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| Number | Title | Issue Date |
| 6186937 | Method and device for obtaining a desired phase of optical characteristic of a fabry-perot etalon A method and device for obtaining a desired phase of optical characteristic of a Fabry-Perot (FP) etalon using multiple optical detectors which, while passively aligned at various positions relative to an incident light beam, detect different phases of li... | 02/13/2001 |
| 5646728 | Ultrasensitive interferometer suitable for detecting gravitational waves A very low amplitude interferometer suitable for detecting gravitational waves is disclosed. The interferometer has an optical cavity consisting of a glass plate sandwiched between two three-dimensional interferometric arrays and contacting a body in whic... | 07/08/1997 |
| 5598264 | Noise compensated interferometric measuring device and method using signal and reference interferometers A sensor and a method for using the sensor for precise measurement of displacement is disclosed. The sensor comprises a fringe tracking signal processing system which can be used with any type of interferometer to provide high resolution over a large dyna... | 01/28/1997 |
| 5565987 | Fabry-Perot probe profilometer having feedback loop to maintain resonance This invention describes a surface profilometry system which measures the surface topography of a sample on a sub-nanometer scale. The surface profile is determined through measurement of the change in distance between two mirrors of a multi-pass resonant... | 10/15/1996 |
| 5555089 | Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source The absolute distance measuring interferometer (ADMI) is a multi-pass interferometer which is a resonant cavity consisting of two plane parallel mirrors whose length is referenced to a stabilized laser system. The resonant cavity can be used in order to m... | 09/10/1996 |
| 5528370 | Apparatus and method for measuring variations in thickness of an optical interference element In a system for measuring variations in thickness of an optical etalon, a light source and a diffraction grating are mounted on a base structure with an axle. A lever arm is affixed to the axle, and a micrometer is held in contact with the lever arm. The ... | 06/18/1996 |
| 5502563 | Transporter for optical spectrum analyzer in alignment system A Fabry-Perot resonator, also called a Fabry-Perot cavity, is a spectroscopic device of extremely high resolving power and is a very useful tool for alignment of mask and wafer for the multiple exposures necessary to make a semiconductor integrated circui... | 03/26/1996 |
| 5412474 | System for measuring distance between two points using a variable frequency coherent source An interferometric gauge for high precision absolute and incremental measurements of distances of up to at least 100 meters. An accuracy of 0.02 Angstrom has been demonstrated, free of the ~10 Angstrom polarization-leakage errors of conventional gauges. T... | 05/02/1995 |
| 5353115 | System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer A system and method for generating a desired displacement of an object, i.e., a target, from a reference position with ultra-high accuracy utilizes a Fabry-Perot etalon having an expandable tube cavity for resolving, with an Iodine stabilized laser, displ... | 10/04/1994 |
| 5185643 | Arrangement for operating a laser diode The invention is directed to an arrangement for operating a laser diode. A two-stage stabilization circuit is provided for stabilizing the wavelength of a laser diode to exactly defined values for its use in distance measuring interferometers. In addition... | 02/09/1993 |
| 5155550 | Accurate correlator of rotational and translational motions and control method and apparatus A beam retarder positioned in the path of a superimposed linearly polarized working beam and an orthogonal linearly polarized reference beam, where the working beam and the reference beam have travelled over different optical paths, converts the linearly ... | 10/13/1992 |
| 5141319 | Displacement detection device with adjacent semiconductor diode lasers A displacement detection device has a laser unit. The laser unit has two semiconductor lasers formed on a single substrate through a single process. One of the lasers has an end coated with a reflection preventing film and facing a mirror provided at the ... | 08/25/1992 |
| 5128537 | Device for optically measuring a pressure differential A device for optically measuring a pressure difference in a medium by means of a Fabry-Perot interferometer, comprises a transparent plate and a diaphragm block connected to the transparent plate, the diaphragm block comprising a substrate, a measuring di... | 07/07/1992 |
| 5103572 | Feeler pin using an optical contact sensor A feeler pin having a contact element with a contact sensor, which is constructed as a laser feedback interferometer whose resonator quality is varied by changes in position of the contact element enabling measurement of radiation flux or the internal res... | 04/14/1992 |
| 4991962 | High precision alignment system for microlithography This invention discloses a high-precision alignment system for aligning a mask with a wafer in a high-resolution microlithography system. This alignment system has a high-sensitivity mask-wafer displacement detection system characterized by an optical het... | 02/12/1991 |
| 4973131 | Modulator mirror This modulator mirror comprises at least two partially transparent reflector stacks bonded to two separate substrates held apart by spacers to create a parallel gap between the partially transparent reflector stacks wherein the gap has a reference spacing... | 11/27/1990 |
| 4768182 | Apparatus for monitoring optical path differences utilizing an etalon The optical path difference between two reflecting surfaces of an etalon 2 is monitored by directing a light beam B onto the etalon, directing the reflected beam Ba from the etalon onto an optical reference wedge 3 and directing the reflected beam Bb from... | 08/30/1988 |
| 4729654 | Laser interferometer A laser interferometer wherein a laser beam emitted from a laser device at a fixed position impinges on an optical lens mounted on a movable member, and interference fringes are produced on a semitransparent mirror formed at an end of the optical lens opp... | 03/08/1988 |
| 4645349 | Method of measuring film thickness An improved method of measuring film thickness of the film layer on a certain material is disclosed. The method is carried out by way of the steps of measuring reflection intensity spectrum, determining extreme values of wavelength relative to the spectru... | 02/24/1987 |
| 4596466 | Method for the measurement of lengths and displacements A method and apparatus are provided for the remote measurement of a quantity of length or displacement, employing fiber-optical signal transmission between two or more interferometers, one of which acts as an optical transducer while the other acts as the... | 06/24/1986 |
| 4589772 | Pulsed remote gauge A method for measuring the separation between two spaced light-reflecting rfaces by means of a single laser pulse. The reflected light is divided into two beams which are then projected at the same angle θ onto the same area on a photographic film to for... | 05/20/1986 |
| 4558950 | Interferometric distance and direction measurement For interferometric measurement of the length of the linear component of movement of a moving point relative to a fixed point and simultaneous recognition of the direction of that movement, two merged or overlapping Fabry-Perot part interferometers are us... | 12/17/1985 |
| 4558952 | Method for measuring an optical length of light path and a laser interferometer for carrying same into effect A method for measuring an optical length of light path based on use of multiple-beam interference of light and carried into effect by forming an original light beam with two collinear components having mutually independent polarizations and different freq... | 12/17/1985 |
| 4492464 | Apparatus and method for distance measurement by laser interferometry The apparatus and method include adjusting two single frequency lasers to separate longitudinal modes of an interferometer, the plates of which are separated by a distance to be measured. A rough estimate of the distance is made using a tape measure or th... | 01/08/1985 |
| 4452533 | External cavity diode laser sensor A sensor for sensing conditions such as acoustic waves, temperature changes, acceleration current and magnetic fields. The sensor employs a diode laser having its cavity contained between end facets defined by partially reflective mirrors, supplemented by... | 06/05/1984 |
| 4309109 | Pulsed interferometric remote gauge The invention comprises a method and means for measuring the separation been two optical surfaces. A short-coherence-length laser pulse is projected upon two optical surfaces separated by a distance, d. The reflected, coincident beams are directed into a... | 01/05/1982 |
| 4160600 | Pressure-responsive apparatus A pressure transducer has a capsule having two chambers separated from one another by a diaphragm. The capsule is made entirely of a glass-ceramics material, such as, lithium alumino silicate. One of the chambers is sealed and has a lens with a curved sur... | 07/10/1979 |
