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| Number | Title | Issue Date |
| 7353832 | Housingless washer An industrial parts washer includes a stand adapted to support a part, a chamber selectively movable from a first position clear of the part to a second position engaging the stand where the chamber forms a closed volume encapsulating the part. A nozzle is positione... | 04/08/2008 |
| 7338565 | Housingless washer An industrial parts washer includes a stand adapted to support a part, a chamber selectively moveable from a first position clear of the part to a second position engaging the stand where the chamber forms a closed volume encapsulating the part. A nozzle is position... | 03/04/2008 |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7268211 | Removal of ruthenium by-product by supercritical fluid processing A process for removing ruthenium or ruthenium-containing compounds from a reaction mixture comprising a compound of the following formula I in an organic solvent using supercritical fluid processing techniques: w... | 09/11/2007 |
| 7255772 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 08/14/2007 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat... | 07/31/2007 |
| 7140393 | Non-contact shuttle valve for flow diversion in high pressure systems A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf... | 11/28/2006 |
| 7077917 | High-pressure processing chamber for a semiconductor wafer A processing chamber having an improved sealing means is disclosed. The processing chamber comprises a lower element, an upper element, and a sealing means that tightly holds the lower element to the upper element to define a processing volume that is maintained usi... | 07/18/2006 |
| 7025804 | Method for separating hydrocarbon-containing gas mixtures using hydrocarbon-resistant membranes A method of separating or concentrating hydrocarbon-containing gas mixtures such as hydrogen from hydrocarbons, carbon dioxide from hydrocarbons, nitrogen from hydrocarbons, and hydrocarbons from one another using a selectively permeable membrane. The method is well... | 04/11/2006 |
| 7018445 | Polyimide blends for gas separation membranes The present invention provides a selectively gas permeable membrane that has a superior combination of permeability and selectivity. The membrane composition includes a Type 1 copolyimide uniformly blended with a Type 2 copolyimide, which polymers are defined by che... | 03/28/2006 |
| 6928751 | Megasonic cleaner and dryer system An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifuga... | 08/16/2005 |
| 6812296 | Methods and compositions for incorporating free water into a sealant composition The present invention provides compositions and methods for removing water from a sealant composition. This includes the addition of a particularly selected anhydride to a sealant composition and further addition of an acrylic acid, in order to remove water from a s... | 11/02/2004 |
| 6811714 | Micromachined component and method of manufacture A method of manufacturing a micromachined component includes using a first liquid to etch a first layer (140) located underneath a second layer (150), exposing the second layer to a second liquid that is inorganic and miscible in carbon dioxide, and su... | 11/02/2004 |
| 6754980 | Megasonic cleaner and dryer An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet fo... | 06/29/2004 |
| 6729042 | Enhancement of fluid replacement in porous media through pressure modulation A method is described for enhancing mass and heat transport of fluids in a fine pore structure through an appropriate modulation of the fluid pressure. For example, in an air drying process for a porous material that contains liquid, the air pressure is modulated th... | 05/04/2004 |
| 6678968 | Supercritical point drying apparatus for semiconductor device manufacturing and bio-medical sample processing A critical point drying apparatus for sample preparation in electron microscopy and semiconductor wafer production includes a computer system to automate the operational modes in drying the specimen. These operational modes controlled by the computer syst... | 01/20/2004 |
| 6655042 | System and method for drying semiconductor substrate A drying system for drying a semiconductor substrate is provided. The drying system includes: a chamber for housing a vapor distributor and a fluid bath, said fluid bath being disposed in a lower portion of the chamber and said distributor being disposed ... | 12/02/2003 |
| 6638476 | Packaging material sterilizing unit for a pourable food product packaging machine A unit for sterilizing strip packaging material for a pourable food product packaging machine, and having a sterilizing chamber for containing a liquid sterilizing agent and along which the packaging material is fed; a control circuit for controlling the ... | 10/28/2003 |
| 6554507 | Pattern formation method and apparatus In this invention, resist patterns formed by development are dried using a supercritical fluid such that no moisture enters the patterns.... | 04/29/2003 |
| 6493964 | Supercritical point drying apparatus for semiconductor device manufacturing and bio-medical sample processing A critical point drying apparatus for sample preparation in electron microscopy and semiconductor wafer production includes a computer system to automate the operational modes in drying the specimen. These operational modes controlled by the computer syst... | 12/17/2002 |
| 6408536 | Process for drying protein crystals The present invention relates to a process for drying protein crystals starting from an aqueous protein crystal suspension, which comprises drying the protein crystal suspension in a centrifugal dryer, where the protein crystals, after they have been filt... | 06/25/2002 |
| 6378229 | Method for the sub-critical drying of lyogels to produce aerogels The present invention refers to a method for the sub-critical drying of lyogels to produce aerogels. The method for the sub-critical drying of lyogels to produce aerogels provides for the lyogel particles to be disposed as a fixed bed and for a drying gas... | 04/30/2002 |
| 6334266 | Supercritical fluid drying system and method of use A method and apparatus for fabricating and drying wafers, including micro-electro-mechanical system (MEMS) structures, in a second, supercritical processing fluid environment. The apparatus utilizes an inverted pressure vessel connected to a supercritical... | 01/01/2002 |
| 6294194 | Method for extraction and reaction using supercritical fluids Methods for removing soluble material from confined spaces within substrates such as containers, capsules and porous powders comprising extraction with supercritical fluids, the pressure of which is preferably modulated between an upper level and a lower ... | 09/25/2001 |
| 6249989 | Method and apparatus for heat transfer A method and apparatus of heating or cooling a charge of a solid material are disclosed. The method includes the steps of supplying a charge of the material to form a packed bed of solids in a process vessel having one or more passageways through which a ... | 06/26/2001 |
| 6228394 | Supercritical fluid extraction of mould lubricant from hard shell capsules Hard shelled capsules and dry, powdered pharmaceutical formulations are treated with supercritical fluids to remove impurities such as mold lubricants and moisture.... | 05/08/2001 |
| 6185841 | Enhanced heat transfer system A method and apparatus for heating or cooling a solid material (93) in a process vessel (80) is disclosed. The Method includes supplying a working fluid to a vessel which holds a packed bed (93) of the solid material. The method is characterised by revers... | 02/13/2001 |
| 6131305 | Process for sub-critically drying aerogels The present invention relates to a process for the sub-critical drying of a lyogel to form an aerogel, in which the lyogel is treated with a heat-conveying fluid at a temperature above the boiling point of the pore liquid of the lyogel under system pressu... | 10/17/2000 |
| 5885493 | Method of drying articles A method of drying a green particulate article includes the steps of: a. Providing a green article which includes a particulate material and a pore phase material, the pore phase material including a solvent; and b. contacting the green article with a liquid desicc... | 03/23/1999 |
| 5680713 | Process for the subcritical drying of aerogels A process for the subcritical drying of a lyogel to give an aerogel comprises treating the lyogel with a heat transfer liquid which has a temperature above the boiling point of the pore liquid of the lyogel under the pressure of the system and subsequentl... | 10/28/1997 |
| 4849257 | Articles and methods for treating fabrics in dryer Dryer-added fabric conditioning articles and methods utilizing a fabric conditioning composition which is released in the dryer by a dispensing means, the fabric conditioning composition comprising an improved uniform and stable mixture of: a polymeric so... | 07/18/1989 |
| 4820627 | Method of preparing particles suitable for tabletting into diagnostic reagents A completely water-soluble, solid, labile biochemical-containing diagnostic reagent is prepared without the need of a lyophilization step, by spraying, preferably by a fluidized bed process, an aqueous solution of labile biochemical, e.g., an enzyme, onto... | 04/11/1989 |
| 4811494 | Removal of water from carbonaceous solids by use of methyl formate A solvent extraction process for the removal of water from carbonaceous solids utilizing methyl formate.... | 03/14/1989 |
| 4667417 | Preparation of aerogels A process for the drying of inorganic hydrogels obtained from readily hydrolyzable compounds of the elements Al, Si, Ti, B, La, Zr, Cr, Sn, Th or Mg, and organic hydrogels based on gelatine, albumin or agar agar, from CO2, to give aerogels is e... | 05/26/1987 |
| 4650495 | Method for stabilizing dried low rank coals A method for pyrophoric particle protection of carbonaceous material particularly low rank coals where the material is simultaneously coated with a treating agent and cooled by a fluidizing gas.... | 03/17/1987 |
| 4599807 | Process for drying polymeric beads and associating shading pigments therewith A process for drying a water-wet paste containing polymeric beads without agglomeration is disclosed in which there is added to the wet paste a proportion of an organic solvent which forms an azeotrope with water, such as methyl isobutyl ketone, in an amo... | 07/15/1986 |
| 4586935 | Method of preparing coal to increase its calorific value and making it safe for storage and transport There is described an improved method for treating low rank coal to lessen the risk of autogenous heating and attendant combustion hazards by means of passing the coal through a bath of molten metal to elevate its temperature into the range Td to Td+50° ... | 05/06/1986 |
| 4579596 | In-situ removal of oily deposits from the interior surfaces of conduits The in-situ cleaning of conduits containing oily deposits is facilitated by the concurrent passage of cleaning particles and a non-agglomerating drying agent therethrough in a propelling gas stream. In cycling cleaning operations, the preliminary injectio... | 04/01/1986 |
| 4562165 | Regenerating sorbents Sorbents used for drying organic liquid process streams can be regenerated by passing an organic liquid carrier solvent such as n-octanol therethrough at a temperature sufficient to dissolve water trapped in the sorbent, thus regenerating it, and subseque... | 12/31/1985 |
| 4411879 | Method for enhancing the sulfur capture potential of lime using a filter means in the flue gas A method is provided for improving the sulfur capture potential of lime in the fluidized bed combustion of coal and for improving the flow characteristics of the feed coal therefor comprising collecting partially sulfated limestone particles from the fly ... | 10/25/1983 |
