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Class 356/243.7 - Texture


Subclass of Class 356 - Optics: measuring and testing
Definition: Surface standard further comprising the optical comparison
No. of patents: 6
Last issue date: 10/20/2009


NumberTitleIssue Date
7605915System and method to create haze standard
In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembl...
10/20/2009
7265850Fortified, compensated and uncompensated process-sensitive scatterometry targets
A scatterometry target is provided in which a plurality of parallel elongated features are placed, each having a length in a lengthwise direction. A plurality of stress-relief features are disposed at a plurality of positions along the length of each elongated featu...
09/04/2007
6989896Standardized sample for characterizing the performance of a scatterometer
A standardized sample for scatterometry includes four quadrants each including an inner block surrounded by four outer blocks. A pattern of gratings is repeated within each of the blocks using different resolutions and orientations. Each grating within an outer bloc...
01/24/2006
6941792Surface inspection system
A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration w...
09/13/2005
6490033Method of thin film process control and calibration standard for optical profilometry step height measurement
A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a...
12/03/2002
6429944Process and device for determining the thickness transverse profile and thickness longitudinal profile of a running strip of material
A process for the determination of the thickness transverse profile and the thickness longitudinal profile of a running material strip. The process includes (a) determining the strip thicknesses in at least two measuring areas, (b) determining the longitu...
08/06/2002
 
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