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| Number | Title | Issue Date |
| 7372190 | Driving apparatus A driving apparatus comprises: an electro-mechanical conversion element; a driving shaft that reciprocates in response to an extension and contraction of the electro-mechanical conversion element; a driven member, frictionally engaged with the driving shaft, that mo... | 05/13/2008 |
| 7352995 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 04/01/2008 |
| 7346981 | Method for fabricating microelectromechanical system (MEMS) devices A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate to the one side of the wafer using an adhesive bonding agent, the sub... | 03/25/2008 |
| 7310215 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 12/18/2007 |
| 7259417 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 08/21/2007 |
| 7211923 | Rotational motion based, electrostatic power source and methods thereof A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the othe... | 05/01/2007 |
| 7110738 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 09/19/2006 |
| 7068220 | Low loss RF phase shifter with flip-chip mounted MEMS interconnection A hybrid circuit phase shifter assembly of RF MEMS switch modules and passive phase delay shifter circuits uses a low loss, preferably flip-chip, interconnection technology. The hybrid circuit assembly approach separates the fabrication of the MEMS switch modules fr... | 06/27/2006 |
| 7006342 | Variable capacitor having a rigidity-increasing feature A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capaci... | 02/28/2006 |
| 6979872 | Modules integrating MEMS devices with pre-processed electronic circuitry, and methods for fabricating such modules A MEMS module is provided comprising at least one MEMS device adhesively bonded to a substrate or wafer, such as a CMOS die, carrying pre-processed electronic circuitry. The at least one MEMS device, which may comprise a sensor or an actuator, may thus be integrated... | 12/27/2005 |
| 6954348 | Tunable MEMS capacitor Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor (368) having a pair of stationary capacitor electrodes (392) that are fixed to and disposed the same distance above a substrate (388) i... | 10/11/2005 |
| 6937456 | Direct digitally tunable microwave oscillators and filters A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal ... | 08/30/2005 |
| 6930487 | Method for electronic damping of electrostatic positioners Electronic damping may be provided to an electrostatic positioner by developing a signal proportional to the velocity of the movable positioner plate and then changing the voltage applied to the positioner in proportion to this velocity signal to oppose the velocity... | 08/16/2005 |
| 6914710 | Multi-axis micro-electro-mechanical actuator A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb electrodes to position optical elements along multiple axes. In one embodiment, an actuator assembly includes an actuator support, typically a silicon wafer, supporting a fixed comb with a... | 07/05/2005 |
| 6905614 | Pattern-transfer process for forming micro-electro-mechanical structures Described is a photolithography “pattern transfer” process for forming Micro-Electro-Mechanical Systems (MEMS) structures. A first material layer is patterned so that raised portions of the layer define features of a MEMS structure to be formed. The resulting pa... | 06/14/2005 |
| 6701779 | Perpendicular torsion micro-electromechanical switch A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control electrode, the insulated torsion beam and the movable contro... | 03/09/2004 |
| 6466114 | Resonator with variable resonance frequency The invention relates to a resonator (200,300) with variable resonance frequency, intended for connection to an amplifier, thus forming an oscillator, said resonator comprising a resonator circuit (205,305) for deciding the resonance frequency of the reso... | 10/15/2002 |
| 6418006 | Wide tuning range variable MEMs capacitor A MEM capacitor having a capacitance plate nearer a movable plate than a separate bias plate. Voltage potential between the bias plate and movable plate determines the value of capacitance between the movable plate and the capacitance plate. In a preferre... | 07/09/2002 |
| 6255913 | Variable frequency oscillator circuit A variable frequency oscillator (VFO) circuit having an increased frequency tuning range to selectively obtain operating frequencies above and below a set frequency. The circuit includes a tank inductor connected in parallel with a tank capacitor for prim... | 07/03/2001 |
| 6232847 | Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology A high-Q precision integrated reversibly trimmable singleband oscillator and tunable multiband oscillator are presented that overcome the problems laser trimming and solid state switches. This is accomplished using micro-electromechanical system (MEMS) te... | 05/15/2001 |
| 5994985 | Integrable high-Q tunable capacitor and method A high-performance integrable tunable inductor includes a "primary" coil and a "drive" coil placed in close proximity to each other and simultaneously driven with primary and drive currents, respectively. The drive current induces mutual components of ind... | 11/30/1999 |
| 5959515 | High Q integrated resonator structure A high Q integrated inductor-capacitor (L-C) resonator (200) includes a planar inductor (201) having a plurality of turns and a serially connected first and second capacitor (205, 207) that is connected in parallel with the planar inductor (201). The firs... | 09/28/1999 |
| 5959516 | Tunable-trimmable micro electro mechanical system (MEMS) capacitor A high Q MEMS capacitor that can be continuously tuned with a large tuning ratio or reversibly trimmed using an electrostatic force. The tunable capacitor has a master/slave structure in which a control voltage is applied to the master (control) capacitor... | 09/28/1999 |
| 4760535 | Control circuit for tuning a high-frequency input circuit A control circuit for tuning a high-frequency input circuit comprises, in addition to a first adjustable component 5 which is directly controlled by a control voltage, further adjustable components 6, 10 which are likewise under the influence of a control... | 07/26/1988 |
| 4736457 | Circuit arrangement for a tuner for changing over two frequency bands The invention relates to a circuit arrangement for a tuner, particularly a television tuner, for a change over switching between two frequency bands with the aid of a switching diode, said frequency bands, particularly the VHF band and the hyperband, bein... | 04/05/1988 |
| 4179627 | Electrical apparatus An electrical apparatus for use as a capacitor, solar cell, switching device, wave-shaper and the like. The apparatus comprises a first electrode, a first dielectric positioned proximate one side of the first electrode, a second electrode positioned proxi... | 12/18/1979 |
| 4083012 | Automatic function setting and indication arrangement for a communications receiver A compact and efficient design of a function switching and indication arrangement for a TV receiver or other communications apparatus is described. The functional setting, illustratively indicative of a selected one of a plurality of TV channels, is chose... | 04/04/1978 |
| 4074216 | Receiver tuning circuit A receiver tuning circuit in which without operation of extra switches a change-over can be made from tuning by means of a continuously varying tuning voltage to tuning by means of one of a number of adjusted tuning voltages by using a capacitor controlle... | 02/14/1978 |
| 4039981 | Variable impedance circuit A variable impedance circuit comprises an amplifier with a high input impedance and a high output impedance whose gain is variable in response to a control voltage, an emitter-follower transistor, and an impedance element adapted to feedback an output sig... | 08/02/1977 |