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| Number | Title | Issue Date |
| 8164821 | Microelectromechanical device with thermal expansion balancing layer or stiffening layer An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does ... | 04/24/2012 |
| 8107158 | Fluorescent imaging device and fluorescent image acquiring method A fluorescent imaging device includes an irradiation section that irradiates an object to be examined with excitation light and reference light, an image pickup section that picks up a fluorescence image based on the excitation light and a reflected light image base... | 01/31/2012 |
| 8102591 | Display apparatus A display apparatus (20) includes an electromagnetic radiation source (22) and digital micro-mirror device (21) having a plurality of micro-mirror elements on a surface thereof. The electromagnetic radiation source (22) is arranged to ill... | 01/24/2012 |
| 8094363 | Integrated imods and solar cells on a substrate Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulato... | 01/10/2012 |
| 8064125 | Color sequential illumination for spatial light modulator The present invention provides a display apparatus, comprising: a light source or light sources for emitting a luminous flux or luminous fluxes having a plurality of colors; a spatial light modulator for modulating the luminous flux(es) having a plurality of colors ... | 11/22/2011 |
| 8040590 | Interferometric modulation devices having triangular subpixels At least some subpixels in an interferometric modulator display are formed in a triangular shape. Such triangular subpixels may be formed and/or addressed in a variety of manners. At least some individual triangular subpixels may be separately addressable. However, ... | 10/18/2011 |
| 8014059 | System and method for charge control in a MEMS device Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit ... | 09/06/2011 |
| 7880954 | Integrated modulator illumination A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent t... | 02/01/2011 |
| 7864404 | Light guide unit and display device having the same A light guide unit includes a light guide plate and a plurality of light-exiting protrusions. The light guide plate includes a light-entering surface, an upper surface connected to the light-entering surface and a lower surface facing the upper surface. The light-ex... | 01/04/2011 |
| 7864403 | Post-release adjustment of interferometric modulator reflectivity In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interfe... | 01/04/2011 |
| 7839561 | Micromirror device with a single address electrode A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflecti... | 11/23/2010 |
| 7800811 | Spatial light modulator device, lithographic apparatus, display device, method of producing a light beam having a spatial light pattern and method of manufacturing a device The spatial light modulator device (SLM) for providing a spatial light pattern which is alterable in response to an electric signal comprises a first modulator element (ME1) and a second modulator element (ME2). The first light beam (LB1) proces... | 09/21/2010 |
| 7787172 | Gamma correction for adjustable light source The present invention provides a projection apparatus, that includes: a light source; a light source control unit for controlling the output of the light source; at least one spatial light modulator for modulating the illumination light from the light source by a pl... | 08/31/2010 |
| 7773288 | Dynamic image regulator Provided is a dynamic image regulator. The dynamic image regulator is an application device based on a micro-opto-electro-mechanical system (MOEMS). The dynamic image regulator includes a spatial light modulator comprising a plurality of holes and a plurality of con... | 08/10/2010 |
| 7773287 | Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation A method and system for determining specific pixel modulation states of a spatial light modulator (SLM) to print a desired pattern on a substrate are disclosed. The method includes selecting at least one super-pixel in an object plane of the desired pattern, the sup... | 08/10/2010 |
| 7751114 | System and apparatus for repairing micromirrors in spatial light modulators Disclosed herein are a system and apparatus for operating a device that comprises an array of micromirrors. The system and apparatus are usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation applies, at the ON state, t... | 07/06/2010 |
| 7742220 | Microelectromechanical device and method utilizing conducting layers separated by stops A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device h... | 06/22/2010 |
| 7710635 | System and method for hinge memory mitigation System and method for reducing failures due to hinge memory in a microdisplay display system. A preferred embodiment includes setting the state of each micromirror in a digital micromirror device based on an image being displayed, recording a usage history for the m... | 05/04/2010 |
| 7706050 | Integrated modulator illumination A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent t... | 04/27/2010 |
| 7649673 | Micromirror device with a single address electrode A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected... | 01/19/2010 |
| 7573633 | Increase gray scales of projection system by reflecting light from mirror elements with non-uniform intensity distribution Additional control flexibilities to generate more gray scales for an image display system is achieved by controlling the intensity distribution of the light projection from a light source to a deflecting mirror to further coordinate with the control of the intermedi... | 08/11/2009 |
| 7515329 | Driving a MEMS scanner with a combined actuator drive signal A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be s... | 04/07/2009 |
| 7439984 | Image signal processing method, image signal processing apparatus, and image displaying apparatus An image signal processing method for performing nonlinear compensation on an image signal to be fed into a display device (103). The characteristics of nonlinear compensation are changed according to the brightness of a place in which the display device (... | 10/21/2008 |
| 7436575 | Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable port... | 10/14/2008 |
| 7430072 | System and method for increasing image quality in a display system System and method for maximizing image quality by eliminating vias on a reflective surface. A preferred embodiment comprises depositing a first portion of a mirror surface over a support surface, applying a protective coating on the mirror surface, and then invertin... | 09/30/2008 |
| 7428092 | Fast-response micro-mechanical devices A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate porti... | 09/23/2008 |
| 7411718 | Variable focal length lens and lens array comprising discretely controlled micromirrors A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by ... | 08/12/2008 |
| 7411717 | Micromirror device A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is n... | 08/12/2008 |
| 7405860 | Spatial light modulators with light blocking/absorbing areas A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror arra... | 07/29/2008 |
| 7405414 | Method and apparatus for patterning a workpiece The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle having a multitude of modulating elements (pixels). The pixels are arrange... | 07/29/2008 |
| 7402255 | MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bot... | 07/22/2008 |
| 7403320 | 2-channel display system comprising micro electro mechanical systems The two channel stereo display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation channels, which differ by the polarization of their light beams. More spe... | 07/22/2008 |
| 7400438 | Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action forces to the movable portion to rotationally displace the movable portion... | 07/15/2008 |
| 7400437 | Discretely controlled micromirror with multi-level positions This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supporter Discretely Controlled Micromirror (VSDCM), which has... | 07/15/2008 |
| 7391554 | High fill-ratio mirror-based spatial light modulator A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirr... | 06/24/2008 |
| 7388707 | High-resolution spatial light modulation Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror that includes a... | 06/17/2008 |
| 7385762 | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the ref... | 06/10/2008 |
| 7382517 | Hybrid light modulator The present invention provides a hybrid light modulator. The hybrid light modulator of the present invention includes an element having a protrusion to diffract incident light even at an early light receiving stage and to control the diffractive angle of the light u... | 06/03/2008 |
| 7379227 | Method and device for modulating light “Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhib... | 05/27/2008 |
| 7372620 | Micromirror and micromirror device There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed ... | 05/13/2008 |
