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Class 356/945 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g., atomic absorption spectrometry (GO1N 21/31)


Subclass of Class 356 - Optics: measuring and testing
No. of patents: 4
Last issue date: 02/07/2006


NumberTitleIssue Date
6995091Process for chemically mechanically polishing wafers
The invention relates to a process for chemically mechanically polishing and grinding wafers. The CMP slurry that is used for grinding is analyzed using slurry atomic absorption spectroscopy. This allows rapid and sensitive analysis of the slurry constituents, in pa...
02/07/2006
6844553Absorption spectroscopy apparatus and method
An absorption spectroscopy apparatus having a fluid inlet and a fluid outlet. The apparatus includes a sample cell including an axis, a side wall having at least one curved reflective surface arrayed about the axis and facing inwardly with respect to the cell such t...
01/18/2005
6686999Method of using an aerosol to calibrate spectrometers
Using a nebulizer gas, sub micron and micron size particulates can be generated from a solution containing salts covering a broad range of elements. The fractional concentration of elements can be determined by bubbling the aerosol through aqueous acid an...
02/03/2004
6361956Biospecific, two photon excitation, fluorescence detection and device
A method for measuring the end point and for monitoring the real time kinetics of a bioaffinity reaction in biological fluids and suspensions, employing microparticles as bioaffinity binding solid phase, biospecific reagent labelled with a fluorescent lab...
03/26/2002
 
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