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| Number | Title | Issue Date |
| 7703217 | Drying-storing apparatus for powdered or granular material and feeding system for powdered or granular material A drying and storing apparatus for powdered or granular material and a feeding system for powdered or granular material. The apparatus comprises a heating and drying chamber having a discharge port at its lower end and a thermal conductive heating means therein and ... | 04/27/2010 |
| 7316079 | Method for drying resin pellets An apparatus for drying resin pellets to be supplied to a molding machine under reduced pressure of a desired level by a reduced pressure drying means comprises a preheating means for heating resin pellets to be supplied to the reduced pressure drying means to a tem... | 01/08/2008 |
| 7208188 | Method of producing a press-molded dried food material A molded dried food material which can be preserved at normal temperature, exhibits favorable rehydrating property with full of voluminous feeling when rehydrated, maintaining excellent taste, color and eat feeling without permitting the shape to be collapsed. A met... | 04/24/2007 |
| 7089681 | Method and apparatus for filtering and drying a product The present invention relates to a method and apparatus for filtering and drying a product. In a preferred embodiment, the apparatus comprises a container having a plurality of porous walls and a plurality of solid walls that divide the container into a plurality of... | 08/15/2006 |
| 7085616 | Atomic layer deposition apparatus A method and apparatus for atomic layer deposition (ALD) is described. The apparatus comprises a deposition chamber and a wafer support. The deposition chamber is divided into two or more deposition regions that are integrally connected one to another. The wafer sup... | 08/01/2006 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first precursor gas is introduced to an enclosure at a first enclosure pressure.... | 06/06/2006 |
| 6929774 | Method and apparatus for heating and cooling substrates A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapte... | 08/16/2005 |
| 6865821 | Vacuum lumber drying kiln with collapsing cover and method of use A lumber drying kiln employs outside air pressure uses a flexible collapsing bag or cover alone or in combination with walls. The collapsing bag seals against a base to maintain the vacuum. The air pressure against the flexible top keeps the lumber layers from warpi... | 03/15/2005 |
| 6857201 | Method for treating and drying of wood Object for the invention is a method for treatment and drying of wood, in which at the first phase wood is warmed up over to the temperature close of the boiling point of water, and wood is compressed with a variable pressure between moisture permeable pressing elem... | 02/22/2005 |
| 6746573 | Method of drying fibrous structures A method for drying fibrous webs utilizing a limiting orifice medium with a plurality of pores. The web is disposed on a supporting fluid permeable carrier. The web is pressed between the supporting carrier and the limiting orifice medium. A vacuum greater than the ... | 06/08/2004 |
| 6658763 | Method for heating and cooling substrates A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism... | 12/09/2003 |
| 6634118 | Method and apparatus for vacuum drying wood in a collapsible container in a heated bath Wood is disposed in a container having at least one flexible wall, and vacuum is applied to the container. The flexible wall presses against a surface of the wood. The container and wood are them immersed in a heated bath (e.g. comprising water, air, or o... | 10/21/2003 |
| 6596091 | Method for sweeping contaminants from a process chamber A method for preparing a chamber prior to semiconductor processing includes the step of flowing a non-reactive gas, preferably argon, through the chamber at a pressure below 4 Torr to sweep contaminants from the chamber. The chamber pressure is reduced to... | 07/22/2003 |
| 6546646 | Method and apparatus for microwave processing of planar materials A process and apparatus for removing moisture from a material, without spoiling the processed product, through the implementation of microwave irradiation heating, drying, dehydration, curing, disinfection, pasteurization, sterilization or vaporization or... | 04/15/2003 |
| 6487793 | Vacuum processing apparatus and operating method therefor This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are t... | 12/03/2002 |
| 6477787 | Method and apparatus for heating and cooling substrates A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism... | 11/12/2002 |
| 6463676 | Vacuum processing apparatus and operating method therefor A method and apparatus for transferring a substrate that includes a cassette table capable of holding a plurality of cassettes, wherein the cassettes are capable of receiving a plurality of substrates. An atmospheric loader is arranged between the plurali... | 10/15/2002 |
| 6430840 | Method of and apparatus for drying a wafer using isopropyl alcohol A method of and an apparatus for drying a wafer using the Marangoni effect quickly forms an isopropyl alcohol layer on a cleaning liquid in which the wafer is submerged. The isopropyl alcohol is first heated and then supplied in a fluid state onto the cle... | 08/13/2002 |
| 6393723 | Forced convection heat exchangers capable of being used in kilns A kiln chamber has an air moving device for circulating air in the chamber interior space along a flow path, and pipe banks positioned in the chamber interior space. Each pipe bank includes finned pipes for having a heated medium flow interiorly therethro... | 05/28/2002 |
| 6387282 | Method of drying a filter cake and a press for carrying out the method The filter cake in a filter press is heated by direct contact with a heating plate opposite the pressing membrane so that a vapor phase is generated which moves uniformly in a planar pressure front through the filter cake to dry residual liquid therefrom.... | 05/14/2002 |
| 6357143 | Method and apparatus for heating and cooling substrates A method and apparatus for heating and cooling a substrate. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted ... | 03/19/2002 |
| 6286230 | Method of controlling gas flow in a substrate processing system A method of transferring and processing a substrate in an evacuable chamber which is located adjacent a process chamber and back-to-back process chambers, and other combinations of evacuable chambers and process chambers. The method includes the use of va... | 09/11/2001 |
| 6276072 | Method and apparatus for heating and cooling substrates A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism... | 08/21/2001 |
| 6256903 | Coating dryer system The present invention relates to heating systems for drying wet coatings such as printing inks, paint, sealants, etc. applied to a substrate. In particular, the invention relates to a drying system in which a blower having an inlet directs a current of he... | 07/10/2001 |
| 6192601 | Method and apparatus for reducing particle contamination during wafer transport The present invention provides method and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the step of preheating a substrate in a preheater to a desired temperature. The preheated substrate is tran... | 02/27/2001 |
| 6182376 | Degassing method and apparatus An apparatus and method is provided for capturing, heating and degassing a wafer without using moving parts and without exposing the wafer to external stress. A degassing chamber is backfilled with a dry gas that improves wafer heating ramp rates and wafe... | 02/06/2001 |
| 6178660 | Pass-through semiconductor wafer processing tool and process for gas treating a moving semiconductor wafer A pass-through, wafer-processing tool for treating a moving semiconductor wafer with a process gas. The tool comprises an open-ended, non-isolated processing module having a wafer path through the module, vacuum manifolds mounted adjacent the wafer entry ... | 01/30/2001 |
| 6128831 | Process for drying medicinal plants Medicinal plants are dried by applying microwave power to plant materials in a chamber under reduced pressure to reduce the moisture content of the plant materials without significantly reducing (oxidizing) the concentration of active medicinal component ... | 10/10/2000 |
| 5953832 | Method for drying a coated substrate A method of drying a coated monolithic substrate by imposing a vacuum at one end of the substrate to draw volatilized constituents out of the channels and by delivering a gas stream through the other end of the substrate during the drying process.... | 09/21/1999 |
| 5882381 | Thermal desorption system A thermal desorption system for the treatment of contaminated solids.... | 03/16/1999 |
| 5857269 | Process for manufacturing fatty alcohol sulfate products A process for manufacturing improved granulated fatty alcohol sulfates. The process includes slowly drying and mechanically mixing the fatty alcohol sulfate.... | 01/12/1999 |
| 5759287 | Method of purging and passivating a semiconductor processing chamber A method for purging and passivating a vacuum chamber suitable for use in the production of integrated circuit structures on semiconductor wafers. The method includes flowing a heated, non-reactive gas, such as argon gas, through the chamber for purposes ... | 06/02/1998 |
| 5702655 | Method for charging powdery heat insulator into a thermally insulated, double-shelled tank Provided is a method for charging a powdery heat insulator into a thermally insulated, double-shelled tank between its inner vessel and outer vessel. The method comprises causing a powdery heat insulator to flow together with water into a space between th... | 12/30/1997 |
| 5656178 | Method for treatment of contaminated materials with superheated steam thermal desorption and recycle A method is provided for the treatment of contaminated materials such as impounded sludges and contaminated soils by thermal desorption wherein a solid matrix is subjected to the action of superheated steam in a closed vessel, a gas stream comprising supe... | 08/12/1997 |
| 5598643 | Capillary dewatering method and apparatus Disclosed is a method for reducing the moisture content of a paper web in a papermaking process from in the range of 10% to 32% dry to the range of 33% to 50% dry wherein the embryonic web is supported on a knuckled through drier fabric and lightly presse... | 02/04/1997 |
| 5560122 | One-pot mixer/granulator/dryer The invention relates to a one-pot mixer/granulator/dryer constituting a single step or one-pot production apparatus for successively mixing, moist-granulating and drying solid pharmaceutical products, for example in the manufacture of powdered products, ... | 10/01/1996 |
| 5548905 | Rapid dehydrating and drying method and device usable in low temperature A high speed negative pressure air stream from a sucking-out nozzle or a combination of a high speed negative pressure air stream from the sucking-out nozzle and a high speed air jet stream from a blowing nozzle are used for drying an article. Flanges can... | 08/27/1996 |
| 5536330 | Method of purging and pumping vacuum chamber to ultra-high vacuum A method for purging a vacuum chamber suitable for use in the production of integrated circuit structures on semiconductor wafers. The method comprises providing the chamber to be purged and flowing a heated, non-reactive gas, such as argon gas, through t... | 07/16/1996 |
| 5505007 | Method for drying structural components made of fiber reinforced plastic materials Fiber reinforced structural components, such as panels with honeycomb cores sandwiched between at least two outer skin layers are dried to remove moisture that may have entered into the interior of the structure. For this purpose the component is cooled i... | 04/09/1996 |
| 5433020 | Apparatus and method for vacuum drying An article is dried in a vacuum and sublimation is prevented by controlling both the heat applied to the article and the heat lost through evaporation. The article is placed in a vacuum chamber having a plurality of infrared lamps disposed around the inte... | 07/18/1995 |
