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Patent No. 6637829

Decorative Jeweled Wheel Cover

An improved wheel is provided wherein decorative items such as gem stones are embedded in either the wheel surface, a special mounting section attached to the wheel surface, or to a spoke strap that wraps around each spoke and positions embedded gem stones on the outside surface of the spoke.

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Class 34/410 - Treating agent is inert gas


Subclass of Class 34 - Drying and gas or vapor contact with solids
Definition: Process wherein the treating agent used is a chemically
No. of patents: 58
Last issue date: 05/27/2008


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NumberTitleIssue Date
7377053Method and device for drying substrate
A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate supporting member supporting substrates within the processing vessel,...
05/27/2008
7368016Substrate processing unit and substrate processing apparatus
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing se...
05/06/2008
7361231System and method for mid-pressure dense phase gas and ultrasonic cleaning
Workpieces are loaded into a cleaning chamber. The cleaning chamber is pressurized with a first dense-phase cleaning fluid, the temperature and pressure of the first dense-phase fluid being maintained at less than about 1500 psi using a temperature control device. T...
04/22/2008
7335333Method of altering a fluid-borne contaminant
An improved method of altering a fluid-borne contaminant includes the steps of: providing a positive-displacement pump (21) having an inlet (22) and an outlet (23); connecting the pump inlet to a source (24) of contaminated fluid; operati...
02/26/2008
7291565Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl...
11/06/2007
7270941Method of passivating of low dielectric materials in wafer processing
A method of passivating silicon-oxide based low-k materials using a supercritical carbon dioxide passivating solution comprising a silylating agent is disclosed. The silylating agent is preferably an organosilicon compound comprising organo-groups with five carbon a...
09/18/2007
7255772High pressure processing chamber for semiconductor substrate
A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical...
08/14/2007
7250374System and method for processing a substrate using supercritical carbon dioxide processing
A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat...
07/31/2007
7179000Method of developing a resist film and a resist development processor
The present invention provides a resist development processor consisting of a development processing chamber for storing a resist substrate having an exposed resist on the substrate and for developing the exposed resist by means of a development solvent consisting o...
02/20/2007
7177081High contrast grating light valve type device
A grating light valve has with a plurality of spaced reflective ribbons are spatially arranged over a substrate with reflective surfaces. The grating light valve is configured to optimized the conditions for constructive and destructive interference with an incident...
02/13/2007
7140393Non-contact shuttle valve for flow diversion in high pressure systems
A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf...
11/28/2006
7111556Printing system, print request terminal, compression algorithm selecting program and printing method
A printing system is provided suitable for reducing a printing time. A client apparatus acquires document data being edited during an editing operation by an application, creates print data for evaluation based on the acquired document data, selects a compression al...
09/26/2006
7068372MEMS interferometer-based reconfigurable optical add-and-drop multiplexor
The interferometer comprises a beam splitter, a mirror and a phase modulator. The beam splitter splits a signal into a first portion and a second portion. The mirror reflects the first portion. The first portion includes an optical path length, which is fixed. The p...
06/27/2006
7054515Diffractive light modulator-based dynamic equalizer with integrated spectral monitor
An integrated device of the present invention comprises free-space optics, a bi-directional multiplexor/de-multiplexor, a diffractive light modulator, a beam splitter, an optical performance monitor, and a controller. The free-space optics collimate, transform and i...
05/30/2006
7049164Microelectronic mechanical system and methods
The current invention provides for encapsulated release structures, intermediates thereof and methods for their fabrication. The multi-layer structure has a capping layer, that preferably comprises silicon oxide and/or silicon nitride, and which is formed over an et...
05/23/2006
7044147System, apparatus and method for contaminant reduction in semiconductor device fabrication equipment components
A system, apparatus, and method for reducing contaminants of semiconductor device fabrication equipment components, featuring a manifold having a passageway in fluid communication with to a plurality of inlets and for providing a purge fluid to removably connected c...
05/16/2006
7044662Developing photoresist with supercritical fluid and developer
An apparatus for developing a polymeric film without the need for a water rinse step is disclosed. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber of the apparatus. A fluid and developer is introduced ...
05/16/2006
7042611Pre-deflected bias ribbons
A modulator for and a method of modulating an incident beam of light including means for supporting a plurality of active elements and a plurality of bias elements, each active and bias element including a light reflective planar surface with the light reflective pl...
05/09/2006
7033089Method of developing a resist film and a resist development processor
The present invention provides a resist development processor consisting of a development processing chamber for storing a resist substrate having an exposed resist on the substrate and for developing the exposed resist by means of a development solvent consisting o...
04/25/2006
6953654Process and apparatus for removing a contaminant from a substrate
Contaminant removal from a substrate can be performed using a supercritical fluid. An apparatus can be configured to operate at conditions that take advantage of higher solubility of a contaminant in its supercritical state compared to its liquid state. The substrat...
10/11/2005
6947613Wavelength selective switch and equalizer
A device comprising a light modulator including a plurality of elements wherein each element is selectively operable such that the plurality of elements are dynamically configurable to combine selected ones of a plurality of grating periods such that selected portio...
09/20/2005
6928748Method to improve post wafer etch cleaning process
A method and apparatus for performing a semiconductor process wafer drying process, the method provides a semiconductor wafer having a process surface disposed in an enclosed drying space following exposure of the process surface to water; supplying a solvent vapor ...
08/16/2005
6928207Apparatus for selectively blocking WDM channels
An apparatus for selective blocking WDM channels comprises a light modulator, a diffraction grating, and a transform lens. The light modulator comprises an array of pixels. Each pixel of the light modulator is selectively operable to direct light into a first mode a...
08/09/2005
6923869Device for deposition with chamber cleaner and method for cleaning the chamber
A chamber cleaner includes a cleaner, which is sealed, a connector passing through a side of the cleaner, lamp assembly connected to the connector and uniformly arranged in an inside surface of the cleaner, a heat-source assembled in the lamp assembly and an exhaust...
08/02/2005
6922272Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices
A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ ligh...
07/26/2005
6908201Micro-support structures
A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one o...
06/21/2005
6896743Wafer drying methods of Marangoni type and apparatus suitable therefor
A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric supply rate to form an organic liquid layer on a surface of the cleaning ...
05/24/2005
6889447Method for drying a wafer and apparatus for performing the same
An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing chamber to below atmospheric pressure; a drying chamber installed wit...
05/10/2005
6745494Method and apparatus for processing wafers under pressure
A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlled draining ...
06/08/2004
6605254Method using ethylene oxide to fumigate corrosion promoting microbes
The present invention relates to a method of fumigating closed systems susceptible to microbially influenced corrosion (MIC). The method is particularly useful in a method for mitigating MIC in fire protection sprinkler systems....
08/12/2003
6543156Method and apparatus for high-pressure wafer processing and drying
A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlle...
04/08/2003
6532684System for cleaning pressurized containers
The present invention relates to a system for cleaning a pressurized container having at least one chemical contained therein. More specifically, the container may store a quantity of a chemical that is reactive with water and forms dangerous reaction pro...
03/18/2003
6442867Apparatus and method for cleaning a vertical furnace pedestal and cap
A system (10) is disclosed for cleaning a vertical furnace (12) pedestal (34) and cap (36) including at least one inlet conduit (40) in fluid communication with a pressurized cleaning medium source (46). The system also includes at least one exhaust condu...
09/03/2002
6430840Method of and apparatus for drying a wafer using isopropyl alcohol
A method of and an apparatus for drying a wafer using the Marangoni effect quickly forms an isopropyl alcohol layer on a cleaning liquid in which the wafer is submerged. The isopropyl alcohol is first heated and then supplied in a fluid state onto the cle...
08/13/2002
6357142Method and apparatus for high-pressure wafer processing and drying
A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlle...
03/19/2002
6289605Method for drying a semiconductor wafer
The present invention provides a drying method for removing a residual solution from a semiconductor wafer. The semiconductor wafer is placed into a chamber, and then the air pressure of the chamber is lowered from atmospheric pressure to a lower pressure...
09/18/2001
6286231Method and apparatus for high-pressure wafer processing and drying
A method and apparatus for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then...
09/11/2001
6286230Method of controlling gas flow in a substrate processing system
A method of transferring and processing a substrate in an evacuable chamber which is located adjacent a process chamber and back-to-back process chambers, and other combinations of evacuable chambers and process chambers. The method includes the use of va...
09/11/2001
6263587Degassing method using simultaneous dry gas flux pressure and vacuum
An apparatus and method for clamping and heating a wafer without using moving parts and without exposing the wafer to external stress is provided. A high backside wafer pressure which provides efficient heat transfer from a heated substrate support to the...
07/24/2001
6249990Method and apparatus for transporting articles
In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of th...
06/26/2001
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