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| Number | Title | Issue Date |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| RE40184 | Refractive surgery and presbyopia correction using infrared and ultraviolet lasers A method and surgical technique for corneal reshaping and for presbyopia correction are provided. The preferred embodiments of the system consists of a scanner, a beam spot controller and coupling fibers and the basic laser having a wavelength of (190-310) nm, (0.5-... | 03/25/2008 |
| 7339973 | Electrodes for fluorine gas discharge lasers Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge s... | 03/04/2008 |
| 7301980 | Halogen gas discharge laser electrodes A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric ... | 11/27/2007 |
| 7283575 | Narrow band electric discharge gas laser having improved beam direction stability An electric discharge, narrow band gas laser with improvements in wavelength stability. Improvements result from reduced laser beam directional fluctuations or fast correction of those fluctuations. Applicant has discovered, using an extremely sensitive knife edge o... | 10/16/2007 |
| 7230965 | Anodes for fluorine gas discharge lasers Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the ele... | 06/12/2007 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ... | 05/15/2007 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a... | 03/27/2007 |
| 7190708 | Annealed copper alloy electrodes for fluorine containing gas discharge lasers An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface st... | 03/13/2007 |
| 7190872 | Semiconductor optical amplifier and optical module using the same The present invention provides a polarization dependency-free, gain-saturated high function semiconductor optical amplifier and optical module at industrially low cost. The gist of the present invention is to structurally separate the optical signal propagating wave... | 03/13/2007 |
| 7180083 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac... | 02/20/2007 |
| 7173954 | Gas laser oscillation device A plurality of discharge sections are formed in an optical resonance space and are provided with electrodes that are mutually different in for example shape, size and construction. Laser medium gas flows through a circulatory passage passing through a fan and heat e... | 02/06/2007 |
| 7145926 | RF excited gas laser RF excited gas laser consists of a laser tube having external surfaces; a power supply compartment having elongated external fins and a pair of endplates on its opposite ends and wherein laser tube is placed between and is flexibly attached to the endplates; a sheet... | 12/05/2006 |
| 7141806 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation method and apparatus for a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials creat... | 11/28/2006 |
| 7132123 | High rep-rate laser with improved electrodes The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is ... | 11/07/2006 |
| 7095774 | Cathodes for fluorine gas discharge lasers A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a di... | 08/22/2006 |
| 7092641 | Method and apparatus for optical transmission of wavelength-encoded modulation formats A system that transmits amplitude modulated data in a wavelength-encoded format and then uses a wavelength-sensitive receiver to convert the received optical signal back to the original amplitude modulated data. This system enables transmission of optical signals th... | 08/15/2006 |
| 7079565 | Systems and methods utilizing laser discharge electrodes with ceramic spoilers Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An in... | 07/18/2006 |
| 7061957 | External cavity laser having a set atmosphere An external cavity laser having a set atmosphere is disclosed. In an embodiment, the laser system includes a gain medium to emit light in response to an applied current, a wavelength selective reflector configured to resonate the light that is emitted from the gain ... | 06/13/2006 |
| 7046713 | Discharge laser with porous layer covering anode discharge surface A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electr... | 05/16/2006 |
| 7003012 | Discharge laser with porous insulating layer covering anode discharge surface A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electr... | 02/21/2006 |
| 6998620 | Stable energy detector for extreme ultraviolet radiation detection A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The det... | 02/14/2006 |
| 6983001 | Laser with heat transfer system A laser includes a deformable tube holding an electrode assembly that includes conformable spacers. The spacers are deformed by compression of the tube into good surface contact with the electrodes and the tube walls, thereby providing the necessary path for heat re... | 01/03/2006 |
| 6937635 | High rep-rate laser with improved electrodes The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is ... | 08/30/2005 |
| 6931033 | Pump source for lasers This invention relates to the field of lasers and in particular to the pump sources used in lasers. Many existing lasers use linear flashlamps in order to create population inversion in the gain medium of the laser. Such pump sources suffer from a number of drawback... | 08/16/2005 |
| 6907058 | Energy monitor for molecular fluorine laser A beam parameter monitoring unit for coupling with a molecular fluorine (F2) or ArF laser resonator that produces an output beam having a wavelength below 200 nm includes a detector and a beam path enclosure. The unit may also include a beam splitter with... | 06/14/2005 |
| 6894586 | Radial bulk annular resonator using MEMS technology A MEMS resonator includes an annular resonator body defined by an inner radius and an outer radius, a first electrode positioned within the inner radius and spaced from the resonator body, and a second electrode positioned around the annular resonator body and space... | 05/17/2005 |
| 6834067 | Laser with gain medium configured to provide an integrated optical pump cavity An optically-pumped laser having a gain medium configured to provide a low loss, three-dimensional integrated optical pump cavity that substantially confines optical pump radiation within the lasing volume, which is particularly useful for efficiently pumping solid ... | 12/21/2004 |
| 6792011 | Frequency modulated laser with high modulation bandwidth A frequency modulated laser comprises a laser cavity in which the gain section of the laser cavity is imbedded within a phase modulation section of the cavity. The laser cavity further comprises electrically-sensitive material, so that an electric field applied acro... | 09/14/2004 |
| 6650679 | Preionization arrangement for gas laser A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cy... | 11/18/2003 |
| 6456643 | Surface preionization for gas lasers An excimer or molecular fluorine laser includes one or more sliding surface discharge preionization units each including an elongated preionization electrode spaced from one or more associated preionization electrodes by an elongated dielectric within the... | 09/24/2002 |
| 6442185 | All-metal, DC excited laser with RF pre-ionization The present invention provides a novel and improved technique for achieving a combined RF-DC gas discharge in the optical cavity of the gas laser. The combination of the fast pre-ionization with the transverse RF discharge and the high power excitation wi... | 08/27/2002 |
| 6347101 | Laser with absorption optimized pumping of a gain medium A solid state laser includes a high absorption coefficient solid state gain medium such as Nd:YVO4 that is side pumped with a semiconductor laser diode array. The resonant cavity of the solid state laser is positioned so that the TEM00 | 02/12/2002 |
| 6258082 | Refractive surgery and presbyopia correction using infrared and ultraviolet lasers A method and surgical technique for corneal reshaping and for presbyopia correction are provided. The preferred embodiments of the system consists of a scanner, a beam spot controller and coupling fibers and the basic laser having a wavelength of (190-310... | 07/10/2001 |
| 6243407 | High power laser devices In an apparatus and method for generating high power laser radiation, the geometry of the resonant laser cavity defines a fundamental spatial or transverse cavity mode. A gain medium is disposed within the resonant cavity and an energy source energizes th... | 06/05/2001 |
| 6084893 | Apparatus and method of laser power and frequency stabilization of radio frequency excited laser using optogalvanic effect An apparatus for and a method of stabilizing the laser power and frequency of a radio frequency excited laser, which are adapted to lock the laser power and frequency of the laser at the vertex of a laser gain curve using an optogalvanic effect generated ... | 07/04/2000 |
| 6078604 | Laser oscillation apparatus A laser oscillation apparatus includes: a laser cavity unit for generating laser light by being provided a voltage and optically amplifying the generated light by means of a pair of mirrors; and a DC power source for supplying the voltage required for gen... | 06/20/2000 |
| 5894493 | Free-space gas slab laser A pair of elongated, parallel electrodes (91,92) are insulatively mounted within a tubular housing (111) filled with a laser gas mixture between an arrangement of reflective optical elements (120,150) sealingly mounted at each end of the housing. The elec... | 04/13/1999 |
