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| Number | Title | Issue Date |
| 7436872 | High frequency discharge excited gas laser oscillator A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section for detecting supply power from the las... | 10/14/2008 |
| 7372887 | Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas supply device and gas exhaust device are controlled so that the l... | 05/13/2008 |
| 7356059 | Nitride semiconductor laser device and semiconductor optical device A drive current is generated by mixing a pulse signal from a pulse generator and a DC current from a DC current power supply using a T circuit and injected into a nitride semiconductor laser having a horizontal light-confinement ridge structure. The horizontal light... | 04/08/2008 |
| 7266137 | Laser gas replenishment method Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas... | 09/04/2007 |
| 7227881 | Master oscillator—power amplifier excimer laser system A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirem... | 06/05/2007 |
| 7215697 | Matched impedance controlled avalanche driver Controlled avalanche driver circuits and apparatuses for gas lasers. One embodiment typically delivers short, rapid, high voltage ionizing pulses in combination with an electric field whose magnitude is too low to sustain a normal glow discharge. The plasma is typic... | 05/08/2007 |
| 7173395 | Inverter unit grounding method and inverter unit A circuit system that includes a sensor circuit for a sensor that detects the state of a motor is provided in an inverter unit for driving the motor. A 0V of the circuit system is connected with a shield braid of a shielded cable that connects the sensor circuit and... | 02/06/2007 |
| 7092419 | Wavelength agile laser An electric field that changes across space is synthesized, by applying voltage levels independent of one another at several locations. The independence in voltage levels allows the electric field that is synthesized to be made periodic or aperiodic. Such a synthesi... | 08/15/2006 |
| 6999492 | Reduced-maintenance excimer laser with oil-free solid state pulser An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pu... | 02/14/2006 |
| 6987790 | Excimer or molecular fluorine laser with several discharge chambers Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using ... | 01/17/2006 |
| 6965624 | Laser gas replenishment method A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluor... | 11/15/2005 |
| 6941259 | Laser software control system A first software program for simulating an operating laser system controls a processor that generates one or more dummy parameters each corresponding to a parameter of an operating laser system. The dummy parameter is read over a same or similar signal interface as ... | 09/06/2005 |
| 6872471 | Infrared emitting electroluminescent and photoluminescent devices The present invention includes infrared emitting materials and infrared emitting devices. The present invention demonstrates 1.54 micron infrared PL and EL emission from an organic complex. This provides a very simple way to obtain a light source at 1.54 micron wave... | 03/29/2005 |
| 6792010 | Laser with reduced parasitic etalon effects According to the present invention, laser performance is improved by appropriately matching the spectral periods of various etalons within the laser cavity. A first embodiment of the invention is a discretely tunable external cavity semiconductor laser where a grid ... | 09/14/2004 |
| 6788722 | High power waveguide laser The above discussed and other drawbacks and deficiencies of the prior art are overcome or alleviated by a laser of the present invention. In accordance with the present invention the laser comprises a housing defining a plurality of compartments therein, a folded wa... | 09/07/2004 |
| 6782029 | Dedusting unit for a laser optical element of a gas laser and method for assembling A dedusting unit for a laser optical element is provided. The dedusting unit comprises a high-voltage duct comprising a high-voltage conducting core having a first end and a second end and an insulator element disposed around the core. The first end of the core is c... | 08/24/2004 |
| 6782010 | Limiter optics Limiter optics for an ignition feedback regenerative free electron laser amplifier have a pickoff mirror direct a portion of the output from the free electron laser through a focusing assembler. After expanding this pickoff beam spatially and temporally, the focusin... | 08/24/2004 |
| 6748001 | Semiconductor laser device providing laser light of two wavelengths and method of fabricating the same An object of the present invention is to provide a semiconductor laser device which is capable of selectively emitting two kinds of laser light of light emitting characteristics differing in wavelength, light emission point, beam shape, light emission power, longitu... | 06/08/2004 |
| 6650678 | Laser oscillating apparatus A plasma is excited uniformly as a whole over the length of each slot. A laser oscillating apparatus is designed to excite a laser gas in a laser tube (2) by introducing electromagnetic waves into the laser tube through a plurality of slots (10) formed in... | 11/18/2003 |
| 6621842 | Method and apparatus for long wavelength semiconductor lasers A W quantum well structure for active region of semiconductor lasers for long wavelength emission of photons. The energy band lineups in the disclosed heterostructures achieve emission at wavelengths of 1.3 μm or greater. The W quantum well structure and... | 09/16/2003 |
| 6603791 | High power fiber amplifiers with passive pump module alignment A hermetically sealed pump module for use with fiber devices is disclosed. The method and apparatus disclosed enable a pump module to be constructed that has a high coupling tolerance and which is inexpensive and easy to manufacture. The pump module may c... | 08/05/2003 |
| 6603790 | Gas laser and a dedusting unit thereof A gas laser and a dedusting unit thereof are provided. The gas laser comprises a tube containing a gas mixture including a laser gas and preferably a buffer gas. The tube preferably comprises a cylindrical inner wall. A discharge unit is inserted into the... | 08/05/2003 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes An excimer or molecular fluorine laser system includes a laser tube filled with a gas mixture including fluorine and a buffer gas, and multiple electrodes within the laser tube connected with a pulsed discharge circuit for energizing the gas mixture. At l... | 05/27/2003 |
| 6539045 | Laser with device for modifying the distribution of laser light intensity across the laser beam cross-section A gas laser includes a control to modify the distribution of the intensity of the laser light over the laser beam cross section produced in the lasing gas within at least one laser tube by at least two electrodes and a voltage supply unit by means of whic... | 03/25/2003 |
| 6522679 | Gas laser discharge unit A gas laser discharge unit is provided. The discharge unit includes an elongated electrode plate having a plurality of spaced-apart holes therein and a plurality of coaxial high voltage ducts. Each duct extends through one of the holes in the electrode pl... | 02/18/2003 |
| 6456643 | Surface preionization for gas lasers An excimer or molecular fluorine laser includes one or more sliding surface discharge preionization units each including an elongated preionization electrode spaced from one or more associated preionization electrodes by an elongated dielectric within the... | 09/24/2002 |
| 6442185 | All-metal, DC excited laser with RF pre-ionization The present invention provides a novel and improved technique for achieving a combined RF-DC gas discharge in the optical cavity of the gas laser. The combination of the fast pre-ionization with the transverse RF discharge and the high power excitation wi... | 08/27/2002 |
| 6434181 | Gas laser oscillator A gas laser oscillator having at least three discharge tubes disposed along the optical axis, and a spacer having an opening centered on the optical axis. The spacer is disposed between a partially reflective mirror and the closest discharge tube. Further... | 08/13/2002 |
| 6275513 | Hermetically sealed semiconductor laser device A wafer assembly that includes a wafer substrate. A plurality of micro-optomechanical or micro-optoelectrical devices are positioned on a surface of the wafer substrate. Each micro-optomechanical or micro-optoelectrical device has a seal surface. A plural... | 08/14/2001 |
| 6222862 | Control method of exciting a pulse laser and power supply unit for exciting a pulse laser A power supply unit provides therein a first power unit outputting a first excitation amplitude and operating from rising of a reference pulse signal outputted from a reference oscillator until rising of a first time delay signal having a time delay to th... | 04/24/2001 |
| 6212210 | Control method and apparatus for stabilizing optical wavelength A control apparatus for stabilizing optical wavelength output by a laser module in which a laser element, temperature sensor and cooling/heating element are installed, comprises a temperature deviation detecting circuit comprising a temperature monitor fo... | 04/03/2001 |
| 6208676 | Gas laser oscillator The gas laser oscillator having metal housings disposed near internal mirrors of the resonator for covering, for example, the external of connecting tubes partially or totally, means for detecting the micro discharge current flowing inside of the connecti... | 03/27/2001 |
| 6198761 | Coaxial laser pulser with solid dielectrics A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial structure. Both the transformer and the compressor utilize ferroma... | 03/06/2001 |
| 6198762 | Supersonic and subsonic laser with RF discharge excitation Disclosed is a gas laser utilizing radio frequency discharge excitation in the area of sonic or supersonic/subsonic transfer gas flow. The laser uses various types of gases and mixtures of gases as the active medium and provides for RF or UV pre-ionizatio... | 03/06/2001 |
| 6167065 | Compact discharge pumped soft x-ray laser An extremely compact soft x-ray and/or extreme ultraviolet laser is disclosed that can be repetitively fired within short time intervals. The laser generates a plasma within a capillary (3) by flowing through the capillary (3) a fast high current pulse ge... | 12/26/2000 |
| 6137818 | Excitation of gas slab lasers An RF-excited discharge laser includes a pair of electrodes and an RF power source, both electrodes being ungrounded, the power source being adapted to apply an RF voltage to both electrodes, the respective voltages applied to each plate being out of phas... | 10/24/2000 |
| 6129884 | Stereolithographic method and apparatus with enhanced control of prescribed stimulation production and application A rapid prototyping and manufacturing (e.g. stereolithography) method and apparatus for producing three-dimensional objects by selectively subjecting a liquid or other fluid-like material to a beam of prescribed stimulation. In a preferred embodiment a so... | 10/10/2000 |
| 6028872 | High pulse rate pulse power system with resonant power supply A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor... | 02/22/2000 |
| 6026099 | Pulse forming x-ray laser A capillary discharge x-ray laser driven by a radial pulse forming line. Both Blumlein and transmission line configurations of the pulse forming line in single and multiple stage arrangements are presented.... | 02/15/2000 |
| 5953360 | All metal electrode sealed gas laser A gas laser includes a plurality of electrically conductive electrodes contained within a hollow housing that contains a laser gas medium. The electrodes surround and define a laser bore in which a plasma is excited by the electrodes. Each of the electrod... | 09/14/1999 |
