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| Number | Title | Issue Date |
| 8056256 | Method for reconditioning FCR APG-68 tactical radar units A method for reconditioning Fire Control Radar APG-68 tactical radar systems (FCR) utilized in military aircraft and returning them to operation with extended useful life expectancies equivalent to or better than new of the FCR APG-68 unit high frequency, high volta... | 11/15/2011 |
| 7658017 | Vacuum drying method A vacuum drying apparatus and method to dry and cure paint is disclosed. The method provides a substantially particle free environment that shortens drying time, reduces cost and improves surface finish. The apparatus includes an enclosed drying tunnel that is maint... | 02/09/2010 |
| 7461465 | Pressure control in centrifugal evaporators A method of controlling the pressure within a chamber (12) of a drying apparatus (10) from which air and vapour is removed by a pump (30), which is operated continuously during the drying process. If both of a vent valve (18) and a pressu... | 12/09/2008 |
| 7370436 | Dual apparatus and process for quick freezing and/or freeze drying produce An apparatus capable of performing consecutively, independently and/or simultaneously the processes of quick freezing and/or freeze drying of produce. The apparatus is characterized by a central vacuum system operating over one or more independent vacuum chambers ( | 05/13/2008 |
| 7347007 | Low pressure high capacity dryer for resins and other granular and powdery materials A vacuum dryer and method for drying granular or powdery material including at least one canister for holding said material being movable among a series of locations including material heating and vacuum drying locations, means for moving said canister among said lo... | 03/25/2008 |
| 7347006 | Processing apparatus and method for removing particles therefrom A processing apparatus includes a first detection unit for detecting a temperature of an inner wall of the vacuum vessel, a second detection unit for detecting a temperature of the processing unit, and a first control unit for controlling a temperature of the gas. T... | 03/25/2008 |
| 7337553 | Lint detector methods and apparatuses Methods and apparatuses of for detecting lint are disclosed. In one embodiment, a light is directed to a plate. The light can be being emitted by a light source. A reflectometer is calibrated to a specific thermal emissivity of the plate. The thermal emission result... | 03/04/2008 |
| 7335277 | Vacuum processing apparatus A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and a mass flow con... | 02/26/2008 |
| 7322225 | Adhesion promotion vacuum monitoring system for photo resist coaters An apparatus and method for monitoring pressure within an adhesion promotion unit is provided. The apparatus in one embodiment includes a chamber configured to receive and heat a semiconductor wafer. A vacuum device is in fluid communication with a processing space ... | 01/29/2008 |
| 7306680 | Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus A lithographic mask is placed in a chamber which is then sealed. The gas pressure in the chamber is reduced to dislodge contaminant particles on the mask surface. ... | 12/11/2007 |
| 7234235 | Wire processing method of cross-linking coated wire In wire cross-linking process, after microwave is launched into the inside of the waveguide coaxial converter, the coated wire is inserted into the wire insertion pipe. The coated wire is cross-linked by high frequency heat and a coating insulator is adhered well to... | 06/26/2007 |
| 7234247 | Low pressure dryer A low pressure dryer for granular or powdery material includes a plurality of canisters rotatable about a common vertical axis serially among material heating, vacuum drying and material inventory discharge positions; pneumatic piston-cylinder means for rotating the... | 06/26/2007 |
| 7210246 | Methods and systems for handling a workpiece in vacuum-based material handling system Methods and systems are provided for handling an item in a vacuum-based handling system for semiconductor manufacturing. The methods include providing a heater or dryer for the load lock of the handling system that dries a semiconductor wafer during the pumping down... | 05/01/2007 |
| 7207101 | Wire processing apparatus A wire processing apparatus includes a microwave generator, a microwave transmitter, a waveguide coaxial converter and a wire insertion pipe, and the wire insertion pipe is disposed in the wireguide coaxial converter. In wire recycling process, after a tip end of a ... | 04/24/2007 |
| 7205025 | Apparatus and method for drying under reduced pressure, and coating film forming apparatus In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After t... | 04/17/2007 |
| 7189376 | Multi-zoned catalyst and trap Provided are coated, multi-zoned catalyst substrates that trap and combust hydrocarbon and nitrogen oxides pollutants in a single monolith substrate. In some embodiments, the multi-zoned catalysts contain both radial and axial zones. The zones can be formed by depos... | 03/13/2007 |
| 7168274 | Combination washer/dryer having common heat source The combination washer/dryer and method for operating a combination washer/dryer. The washer/dryer has a containment drum which receives wash water, and includes a perforated clothes drum which rotates within the containment drum. A heat plenum is provided in heat t... | 01/30/2007 |
| 7100306 | Wafer guides for processing semiconductor substrates A wafer guide includes a horizontal support panel and at least three vertical panels attached on one surface of the support panel. Each of the vertical panels has a vertical body panel and a plurality of protrusions upwardly extended from a top surface of the vertic... | 09/05/2006 |
| 7068050 | Moisture and density detector (MDD) A Moisture and Density Detector (MDD) provides a method and apparatus to determine the moisture content and/or density, as well as presence and location of anomalies, and/or wood type of any dielectric material for various purposes. This device is very useful in det... | 06/27/2006 |
| 7034918 | Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory An exposure apparatus includes a reticle stage which holds a reticle, a projection optical system which projects a pattern of the reticle onto a substrate, a reticle surface plate which is a base plate disposed between the reticle and the projection optical system a... | 04/25/2006 |
| 7006888 | Semiconductor wafer preheating Embodiments of the present invention provide a method, article of manufacture, and apparatus for processing semiconductor wafers. The method includes preheating a semiconductor wafer in two types of chambers. In one embodiment, a first preheating chamber is a load l... | 02/28/2006 |
| 6966105 | Process for reclaiming rubber-metal waste For a workpiece having a metal part bonded to a rubber part, a method is devised to separate the metal and rubber parts. A flame is used to heat a portion of an exposed surface of the metal part, while moving the flame relative to the metal part until substantially ... | 11/22/2005 |
| 6966949 | Apparatus and method for drying under reduced pressure, and coating film forming apparatus In drying a coating liquid such as a resist applied to a substrate under reduced pressure, a coating film in a peripheral portion tends to lose good shape regardless of duration of a drying period, and it is difficult to set an appropriate exhaust flow rate. After t... | 11/22/2005 |
| 6949143 | Dual substrate loadlock process equipment One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. T... | 09/27/2005 |
| 6922912 | Drying apparatus The invention provides drying apparatus including a first chamber for receiving articles to be dried and having an outlet, a second chamber having an outlet, and a fan having a fan inlet and a fan outlet, the fan inlet communicating with the outlet of the first cham... | 08/02/2005 |
| 6915660 | Method and system for liquefaction monitoring A method and system for liquefaction monitoring of a gas in a gas piping system in which pressure and temperature information about the gas is gathered and the liquefaction status of the gas is determined and reported. ... | 07/12/2005 |
| 6889447 | Method for drying a wafer and apparatus for performing the same An instantaneous pressure reducing heating and drying apparatus for an object, such as a wafer, includes a pressure reducing chamber; a vacuum pump for reducing a pressure in the pressure reducing chamber to below atmospheric pressure; a drying chamber installed wit... | 05/10/2005 |
| 6865821 | Vacuum lumber drying kiln with collapsing cover and method of use A lumber drying kiln employs outside air pressure uses a flexible collapsing bag or cover alone or in combination with walls. The collapsing bag seals against a base to maintain the vacuum. The air pressure against the flexible top keeps the lumber layers from warpi... | 03/15/2005 |
| 6742282 | Detecting liquid dry conditions for liquefied compressed gases A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The apparatus in... | 06/01/2004 |
| 6722057 | Method of drying thermoplastic norbornene resin and method of manufacturing magnetic recording medium The gas components in thermoplastic norbornene resin pellets are suppressed below certain levels by drying the resin under vacuum or under the ordinary pressure and under vacuum. A substrate for magnetic recording media is manufactured by injection-molding the resin... | 04/20/2004 |
| 6643951 | Detecting liquid dry conditions for liquified compressed gases A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The a... | 11/11/2003 |
| 6640462 | Method of drying wood and a system therefor Disclosed is a method of drying timbers loaded in a drying chamber, which comprises the steps of heating the drying chamber by a heating system up to a temperature of 80 to 100° C., subjecting the timbers to vacuum blowing by connecting the inside of the... | 11/04/2003 |
| 6605254 | Method using ethylene oxide to fumigate corrosion promoting microbes The present invention relates to a method of fumigating closed systems susceptible to microbially influenced corrosion (MIC). The method is particularly useful in a method for mitigating MIC in fire protection sprinkler systems.... | 08/12/2003 |
| 6473995 | Vacuum drying apparatus and vacuum drying method A vacuum drying apparatus and a vacuum drying method are provided wherein it is possible to reduce the drying time of an object to be dried and the surface condition of the object to be dried after drying is extremely satisfactory. A vacuum pump is connec... | 11/05/2002 |
| 6470593 | Ejector device for vacuum drying The present invention relates to an ejector device for vacuum drying having at least first and second passages for connecting a first chamber with a second chamber, wherein the chambers are arranged substantially at right angles with respect to each other... | 10/29/2002 |
| 6354019 | Method for drying paper In a process for drying paper, in particular whole books but also other absorbent and in particular organic materials present in particular in layered or laminated form, to achieve residual moisture contents of 1% and below in the shortest possible time a... | 03/12/2002 |
| 6286230 | Method of controlling gas flow in a substrate processing system A method of transferring and processing a substrate in an evacuable chamber which is located adjacent a process chamber and back-to-back process chambers, and other combinations of evacuable chambers and process chambers. The method includes the use of va... | 09/11/2001 |
| 6253464 | Method for protection of lithographic components from particle contamination A system that employs thermophoresis to protect lithographic surfaces from particle deposition and operates in an environment where the pressure is substantially constant and can be sub-atmospheric. The system (thermophoretic pellicle) comprises an enclos... | 07/03/2001 |
| 6226887 | Freeze drying methods employing vapor flow monitoring and/or vacuum pressure control Freeze drying apparatus and associated lyophilization procedures are provided employing vapor flow detection and/or vacuum control for monitoring and control of the lyophilization process. The vapor flow detector, such as a windmill sensor, is disposed to... | 05/08/2001 |
| 6151796 | Substrate drying device, drying method and substrate dried by the same A substrate drying device includes a reduced pressure enclosure including an airproof door, and an exhaustion device. Inside of the enclosure is caused to be a sealed state when the airproof door is closed. After a substrate to which an application materi... | 11/28/2000 |
