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| Number | Title | Issue Date |
| 7282874 | Alignment apparatus, exposure apparatus, and device manufacturing method An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage fo... | 10/16/2007 |
| 7215095 | Driving apparatus, exposure apparatus, and device manufacturing method A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the obje... | 05/08/2007 |
| 7074246 | Modular semiconductor workpiece processing tool The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a... | 07/11/2006 |
| 7057364 | Actuation system comprising a digital position sensor An actuating system having an electric motor that is controlled by a computer as a function of a setpoint position of a member that is to be actuated. The actuating system includes an encoder that is dependent on the movement of the motor, a sensor designed to deliv... | 06/06/2006 |
| 6941864 | Method to control optimized cutting of stock to satisfy a cut list A method of processing material involves cutting pieces of material pursuant to a cut list and managing remaining salvage and defect pieces. A computer may be connected to a saw machine, and programmed to optimize cutting of stock to satisfy a cut list. An operator ... | 09/13/2005 |
| 6930850 | Head clamping apparatus for magnetic disk tester and magnetic disk tester A magnetic disk tester has a head clamp (35, 218) to position a magnetic head (15, 289). The head clamp has a micromotion stage (55, 273) provided with a stage (59, 205) which is horizontally moved by a piezo-element (77). The magnetic head is attached to the piezo-... | 08/16/2005 |
| 6819073 | Active compensation of mechanical vibrations and deformations in industrial processing machines In a method for active compensation of mechanical vibrations and/or deformations in industrial processing machines, a main drive in a primary axis executes a first motion to move a mechanical machine element with an auxiliary drive in a secondary axis for execution ... | 11/16/2004 |
| 6160676 | Storage disk apparatus and method of controlling same A storage disk apparatus has a storage disk having servo information, a plurality of heads for reading information recorded on the storage disk, a plurality of first actuators for accurately positioning the heads with respect to the storage disk, a second... | 12/12/2000 |
| 6130517 | Magnetic actuator producing large acceleration on fine stage and low RMS power gain A pair of complementary magnetic actuators controls a stage in a high-precision positioning instrument in a single coordinate direction. Additional pairs of complementary magnetic actuators can be used to provide control of the stage in other coordinate d... | 10/10/2000 |
| 5910721 | Position control system and position control method In a position control system, the positional deviation between the position of the control point of the controlled object and the target position is corrected in accordance with the change of the relative positional relationship between mechanically relat... | 06/08/1999 |
| 5808435 | Micropositioning device for disk head testing system A micropositioner has a coarse positioner and a fine positioner, with a separate closed loop control circuit for the fine positioner. A disk head being positioned over a disk is attached to the stage of the fine positioner. The fine positioner includes a ... | 09/15/1998 |
| 5801939 | Precision positioning control apparatus and precision positioning control method A precision positioning control apparatus includes a coarse positioner, a fine positioner, a displacement totalizer for totaling the displacements of the two positioners, a total displacement detector for producing a total displacement signal, a comparato... | 09/01/1998 |
| 5760561 | Method of controlling a stage and a system such as an exposing apparatus using the same A method of controlling a stage includes the steps of setting a plurality of drive modes according to which the stage is driven, which correspond to a plurality of positioning processes for positioning an element supported by the stage, and driving the st... | 06/02/1998 |
| 5315526 | Numerically controlled lathe A numerically controlled lathe capable of machining a workpiece by numerically controlling a machining table provided with a machining tool. In order to prevent a local uneven abrasion of parts, which make a sliding contact, due to a mass production of wo... | 05/24/1994 |
| 5267478 | Device for a rapid positioning of a heavy carriage A device for the rapid precision positioning of a heavy carriage employs stationary positioning bar, for instance a part of a linear electric motor or a gear rack, and a cooperating moving part of the linear motor or a motor attached to the carriage. The ... | 12/07/1993 |
| 5262707 | Positioning control method and apparatus A positioning control method and apparatus in which a fine movement mechanism is moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a p... | 11/16/1993 |
| 5260632 | Position control system A positioning control for linearly displacing an object (31) has a direct current motor (1) and a gear (2,21) for converting rotary into linear motion, a current supply (4) of current pulses having given frequency, amplitude and duration; a pole reverser;... | 11/09/1993 |
| 5177652 | Dual-actuator transducer position control apparatus for seeking and following track on rotary disk In a rotary-disk transducer position control apparatus and method in which positional information concerning a transducer relative to a rotary disk based on a signal is obtained from the transducer which is disposed in opposition to the rotary disk, a see... | 01/05/1993 |
| 5144213 | Brake control method of gravity axis A gravity axis brake control method of controlling the brake of the gravity axis of a computerized numerical controlled machine tool, wherein a computerized numerical control (CNC) notifies a programmable controller (PC) that the control of the gravity ax... | 09/01/1992 |
| 5136226 | Correlated coarse position error processor A technique for overcoming the difficulties that arise from the transition between coarse and fine loop control. Coarse and fine phase locked loops, each having a respective latch provide a coarse number in the range 000.0°-359.9° and a fine number in t... | 08/04/1992 |
| 5070288 | Reference point return system A system for carrying out reference point return in a numerical control device is provided, including a deceleration dog having a short length and arranged at a machine table, a deceleration limit switch operated by the deceleration dog, for generating a ... | 12/03/1991 |
| 5013986 | Actuating drive for positioning a rotary element A rotary element (10) such as a robot arm is to be positioned by an actuating drive to a position determined by a desired value signal. An angle pick-off (20) provides an actual value signal. A first controller (36) provides a first controller output sign... | 05/07/1991 |
| 5003238 | Method and apparatus of fine tuning the position of an ultrasonic sensor probe using analog motor position signals As disclosed herein, a new and improved method and apparatus provide for fine tuning the position of a servomotor used to drive a transducer mounted on an ultrasound probe to a desired position. This improvement is accomplished by processing the analog qu... | 03/26/1991 |
| 5001409 | Surface metrological apparatus In an apparatus for measuring texture and characterization of the surface of a sample on the basis of the drive signal of a servo control circuit by allowing a probe-tip (1) to approach the sample (2) and subjecting the probe-tip (1) to servo control so t... | 03/19/1991 |
| 4988936 | Correlated coarse position error processor A technique for overcoming the difficulties that arise from the transition between coarse and fine loop control. Coarse and fine phase locked loops, each having a respective latch, provide a coarse number in the range 000.0°-359.9° and a fine number in ... | 01/29/1991 |
| 4843293 | Apparatus for controlling servo system employing piezo-electric actuator A first servo system (31) which feeds back at least position and speed and a second servo system (32) which effects integral control by feeding back position are connected in series. A first signal obtained by multiplying the output of the integral contro... | 06/27/1989 |
| 4795956 | Web motion converter A motion converter is disposed at the input to a work station to convert the constant velocity of sheet material as it is payed out from a roll into a cyclic, stop and go motion. The motion converter includes a pair of actuators containing electromagnets ... | 01/03/1989 |
| 4794311 | Numerical control system In a numerical control system for a machine tool using a general-purpose motor (11) in place of at least one of servo motors, a current position of a spindle (10) driven by the general-purpose motor (11) is detected (14, 9) and is compared with a position... | 12/27/1988 |
| 4736353 | Disc accessing using coarse and fine actuators with the fine actuator locked during coarse actuator movement A method of accessing a rotary recording medium for positioning a head at a desired track on the rotary recording medium by using a coarse actuator and a fine actuator, comprising the steps of comparing an output signal produced from a detector for detect... | 04/05/1988 |
| 4669359 | Positioning system A system for positioning a movable body for a processing machine. A lead screw is rotatably and axially shiftably supported and engaged with the movable body. The lead screw is rotated by a motor to move the movable body. A hydrostatic thrust bearing is p... | 06/02/1987 |
| 4614986 | Magnetic servo with improved tracking system A two-part head positioning system has a tracking motor for moving the head through relatively small distances so that it follows the track of a medium and moves between adjacent tracks and a seek motor for moving the tracking motor and head through relat... | 09/30/1986 |
| 4602540 | Precision machine system A precision machining system for machining a workpiece into a desired surface with two tool driving units. A first drive unit moves the tool along at least two axes to shape the workpiece similar to a desired surface. A second drive unit moves the tool al... | 07/29/1986 |
| 4577142 | Fine feed system A system for finely feeding a movable member being movable relative to a stationary member. This fine feed system is constructed such that the movable member is provided with a fine feed mechanism, which includes a screwshaft and a nut member threadably c... | 03/18/1986 |
| 4571530 | Adaptive pulsing motor control for positioning system An adaptive motor pulsing apparatus for a driven element positioning system is disclosed which divides the available time between recurring motor on periods and motor off periods, and which also varies the duty cycle of the motor during successive on peri... | 02/18/1986 |
| 4562562 | Tracking system for controlling the radial positioning of a transducer on a disc medium A data track searching device capable of switching between two modes; one being the rough searching mode in which a transducer is displaced at a high velocity to a desired track and the other being the fine searching mode which follows the rough searching... | 12/31/1985 |
| 4513234 | Method and apparatus for controlling zero-point return of a movable element A method and apparatus for controlling the return of a movable element of a machine tool to a predetermined grid point by controlling a movable element drive device in accordance with feedback pulses generated while the drive device is being driven to tra... | 04/23/1985 |
| 4504158 | Positioning device for a selection member of printing machines Positioning device for a printer comprising a type carrier daisy wheel fitted on a carriage movable in front of the platen. The selection of type and movement of carriage are carried out by selection and transport motors of direct current type which are c... | 03/12/1985 |
| 4255643 | Programmed welding machine with continuously monitored override control A welding machine includes a programming device to move a welding head relative to horizontal main X and Y axes, and to rotate the head about a vertical C axis. A sensor is connected to rotate with the welding head on a rotator. A sine cosine resolver is ... | 03/10/1981 |
| 4234777 | Programmed welding machine with weld head speed override A welding machine includes a programming device to move a welding head relative to horizontal main X and Y axes, and to rotate the head about a vertical C axis. A sensor is connected to rotate with the welding head on a rotator. A sine cosine resolver is ... | 11/18/1980 |
| 4191981 | Record storage apparatus employing enhanced transducer positioning servomechanisms A sequentially operated machine employs two positionable members, a movable center selection piston member and a movable transducer member for accessing a record storage member selected by the central piston member. Making the record storage member availa... | 03/04/1980 |
