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Class 356/623 - Triangulation


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein an image of a projected beam or
No. of patents: 280
Last issue date: 01/31/2012


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NumberTitleIssue Date
7230701Compact spectroscopic ellipsometer
The invention concerns an ellipsometer comprising: a source (2) capable of emitting a broadband ray (4), a polarizer (10) for producing a polarised incident beam (12) adapted to illuminate a sample (16) according to at least a sele...
06/12/2007
7227648Method and apparatus for a touch-free examination of objects, particularly regarding the surface character of the same
A method and apparatus for optically examining an object in a contactless manner, in which light successively impinges upon the surface of an object being examined. The different sources of light strike the object surface at different angles of incidence and reflect...
06/05/2007
7222737Die sorter with reduced mean time to convert
An adapter frame has channels that hold multiple die carriers in each channel. The die carriers, such as 2″×2″ or 4″×4″ waffle packs or GEL-PAK die carriers, slide into the channels and are secured by a spring clip retention mechanism. In other embodiments...
05/29/2007
7224910Direct attach optical receiver module and method of testing
Optical receiver modules are used for receiving high-speed optical data signals. Unfortunately, these optical receiver modules are often tested for the first time after they are packaged in a housing. Thus significant costs are associated with those packaged devices...
05/29/2007
7224431Lithographic apparatus and device manufacturing method
In, for example, an immersion lithography apparatus, a sensor that would normally be provided on the substrate table is replaced by a retro-reflector on the substrate table and a sensor at, for example, patterning device level. This may avoid the need to make the se...
05/29/2007
7221288Method and apparatus for using optical signal time-of-flight information to facilitate obstacle detection
One or more optical signals (wherein at least some of a plurality of optical signals are at different angles of travel with respect to one another and are directed towards an area comprising a movable barrier-controlled point of passage) create reflections when stri...
05/22/2007
7213740Optical structures including liquid bumps and related methods
A liquid prime mover can be used to position a component on a substrate. For example, a liquid material can be provided on the substrate adjacent the component such that the component has a first position relative to the substrate. A property of the liquid material ...
05/08/2007
7208724Apparatus and method of detecting probe tip contact with a surface
We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having...
04/24/2007
7202957Three-dimensional visual sensor
A three-dimensional visual sensor is disclosed. A two-dimensional image of a two-dimensional feature portion including a point determined on a work is acquired, and N points are determined. A slit of light is projected by a projector, an image of a projected portion...
04/10/2007
7198694Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These ...
04/03/2007
7193731Optical displacement sensor
Optical displacement sensor may possess light-emitting element(s) for projecting light onto distance measurement target(s), and light-receiving element(s) capable of receiving light reflected from distance measurement target(s) and disposed such that light-receiving...
03/20/2007
7190454Automatic power controller
An automatic power controller includes a photo detector for detecting the output power of the laser light source and generating a detection signal, a comparator for comparing the detection signal with a reference signal and outputting a comparison signal, a signal s...
03/13/2007
7190826Measuring the location of objects arranged on a surface, using multi-camera photogrammetry
A method and apparatus for measuring the location of objects arranged on a convex surface. A plurality of cameras is arranged in a stationary array about the surface, and is used to capture images of the objects. A parameterized model of the surface is developed usi...
03/13/2007
7180606Machine vision system for measuring heights of items
A machine vision system (1) has two laser sources (2, 3) to illuminate a solder deposit from both sides for comprehensive coverage without occlusion. The camera (4) has an FGPA (32) programmed to define a subset of the sensor array (20...
02/20/2007
7154112Distance measurement sensor
A measurement sensor comprising a PSD (30) as an optoelectronic receiver, a transmitter (10, 12) for generating spots (22, 26), optics (14, 32) for reproducing the spots (22′, 26′) on the PSD (30) and means (44, 46, 4...
12/26/2006
7154818Radio controlled clock movement control system
Disclosed is a radio controlled clock movement control system, including two stepper motors, two gearings, and a photo electronic control unit. The two stepper motors are operated independently each one driving a gearing, where the first gearing contains a second wh...
12/26/2006
7142198Method and apparatus for remote pointing
A remote pointing apparatus including a remote control that generates an optical signal that is periodically expanded and/or reduced around the origin and an optical sensor that detects whether the optical signal is received, and a remote pointing method therefor. T...
11/28/2006
7139121Projection microscope
This projection microscope (10) includes an elongate support member (12) carrying a stage assembly (22) between its ends, the stage assembly (22) having opposed sides and an associated specimen holder (28). A light emitting source ...
11/21/2006
7136170Method and device for determining the spatial co-ordinates of an object
The invention relates to a method for determining the spatial co-ordinates of an object, whereby the object is illuminated with patterns of light from at least two directions by means of a projection device. A calibrating camera and at least one measuring camera at ...
11/14/2006
7136519Specimen topography reconstruction
This method removes high frequency noise from shape data, significantly improves metrology system (10) performance and provides very compact representation of the shape. This model-based method for wafer shape reconstruction from data measured by a dimensiona...
11/14/2006
7130027Reflection-photometric analytical system
This invention generally relates to a reflection-photometric analytical system having a measuring head comprising a source of radiation and a radiation detector for the reflection-photometric analysis of a target surface of a test object arranged at a distance from ...
10/31/2006
7125312Rotor-grinding machine comprising a rotary head with two grinding wheels
The invention relates to a machine (1) for grinding the blades of a turbine rotor (2) or a compressor. The inventive machine consists of a rotary head (6) which is provided with two different grinding wheels (7, 7′) for grinding the rot...
10/24/2006
7127378Method and apparatus for establishing the layout of a building
An apparatus for establishing a layout of a building. The apparatus includes a mechanism for scanning a first room of the building to obtain room data. The apparatus also includes a scanner for forming a representation of a layout of the first room from the first ro...
10/24/2006
7119886Lithographic apparatus, device manufacturing method, and angular encoder
In a lithographic projection apparatus, a measuring system configured to measure the position of the projection system relative to a reference frame includes sensors rigidly mounted in relation to counterpart sensors of a measuring system measuring the substrate tab...
10/10/2006
7119887Optical distance measuring sensor and self-propelled cleaner
An optical distance measuring sensor has a plurality of light-emitting elements, a light-emitting lens, a photodetector having a light-receiving surface, a light emission driving part to sequentially drive the light-emitting elements, and a distance signal outputtin...
10/10/2006
7119912Ranging sensor and electronic device using the same
A ranging sensor includes: a light emitting element; a projection lens for projecting light emitted from the light emitting element to an object; a condenser lens for condensing light reflected from the object; and a light receiving element, provided at the light co...
10/10/2006
7117047High accuracy inspection system and method for using same
A method and a system that enable the inspection of large envelopes and complex surfaces. This is accomplished by generating a rotation and translation transform which enables the process monitoring system to define the location of the product placed in a field of v...
10/03/2006
7116839Optical measurement of vane ring throat area
A method and device for optically measuring throat area in a vane ring for a gas turbine engine, the method according to one aspect of the invention following the steps of: placing the vane ring on a fixture with the periphery of each throat within an optical measur...
10/03/2006
7113272Device and method for automatically inspecting objects traveling in an essentially monolayer flow
A device and a method for automatically inspecting objects traveling in an essentially monolayer flow. The device comprises a detection unit through which the object flow passes, consisting of the following: elements for applying electromagnetic radiation in the dir...
09/26/2006
7099017Methods and apparatus for measuring flow opening areas
A method and apparatus for measuring an opening defined within object using an optical sensor system is provided. The method includes positioning an illumination source adjacent the opening, illuminating a perimeter circumscribing the opening, receiving an image of ...
08/29/2006
7083405Photo-fabrication apparatus
A photo-fabrication apparatus comprises a stage for holding a photosensitive member which is a substrate coated with a photosensitive material, a head part for emitting a spatially-modulated light beam to said photosensitive member and a computer. The head part has ...
08/01/2006
7084978Sample orientation system and method
Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems. ...
08/01/2006
7084967Scanning system for inspecting anomalies on surfaces
A high sensitivity and high throughput surface inspection system directs a focused beam of light at a grazing angle towards the surface to be inspected. Relative motion is caused between the beam and the surface so that the beam scans a scan path covering substantia...
08/01/2006
7079974System and method for detecting an object using pulsed light
A system and method for detecting an object is provided. The method includes emitting a light pulse. The method further includes receiving a reflection of the light pulse. The method further includes indicating a presence of the object from the received light pulse....
07/18/2006
7071480Sensor with alignment self compensation
A material web attribute detection system with the material web having a first side and a second side. The system includes a radiation source located proximate to the first side of the material web and emitting radiation toward the material web, and a radiation dete...
07/04/2006
7050177Method and apparatus for approximating depth of an object's placement onto a monitored region with applications to virtual interface devices
Structured light is directed across a monitored region. An image is captured of a light pattern that forms on the object as a result of the object intersecting the structured light when the object is placed at a first position in the monitored region. A geometric ch...
05/23/2006
7046858Method for improved contrast mapping of digital images
A method of local contrast mapping that changes the dynamic range of an original image to more closely match the dynamic range of the medium used for the reproduction. The method compresses large contrast differences between different areas of an image while preserv...
05/16/2006
7046378Device and method for the optical detection of objects
A method and a device for the optical distance measurement and for the optical detection of objects with an at least partially specular reflective surface (12) wherein light through the specular reflective surface (12) and a diffuse scattering at a ref...
05/16/2006
7036232Apparatus for monitoring the rails of a railway or tramway line
A laser apparatus for monitoring the rails of a railway or tramway line, characterized by comprising at least two measurement units mounted on a railway or tramway carriage and operating at last on the inner part of the two rails, along with said carriage is made to...
05/02/2006
7033463Substrate plating method and apparatus
A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of the substrate to fill a wiring recess formed in the semiconductor subs...
04/25/2006
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