710938 | Metal ion laser protected against the deposition of metal vapor on brewster windows A helium-cadmium ion laser is disclosed which has a tubular housing hermetically closed at both ends by Brewster windows and having a hollow cathode mounted therein. Disposed outside the hollow cathode and open to its interior are a row of primary anodes ... | 12/01/1987 |
| 4704583 | Light amplifiers employing collisions to produce a population inversion This application discloses light amplification apparatus in which population inversion is created in which energized particles collide with a lasing medium to create a population inversion. In the preferred embodiment the energized particles are atoms, io... | 11/03/1987 |
| 4688229 | Gas laser structure, particularly CO2 laser To improve the power transfer of a glow discharge between a cathode (3) and an anode (4) in a glow discharge space (2), through which a laser-active is being passed (5) at high speed, the cathode is constructed to have a rotating surface, projecting throu... | 08/18/1987 |
| 4680770 | Dual beam gas ion laser A gas ion laser employs two or more independently controlled electrical gas discharges including a longitudinal plasma arc created by a thermionic cathode and an anode and a transverse glow discharge electron beam created within a photocathode reflector. ... | 07/14/1987 |
| 4641316 | D.C. electron beam method and apparatus for continuous laser excitation A highly efficient laser employs a glow discharge electron gun and includes a solid wall cathode that emits a beam of electrons resulting in a plasma that is a negative glow discharge having an electron distribution that has a larger number of high energy... | 02/03/1987 |
| 4635269 | Flowing gas laser having screening for smoothing low turbulence flow A flowing gas laser of the kind normally operating in the glow discharge mode and having a glow discharge region through which the gas flows while the glow discharge occurs, employs one or an array of flow smoothing screens disposed in series in the gas f... | 01/06/1987 |
| 4635272 | Laser discharge tube A laser discharge tube comprises a discharge envelope and an anode and cathode both disposed within the envelope. The envelope includes a capillary tube having a hole. In this hole the tip portion of the anode is inserted. Outside the envelope there is pr... | 01/06/1987 |
| 4631452 | Apparatus and method for generating a plurality of electric discharges An electric discharge apparatus, for example a gas laser or discharge lamp, includes first and second electrodes defining a first discharge path and third and fourth electrodes defining a second discharge path alongside the first. A respective impedance i... | 12/23/1986 |
| 4612643 | Electric glow discharge using prepulse and charge storage device A method and apparatus for transferring energy to a gas by means of a glow discharge. A transmission line is charged to a voltage of approximately twice that of the steady-state voltage of the glow discharge. A prepulse voltage source, having a higher vol... | 09/16/1986 |
| 4606035 | Lateral excitation type gas laser A lateral excitation type gas laser device having a small size and high output. An anode and a cathode are arranged opposite one another with a flow of laser gas therebetween. A high DC voltage is applied between the anode and cathode to cause a glow disc... | 08/12/1986 |
| 4604752 | Magnetic stabilization of high power glow discharges The invention provides a novel means of stabilizing a glow discharge device against electrothermal instabilities and electrode induced instabilities comprising imposing a magnetic field on the discharge current to create a sheared flow system within the d... | 08/05/1986 |
| 4597086 | Coaxial type laser oscillator for excitation by silent discharge A coaxial type laser oscillator to carry out excitation of laser medium gas by voiceless discharge with high performance. The laser oscillator is constructed in such a manner that at least a pair of ring-shaped electrodes are disposed on and around the outer p... | 06/24/1986 |
| 4594721 | Corona discharge preionized high pulse repetition frequency laser A sealed structure laser apparatus is disclosed which utilizes corona discharge as a pre-ionizing means wherein the laser discharge space is defined by a dielectric material channel with C cross section and one of the two discharge main electrodes is loca... | 06/10/1986 |
| 4574380 | Self-optimizing electrode and pulse-stabilized super high power C.W. gas lasers An electrode assembly and a D.C. glow discharge system incorporating the electrode assembly. The system is stabilized by a lower pulse repetition rate (1 KHz-5 KHz) and power ( | 03/04/1986 |
