Did You Know...
...that Charles Goodyear performed some of his experiments on rubber while in debtor's prison? He was there so often he referred to it as his "hotel". Chronically in debt because of poor business sense and ill health, Goodyear depended on the generosity of friends and family. Even after he unlocked the secret to vulcanizing rubber, he was unable to improve his financial situation. When he died, his estate was $200,000 in debt.
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| Number | Title | Issue Date |
| 7279432 | System and method for forming an integrated barrier layer An apparatus and method for forming an integrated barrier layer on a substrate is described. The integrated barrier layer comprises at least a first refractory metal layer and a second refractory metal layer. The integrated barrier layer is formed using a dual-mode ... | 10/09/2007 |
| 7204886 | Apparatus and method for hybrid chemical processing A method and apparatus for performing multiple deposition processes is provided. In one embodiment, the apparatus includes a chamber body and a gas distribution assembly disposed on the chamber body. In one embodiment, the method comprises positioning a substrate su... | 04/17/2007 |
| 7175713 | Apparatus for cyclical deposition of thin films An apparatus for cyclical depositing of thin films on semiconductor substrates, comprising a process chamber having a gas distribution system with separate paths for process gases and an exhaust system synchronized with operation of valves dosing the process gases i... | 02/13/2007 |
| 7066194 | Valve design and configuration for fast delivery system Embodiments of the present invention relate to a method and apparatus for rapid delivery of pulses of one or more reactants to a substrate processing chamber. One embodiment of a valve body includes a first inlet, a second inlet, and an outlet. A valve chamber is in... | 06/27/2006 |
| 7041335 | Titanium tantalum nitride silicide layer Methods and apparatus of forming titanium tantalum silicon nitride (TixTay(Si)Nz) layers are described. The titanium tantalum silicon nitride (TixTay(Si)Nz) layer may be formed using a cyclical deposi... | 05/09/2006 |
| 6998014 | Apparatus and method for plasma assisted deposition Embodiments of the present invention relate to an apparatus and method of plasma assisted deposition by generation of a plasma adjacent a processing region. One embodiment of the apparatus comprises a substrate processing chamber including a top shower plate, a powe... | 02/14/2006 |
| 6979847 | Ferroelectric element and method for manufacturing the same In a ferroelectric element, the ferroelectric film is prevented from deteriorating and the interconnect film from lowering in reliability. A ferroelectric element comprises a first electrode, a ferroelectric film formed on the first electrode, a second electrode for... | 12/27/2005 |
| 6972267 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor Disclosed is a method and apparatus that features deposition of tantalum films employing sequential deposition techniques, such as Atomic Layer Deposition (ALD). The method includes serially exposing a substrate to a flow of a nitrogen-containing gas, such as ammoni... | 12/06/2005 |
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system A method and apparatus for controlling the temperature of at least one gas flowing into a processing chamber is provided. In one embodiment, a gas temperature control apparatus for semiconductor processing includes a gas delivery line coupled between a processing ch... | 10/18/2005 |
| 6939801 | Selective deposition of a barrier layer on a dielectric material A method to selectively deposit a barrier layer on dielectric material that surrounds one or more metal interconnects on a substrate is disclosed. The barrier layer is selectively deposited on the metal film using a cyclical deposition process including a predetermi... | 09/06/2005 |
| 6936538 | Method and apparatus for depositing tungsten after surface treatment to improve film characteristics A method and system to form a refractory metal layer over a substrate includes introduction of a reductant, such as PH3 or B2H6, followed by introduction of a tungsten containing compound, such as WF6, to form a tungsten l... | 08/30/2005 |
| 6915592 | Method and apparatus for generating gas to a processing chamber A method and apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes an unitary, isolatable, transportable canister having a plurality of first spacing elements, a pluralit... | 07/12/2005 |
| 6911391 | Integration of titanium and titanium nitride layers Embodiments of the present invention generally relate to an apparatus and method of integration of titanium and titanium nitride layers. One embodiment includes providing one or more cycles of a first set of compounds, providing one or more cycles of a second set of... | 06/28/2005 |
| 6905737 | Method of delivering activated species for rapid cyclical deposition A method for providing activated species for a cyclical deposition process is provided. In one aspect, the method includes delivering a gas to be activated into a plasma generator, activating the gas to create a volume of reactive species, delivering a fraction of t... | 06/14/2005 |
| 6859995 | Universal fixture for HSA assembly and its testing process A new fixture which is capable of holding an HSA throughout all processes is invented so that Quasi-Static Test can be done before swaging. Handling operations are reduced and rework is made much easier. The invention further provides a process for testing the HSA b... | 03/01/2005 |
| 6801418 | Grounding elements for eliminating ESD via floor coverings and devices Grounding elements are used to properly ground floor coverings and other elements whereby a floor covering, such as a carpet, need not be removed and reinstalled to correct a grounding problem. Properly grounded floor coverings and other devices reduces the effects ... | 10/05/2004 |
| 6116039 | Cooling apparatus having integrated sorber-evaporator structure An apparatus for cooling an electrical component is disclosed which comprises a sorber containing a sorbent; a condenser in fluid communication with the sorber; an evaporator in fluid communication with both the sorber and the condenser and connected in h... | 09/12/2000 |
| 5696661 | Remanence switching device The present invention is directed to a device intended to turn on loads and keep them on for a pre-established period of time and includes a remanence relay which includes a coil L, a movable contact 1, a fixed, normally opened contact 2b and a fixed, nor... | 12/09/1997 |
| 4553850 | Logical regulation circuit for an electronic timepiece A logic regulation circuit for regulating the frequency dividing ratio of a variable frequency divider of an electronic timepiece comprises a first switch group having a plurality of ON and OFF switching states representative of different frequency rates ... | 11/19/1985 |
| 3987346 | Purge timer for burner control system Disclosed herein is a fuel burner control system with a purge timer having a current responsive control relay that is energized into an active state only by a given minimum input current level but can be maintained in that active state by a substantially ... | 10/19/1976 |
