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Class 356/394 - With comparison to master, desired shape, or reference voltage


Subclass of Class 356 - Optics: measuring and testing
Definition: Subject matter including optical elements to permit the
No. of patents: 795
Last issue date: 02/14/2012


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NumberTitleIssue Date
8115928Box inspector
A box inspector for detecting at an inspection station an unacceptable skew in, an item missing from, and/or an unacceptable gap in a box. The box inspector has pairs of aligned emitters and receivers generating a signal when an unacceptable skew is detected, at lea...
02/14/2012
8072600Inspection method of circuit substrate
An inspection method for a circuit substrate is disclosed, which inspects electrical properties of a circuit substrate having a multilayered structure, by controlling inspection environments so that dew forms on a surface of the circuit substrate and detecting chang...
12/06/2011
7952713Bonding agent sticking inspection apparatus, mounting apparatus, and method of manufacturing electrical component
A bonding agent sticking inspection apparatus includes a photographing section, a movement section, and a control section. The photographing section photographs an image of a substrate. The image includes a sticking expected range indicating a range in which a bondi...
05/31/2011
7593103Light intensity measuring method and electronic device
The present invention discloses a method for measuring an intensity of a part of an electromagnetic spectral range, and an electronic device implementing the method. The method comprises the steps of providing an electronic device comprising an optical device (10...
09/22/2009
7580129Method and system for improving accuracy of critical dimension metrology
A method for improving accuracy of optical critical dimension measurement of a substrate is provided. A process parameter that influences the refractive index and extinction coefficient of a thin film in the substrate is identified. A refractive index and extinction...
08/25/2009
7561269Optical measurement system with systematic error correction
An optical measurement system and wafer processing tool for correcting systematic errors in which a first diffraction spectrum is measured from a standard substrate including a layer having a known refractive index and a known extinction coefficient by exposing the ...
07/14/2009
7557920Method and apparatus for auto-adjusting illumination
A machine-vision system that provides changing and/or automatic adjustment of illumination angle, dispersion, intensity, and/or color of illumination. One such system includes a light source emitting polarized light, a machine-vision imager, an image processor opera...
07/07/2009
7542140Detection method using electromagnetic wave and detection apparatus
A detection apparatus includes a sample holding section, an irradiation means, a detection means, a calculation means, and an evaluation means. The irradiation means irradiates a substance held in the sample holding section with a THz wave. The detection unit detect...
06/02/2009
7532328Circuit-pattern inspection apparatus
The disclosed subject matter is related to a circuit pattern inspection apparatus for detecting a gradual changing of defect expanding over a large area of the semiconductor wafer. In order to detect a gradual changing of a defect related condition expanding over a ...
05/12/2009
7525658System of correlating light measurements
A system provides a correlation between a field-tested measured light transmission, light reflection and/or light absorption in at least one transparent, translucent or semi-opaque medium to a pre-set measured light transmission. ...
04/28/2009
7440093Apparatus and methods for providing selective defect sensitivity
Disclosed are techniques and apparatus for accounting for differing levels of defect susceptibility in different pattern areas of a reticle in an inspection of such reticle or in inspection of a semiconductor device fabricated from such reticle. In general terms, tw...
10/21/2008
7433032Method and apparatus for inspecting defects in multiple regions with different parameters
In a method of inspecting defects, a first actual region of an actual object is inspected based on a first characteristic parameter as an inspection condition. A point where an inspection region of the actual object is changed into a second actual region from the fi...
10/07/2008
7421109Pattern inspection apparatus
A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measure...
09/02/2008
7417750Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer
Structures formed on a semiconductor wafer are consecutively measured by obtaining first and second measured diffraction signals of a first structure and a second structure formed abutting the first structure. The first and second measured diffraction signals were c...
08/26/2008
7415149Pattern inspection apparatus
A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination w...
08/19/2008
7394084Method of generating image and illumination device for inspecting substrate
For generating an image for inspection of a substrate, a camera is provided above this substrate with an optical axis orienting downward and a plurality of multi-colored light emitting members are set around the optical axis of the camera so as to be within a specif...
07/01/2008
7373332Methods and apparatus for detecting temporal process variation and for managing and predicting performance of automatic classifiers
Techniques for detecting temporal process variation and for managing and predicting performance of automatic classifiers applied to such processes using performance estimates based on temporal ordering of the samples are presented. ...
05/13/2008
7369236Defect detection through image comparison using relative measures
Inspection of objects such as semiconductor wafers can include comparisons of shapes between inspection and reference images. As part of the inspection process, relative values may be assigned to pixels within each image based on comparison of such pixels to neighbo...
05/06/2008
7369224Surface inspection apparatus, surface inspection method and exposure system
A surface inspection apparatus includes an illumination means for illuminating a pattern formed through a predetermined pattern forming process containing a process of exposure of a resist layer formed on a substrate having a periodicity with a linearly polarized li...
05/06/2008
7365324Testing apparatus using charged particles and device manufacturing method using the testing apparatus
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, th...
04/29/2008
7365837Vision inspection apparatus using a full reflection mirror
The present invention relates to a vision inspection apparatus and method using total reflection mirrors. The present invention provides a vision inspection apparatus using the total reflection mirrors comprising; a board position control module for fixing a printed...
04/29/2008
7365862Methods and apparatus for inspecting an object
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto an object, and an imaging sensor for receiving light reflected from the object. The method includes determining a profile of the object to b...
04/29/2008
7359042Inspection system for limited access spaces
A limited access space inspection system comprising: an imaging device for imaging a region in the limited access space, a mounting for mounting the imaging device to scan about the limited access space and a scanning control unit, associated with the imaging device...
04/15/2008
7359043Pattern inspecting method and pattern inspecting apparatus
A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measure...
04/15/2008
7355681Optical proximity correction using chamfers and rounding at corners
Disclosed is a method of optimizing a design to be formed on a substrate. The method includes approximating rounding of at least one corner of an image of the design; generating a representation of the design further to the approximate rounding of the at least one c...
04/08/2008
7355692System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
A method for inspecting an electrical circuit including optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom in a first image during a first time interval, optically inspecting light emitted from at least a portion ...
04/08/2008
7353954Tray flipper and method for parts inspection
Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconduc...
04/08/2008
7352892System and method for shape reconstruction from optical images
Reconstructing the shape of the surface of an object in greater than two dimensions is performed using a noise-tolerant reconstruction process and/or a multi-resolution reconstruction process. The noise-tolerant reconstruction process can be a Bayesian reconstructio...
04/01/2008
7352456Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes
A surface inspection apparatus and method are disclosed. In particular, the method and apparatus are capable of inspecting a surface in two (or more) optical regimes thereby enhancing the defect detection properties of such method and apparatus. A method involves il...
04/01/2008
7349575Pattern inspection method and apparatus, and pattern alignment method
In a pattern inspection method, a master pattern serving as a reference and the continuous tone image of a pattern to be measured that is sensed by a camera are aligned. At least the position of a base in the continuous tone image of the pattern to be measured is de...
03/25/2008
7349106Apparatus and method for thin-layer metrology
An apparatus (1) and a method for thin-layer metrology of semiconductor substrates (16) are disclosed. The semiconductor substrates (16) are delivered or transported to the apparatus (1) by means of at least one cassette element. A measur...
03/25/2008
7342681High-speed calibration method and system for an image-capture apparatus
The present invention provides a calibration method and circuit for outputting an average calibration value used in an image-capture apparatus. The calibration circuit comprises difference means accepting a plurality of digital signals from capturing a pixel of a ca...
03/11/2008
7339662Exposure apparatus and a device manufacturing method using the same
A scanning type exposure apparatus includes a projection optical system which projects a pattern of a reticle onto a wafer, which is held by a wafer chuck, a scanning stage system which scanningly moves the reticle and the wafer synchronously with respect the projec...
03/04/2008
7339661Dark field inspection system
Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from ...
03/04/2008
7339672Solid-state image pickup device and signal reading method therefor
A solid-state image pickup device has a photoelectric conversion part performing photoelectric conversion on incident light, a comparison part connected to an output terminal of the photoelectric conversion part to compare an output voltage of the photoelectric conv...
03/04/2008
7339651Exposure equipment and related control method
Exposure equipment adapted for use in the manufacture of semiconductor devices and a related control are disclosed. A wafer stage in the exposure equipment comprises an image sensor adapted to detect patterned light from the reticle. Image data corresponding to the ...
03/04/2008
7336374Methods and apparatus for generating a mask
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining ...
02/26/2008
7332708Optical encoder
In an optical encoder, a plurality of light sources is controlled on and off so as to use light rays to irradiate an optical grating of a scale from a plurality of different directions. The light rays are received by a plurality of photoreceptor elements. Operations...
02/19/2008
7333192Apparatus and method for inspecting defects
A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been ...
02/19/2008
7330248Method and apparatus for inspecting defects
In a defect inspecting apparatus, having contrast, brightness and appearance of a target for inspection and detection sensitivity of a defect changed depending on optical system conditions, and adapted to perform inspection by selecting an optimal test condition, ev...
02/12/2008
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