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Class 356/498 - Displacement or distance


Subclass of Class 356 - Optics: measuring and testing
Definition: Dimensional measurement wherein the interferometer is
No. of patents: 342
Last issue date: 05/01/2012


1                  
NumberTitleIssue Date
8169619Detector element matrix for an optical position measuring instrument
A detector element array for an optical position measuring instrument, by way of such array a fringe pattern resulting in a detector plane can be converted into electrical scanning signals. The detector element array includes a plurality of light-sensitive detector ...
05/01/2012
8149420Interferometer calibration system and method
A metrology system is provided comprising a diffraction grating mounted on the object, and an interferometer head operable to direct at least one measurement light beam towards the grating at a non-zero angle of incidence. With a single first separation in the secon...
04/03/2012
8035820Method and apparatus for resonant frequency identification through out-of-plane displacement detection
A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrat...
10/11/2011
8031344Z-stage configuration and application thereof
A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of the z-stage may decrease the vibrational movements of the z-stage. Furt...
10/04/2011
8018600Interferometer for measuring displacement information of an object
An interferometer includes a laser beam source, a light wave dividing and synthesizing portion for 2-demultiplexing and irradiating a laser beam irradiated from the laser beam source on a measuring target and synthesizing a light having each displacement information...
09/13/2011
8018601Method for determining vibration displacement and vibrating frequency and apparatus using the same
A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting d...
09/13/2011
7990542Memory-based high-speed interferometer
An interferometer produces a first optical signal and a second optical signal interfering with each other. The optical signals are converted digital signals form addresses. A memory stores data values corresponding to the first and second optical signals, and in whi...
08/02/2011
7920273Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer
In the tracking type laser interferometer including: a laser interferometer; an optical axis deviation detection sensor for detecting a deviation of an optical axis of the laser interferometer; a two-axis turning mechanism for turning the laser interferometer to any...
04/05/2011
7889354Interferometric measuring device
A device for an interferometric measuring device having a first interferometer and a second interferometer, short coherent radiation being supplied to the first interferometer via a radiation source which is split into to beam components by a first beam splitter; an...
02/15/2011
7889353Method of measuring relative movement of an object and an optical input device over a range of speeds
A method and optical module for measuring relative movement of an input device and object (15) along at least one measuring axis. A laser device (3) having a laser cavity is provided for generating a measuring beam (13) in respect of each measur...
02/15/2011
7826062Device to detect or generate optical signals
The present invention relates to a device for detecting or generating and modulating optical signals, and having an angular dispersive element arranged to change angles of the optical signals or carrier and/or reference rays brought to interference. ...
11/02/2010
7791736Position measurement system
A position measurement system for measuring positional coordinates of a point under measurement includes a first noise removal unit, a parameter determination unit and a second noise removal unit. The first noise removal unit removes noise from the measured position...
09/07/2010
7791735Pointing device
There is provided a pointing device including a light source that provides incident light for illuminating a front surface of a substrate at a predetermined angle of incidence, the substrate having a rear surface as well as the front surface and being transparent to...
09/07/2010
7782466Method and apparatus for resonant frequency identification through out-of-plane displacement detection
A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrat...
08/24/2010
7746477System and method for illuminating and imaging a surface for an optical navigation system
The present invention discloses an optic system for providing illumination and imaging functions in an optical navigation system. Generally, the optic system includes a unitary optic component having an illumination lens and at least one prism to project a collimate...
06/29/2010
7724375Method and apparatus for increasing metrology or inspection tool throughput
A method and system for performing measurements on a test sample with a metrology or inspection tool are disclosed. At least one of the test sample and the tool is moved with respect to the other from a first position to a second position. At the second position, th...
05/25/2010
7715016Image invariant optical speckle capturing device and method
An image invariant optical speckle capturing device and method. A highly coherent light is used to illuminate a surface and is scattered by the surface, and is captured from the direction with a ±10° from the angle of specular reflection. A light restrictive modul...
05/11/2010
7663764Measuring device and method to optically measure an object
A measuring device for the optic measuring of an object 13a is provided, in particular for measuring a motion of the object. The device includes an interferometer 20 with a measuring beam exit 12, a reflection beam entry 14, an int...
02/16/2010
7649631Distance/speed meter and distance/speed measuring method
In a distance/speed meter, first and second semiconductor lasers emit parallel laser light beams to a measurement target. A first laser driver drives the first semiconductor laser such that the oscillation interval in which at least the oscillation wavelength monoto...
01/19/2010
7633628Optical lens system and position measurement system using the same
An optical lens system includes a lens surface capable of forming concentric interference patterns on an object as if light emitted from a single light source were virtually emitted from two or more light sources within a plane containing an optical axis of the sing...
12/15/2009
7619744Movement sensor
In an apparatus for handling sheet material or an optical input device, for example, which employs a relative movement sensor (108) utilizing the so-called “self-mixing” effect of a laser diode, a band pass filter (100) is provided for filtering th...
11/17/2009
7609387Method and measuring device for measuring an absolute distance
In a method and a measuring device (10) for measuring an absolute distance value corresponding with a range (9) between a measuring device (10) and a target (8), wherein for measuring the absolute distance value a number of individual mea...
10/27/2009
7599070Optical axis polarization type laser interferometer
An optical axis polarization type laser interferometer including a reference sphere which forms a reference of measurement, a retro-reflecting means disposed at a measurement object, a laser interference measuring apparatus for outputting a measurement value corresp...
10/06/2009
7593113Large areas undistorted imaging apparatus for light speckles and method thereof
The present invention relates to a large area undistorted imaging apparatus for light speckles and a method thereof. The large area undistorted imaging apparatus for light speckles comprises a light-emitting device, a light-limiting module, and a sensor. The light-l...
09/22/2009
7583387Seismic exploration
An instrument for studying an object (12) comprising a movable interferometer having a laser source and a plurality of detectors (24) arranged in an array. The laser source is expanded and arranged to direct a converging object beam (21) towards...
09/01/2009
7583388Position measurement system
A position measurement system for measuring positional coordinates of a point under measurement includes a first noise removal unit, a parameter determination unit and a second noise removal unit. The first noise removal unit removes noise from the measured position...
09/01/2009
7545506Interferometric measuring device
The present invention relates to an interferometric measuring device having a short-coherent radiation source, a modulation interferometer and a downstream reference interferometer connected thereto. The mechanical coupling between the reference interferometer and t...
06/09/2009
7542149Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector
An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the referen...
06/02/2009
7542150Displacement interferometer system and exposer using the same
A displacement interferometer system comprises: a light source for generating a laser beam of a predetermined wavelength; an incidence unit for allowing the laser beam, generated in the light source to be incident on a target object to be measured; a detector for me...
06/02/2009
7538888Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer
A method for estimating an absolute distance between a tracking laser interferometer and a retroreflector is provided. The tracking laser interferometer includes the retroreflector for reflecting and returning an incident measurement light in an incident direction a...
05/26/2009
7535579System and method for optical vibration sensing
A system for sensing vibration of a machine is provided. A light source directs a beam of light toward a light receiving system adapted to receive at least a portion of the beam of light. A light modulating system modulates the light beam received by the light recei...
05/19/2009
7535580Image forming apparatus and image forming method
An image forming apparatus which can form an even image while maintaining high resolution. A speckle pattern detecting unit detects a speckle pattern on a surface of a photosensitive drum. A motor drive circuit controls the rotational speed of the photosensitive dru...
05/19/2009
7511825Pointing device
A pointing device includes a light source, an aperture member, and a detector. The light source provides incident light for illuminating an obverse surface of a plate at a predetermined incident angle. The plate has the obverse surface and a reverse surface and is t...
03/31/2009
7495770Beam shear reduction in interferometry systems
In certain aspects, the invention features interferometry systems that include an input assembly positioned to receive a beam emitted from a light source comprising a first component beam and a second component beam, the input assembly being configured to change a d...
02/24/2009
7489406Optical lens system and position measurement system using the same
An optical lens system includes a lens surface capable of forming concentric interference patterns on an object as if light emitted from a single light source were virtually emitted from two or more light sources within a plane containing an optical axis of the sing...
02/10/2009
7480059Optical coherence tomography for eye-length measurement
An accurate measure of eye length can be obtained using concurrent OCT measurements. A position OCT device can be used to continually monitor the position of the front surface of the cornea, while a distance OCT device can determine the apparent distance between the...
01/20/2009
7460242Systems and methods for high-precision length measurement
Provided are systems and methods for performing high-precision length measurement. One such system includes: an optical receiver, configure to receive a reflected optical pulse from a target; an optical combiner, configured to generate a combined optical pulse using...
12/02/2008
7436519System and method for interferometer non-linearity compensation
A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital position values. The method includes sensing whether a low velocity conditi...
10/14/2008
7433047Runout characterization
Runout characterization is performed on a moving body by positioning a light source and optical sensor at a nominal distance from the moving body, with a beam directed from the light source against a surface of the moving body. The reflected light is detected at a s...
10/07/2008
7420542Apparatus for capturing and analyzing light and method embodied therein
An apparatus including an image sensor is disclosed. The apparatus includes a polarization filter, an image sensor, and a processor connected to the image sensor. The polarization filter is adapted to filter out light polarized in a first direction from a first scen...
09/02/2008
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