"I hate what they've done to my child...I would never let my own children watch it. "
Vladimir Zworykin, television pioneer ; Talking about an invention in which he played a critical role.
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| Number | Title | Issue Date |
| 7605915 | System and method to create haze standard In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembl... | 10/20/2009 |
| 7265850 | Fortified, compensated and uncompensated process-sensitive scatterometry targets A scatterometry target is provided in which a plurality of parallel elongated features are placed, each having a length in a lengthwise direction. A plurality of stress-relief features are disposed at a plurality of positions along the length of each elongated featu... | 09/04/2007 |
| 6989896 | Standardized sample for characterizing the performance of a scatterometer A standardized sample for scatterometry includes four quadrants each including an inner block surrounded by four outer blocks. A pattern of gratings is repeated within each of the blocks using different resolutions and orientations. Each grating within an outer bloc... | 01/24/2006 |
| 6941792 | Surface inspection system A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration w... | 09/13/2005 |
| 6490033 | Method of thin film process control and calibration standard for optical profilometry step height measurement A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a... | 12/03/2002 |
| 6429944 | Process and device for determining the thickness transverse profile and thickness longitudinal profile of a running strip of material A process for the determination of the thickness transverse profile and the thickness longitudinal profile of a running material strip. The process includes (a) determining the strip thicknesses in at least two measuring areas, (b) determining the longitu... | 08/06/2002 |