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| Number | Title | Issue Date |
| 8106651 | Methods and apparatuses for determining thickness of a conductive layer Methods and apparatuses for calibrating eddy current sensors. A calibration curve is formed relating thickness of a conductive layer in a magnetic field to a value measured by the eddy current sensors or a value derived from such measurement, such as argument of imp... | 01/31/2012 |
| 8102174 | Techniques for electrically characterizing tunnel junction film stacks with little or no processing Probes are electrically connected to a surface of a tunnel junction film stack comprising a free layer, a tunnel barrier, and a pinned layer. Resistances are determined for a variety of probe spacings and for a number of magnetizations of one of the layers of the st... | 01/24/2012 |
| 7876095 | Apparatus for determination of an interface of a slag layer An apparatus is provided for determination of at least one interface of a slag layer on top of a molten metal. The apparatus has a carrier tube and a measuring head arranged on one end of the carrier tube with a body fixed within the carrier tube and an end face fac... | 01/25/2011 |
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a p... | 08/17/2010 |
| 7714572 | Method of detecting characteristics of films using eddy current A method of detecting a characteristic (such as thickness) of first and second films formed on a substrate includes supplying a sensor coil with a first alternating current having a first frequency when detecting the first film, and a second alternating current havi... | 05/11/2010 |
| 7619409 | Methods and apparatus for electrically characterizing magnetic tunnel junctions having three metal layers separated by two dielectric layers A method of electrically characterizing a magnetic tunnel junction film stack having three metal layers separated by two dielectric layers comprises three steps. In a first step, four or more probes are electrically coupled to a surface of the magnetic tunnel juncti... | 11/17/2009 |
| 7508201 | Eddy current sensor An eddy current sensor (10) has a sensor coil (100) disposed near a conductive film (6) formed on a semiconductor wafer (W) and a signal source (124) configured to supply an AC signal to the sensor coil (100) to produce an eddy cur... | 03/24/2009 |
| 7417442 | Method and apparatus for testing tunnel magnetoresistive effect element, manufacturing method of tunnel magnetoresistive effect element and tunnel magnetoresistive effect element A method for testing a TMR element includes a step of measuring a plurality of resistances of the TMR element by feeding a plurality of sense currents with different current values each other through the TMR element, a step of calculating a ratio of change in resist... | 08/26/2008 |
| 7388369 | Method and apparatus for measuring hydrogen concentration in zirconium alloy components in the fuel pool of a nuclear power plant The present invention provides a method for measuring hydrogen concentration in an electrically conductive material, such as a nuclear fuel rod, comprising calibrating an eddy current probe at a plurality of hydrogen concentrations; measuring eddy currents at a plur... | 06/17/2008 |
| 7372282 | Method and apparatus for testing tunnel magnetoresistive effect element, manufacturing method of tunnel magnetoresistive effect element and tunnel magnetoresistive effect element A method for testing a TMR element includes a step of measuring a plurality of resistances of the TMR element by applying a plurality of voltages with different voltage values each other to the TMR element, respectively, a step of calculating a ratio of change in re... | 05/13/2008 |
| 7369255 | Apparatus and method for capacitive measurement of materials Method for measuring thicknesses of a film, a foil or a material layer with a measuring head which is spaced away from the film and with which a capacitive thickness measurement is performed, in which an optical distance measurement is performed with a distance meas... | 05/06/2008 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a p... | 04/08/2008 |
| 7352194 | Method for determining the thickness of a coating on a composite material The invention relates to a method for determining the thickness of a coating on a composite material by applying induced currents wherein the composite material together with its coating is placed on a conducting material, in which circulating electric currents indu... | 04/01/2008 |
| 7348771 | Method for verifying sensor condition Sensor condition verification may be performed on electromagnetic sensors and sensor arrays mounted to a material surface. The sensors typically have a periodic winding or electrode structure that creates a periodic sensing field when driven by an electrical signal.... | 03/25/2008 |
| 7340320 | Method of recipe control operation An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method co... | 03/04/2008 |
| 7334330 | Thermally insulating layer incorporating a distinguishing agent and method for inspecting the same Thermally insulating layer incorporating a distinguishing agent and method for inspecting the insulating layer are provided. The distinguishing agent may be used for determining a remaining thickness of the thermally insulating layer. ... | 02/26/2008 |
| 7309618 | Method and apparatus for real time metal film thickness measurement A semiconductor processing system is provided. The semiconductor processing system includes a first sensor configured to isolate and measure a film thickness signal portion for a wafer having a film disposed over a substrate. A second sensor is configured to detect ... | 12/18/2007 |
| 7288930 | Wheel-speed sensor Unlike known wheel-speed sensors, the wheel-speed sensor in accordance with the present invention is readily serviceable without disassembly of major components of the wheel assemblies and is relatively simple, and thus less expensive to manufacture, than known whee... | 10/30/2007 |
| 7282909 | Methods and apparatus for determining the thickness of a conductive layer on a substrate A method of determining the thickness of a conductive film is disclosed. The method employs measured voltage and current responses that have been temperature-compensated to determine the thickness of the conductive film. The temperature compensation uses a temperatu... | 10/16/2007 |
| 7272972 | Method and apparatus for measuring a thickness of a thin film in motion An apparatus for monitoring a thickness of a film in motion. The apparatus comprises a roller for receiving and supporting the film in motion, the roller being adapted to rotate about an axis of rotation. The apparatus also comprises a position detector for detectin... | 09/25/2007 |
| 7262067 | Method for conductive film quality evaluation A method for monitoring copper film quality and for evaluating the annealing efficiency of a copper annealing process includes measuring hardness of a copper film formed on a substrate before and after annealing and comparing the hardness measurement results. The me... | 08/28/2007 |
| 7262596 | Method for the contactless determination of a layer thickness via resistance and inductance measurement of a sensor oil With a method for the contactless determination of a thickness of a layer (20) made of electrically-conductive material of a component (17), a sensor composed of a coil form (13) and a coil (14) is positioned in the vicinity of the compon... | 08/28/2007 |
| 7262867 | Device to determine the thickness of a conductive layer The device comprises at least a measuring head (7) with a transmitter (7A) and a receiver (7B). The head comprises means to measure the thickness through surface resistivity and optical means to measure said thickness by measuring the transparen... | 08/28/2007 |
| 7259552 | Wear monitor for turbo-machine A measurement device for measuring the wear of turbo-machine components to reduce the likelihood of component failure while a turbine-machine is at load. The measurement device is capable of measuring and calculating a distance between surfaces while the turbo-machi... | 08/21/2007 |
| 7248042 | Method for the contactless determination of a thickness of a layer made of electrically-conductive material With a method for the contactless determination of a thickness of a layer (20) made of electrically-conductive material of a component (17), a sensor composed of a coil form (13) and a coil (14) is positioned in the vicinity of the compon... | 07/24/2007 |
| 7240322 | Method of adding fabrication monitors to integrated circuit chips An integrated circuit, a method and a system for designing and a method fabricating the integrated circuit. The method including: (a) generating a photomask level design of an integrated circuit design of the integrated circuit, the photomask level design comprising... | 07/03/2007 |
| 7235967 | Eddy current testing probe and eddy current testing apparatus An eddy current testing probe has a flexible substrate adapted to face to a surface of a test article, a plurality of coils which are fixed to the flexible substrate and energized one of which is capable of being changed sequentially, a pressing member for pressing ... | 06/26/2007 |
| 7215117 | Measurement with a magnetic field Material properties such as stress in a ferromagnetic material may be measured using an electromagnetic probe. While generating an alternating magnetic field in the object, and sensing the resulting magnetic field with a sensor, the signals from the magnetic sensor ... | 05/08/2007 |
| 7212895 | Magnetic sensor A magnetic flux is sensed within a gap at a first location between two portions of a vehicle body/structure and a signal generated responsive thereto controls an element of the vehicle, wherein the magnetic flux is responsive to a disturbance of the vehicle body/str... | 05/01/2007 |
| 7209844 | Magnetic crash sensor A first magnetic field generated by a first coil operatively associated with a first portion of a vehicle interacts with at least one conductive element operatively associated with or at least a part of a second portion of the vehicle so as to generate an eddy curre... | 04/24/2007 |
| 7199884 | Thin thickness measurement method and apparatus Techniques for non-contacting thickness or caliper measurements of moving webs or sheets employ a sensor device that includes a first sensor head and a second sensor head that are spaced apart to define a path through which the moving web travels. The sensor device ... | 04/03/2007 |
| 7198545 | Method of calibration and data evaluation for eddy current metrology systems Methods are provided for calibrating a tool using an eddy current probe and calibration wafers that each have a measurable predetermined property and a measurement of the measurable predetermined property of a first calibration wafer is different than a measurement ... | 04/03/2007 |
| 7187191 | Sensor device for determining the layer thickness of a thin layer To provide a sensor device for determining the layer thickness of a thin layer of an electrically conducting or semiconducting material which can be used in a simple and low-cost way, it is proposed that the said sensor device comprises one or more inductive proximi... | 03/06/2007 |
| 7180286 | Hand-held device for non-destructive thickness measurement An apparatus for non-destructive measurement of the thickness of thin layers, has a housing and a probe which is connected to an evaluation unit and to which signals are emitted during a measurement for determining the layer thickness, and having a display apparatus... | 02/20/2007 |
| 7176675 | Proximity sensitive defect monitor The invention relates to a method for determining processing image induced defects in the manufacture of semiconductor products such as wafers by analyzing the circuit design of the product mask and modifying a conventional test defect structure to mimic the product... | 02/13/2007 |
| 7175720 | Non-destructive testing method of determining the depletion of a coating It is disclosed a method of measuring the thickness and/or the depletion of Al and Cr of a γ/γ′ MCrAlY-coating after the use in a high temperature environment, the γ/γ MCrAlY-coating exhibiting a non-equilibrium γ/γ′-microstructure at a temperature lower t... | 02/13/2007 |
| 7173417 | Eddy current sensor with concentric confocal distance sensor A metrology instrument includes an eddy current sensor that is mounted to and concentric with a confocal distance sensor. By measuring the precise vertical placement of the eddy current probe with respect to the surface of the sample using the confocal distance sens... | 02/06/2007 |
| 7173418 | Methods and apparatus for optimizing an electrical response to a set of conductive layers on a substrate A method of determining a first thickness of a first conductive layer formed of a first conductive material on a target substrate, the target substrate further having a second conductive layer formed of a second conductive material different from the first conductiv... | 02/06/2007 |
| 7160739 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and identifies a wafer material removal rate in a polishing step of a polishing pro... | 01/09/2007 |
| 7157900 | Removable breaking calibration connector for toroidal conductivity sensor and method of calibration This invention relates to electrical connectors used with non-invasive toroidal conductivity sensors and calibration thereof. A removable breaking calibration connector is provided for temporary insertion in the electrical circuit to selectively break connection to ... | 01/02/2007 |
