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| Number | Title | Issue Date |
| 7771065 | Optical unit and exposure apparatus having the same An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to cha... | 08/10/2010 |
| 7740363 | Deformable-mirror holder This invention relates to a deformable-mirror holder for holding a mirror in a desired position, to within accepted tolerances, even whilst the mirror is deforming or in a deformed state. In particular, this invention relates to a holder for a bimorph mirror. A defo... | 06/22/2010 |
| 7682030 | Deformable mirror apparatus It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, ... | 03/23/2010 |
| 7399093 | Reflection mirror of projection television and fabrication method thereof Disclosed is a reflection mirror of a projection television to prevent the frame of the projection television from being deformed and to fabricate the projection television with ease. The reflection mirror is fabricated by forming a plurality of ribs at a section of... | 07/15/2008 |
| 7388701 | Optical modulator An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer positioned with an intermediate portion spaced apart from the insulation layer... | 06/17/2008 |
| 7381934 | Closed loop compensation system and method for a deformable mirror A closed loop compensation system including a deformable mirror including an array of spaced actuators. An array of spaced sensors is mapped in optical space to reside between pairs of actuators. A lens system receives a wavefront from the deformable mirror and focu... | 06/03/2008 |
| 7374301 | Stretched membrane device An improved device for reflecting, radiating, or receiving electromagnetic radiation, acoustic waves, or other energy forms through the use of a membrane stretched across a lightweight, round, frame structure. A near perfectly round and flat semi-rigid backplane sur... | 05/20/2008 |
| 7355777 | Energy storage structures using electromechanically active materials for micro electromechanical systems System and method for storing energy using electromechanically active materials in micro electromechanical systems. A preferred embodiment comprises a movable element, an intermediate layer formed under the movable element, and electrical addressing circuitry formed... | 04/08/2008 |
| 7342346 | Microfabricated vertical comb actuator using plastic deformation A microfabricated actuator of the vertical comb-drive (AVC) type or staggered vertical comb-drive type for torsional or linear applications includes torsion springs which permit self-aligned deformation of the device (micromirror) structure of the actuator through t... | 03/11/2008 |
| 7316482 | Reflecting mirror and projection image display apparatus using the same The present invention is directed to the provision of a reflecting mirror that suppresses decreases in the resolution performance and contrast performance by decreasing the mean surface roughness. In a projection type image display apparatus including a projector le... | 01/08/2008 |
| 7311408 | Adjustable rear view mirror structure An adjustable rear view mirror structure is provided. The rear view mirror structure comprises a flexible body and an adjusting apparatus wherein the body has a reflective surface and an inner surface. The adjusting apparatus is disposed at a rear portion of the bod... | 12/25/2007 |
| 7294814 | Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is s... | 11/13/2007 |
| 7295331 | Optical element with an optical axis The invention concerns an optical element (1) with an optical axis (3), designed in particular for an exposure lens used in semiconductor lithography. Said optical element comprises at least an extension (2, 2′) in the direction of the optical... | 11/13/2007 |
| 7264363 | Deformable-mirror cooling This invention relates to a cooled deformable-mirror and its mount. A deformable mirror is provided comprising a reflective element provided on a substrate that is secured to a deformable element, wherein the substrate comprises at least one channel having a pair of... | 09/04/2007 |
| 7262541 | Micro-oscillation element incorporating springs A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and... | 08/28/2007 |
| 7256919 | Rotational micro mirror A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and reflects light; a pair of torsion springs which support opposite ends of ... | 08/14/2007 |
| 7253834 | Image pickup apparatus having image pickup optical system An image pickup apparatus comprising a first lens unit which comprises at least a negative lens element and at least a positive lens element and has negative refractive power, a second lens unit which has positive refractive power, and an optical path bending reflec... | 08/07/2007 |
| 7249535 | Two-dimensional displacement apparatus A displacement apparatus for two-dimensional displacement of an object in relation to a fix-point includes a frame that is symmetrical in relation to a center of the frame and adapted to receive first and second actuators, each of which exerts a force along respecti... | 07/31/2007 |
| 7229178 | Variable focal length deformable mirror A variable focal length deformable mirror has an inner ring and an outer ring that simply support and push axially on opposite sides of a mirror plate. The resulting variable clamping force deforms the mirror plate to provide a parabolic mirror shape. The rings are ... | 06/12/2007 |
| 7221495 | Thin film precursor stack for MEMS manufacturing This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a ... | 05/22/2007 |
| 7209295 | Optical system, and optical apparatus The invention relates to an optical system that has reduced power consumptions, ensures noiseless operations and fast responses, contributes to cost reductions due to simplified mechanical structure, and, albeit having a small outside diameter and small size, is cap... | 04/24/2007 |
| 7195361 | Active hybrid optical component An active hybrid optical component includes a substrate including a mounting surface; a replicated optical surface mounted on the mounting surface; and a plurality of actuators for deforming the substrate to impose a predetermined finished optical shape to the repli... | 03/27/2007 |
| 7178945 | Luminaire having a deformable reflector well An apparatus, system, and method for a luminaire with a light emitting device and a deformable reflector well is disclosed herein. ... | 02/20/2007 |
| 7180652 | Mars optical modulators The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made o... | 02/20/2007 |
| 7164520 | Packaging for an interferometric modulator A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modul... | 01/16/2007 |
| 7161274 | Micro-oscillation element having two rotational axes that are non-orthogonal to each other A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the mova... | 01/09/2007 |
| 7145165 | Tunable laser fluid sensor A sensitive fluid sensor for detecting fluids and particularly trace fluids. The sensor may be adjustable for detecting fluids of various absorption lines. To effect such adjustment, a tunable laser may be used. The laser may be an edge emitting diode, a VCSEL or ot... | 12/05/2006 |
| 7126738 | Visible spectrum modulator arrays Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit ... | 10/24/2006 |
| 7124705 | Visual parking guide A visual parking guide, more particularly, a thin flat surface, divided into three zones, with a multitude of markings in each zone, to assist drivers of varying heights to park their car in a safe parking position. The visual parking guide is mountable on a support... | 10/24/2006 |
| 7126259 | Integral thermal compensation for an electro-mechanical actuator The present invention includes a method of compensating for differences in the rate of thermal expansion in one or more elements of an electro-mechanical actuator. The electro-mechanical actuator can include one or more elements such as a piezoelectric ceramic multi... | 10/24/2006 |
| 7126742 | Electrostatic control of a membrane for adaptive optics and the like A membrane receives an incident energy signal at a first surface of the membrane. An actuating electrode, located adjacent to the membrane on a side opposite the first surface, applies an actuating pressure to the membrane if an actuating potential is applied betwee... | 10/24/2006 |
| 7112772 | Catadioptric projection objective with adaptive mirror and projection exposure method A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is s... | 09/26/2006 |
| 7098871 | Optical scanning system with correction A scanning system device has a predetermined aberration as it scans or switches light along selected optical paths. A deformable membrane receives the light and introduces an inverse “aberration” that offsets that of the scanning system. In one embodiment the sc... | 08/29/2006 |
| 7046335 | Exposure apparatus and device fabrication method An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical el... | 05/16/2006 |
| 7025468 | Variable mirror, optical apparatus and decentered optical system which include variable mirror, variable-optical characteristic optical element or combination thereof A variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired. The variable mirror includes a mirror body formed of an elastic or flexible material and having one surface functioning as a reflecting surfac... | 04/11/2006 |
| 7015457 | Spectrally tunable detector A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The... | 03/21/2006 |
| 7011424 | Candle fireplace illuminator A candle fireplace illuminator that includes a multi-reflector element assembly that is foldable for storage and which unfolds into a three-sided, single-bottomed reflector assembly having four reflective elements and which has a bottom reflective element for suppor... | 03/14/2006 |
| 7012271 | Electromagnetic radiation structure control system A control system is provided for controlling the shape of a flexible electromagnetic radiation structure. The control system includes a plurality of actuators and a plurality of computational elements. Each of the plurality of actuators is coupled to a portion of th... | 03/14/2006 |
| 7006720 | Optical switching system A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the supp... | 02/28/2006 |
| 7002739 | Device for generating line-shaped light beam and laser microscope A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromi... | 02/21/2006 |
