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| Number | Title | Issue Date |
| 8179046 | Ultraviolet lamp system with cooling air filter A microwave-excited ultraviolet lamp system includes a microwave chamber cooled with air drawn through the chamber by a negative pressure source. A filter provided at an inlet of the lamp system prevents particulate material from entering the microwave chamber. ... | 05/15/2012 |
| 8179047 | Method and system for adjusting the frequency of a resonator assembly for a plasma lamp A plasma electrodeless lamp comprises a substantially hollow metallic body, closely receiving two coupling elements, the first coupling element connected to the output of an RF amplifier, and the second coupling element connected to the input of an RF amplifier. The... | 05/15/2012 |
| 8164264 | Lamp A bandpass filter comprises an air filled aluminum chamber having a lid and a cuboid resonant cavity having a central iris. At opposite end nodes of the cavity, perfect electric conductors (PECs) are provided. Threaded tuning projections opposite the PECs and in the... | 04/24/2012 |
| 8159136 | Frequency tunable resonant cavity for use with an electrodeless plasma lamp A plasma lamp is described with resonant frequency tuning capability and associated methods for tuning. One tuning method allows plasma lamp manufacturer to set the frequency of lamps to several discrete predetermined values. For example, most lamps that are near th... | 04/17/2012 |
| 8125153 | Microwave energized plasma lamp with dielectric waveguide A plasma lamp including a waveguide body comprising at least one dielectric material. The body is coupled to a microwave power source which causes the body to resonate in at least one resonant mode. A lamp chamber integrated with the body contains a bulb with a fill... | 02/28/2012 |
| 8110988 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp is disclosed for powering a small and bright bulb with a diameter of a few millimeters. The lamp is contained within a high dielectric constant material which guides the microwaves to the bulb, provides heat isolation to... | 02/07/2012 |
| 7994721 | Plasma lamp and methods using a waveguide body and protruding bulb A plasma lamp for an electrodeless plasma lamp having a dielectric waveguide body and a bulb positioned, at least in part, in the waveguide body and having at least one end protruding from the waveguide body. A probe is used to couple power into the waveguide body. ... | 08/09/2011 |
| 7965044 | Light source device and projector including light source device An optical source device includes a solid high frequency oscillating unit that outputs a high frequency signal, a waveguide that receives the high frequency signal output from the solid high frequency oscillating unit and radiates the received high frequency signal ... | 06/21/2011 |
| 7940007 | Plasma lamp with dielectric waveguide integrated with transparent bulb A dielectric waveguide integrated plasma lamp (DWIPL) with a body comprising at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one resonant mode when... | 05/10/2011 |
| 7919923 | Plasma lamp with dielectric waveguide A plasma lamp and a method of generating light are provided. The plasma lamp may include a lamp body having a dielectric constant greater than about 2 and a power source. The power source is coupled to the lamp body by a feed to provide power to the lamp body. A bul... | 04/05/2011 |
| 7906910 | Plasma lamp with conductive material positioned relative to RF feed In an example embodiment, an electrodeless plasma lamp is provided which comprises a lamp body comprising a dielectric material having a relative permittivity greater than 2, and a bulb adjacent to the lamp body, the bulb containing a fill that forms a plasma when R... | 03/15/2011 |
| 7906911 | Luminaire assembly having a bonded reflector cavity for supporting an ultra-violet lamp A luminaire reflector comprises a first end reflector segment, a second end reflector segment, and a main reflector segment bonded together as a single-piece. The main reflector segment, the first end reflector segment, and the second end reflector segment form a mi... | 03/15/2011 |
| 7888874 | Plasma lamp with conductive material positioned relative to RF feed In an example embodiment, an electrodeless plasma lamp is provided which comprises a lamp body comprising a dielectric material having a relative permittivity greater than 2, and a bulb adjacent to the lamp body, the bulb containing a fill that forms a plasma when R... | 02/15/2011 |
| 7855511 | Plasma lamp with phase control A plasma lamp for an electrodeless plasma lamp having a waveguide body with an effective dielectric constant of at least 2. A drive probe is coupled to the waveguide body to provide the primary power for ignition and steady state operation of the lamp. A phase shift... | 12/21/2010 |
| 7830092 | Electrodeless lamps with externally-grounded probes and improved bulb assemblies An electrode-less plasma lamps, comprising generally of a bulb containing a gas-fill that is excited to produce light using radio-frequency (RF) energy. In specific embodiments, the use of grounded coupling-elements with integrated bulb assemblies simplifies manufac... | 11/09/2010 |
| 7795815 | Light source device and projector including light source device The invention provides an optical source device and a projector including the optical source device, in which a microwave is used to reduce the size, and increase the life span. The optical source device according to the invention includes a solid high freque... | 09/14/2010 |
| 7791280 | Plasma lamp using a shaped waveguide body A plasma lamp for an electrodeless plasma lamp having a shaped dielectric waveguide body. The shaped body may have a relatively thin region containing a bulb, and a second region thicker than the first region. Microwave probes may be positioned in the second region ... | 09/07/2010 |
| 7719195 | Plasma lamp with field-concentrating antenna An electrodeless plasma lamp is described comprising a lamp body including a solid dielectric material. The lamp includes a bulb received at least partially within an opening in the solid dielectric material and a radio frequency (RF) feed configured to provide powe... | 05/18/2010 |
| 7710041 | Microwave tube An output power adjusting mechanisms for adjusting output power is provided on a wave guide of a high frequency output section coupled to an output cavity. The output power adjusting mechanisms is located at a position apart away from the output cavity by a distance... | 05/04/2010 |
| 7701143 | Plasma lamp with compact waveguide A plasma lamp for an electrodeless plasma lamp having a compact dielectric waveguide body. Example embodiments may use a shaped body to allow operation at a lower frequency (or at the same frequency with a body of smaller volume) than a solid cylindrical or rectangu... | 04/20/2010 |
| 7656095 | Light system with dielectric barrier discharge lamp, operating device and connection cable A lighting system with a dielectric barrier discharge lamp (2) and an operating device (1) is connected to a high-voltage flat ribbon cable (6). As a result, the capacitive line losses can be minimized and both the ignition behavior and the powe... | 02/02/2010 |
| 7564190 | Light source device and image displaying apparatus using the same A light source device comprises a waveguide, an electrodeless lamp, a probe, and conversing means. The waveguide is formed to contain a medium enabling a microwave to resonate and has a surface and an aperture cavity with an aperture opened at a predetermined positi... | 07/21/2009 |
| 7525253 | Microwave energized plasma lamp with dielectric waveguide A plasma lamp including a waveguide body comprising at least one dielectric material. The body is coupled to a microwave power source which causes the body to resonate in at least one resonant mode. A lamp chamber integrated with the body contains a bulb with a fill... | 04/28/2009 |
| 7518315 | Microwave energized plasma lamp with solid dielectric waveguide A plasma lamp including a waveguide body including at least one dielectric material with a dielectric constant greater than approximately 2. The body is coupled to a microwave source which causes the body to resonate in at least one resonant mode. At least one lamp ... | 04/14/2009 |
| 7498747 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp is disclosed for powering a small and bright bulb with a diameter of a few millimeters. The lamp is contained within a high dielectric constant material which guides the microwaves to the bulb, provides heat isolation to... | 03/03/2009 |
| 7439677 | Microwave generator A microwave generator having a central electrode (14) which at the front end has a radiating element (22) and an external electrode (18) which coaxially surrounds the central electrode (14) along an axially extending resonator portion ( | 10/21/2008 |
| 7397173 | Lighting apparatus using microwave energy A lighting apparatus using microwave energy comprises, a magnetron disposed inside a casing, for generating microwave energy; a waveguide for guiding microwave energy; a resonator providing a resonant region in which the microwave energy is resonated; a bulb dispose... | 07/08/2008 |
| 7391158 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp (DWIPL) with a body consisting essentially of at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one res... | 06/24/2008 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7372209 | Microwave energized plasma lamp with dielectric waveguide A plasma lamp including a waveguide body including at least one dielectric material with a dielectric constant greater than approximately 2. The body is coupled to a microwave source which causes the body to resonate in at least one resonant mode. At least on... | 05/13/2008 |
| 7368741 | Extreme ultraviolet light source The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line wit... | 05/06/2008 |
| 7365351 | Systems for protecting internal components of a EUV light source from plasma-generated debris Systems and methods are disclosed for protecting an EUV light source plasma production chamber optical element surface from debris generated by plasma formation. In one aspect of an embodiment of the present invention, a shield is disclosed which comprises at least ... | 04/29/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7362055 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp is disclosed for powering a small and bright bulb with a diameter of a few millimeters. The lamp is contained within a high dielectric constant material which guides the microwaves to the bulb, provides heat isolation to... | 04/22/2008 |
| 7362056 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp (DWIPL) with a body consisting essentially of at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one res... | 04/22/2008 |
| 7362054 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp is disclosed for powering a small and bright bulb with a diameter of a few millimeters. The lamp is contained within a high dielectric constant material which guides the microwaves to the bulb, provides heat isolation to... | 04/22/2008 |
| 7358678 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp is disclosed for powering a small and bright bulb with a diameter of a few millimeters. The lamp is contained within a high dielectric constant material which guides the microwaves to the bulb, provides heat isolation to... | 04/15/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7348580 | Particle beam processing apparatus and materials treatable using the apparatus The present invention is directed to a particle beam processing apparatus that is smaller in size and operates at a higher efficiency, and also directed to an application of such apparatus to treat a coating on a substrate of a treatable material, such as for flexib... | 03/25/2008 |
| 7348732 | Plasma lamp with dielectric waveguide A dielectric waveguide integrated plasma lamp (DWIPL) with a body consisting essentially of at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one res... | 03/25/2008 |
