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| Number | Title | Issue Date |
| 7545112 | Fan motor control method and device thereof A fan motor control device comprises a clock signal generator and a drive unit. The clock signal generator generates a low-frequency clock signal. A frequency of low-frequency clock signal is less than 23 KHz. The drive unit converts the low-frequency clock signal t... | 06/09/2009 |
| 7333179 | Moving mechanism with high bandwidth response and low force transmissibility Methods and apparatus for providing a stage with a relatively high positioning bandwidth and low transmissibility are disclosed. According to one aspect of the present invention, a method for positioning a stage including providing a first force of a first magnitude... | 02/19/2008 |
| 7282874 | Alignment apparatus, exposure apparatus, and device manufacturing method An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage fo... | 10/16/2007 |
| 7253576 | E/I core actuator commutation formula and control method A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208... | 08/07/2007 |
| 7248989 | Speed measurement system for speed control of high-speed motors A system for measuring speed of a high-speed motor using a moving average filter. A position sensor generates a rotor position signal. A signal processing module determines a rotor angle from the rotor position signal. A speed observer module calculates a raw speed ... | 07/24/2007 |
| 7245412 | On-the-fly laser beam path error correction for specimen target location processing A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam positi... | 07/17/2007 |
| 7237512 | Controller cooling structure in electric vehicle To provide a cooling structure which can effectively cool a controller for controlling a drive of a motor in an electric vehicle. A controller cooling structure of an electric vehicle is provided with a motor for supplying power to the rear wheel as the drive wheel,... | 07/03/2007 |
| 7227321 | System and method for detecting back electromotive force with automatic pole calibration A system and method for determining the rotational speed of a motor, such as a three-phase disk drive motor, detects back electromotive force voltage generated during operation of the motor with an automatic pole calibration to minimize or eliminating variations in ... | 06/05/2007 |
| 7208893 | Motor driving control device to be driven at interval of constant time A motor driving control device includes a motor, a switch unit that controls driving of the motor, a current detection resistor that outputs a detection voltage indicating a current of the motor, a comparator that compares the detection voltage with a target current... | 04/24/2007 |
| 7209862 | Self-diagnosing system for encoder A self-diagnosing system for an encoder. The system includes an encoder circuit for outputting information detected by an encoder; a data preparing section provided in the encoder circuit and preparing data representing a state of an abnormal-state judgment factor i... | 04/24/2007 |
| 7199547 | Apparatus, method or system for controlling mobile body In order to control the position of a mobile body without using a position detector, a magnetic pole position of a rotor of a synchronous motor is estimated based on electrical quantities in relation to electric power supplied to the synchronous motor and then the m... | 04/03/2007 |
| 7196321 | Fine pattern forming apparatus and fine pattern inspecting apparatus Disclosed is a fine pattern forming apparatus and a fine pattern inspecting apparatus. In one preferred form, the fine pattern forming apparatus includes a surface irregularity information reading device for detecting a shape signal corresponding to a surface irregu... | 03/27/2007 |
| 7171718 | Direct drive windshield wiper assembly A windshield wiper assembly including at least one motor having an output shaft and a windshield wiper operatively connected to the output shaft. The motor includes a stator adapted to provide an electromagnetic flux and a rotor assembly supported for rotation about... | 02/06/2007 |
| 7173887 | Carriage servo method and apparatus for determining and setting a drive signal A carriage servo apparatus according to the present invention comprises: a carriage for supporting a pickup that records or reproduces information relevant to an information recording face; and a carriage motor for moving the carriage in a direction parallel to the ... | 02/06/2007 |
| 7154210 | Driving device The driving device has a piezoelectric element 32, a supporting member 16 fixed to one end of the piezoelectric element 32, a driving shaft 18 fixed to the other end of the piezoelectric element 32, a movable member 20 that ... | 12/26/2006 |
| 7116430 | Highly-sensitive displacement-measuring optical device The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diff... | 10/03/2006 |
| 7109679 | Damping for electromechanical actuators Oscillation and other disturbance damping is provided for a system having a load driven by an electric motor, e.g., an electromagnetic actuator. Damping is achieved using feedback in an active mode, where power is supplied in a normal operation mode of the electroma... | 09/19/2006 |
| 7088064 | Method for the orientation of a spindle and numerical control device of a machine tool embodied for the method for the orientation of the spindle A method for the orientation of a spindle of a numerically controlled and rapidly rotating spindle by which the spindle is brought from an initial rotational speed into a predetermined position of rest. The method includes performing a first phase of orientation of ... | 08/08/2006 |
| 7068377 | System and method for surface profiling a target object The present invention relates to microinterferometers and the application of such to profile surface geometries. A representative method for profiling a target surface of an object includes: illuminating the target surface with an incident light beam through a phase... | 06/27/2006 |
| 7064512 | Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method A positioning apparatus includes an X stage, a linear motor (X-axis) which drives the X stage along the X-axis, a linear motor (Y-axis) which drives a Y stage along the Y-axis, a laser interferometer which detects position information of the stages along the X and Y... | 06/20/2006 |
| 7061202 | Automobile servomotor controller An automobile servomotor controller includes a master control unit having a master control circuit for transmitting a designation signal and a slave unit having a motor and a control circuit which controls driving of a motor by outputting an operation signal to a dr... | 06/13/2006 |
| 7057364 | Actuation system comprising a digital position sensor An actuating system having an electric motor that is controlled by a computer as a function of a setpoint position of a member that is to be actuated. The actuating system includes an encoder that is dependent on the movement of the motor, a sensor designed to deliv... | 06/06/2006 |
| 7049592 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes a projection system mounted on a reference frame, which in turn is mounted on a base which supports the apparatus. Vibrations and displacement errors in the base are filtered through two sets of isolation mounts operatively between ... | 05/23/2006 |
| 7030588 | Control constant adjusting apparatus A control constant adjusting apparatus in a control apparatus of a robot or a machine tool, etc. is disclosed. This control constant adjusting apparatus includes a speed control part (12), an estimation part (13), an identification part (14) and... | 04/18/2006 |
| 7030581 | Motor controller This invention relates to a motor controller for driving an object to be controlled by torque from a motor responding to a computed torque command, the object being provided with the motor and a mechanical load. The motor controller includes: a feedback computation ... | 04/18/2006 |
| 7015670 | Method of controlling a high-friction electro-mechanical servo-mechanism to minimize the power needed to hold a loaded output member The invention provides a method for controlling an electromechanical servomechanism (20) for moving an output member relative to a variable load (38). The servomechanism includes: a motor (37) having at least one coil (32A, 32B or ... | 03/21/2006 |
| 7009359 | Foam core chuck for the scanning stage of a lithography system A foam core chuck for use in a scanning stage of a lithography system is disclosed. In accordance with an embodiment of the present invention, the lithography stage includes a frame and a chuck supported by the frame. The chuck has a foam core structure that is cove... | 03/07/2006 |
| 6992450 | Active mass damper The invention provides an active mass damper by use of which a machining apparatus can be downsized. The active mass damper includes a support unit for supporting a weight movably and horizontally, a motor for driving the weight, and a controller for controlling the... | 01/31/2006 |
| 6984947 | Apparatus and method for adjusting components of an optical or mechanical system An apparatus and a method for adjusting components of an optical system, the components including an adjustment device. An electric positioning motor can be engaged onto the adjustment device of the components. An electrical generator is electrically connected to th... | 01/10/2006 |
| 6956915 | Method of correcting frequency error A method of correcting frequency errors for use in CDMA mobile radio terminals which is adaptive, depending on the value of the frequency error. There are thus three different frequency error correction processing modes: a processing mode with no correction, an open... | 10/18/2005 |
| 6952320 | Virtual tracks for repeatable runout compensation The present invention relates to repeatable runout (RRO) compensation of servo control systems that can be used in disc drives or spin-stands. The RRO relates to eccentricity between servo tracks, which were written onto a disc prior to the installation of the disc ... | 10/04/2005 |
| 6944906 | Direct drive windshield wiper assembly A direct drive windshield wiper assembly including at least one brushless DC motor providing a drive torque through an output that is rotatable about the longitudinal axis of the motor and a windshield wiper that is driven by the motor about the longitudinal axis in... | 09/20/2005 |
| 6940252 | DC motor control method and apparatus A DC motor control method and apparatus for reducing time required for deceleration without degrading positioning accuracy. In a device which drives a mechanism by using a DC motor as a power source, in deceleration of the DC motor, when the mechanism arrives at a p... | 09/06/2005 |
| 6937911 | Compensating for cable drag forces in high precision stages A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from actin... | 08/30/2005 |
| 6914745 | Head movement controlling based on servo generated speed control values The hard disk drive comprises: a magnetic disk 2 having servo information stored; magnetic heads 4 seeking on the magnetic disk 2 and staying at a predetermined position to read or write data; a voice coil motor 6 moving the magnetic head... | 07/05/2005 |
| 6911798 | Rotation angle detecting apparatus for synchronous rotary electric machine A rotation angle detecting apparatus for a synchronous rotary electric machine includes an incremental encoder. The incremental encoder generates an index pulse each time electric power is supplied to said plurality of phase-coils and an auxiliary index pulse each t... | 06/28/2005 |
| 6806674 | Control device for driving and controlling a servomotor Parameter set 1: T1a, T2a, Fa, Aa, parameter set 2: T1b, T2b, Fb, Ab, and parameter set 3: T1c, T2c, Fc, Ac, which consist of parameters having discrete values i... | 10/19/2004 |
| 6791293 | Sensorless control device for synchronous electric motor The invention provides a synchronous motor sensorless controller which drives a synchronous motor without use of a rotational position sensor. The controller has a relative position counter 4 which acquires an estimated position of a magnetic pole from the po... | 09/14/2004 |
| 6787768 | Method and apparatus for tool and tip design for nanomachining and measurement A single-body structure is presented for use as a tool tip for making modifications and/or collecting measurements on a target object. The single-body structure comprises a first end portion, a second end portion opposite the first portion, and a mid portion between... | 09/07/2004 |
| 6750625 | Wafer stage with magnetic bearings A high accuracy stage supported in six degrees of freedom by electromagnetic bearings. Movements in the horizontal plane of the stage are controlled by variable reluctance actuators which are mounted between the high accuracy stage and a coarse stage so as not to di... | 06/15/2004 |
