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| Number | Title | Issue Date |
| 5515167 | Transparent optical chuck incorporating optical monitoring A transparent chuck is used to force a semiconductor wafer to take a prescribed shape. Any gap which is formed between the chuck and the wafer can be imaged through the transparent chuck. An interferometer is used to illuminate the gap with a narrow band ... | 05/07/1996 |
| 5325177 | Optical, interferometric hole gauge An optical gauge for measuring the dimension of a hole in a workpiece employs an interferometric technique using a partially coherent radiation source. A beam of the radiation is directed to a beam splitter positioned a known distance from one of the know... | 06/28/1994 |
| 5223912 | Method and device for measuring at least one transverse dimension of a textile yarn A method and device for measuring at least one transverse dimension of a textile yarn using an optical system. The measuring device comprises a coherent light source which sends a beam (10) onto a cylindrical lens (11). Two axially movable plates (12, 13)... | 06/29/1993 |
| 5187543 | Differential displacement measuring interferometer A linear displacement interferometer system employs glass wedge prisms (71, 73, 75, 76) diposed about the interferometer axis of symmetry to refract the beams (51A, 55A) produced by the interferometer onto a single area (72, 86) approximately the size of ... | 02/16/1993 |
| 5179863 | Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance An apparatus for setting the gap distance between a mask and a wafer, facing with each other to a predetermined distance, is arranged as follows. A wafer stage is movable along a reference plane defined as a plane parallel to the transferring direction of... | 01/19/1993 |
| 5133599 | High accuracy linear displacement interferometer with probe A high accuracy linear displacement interferometer capable of measuring changes in displacement of two plane mirror surfaces (60, 61) comprises a source (10) of an input beam (12) with two linear orthogonally polarized components which may or may not be o... | 07/28/1992 |
| 4932782 | Channelled light spectrum analysis measurement method and device, more especially for measuring a low amplitude movement of a mobile surface, which may be representative of a variation of a physical magnitude convertible into such a movement A measuring method and device are provided based on the analysis of a channelled light spectrum, particularly for measuring a low amplitude movement of a mobile surface, possibly representative of the variation of a physical magnitude convertible into suc... | 06/12/1990 |
| 4932781 | Gap measuring apparatus using interference fringes of reflected light A proximity gap measuring system usable in a proximity mask aligner. The measuring system includes an illumination optical system for illuminating a mask and a wafer with white light, and an optical system, including a Wollaston prism, for dividing a wave... | 06/12/1990 |
| 4854701 | Arrangement for inspecting light waveguide end faces The invention relates to an arrangement of inspecting light waveguide end faces by observing the interference pattern formed by means of measuring light in the airgap between a plane transparent plate and the end face of a light waveguide abutting on said... | 08/08/1989 |
| 4842410 | Apparatus and method utilizing interference fringes to determine the thermal stability of a liquid In a method of evaluating the thermal stability of hydrocarbon liquid fuels, the fuel flows over a heated tube that causes the fuel to decompose and deposit a residue as a film on the surface of the heated tube. The thickness of that residue film is a mea... | 06/27/1989 |
| 4815855 | Interferometric load sensor and strain gage The invention comprises an interferometric load sensor, or force balance 10 which utilizes etalons 12, 14 to form a reflective cavity 16. A fringe pattern is formed in cavity 16 by light from laser source 26. One of the etalons (14) is mounted to a sectio... | 03/28/1989 |
| 4656347 | Diffraction grating position adjuster using a grating and a reflector A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the sec... | 04/07/1987 |
| 4618261 | Optical gap measuring A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a subs... | 10/21/1986 |
| 4560277 | Process and device for qualitative and quantitative measurement of irregularities and impurities on and in transparent or semitransparent flexible sheet materials Disclosed is a process for the qualitative and quantitative measurement of irregularities and impurities on and in transparent or semitransparent flexible sheet materials, comprising the steps of producing interference fringes by obliquely directing a lig... | 12/24/1985 |
| 4498775 | Method for detecting distance deviations to a photoresist surface in an optical printer A device for monitoring gap deviations in an optical printer comprises a mask having a plurality of closely-spaced differently-sized apertures. Actinic light passing through the aperture to a photoresist surface develops a pattern of diffraction-induced i... | 02/12/1985 |
| 4408883 | Apparatus for inspecting average size of fundamental patterns An apparatus for determining the average size of fundamental patterns contained in a given region of an object to be inspected, which includes Fourier transform means for producing output data corresponding to a Fourier transform pattern image of the give... | 10/11/1983 |
| 4403860 | Apparatus for determining dimensions Apparatus and method for determining dimensions of an object. In one embodiment, apparatus comprises a support structure, means for positioning an object, at least one gage member having a contact portion for contacting a surface of a positioned object an... | 09/13/1983 |
| 4168911 | Diffractographic and other sensors utilizing diffraction waves A method and devices for sensing changes in separation of a first member relative to a second member, as well as variables causing such changes is disclosed. Electromagnetic waves diffracted by means included in said first member interact with waves from ... | 09/25/1979 |
| 4131365 | Method and apparatus for determining object position and dimension using a diffraction wave The disclosed invention relates to methods and apparatus for obtaining the dimension, position or angle of an object using a point on the object boundary surface to create a diffraction wave when illuminated by a laser beam or other source of electro-magn... | 12/26/1978 |
| 4072423 | Light interference device with low degree of spacial coherence A light interference device comprising a light source having a low degree of spacial coherence, an optical element having a reference surface for interference, an optical system for providing a parallel light bundle, and an optical projection system for p... | 02/07/1978 |
| 4050818 | Method for determining changes in spacing between two positions of interest The method of determining the change in the spacing between two positions on a single object or a position on each of two objects, by affixing two linear scatterers at the two positions; illuminating the scatterers with coherent monochromatic light from a... | 09/27/1977 |
| 4014613 | Method and apparatus for determining changes in spacing between two positions of interest The method of determining the change in the spacing between two positions on a single object or a position on each of two objects, by affixing two linear scatterers at the two positions; illuminating the scatterers with coherent monochromatic light from a... | 03/29/1977 |
| 4009965 | Method and apparatus for determining object dimension and other characteristics using diffraction waves The disclosed invention relates to methods and apparatus for obtaining the dimension, position or angle of an object using a point on the object boundary surface to create a diffraction wave when illuminated by a laser beam or other source of electro-magn... | 03/01/1977 |
| 3994584 | Diffractographic and other sensors utilizing diffraction waves A method and devices for sensing changes in separation of a first member relative to a second member, as well as variables causing such changes is disclosed. Electromagnetic waves diffracted by means included in said first member interact with waves from ... | 11/30/1976 |
| 3954337 | Method and apparatus for determining the average size of apertures in an apertured member The average aperture width in a small area of an apertured member, such as a shadow mask for a cathode-ray tube, is determined by passing a beam of substantially monochromatic light through an area of the member to form an interference pattern, detecting ... | 05/04/1976 |
| 3937580 | Electro-optical method for measuring gaps and lines Rather than counting nulls in the diffraction pattern generated by a very narrow line or gap in order to measure its width, the diffraction pattern is optically detected and converted to an analog electrical signal constituting a function of the detected ... | 02/10/1976 |
