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Class 356/619 - Quadrature detection


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter wherein moire fringes are detected at two
No. of patents: 92
Last issue date: 05/13/2008


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NumberTitleIssue Date
7372580Three-dimensional shape detecting device, three-dimensional shape detecting system, and three-dimensional shape detecting program
In a three-dimensional shape detecting system comprising a three-dimensional shape detecting device and an external calculating device, the three-dimensional shape detecting device includes: projection means which projects pattern light onto a subject; image data ob...
05/13/2008
7348544Optical encoder with discontinuous optical grating
An optical encoder includes a light-emitting unit, a scale with a discontinuous part, and a plurality of light-receiving elements arranged in relationship to a pitch of the scale. In the optical encoder, a light beam from the light-emitting unit reflects off the sca...
03/25/2008
7349087Method for determining stokes parameters
A method of determining polarization profiles of points in a scene from video frames using Stokes parameters. The method includes emitting scene light rays from points in a region in a scene, and emitting a correlator light ray from a correlator. The correlator incl...
03/25/2008
7340844Device for mounting a position measuring device onto a machine tool, and position measuring system
A bracket set is for mounting an encoder device to a machine tool. The bracket set includes a first connector connectable to the machine tool; a first member adjustably connected to the first connector, a longitudinal axis of the first member arranged transverse to ...
03/11/2008
7299564Scanning unit and position measuring device
A scanning unit including a support and a scanning plate fastened on the support by a first fastening element and a second fastening element. An eccentric element that can be rotated around a first axis of rotation and causes pivoting of the scanning plate with resp...
11/27/2007
7292312Lithographic apparatus and method for calibrating the same
Lithographic apparatus includes a substrate table and a motion control system for controlling a movement of the substrate table. The motion control system includes at least 3 position detectors constructed for detecting a position of the substrate table. For measuri...
11/06/2007
7289229Optical displacement-measuring instrument
An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second...
10/30/2007
7286246Method and apparatus for non-contact three-dimensional surface measurement
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze th...
10/23/2007
7274449System for determining stokes parameters
A system for determining polarization profiles of points in a scene from video frames using Stokes parameters includes a scene having a region that emits scene light rays that correspond to the points in the scene, a color filter, a Stokes filter that includes a rot...
09/25/2007
7265338Photoelectric encoder using an incoherent semiconductor light source
A photoelectric encoder is provided, which emits light from a light source to a main scale and an index scale that can relatively move with respect to each other and obtains a light-receiving signal by interaction between the main scale and the index scale. The phot...
09/04/2007
7262851Method and apparatus for detecting relative positional deviation between two objects
Disclosed is a method and apparatus for detecting a relative positional deviation between first and second objects. In one preferred form of the invention, the detecting method includes the steps of (i) providing the first and second objects with diffraction grating...
08/28/2007
7258953Multi-layer registration and dimensional test mark for scatterometrical measurement
A layered test pattern for measuring registration and critical dimension (CD) for multi-layer semiconductor integrated circuits is disclosed. A first layer includes a first pattern having vertical and horizontal portions. A second layer is formed over the first laye...
08/21/2007
7230722Shadow moire using non-zero talbot distance
A method for measuring deformation in specimens is provided. The method includes providing a shadow moiré system, the shadow moiré system including an illumination source, a reference grating and an image capture device and providing a specimen. The method further...
06/12/2007
7214928Scanning unit for an optical position measuring device
A scanning unit for an optical position measuring device, the scanning unit having a structured optoelectronic photodetector that includes: a semiconductor substrate, a plurality of radiation-sensitive detector areas, which are arranged next to each other on the sem...
05/08/2007
7209235Accurate positioning of components of a optical assembly
A passive alignment technique is disclosed to facilitate accurate positioning of components of an optical assembly. In one aspect, a method includes directing light onto components of an optical assembly in which a first component includes a first pattern of marks w...
04/24/2007
7185444Modular scanning unit of a position measuring system
A modular scanning unit for a position measuring system and including a support having a recess with a guide surface and a holder adjustably supported upon the support, wherein the holder has a light source and a beam-shaping device aligned with the light source. A ...
03/06/2007
7154609Interferential position measuring arrangement
An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an incoming beam of rays. A scale grating which splits the incoming beam of...
12/26/2006
7127824Apparatus for detecting the position in space of a carriage moveable along a coordinate axis
Described is a device for machine tools or measuring apparatus for detecting the spatial position of a carriage movable in a coordinate axis along a guide with respect to a reference standard which is designed as a rectangular plate extending parallel to the guide o...
10/31/2006
7114265Apparatus for detecting the position of a probe element in a multi-coordinate measuring device
The invention is directed to a device for direct detection of the spatial position of a probe element in a multi-coordinate measuring apparatus, with a reference system comprised of at least one first standard and one second standard that are associated with coordin...
10/03/2006
7092108Method for determining a position and position measurement device for carrying out the method
A method for position determination that includes generating first and second position-dependent scanning signals, transmitting the first and second position-dependent scanning signals from a scanning location via corresponding first and second scanning channels to ...
08/15/2006
7058520Method and apparatus for detecting maximum and minimum values, and torque detecting apparatus and steering apparatus comprising the maximum and minimum values detecting apparatus
The method and apparatus for detecting maximum and minimum values, and the torque detecting apparatus and steering apparatus comprising the maximum and minimum values detecting apparatus can detect maximum and minimum values of detection signals without setting a pa...
06/06/2006
6922907Measuring system for recording absolute angular or position values
A measuring system for the recording of angular or position values, wherein the scale includes a measurement track with absolute encoding, and which is scanned by a sensor is provided. The scale is composed of at least two segments with similar absolute encod...
08/02/2005
6920699Device for and method for detecting a relative movement between two machine parts which are movable relative to one another
A device for detecting a relative movement between two machine parts movable relative to one another has a plurality of marking rulers arranged on one of the machine parts one after the other in direction of the relative movement of the machine parts and having incr...
07/26/2005
6919727Accurate time measurement system circuit and method
Disclosed is a method of measuring the time signal of an electronic device including steps for measuring a true signal and an inverted signal. The measured true path signal and inverted path signal are combined to reduce measurement error and provide an accurate mea...
07/19/2005
6580066Measurement signal generating circuit for linear scale
A measurement signal generating circuit for a linear scale capable of increasing an Signal-to-Noise (S/N) ratio, wherein S stands for Corona signal strength, and N for noise strength ratio of a signal for measurement of a linear scale. A photo detector or...
06/17/2003
6528783Position sensor and circuit for optical encoder
An electronic circuit for measuring the position of a spatially periodic intensity pattern of incident radiation includes an array of detectors (1); two or more correlator units (2, 3) each having arrays of capacitors (12, 13) connected to a buffer (14); ...
03/04/2003
6452159Position measuring system
A position measuring system that includes a scale having an incremental track, which extends in a measuring direction and has an incremental graduation with two different graduation periods. A scanning unit moves in relation to the scale in a measuring di...
09/17/2002
6291817Moire apparatus having projection optical system and observation optical system which have optical axes parallel to each other
In a moire apparatus having a projection grating 40, three-dimensional data of an object to be measured 2 is computed from the moire fringe observed while the projection grating 40 is moved, a distance-measuring reference point P (X, Y, Z) on the object 2...
09/18/2001
5859707Position detection apparatus and aligner comprising same
Position-detection apparatus (alignment sensors) are disclosed for determining the position of an object (e.g., wafer, bearing a position-detection mark) as required in microlithography processes for manufacturing semiconductor devices and displays. The a...
01/12/1999
5636025System for optically measuring the surface contour of a part using more fringe techniques
An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parall...
06/03/1997
5576537Photoelectric position measuring system using gratings having specified dimensions to suppress harmonics
A light source which emits light in strips is provided for illuminating a scale of a photoelectric position measuring system. The light modulated by the scale is converted into a sinusoidal scanning signal by a scanning plate. The scanning plate is a semi...
11/19/1996
5515730Apparatus for detecting the amplitude, frequency or modes of vibration of a vibrating panel
Apparatus for detecting at least one of the amplitude, frequency and modes of vibration of a panel is described. Detection is achieved using Moire fringes by employing two diffraction gratings (33 and 38) through the first of which light is projected on t...
05/14/1996
5493399Position measuring system with compensation for variable distance between light source and index disk
A position measuring system with compensation for variable distance between the light source and the index disk. The index disk has a plurality of index lines separated by masked areas. The light source emits beams of light that impinge upon the plane of ...
02/20/1996
5456021Apparatus and method for measuring linear and angular displacements
An apparatus and method for measuring displacement by determining the relative speed between a scale and a scanning plate from reading out a first track twice at different times. From this, correction values for the other tracks are calculated, which repr...
10/10/1995
5448358Optical apparatus and displacement-information measuring apparatus using the same
In an optical apparatus, a light beam from a light-emitting device is divided into a plurality of light beams by a first diffraction grating provided on a transparent substrate. The plurality of light beams are guided to a diffraction-grating scale which ...
09/05/1995
5414516Position measuring apparatus
A position measuring apparatus for obtaining position information by processing a first and second sinusoidal signals with the phase difference of 90° obtained by a detecting device in accordance with change of a position, comprises an adding and subtrac...
05/09/1995
5260769Position detector
The amount of relative in-surface rotation between two scales of a position detector is precisely detected to thereby determine the deviation in longitudinal phase between tracks in one scale. Thus, positional data corresponding to signals from the tracks...
11/09/1993
5253531System and method for monitoring torsional vibrations and operating parameters of rotating shafts
An optical system for monitor vibration, particularly applicable to power shafts in rotating power systems such as those found in trucks, naval vessels, turbogenerators, hydroelectric and nuclear generators, and helicopters, has an optical unit including ...
10/19/1993
5235405Detector apparatus for detecing coherent monohromatic point-source radiation
Detector apparatus includes a dispersive prism (10) and a diffraction grating (11) of the type which produces only zero and first order diffraction patterns. Located behind the diffraction grating (11) so as to interact with the first harmonic content of ...
08/10/1993
5233407Displacement signal output device
The invention provides a thin-profile displacement signal output device. The device comprises a first member having a periodic pattern consisting of alternating high-transmittance and low-transmittance regions, a second member having a periodic pattern co...
08/03/1993
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