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| Number | Title | Issue Date |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7270132 | Washer A washer includes a plurality of washing devices for spraying washing water to an object to be washed from various directions of a washing tub, and a washing water feeding device for feeding the washing water. The washing water is sequentially sprayed from respectiv... | 09/18/2007 |
| 7255772 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 08/14/2007 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat... | 07/31/2007 |
| 7181863 | Wafer dryer and method for drying a wafer A wafer dryer and method featuring a nebulizer which emits a pressurized drying liquid stream that converges with an opposed pressurized non-reactive carrier gas stream to produce a drying liquid fog. The pressurized non-reactive gas spray device is disposed partial... | 02/27/2007 |
| 7178263 | Method of manufacturing incombustible wood Provided is a method of manufacturing incombustible wood that enables maximization of the amount of an incombustion agent used to be impregnated into wood. Further provided is a method of manufacturing incombustible wood that completely satisfies incombustible-wood ... | 02/20/2007 |
| 7172734 | Sanitizing device and associated method A sanitizing device comprising: a sanitizing component for sanitizing a surface, liquid, gas, and/or associated surrounding environment, wherein the sanitizing component includes an electrochemical, chemical, and/or corona cell; and a housing for retaining the sanit... | 02/06/2007 |
| 7156927 | Transition flow treatment process and apparatus A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liqui... | 01/02/2007 |
| 7140393 | Non-contact shuttle valve for flow diversion in high pressure systems A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf... | 11/28/2006 |
| 7125516 | Vacuum drying process used for manufacturing dialyzer A method of sterilizing and drying a dialyzer or other device, wherein a vacuum drying phase is interrupted by interspersed pulses of air or other gas. The pulses lessen the evaporative cooling effect, to thereby reduce differential shrinkage that can structurally d... | 10/24/2006 |
| 7044662 | Developing photoresist with supercritical fluid and developer An apparatus for developing a polymeric film without the need for a water rinse step is disclosed. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber of the apparatus. A fluid and developer is introduced ... | 05/16/2006 |
| 7022570 | Methods of forming hemispherical grained silicon on a template on a semiconductor work object The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by sil... | 04/04/2006 |
| 6923015 | Refrigerator A refrigerator includes a refrigerating cycle unit for refrigerating an atmosphere in the refrigerator by means of heat absorption due to change of a flammable refrigerant from a liquid phase to a gaseous phase, and a deodorizer having first and second electrodes di... | 08/02/2005 |
| 6918192 | Substrate drying system A substrate drying system for drying substrates after the substrates are washed typically using deionized water, is disclosed. The substrate drying system comprises a substrate cleaning tank in which the substrates are washed. A dry pump is provided in fluid communi... | 07/19/2005 |
| 6896743 | Wafer drying methods of Marangoni type and apparatus suitable therefor A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric supply rate to form an organic liquid layer on a surface of the cleaning ... | 05/24/2005 |
| 6889447 | Method for drying a wafer and apparatus for performing the same An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing chamber to below atmospheric pressure; a drying chamber installed wit... | 05/10/2005 |
| 6802137 | Solvent drying method The present invention is directed to a controlled environment processing chamber of chambers in which parts are to be dried. The parts either contain water on or imbibed into the part. The process includes a means of applying a negative gauge pressure to the chamber... | 10/12/2004 |
| 6769200 | Device for spray-drying solvent-containing compositions An apparatus and method for the spray drying of solvent-containing compositions. A liquid or paste-form solvent-containing composition is heated to a temperature above the boiling point of the solvent, transported under excess pressure and at a temperature above the... | 08/03/2004 |
| 6605254 | Method using ethylene oxide to fumigate corrosion promoting microbes The present invention relates to a method of fumigating closed systems susceptible to microbially influenced corrosion (MIC). The method is particularly useful in a method for mitigating MIC in fire protection sprinkler systems.... | 08/12/2003 |
| 6550158 | Substrate handling chamber An apparatus and method for reducing particles in reactors. The apparatus includes an enclosure with a wafer handling chamber connected by an isolation gate valve to a processing chamber. Pipes deliver purge gas into the wafer handling chamber to eliminat... | 04/22/2003 |
| 6460269 | Wafer dryer comprising revolving spray nozzle and method for drying wafers using the same A wafer dryer for drying a wafer includes a chamber and a support adapted to support the wafer in the chamber. A spray nozzle is disposed in the chamber. A source gas supply tank is in fluid communication with the spray nozzle. At least one heater is oper... | 10/08/2002 |
| 6409932 | Method and apparatus for increased workpiece throughput A method is disclosed for speeding workpiece thoughput in low pressure, high temperature semiconductor processing reactor. The method includes loading a workpiece into a chamber at atmospheric pressure, bringing the chamber down to an intermediate pressur... | 06/25/2002 |
| 6289605 | Method for drying a semiconductor wafer The present invention provides a drying method for removing a residual solution from a semiconductor wafer. The semiconductor wafer is placed into a chamber, and then the air pressure of the chamber is lowered from atmospheric pressure to a lower pressure... | 09/18/2001 |
| 6263587 | Degassing method using simultaneous dry gas flux pressure and vacuum An apparatus and method for clamping and heating a wafer without using moving parts and without exposing the wafer to external stress is provided. A high backside wafer pressure which provides efficient heat transfer from a heated substrate support to the... | 07/24/2001 |
| 6219936 | Wafer drying device and method Nitrogen gas is jetted into a space on the liquid level of pure water in a drying chamber in which wafers are immersed. Simultaneously therewith, liquid-phase isopropyl alcohol is jetted at a temperature higher than the temperature of the wafers and in th... | 04/24/2001 |
| 6134806 | Bag with air distributor and ozone generator A portable sport equipment bag having an air distributor is connected with a hose to blower and ozone generator operable to move air and ozone under pressure into the air distributor. The air distributor has one or more manifolds located within the bag. T... | 10/24/2000 |
| 6128830 | Apparatus and method for drying solid articles Disclosed herein is an apparatus and method for drying solid articles such as semiconductor wafers. In one embodiment, the dryer comprises a process tank and a drying fluid supply system. The process tank includes a plurality spray nozzles to spray a non-... | 10/10/2000 |
| 6119368 | Apparatus for reducing cool chamber particles An improved cool chamber is provided which includes a gas manifold for redistributing the gas flow and reducing the velocity of the gas particles that are directed towards a wafer. The gas manifold has a generally circular body that defines a plurality of... | 09/19/2000 |
| 6098679 | Dimensionally stable oriented strand board (OSB) and method for making the same The present invention is concerned with a method for obtaining a wood panel, preferably an OSB panel, with significantly reduced thickness swelling properties when exposed to or contacted with moisture or water. The novel dimensionally stable panels are o... | 08/08/2000 |
| 5815947 | Method and apparatus for maintaining sensitive articles in a contaminant-free environment Sensitive articles, such as IC wafers can be maintained in a contamination-free condition. A base member is provided for supporting one or more of the sensitive articles. A cover is provided for sealing engagement with a base member so as form a sealed un... | 10/06/1998 |
| 5797195 | Nitrogen trifluoride thermal cleaning apparatus and process The present invention is a method and apparatus for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with thermally activated nitrogen trifluoride wherein the cleaning effluent is safely removed and cleaning by-produ... | 08/25/1998 |
| 5551165 | Enhanced cleansing process for wafer handling implements Methods are providing for cleansing contaminants from substrates, such as semiconductor wafer handling implements, and thereby reduce the incidence of contamination of semiconductor devices being assembled upon the semiconductor wafers. In one aspect of t... | 09/03/1996 |
| 5539998 | High purity bulk chemical delivery system An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainme... | 07/30/1996 |
| 5537760 | System of low-temperature low-humidity preservation storage and accelerated retrieval of books and other papers In a combined system or method for extending the life expectancy of an article of cellulosic material such as a book or other paper, the book or other paper is put in preservation storage at subnormal temperature and subnormal humidity. The resulting loss... | 07/23/1996 |
| 5426865 | Vacuum creating method and apparatus A vacuum creating method comprising preparing a chamber for forming a space which can be made so atmospheric and vacuous as to allow a substrate to be directly or indirectly carried in and out of the space, exhausting the chamber, filling the space in the... | 06/27/1995 |
| 5392530 | Method of seasoning lumber A three step process to season lumber to reduce cracks in the lumber and reduce warping of the lumber. In a first step, the lumber is piled up into a pressure vessel for seasoning. The vessel is charged with saturated steam, the pressure of which fluctuat... | 02/28/1995 |
| 5359787 | High purity bulk chemical delivery system An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainme... | 11/01/1994 |
| 5351415 | Method and apparatus for maintaining clean articles A method, system and apparatus for maintaining articles to be processed clean, having an airtight transportable container with an inlet valve for admitting ionized gas and an outlet valve for venting gas, a purger with an interface to the container inlet ... | 10/04/1994 |
| 5232550 | Vacuum drying method A vacuum drying method and wherein a feed liquid is sprayed into a solvent vapor before being introduced into a vacuum chamber for vacuum evaporation, whereby a powder having spherical particles is produced. Moreover, the amount of solvent remaining in th... | 08/03/1993 |
| 5222307 | Drying method and apparatus therefor A drying method for removing free water resided on electronic parts such as semiconductors, liquid-crystal display devices and printed wiring boards, optical parts such as lenses and prisms, and precision instrument parts such as gears and lead frames hav... | 06/29/1993 |
