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| Number | Title | Issue Date |
| 8164761 | Differential focus blade clearance probe and methods for using same An apparatus and a method for ascertaining a gap between a stationary member and a rotating member are disclosed. At least a reference beam and a signal beam, which have different focal lengths or which diverge/converge at different rates, are fixed to the stationar... | 04/24/2012 |
| 7916312 | Measuring device for measuring a distance A measurement arrangement has a rotation axis around a first end of an extended member having a first joint thereat, and a second joint at the opposing end. An equipment for recording measured points is connected to the second joint. The joints are connected through... | 03/29/2011 |
| 7843576 | Means for measuring a diameter A diameter measuring instrument that comprises a straight-edge and two legs or jaws, wherewith the distance between the legs can be read-off. The invention is characterized in that the straightedge (2) is provided with a leg (3) which is fixed in relat... | 11/30/2010 |
| 7746486 | Pellet sorting by diameter measurement A system based on the continuous measurement (20) of the diameter of a cylindrical object (1) moving, laid down, on a belt conveyor (10) allows dimensional compliance of the latter object to be checked. The measurement system (20) ... | 06/29/2010 |
| 7738120 | Method and apparatus for determining geometrical dimensions of a vehicle wheel A method and an apparatus of determining geometrical dimensions of a motor vehicle wheel (rim/tyre assembly) 1 by contact-less sensing, wherein the wheel is fixed on wheel receiving means 8 of a tyre changer, that at least one planar light beam 3 | 06/15/2010 |
| 7633634 | Optical modules and method of precisely assembling same Optical modules and a method of precisely assembling the modules are provided. The method includes the step of providing a set of optical components including a plurality of beam shaping components for converting at least one initial shape in cross section of a lase... | 12/15/2009 |
| 7483156 | Method for measuring overlay and overlay mark used therefor An overlay measurement method and related apparatus are provided in which overlay measurement data is calculated on the basis of distances measured in disparate manners in relation to whether the current process is an initial process or a subsequent process. Related... | 01/27/2009 |
| 7440121 | Optically measuring interior cavities A method of measuring the three-dimensional volume or perimeter shape of an interior cavity includes the steps of collecting a first optical slice of data that represents a partial volume or perimeter shape of the interior cavity, collecting additional optical slice... | 10/21/2008 |
| 7436527 | Systems and methods for immersion metrology Fluid immersion technology can be utilized to increase the resolution and angular range of existing metrology systems. An immersion fluid placed between the metrology optics and the sample can reduce the refraction at the sample interface, thereby decreasing the spo... | 10/14/2008 |
| 7423269 | Automated feature analysis with off-axis tilting One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and compu... | 09/09/2008 |
| 7420670 | Measuring instrument and method for operating a measuring instrument for optical inspection of an object A measuring instrument for optical inspection of an object includes a light source for illuminating an object; a detector; an illuminating beam path extending from the light source to the object; a detection beam path extending from the object to the detector; an il... | 09/02/2008 |
| 7409309 | Method of deciding the quality of the measurement value by the edge width A method of deciding the quality of a measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, including acquiring the signal intensity distribution of the pattern on the object to-be-measured, detecting the edge p... | 08/05/2008 |
| 7400418 | Method and an apparatus for determining the clearance between a turbine casing and the tip of a moving turbine blade It is disclosed a method and an apparatus of determining the distance (D) between a collimator lens (13) and an object. Low-coherence light is emitted from a light source (1) and directed the low-coherence light through a collimator lens (13) to... | 07/15/2008 |
| 7397252 | Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current A method for accurately measuring feature sizes and quantifying the beam spot size in a CDSEM at real time is provided. The inventive method is based on a scanning microscope and it works on both conductive and non-conductive features. The measurement of conductive ... | 07/08/2008 |
| 7391524 | System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines A system and a method for optical characterization of a symmetric grating illuminated at off-normal incident angle are provided, where the plane of incidence is parallel to the grating lines. In this case corresponding positive and negative diffraction orders have t... | 06/24/2008 |
| 7379185 | Evaluation of openings in a dielectric layer A patterned dielectric layer is evaluated by measuring reflectance of a region which has openings. A heating beam may be chosen for having reflectance from an underlying conductive layer that is several times greater than absorptance, to provide a heightened sensiti... | 05/27/2008 |
| 7379194 | Method and system for determining mail piece dimensions using swept laser beam A method of measuring a mailpiece includes deflecting a laser beam through an arc, determining an angle at which the laser beam is currently directed, and calculating a dimension of the mailpiece based at least in part on the determined angle. ... | 05/27/2008 |
| 7375831 | Line width measuring method, substrate processing method, substrate processing apparatus and substrate cooling processing unit In optical line width measurement performed using the scatterometry technique, the present invention measures the line width formed on a substrate more accurately than in the prior art. After a predetermined pattern is formed in a resist film on a substrate, the ref... | 05/20/2008 |
| 7372541 | Lithographic apparatus and device manufacturing method In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. Gas is used between the structure and the surface of the substrate to contain liquid in the space.... | 05/13/2008 |
| 7365827 | Lithographic apparatus and device manufacturing method A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts. ... | 04/29/2008 |
| 7352440 | Substrate placement in immersion lithography A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position o... | 04/01/2008 |
| 7349106 | Apparatus and method for thin-layer metrology An apparatus (1) and a method for thin-layer metrology of semiconductor substrates (16) are disclosed. The semiconductor substrates (16) are delivered or transported to the apparatus (1) by means of at least one cassette element. A measur... | 03/25/2008 |
| 7341140 | Off-loading conveyor of produce An off-loading conveyor of produce having utility in the discrimination and separation of watermelons includes a support structure defining a conveying path, an endless flexible element mounted on the support structure to extend and to move along the conveying path ... | 03/11/2008 |
| 7336377 | Foot measuring device An apparatus for measuring the dimensions of pairs of human feet and a method for carrying out the measurements using the apparatus is described. The device is based on two light emitter/detector pairs. The emitter/detector pairs are caused to move in mutually ortho... | 02/26/2008 |
| 7330238 | Lithographic apparatus, immersion projection apparatus and device manufacturing method A lithographic apparatus comprises a substrate table to hold a substrate and a projection system to project a patterned radiation beam onto a target portion of the substrate. The lithographic apparatus further comprises a fluid supply system to supply a fluid betwee... | 02/12/2008 |
| 7326876 | Sequential lateral solidification device A sequential lateral solidification device, for enhancing optical characteristics of the device and for preventing damage caused by an ablation of a crystallization thin film, is disclosed. The device includes a laser light source generating a laser beam, a projecti... | 02/05/2008 |
| 7324185 | Lithographic apparatus and device manufacturing method In an embodiment, a lithographic projection apparatus has an off-axis image field and a concave refractive lens as the final element of the projection system. The concave lens can be cut-away in parts not used optically to prevent bubbles from being trapped under th... | 01/29/2008 |
| 7317507 | Lithographic apparatus and device manufacturing method A lithographic projection apparatus uses a volume of a second liquid to confine a first liquid to a space between the projection system and the substrate. In an embodiment, the first and second liquids are substantially immiscible and may be a cycloalkane, such as c... | 01/08/2008 |
| 7315384 | Inspection apparatus and method of inspection An inspection apparatus, comprising; an illumination system configured to provide an illumination beam for irradiating a target; a first detection system configured to detect radiation scattered from the target in a non-zero order diffraction direction; and the dete... | 01/01/2008 |
| 7315794 | Timber survey process and apparatus A timer survey system performing the steps of: placing a first reference point and a second reference point on a tree trunk, wherein an actual distance between the first reference point and the second reference point is a known distance, “A1”; capturi... | 01/01/2008 |
| 7312870 | Optical alignment detection system An optical alignment detection system for detecting the alignment of a first object relative to a second object is provided. One or more light sources and one or more light detectors, either or both of which are secured relative to the second object, are used to det... | 12/25/2007 |
| 7301623 | Transferring, buffering and measuring a substrate in a metrology system A chuck that clamps a substrate to the top surface using, e.g., a vacuum, electrostatic force, or other appropriate means, includes a plurality of lift pins that can raise the substrate off the top surface of the chuck. The chuck may be used with a metrology device ... | 11/27/2007 |
| 7297930 | Device for measuring width by light attenuation difference A device for measuring the width L of a mail item on the fly in a mail handling machine in which mail items are caused to move parallel to a reference wall, the device comprising: a detector device rendered active when the presence of a mail item passing over a plur... | 11/20/2007 |
| 7291850 | Lithographic apparatus and device manufacturing method A method and apparatus for monitoring a level of silicon dioxide in a liquid and removing the silicon dioxide using polishers is disclosed. In an embodiment, two polishers that absorb carbon dioxide and silicon dioxide, but which have a greater affinity for carbon d... | 11/06/2007 |
| 7289017 | Vehicular control object determination system and vehicle control system In a vehicular control object determination system, the position of an object detected by a radar device is stored by a detection position memory, and a predetermined area having the position of the object as the center is set as the determination region by a determ... | 10/30/2007 |
| 7285781 | Characterizing resist line shrinkage due to CD-SEM inspection A CD-SEM (critical dimension-scanning electron microscope) system may utilize a technique for characterizing and reducing shrinkage carryover due to CD-SEM measurements. The system may identify the affects of CD-SEM measurements on the resist and adjust the operatin... | 10/23/2007 |
| 7280231 | Apparatus for determining wall thickness of microcapsule A thickness-determining apparatus for determining a wall thickness of a microcapsule having a refractive index n1 comprises a sensor 1 for detecting a light scattering intensity data I1 with respect to the microcapsule dispersed in a medium havi... | 10/09/2007 |
| 7280233 | Method and apparatus for inspecting an edge exposure area of a wafer For an automatic defect inspection of an edge exposure area of a wafer, an optical unit supplies a light beam onto the edge portion of a wafer and a detection unit detects light reflected from the edge portion. The detection unit converts the detected light into an ... | 10/09/2007 |
| 7276380 | Transparent liquid inspection apparatus, transparent liquid inspection method, and transparent liquid application method The present invention provides a transparent liquid inspection apparatus capable of identifying a boundary between a transparent liquid applied on a base material which provides a multi-piece product and the base material, and automatically inspecting an applied con... | 10/02/2007 |
| 7274472 | Resolution enhanced optical metrology A resolution enhanced optical metrology system to examine a structure formed on a semiconductor wafer includes a source configured to direct an incident beam at the structure through a coupling element. The coupling element is disposed between the source and the str... | 09/25/2007 |
