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| Number | Title | Issue Date |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7255772 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 08/14/2007 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat... | 07/31/2007 |
| 7244401 | Apparatus for separation of constituents from matrices The present invention provides an apparatus useful for the separation of hazardous and non-hazardous organic and inorganic constituents from various matrices. A method of separating such constituents is also provided. ... | 07/17/2007 |
| 7203563 | Automatic N2 purge system for 300 mm full automation fab A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in th... | 04/10/2007 |
| 7140393 | Non-contact shuttle valve for flow diversion in high pressure systems A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf... | 11/28/2006 |
| 7122085 | Sublimation bed employing carrier gas guidance structures Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, ... | 10/17/2006 |
| 7101140 | Apparatus for storage and unloading of granular material The object of the invention is an apparatus for storage of wood chips in a curved-top stockpile the apparatus consisting of a central tower which supports a conveyor for loading the chips and a beam-like turning pile composer, and a unloading beam supported on groun... | 09/05/2006 |
| 6921062 | Vaporizer delivery ampoule A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances exte... | 07/26/2005 |
| 6689180 | Hot air flow control device of heat-shrinking film packaging machine A heat-shrinking film packaging machine includes a conveyor for transporting an article to be packaged through a heating device to have a heat-shrinking film surrounding the article heated and shrunk and thus tightly packaging the article. The heating dev... | 02/10/2004 |
| 6560896 | Apparatus, method and system for the treatment of a wafer Apparatus, method and system for the treatment of a wafer. After a treatment at elevated temperature, a wafer is taken out of the reactor in question with the help of a mechanical transport apparatus which preferably grips the wafer around the circumferen... | 05/13/2003 |
| 6399923 | Heating furnace including vertically spaced-apart double-sided far-infrared-radiation panel heaters defining multi-stage drying chambers A multi-stage heating furnace for drying large-sized substrates arranged in a stack, including a furnace body, and shelf heaters arranged within the furnace body such that the shelf heaters are spaced from each other in a vertical direction at a predeterm... | 06/04/2002 |
| 6360452 | Drying tunnel for fruit and vegetables The object of the Patent is a drying tunnel for fruit and vegetables which is prismatic rectangular in shape and is internally divided by spacing walls (1) with a bucket conveyor travelling successively up and down. The buckets are elongate, parallel to the wa... | 03/26/2002 |
| 6336299 | Food storage building floor and method of constructing the same A storage floor air vent may comprise at least two vent walls positioned in substantially parallel relation to thereby define a channel; a plurality of angular baffle members, each angular baffle member composed of two segments forming an apex therebetwee... | 01/08/2002 |
| 6311411 | Vertical dryer with vertical particle removal plenum and method of use An vertical dryer (10) is provided having a plurality of individual dryer decks (12-18) including alternating fan and heater decks (14, 16), an air circulation assembly (11), and an upright, common plenum chamber (26) in communication with the decks (12-1... | 11/06/2001 |
| 6270839 | Device for feeding raw material for chemical vapor phase deposition and method therefor A raw material feeding apparatus is provided for a film-forming apparatus in which a thin film is formed from a solid matter as a raw material during chemical vapor-phase deposition. The apparatus includes sub-containers each having an opening for introdu... | 08/07/2001 |
| 6263591 | Sports equipment drying container The portable sports equipment drying container comprised: a box shaped body; a cover for the body; the body having opposed side walls and opposed end walls; an input fan mounted in one of the walls; an output fan mounted in a another one of the walls; a h... | 07/24/2001 |
| 6185835 | Apparatus for conditioning of commodities for vacuum packing Apparatus is provided for the conditioning of a commodity (12) such as clothing suitable for vacuum packing in which there is provided a conditioning tunnel (2) including a floor (4), a ceiling (6) and two side walls (8), through which tunnel runs a conve... | 02/13/2001 |
| 6112426 | Thermal compression plant with heat recovery for vacuum dryers and dryer incorporating said plant A thermal compression plant with heat recovery for vacuum dryers of industrial leathers and similar products with one or more drying chambers (4) each one composed of a heated table (2), on which the products to be dried are laid, and a hermetic cover (3)... | 09/05/2000 |
| 6085442 | Food Dehydrator A modular food dehydrator utilizing a heater blower assembly located on a top surface of a dehydrator module is disclosed. The heater blower assembly includes a motor driven fan, a heating element and an air distribution portion for directing heated air a... | 07/11/2000 |
| 6076274 | Vacuum drying cabinet A vacuum drying cabinet has nozzles on a pipe body which can be removable from but attached to a pipe fitting mounted in the roof of the cabinet and which, when in place, can be coupled to the shaft of a motor for driving the cleaning unit and to the clea... | 06/20/2000 |
| 6041696 | Structure of an apparatus for dehydrating fruits, vegetables and foods An apparatus for dehydrating fruits, vegetables and foods includes a base having a top formed with a center hole and two opposite vertical recesses close to two sides, the base having two opposite through holes at two opposite lower corners in communicati... | 03/28/2000 |
| 5926970 | Finishing machine for fabrics in rope or open-width form A wet and/or dry finishing machine for fabrics in rope or open-width form comprising a treatment tank in which a transporting means is installed for the fabric, for example in endless-loop form, the transporting means drawing the fabric from the base of t... | 07/27/1999 |
| 5878508 | Food dehydrator A modular food dehydrator utilizing a heater blower assembly located on a top surface of a dehydrator module. The heater blower assembly includes a motor driven fan, a heating element and an air distribution portion for directing heated air across the sup... | 03/09/1999 |
| 5746008 | Electronic substrate processing system using portable closed containers Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a pr... | 05/05/1998 |
| 5621982 | Electronic substrate processing system using portable closed containers and its equipments Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a pr... | 04/22/1997 |
| 5505009 | Heated product merchandiser The present invention relates to a food storage, display, and warming apparatus having a first storage compartment for holding bulk food at a predetermined temperature above ambient temperature and including one or more door members for accessing the bulk... | 04/09/1996 |
| 5444922 | Corrugated product dryer The invention relates to a single pass airflow apparatus for cooling and drying corrugated product having open flutes, comprising an airflow exhaust duct having a first cross-sectional area, an inlet plenum with a cross-section area greater than the airfl... | 08/29/1995 |
| 5437108 | Food dehydrator and tray for a dehydrator The present food dehydrator may be substantially cylindrical in shape including a base member, an air heating and circulation means, a plurality of stackable trays, and a top. Each tray includes an outer wall structure and a platform section which may be ... | 08/01/1995 |
| 5185939 | Apparatus for drying rubber boots and other items A drying apparatus for rubber boots and other items comprising hollow housing equipment with open front and rear surfaces, disinfectant spraying equipment a low-temperature dehumidifier connected in free communication with the housing equipment, wherein t... | 02/16/1993 |
| 5025570 | Modular convective oven with anti-contamination features An oven employing a group of identical modular oven units, each unit divided into a main cavity with a first upper auxiliary chamber and a second lower auxiliary chamber. A barrier plate separating the upper chamber from the main cavity is gas pervious an... | 06/25/1991 |
| 5020246 | Grain drying system A grain bin structure having an inverted frusto-conical interior drying floor dividing the bin structure into a drying chamber and a storage chamber, and a transfer means comprising a rotating helical conveying system for transporting grain from the dryin... | 06/04/1991 |
| 4636168 | Apparatus for thermal and pneumatic treatment of granular solids An apparatus for thermally and pneumatically treating granular solids to remove organic and inorganic chemical additives which are bonded to the granular solids or in admixture with them, to provide a purified granular solid product which is suitable for ... | 01/13/1987 |
| 4627174 | Process and system for the dry quenching of coke Glowing coke descending through a cooling duct in a coking plant is quenched by two gas flows respectively traversing an upper compartment and a lower compartment of the duct, the two compartments meeting at a restricted gate for the passage of the coke. ... | 12/09/1986 |
| 4578881 | Drier for knitted garments One or more mesh-topped, extendable trays removably coupled to a motor-driven fan for causing forced air, normally at ambient temperature, to pass thru the mesh top or tops and thru one or more knitted or crocheted garments lying thereon, the flow of air ... | 04/01/1986 |
| 4548191 | Food cooking oven and method An oven and method for cooking food products. The oven comprises an elongated housing having an inlet for food products to be cooked in the oven and an outlet for emitting cooked food product from the oven, together with means for heating a gaseous cookin... | 10/22/1985 |
| 4531304 | Production of concrete articles utilizing heat-reclaiming system A method of producing concrete articles comprises reclaiming a portion of the heat energy from the kiln atmosphere during the curing of the concrete articles, and then utilizing the reclaimed heat energy to pre-heat mixing water used to form other concret... | 07/30/1985 |
| 4502228 | Apparatus for drying printed or coated webs In the drying of printed or coated webs of moving material with the aid of heated air, the air is cycled through drying chambers or hoods until it is laden with solvents up to a predetermined value of saturation such as 50% of the lower explosion limit, w... | 03/05/1985 |
| 4481724 | Device for drying and preheating coking coal In order to preserve the quality of treated coking coal, the drying and preheating operation is performed in consecutive stages. For this purpose, a set of superimposed containers is provided with vertically oriented pipes for a heating medium, the pipes ... | 11/13/1984 |
| 4479308 | Process and device for recovering heat from a particulate solid Heat is recovered from a hot particulate solid by passing the solid through a heat recovery zone having a countercurrent flow of gas and internal means for controlling backmixing and residence times, said internal means also containing a circulating heat ... | 10/30/1984 |
