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Class 315/111.91 - Gas ionization type (e.g., ion pump or gauge source)


Subclass of Class 315 - Electric lamp and discharge devices: systems
Definition: Subject matter wherein the fluent material is bombarded
No. of patents: 228
Last issue date: 11/01/2011


1            
NumberTitleIssue Date
8049426Electrostatic fluid accelerator for controlling a fluid flow
An electrostatic fluid accelerator includes an electrode array comprising an array of corona discharge electrodes and an array of accelerating electrodes for moving a fluid. A detector is configured to sense a constituent component of the fluid. A control circuit su...
11/01/2011
7911146High-velocity, multistage, nozzled, ion driven wind generator and method of operation of the same adaptable to mesoscale realization
Gas flows of modest velocities are generated when an organized ion flux in an electric field initiates an ion-driven wind of neutral molecules. When a needle in ambient air is electrically charged to a potential sufficient to produce a corona discharge near its tip,...
03/22/2011
7855513Device and method for gas treatment using pulsed corona discharges
A plasma reactor is provided, which includes a discharge chamber with dimensional characteristics and configuration of dielectric and electrodes so as to enhance efficiency based on the characteristics of the corona discharge streamers generated. Upon application of...
12/21/2010
7652431Electrostatic fluid accelerator
An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated from one another with exciting electrodes. Either the exciting electro...
01/26/2010
7435971Ion source
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirect...
10/14/2008
7425709Modular ion source
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common c...
09/16/2008
7410532Method of controlling a fluid flow
An electrostatic fluid accelerator includes an electrode array including an array of corona discharge electrodes and an array of accelerating electrodes. A detector is configured to sense a constituent component of the fluid as present in an output from the electrod...
08/12/2008
7405411Ion source with multi-piece outer cathode
In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereb...
07/29/2008
7372059Plasma-based EUV light source
Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can prod...
05/13/2008
7371332Uniform etch system
Etching a layer over a substrate is provided. The substrate is placed in a plasma processing chamber. A first gas is provided to an inner zone within the plasma processing chamber. A second gas is provided to the outer zone within the plasma processing chamber, wher...
05/13/2008
7365315Method and apparatus for ionization via interaction with metastable species
An apparatus for analyzing a sample material includes a desorption mechanism configured to desorb molecules from the sample material, a metastable generator separate from the desorption mechanism and configured to generate a metastable species, and an interaction re...
04/29/2008
7355171Method and apparatus for process monitoring and control
A method and apparatus for real-time monitoring of a gaseous environment during a semiconductor process. The method utilizes metastable electronic energy transfer to excite and ionize the chamber gaseous effluent and correlates the fluorescence signals from the exci...
04/08/2008
7334394Localized arc filament plasma actuators for noise mitigation and mixing enhancement
A device for controlling fluid flow. The device includes an arc generator coupled to electrodes. The electrodes are placed adjacent a fluid flowpath such that upon being energized by the arc generator, an arc filament plasma adjacent the electrodes is formed. In tur...
02/26/2008
7321346Method and apparatus for driving plasma display panel
There is disclosed a method and apparatus of driving a plasma display panel that is adaptive for improving its contrast and enabling its high speed driving. A driving method of a plasma display panel according to an embodiment of the present invention applies...
01/22/2008
7312579Hall-current ion source for ion beams of low and high energy for technological applications
A Hall-current ion source for generation of low and high energy ion beams with selection of magnetic fields and emission currents, where there are utilized low magnetic fields and high emission currents that are higher than discharge currents for low energy ion beam...
12/25/2007
7311756Fanless indoor air quality treatment
An indoor air quality system for a structure is provided. The indoor air quality system includes a ventilation system and a corona discharge apparatus. The ventilation system directs air through the structure. The corona discharge apparatus is positioned within the ...
12/25/2007
7301269Image display apparatus provided with an ion pump assembly arranged within an external container
Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container...
11/27/2007
7298092Device and method for gas treatment using pulsed corona discharges
A novel plasma reactor is provided that includes a discharge chamber with dimensional characteristics and configuration of dielectric and electrodes that optimize efficiency based on the characteristics of the corona discharge streamers generated. Upon application o...
11/20/2007
7293423Method and apparatus for controlling freezing nucleation and propagation
An apparatus and method of controlling freezing in a liquid system is disclosed. The apparatus includes a heat exchanger having a initial zone characterized by a surface area to volume ratio. The apparatus also includes means for initiating freezing of a fluid from ...
11/13/2007
7294209Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that suppli...
11/13/2007
7278549Remedies to prevent cracking in a liquid system
A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are desig...
10/09/2007
7279846Image display apparatus
Provided is an image display apparatus including: a vacuum container having an electron source enclosed therein for displaying an image; an ion pump communicating with the vacuum container for discharging air therefrom and decreasing pressure therein; and a resistor...
10/09/2007
7279845Plasma processing method and apparatus
A method and apparatus for processing a target substance by using atmospheric-pressure plasma produced by a composite waveform generated by superimposing a high-frequency sine wave and a high-frequency square wave at the same or substantially the same frequency and ...
10/09/2007
7266991Sensor for helium or hydrogen
The invention relates to a sensor (1) for helium or hydrogen with a vacuum-tight housing (2), wherein a gas consuming cold cathode array (3, 4) is arranged, in addition to a selectively active passage (9) for the gas to be detected. Accor...
09/11/2007
7269008Cooling apparatus and method
A cooling apparatus is provided with an electrostatic flow modifier to be complementarily positioned relative to a cooling fluid flow to modify at least one characteristic of the cooling fluid flow to enhance an amount of heat the cooling fluid flow removes from an ...
09/11/2007
7264741Coater having substrate cleaning device and coating deposition methods employing such coater
A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a...
09/04/2007
7259378Closed drift ion source
A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed ...
08/21/2007
7248003Electrostatic fluid accelerator for and method of controlling a fluid flow
An electrostatic fluid accelerator includes a first number of corona electrodes and a second number of accelerating electrodes spaced apart from and parallel to adjacent ones of the corona electrodes. An electrical power source is connected to supply the corona and ...
07/24/2007
7226496Spot ventilators and method for spot ventilating bathrooms, kitchens and closets
A spot ventilator and method for spot ventilating a localized environment of a building is provided. The spot ventilator includes a passage and at least one corona discharge apparatus. The passage extending between an inlet positioned in the localized environment an...
06/05/2007
7226497Fanless building ventilator
A ventilation system for a building is provided. The ventilation system includes a pair of passages between the interior and exterior of the building and at least one corona discharge apparatus for drawing fluid through the passages. The ventilation system may also ...
06/05/2007
7214949Ion generation by the temporal control of gaseous dielectric breakdown
An apparatus and method for ion generation are adapted such that an ionization process is controlled temporally, to first initiate, then to halt the breakdown of the gas before a destructive plasma or glow is formed. This method controls the release of energy to the...
05/08/2007
7201214Remedies to prevent cracking in a liquid system
A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are desig...
04/10/2007
7201012Remedies to prevent cracking in a liquid system
A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are desig...
04/10/2007
7198699Sputter coating apparatus including ion beam source(s), and corresponding method
A coating apparatus deposits a first coating (single or multi-layered) onto a first side of a substrate (e.g., glass substrate) passing through the apparatus, and a second coating (single or multi-layered) onto the other or second side of the substrate. In certain e...
04/03/2007
7199374Corona discharge lamps
Excimers are formed in a gas (30,130) by applying a pulsed potential between a first electrode (14,114) and a counter electrode (26, 126) so that corona discharge occurs, substantially without arcing, when the potential is on. The pulses or on-t...
04/03/2007
7196525Sample imaging
Systems and methods of generating ions at atmospheric pressure are presented. These systems and methods include spatially dependent analysis of a sample using an effusive ionization source. Systems and methods of isolating samples at atmospheric pressure are present...
03/27/2007
7194801Thin-film battery having ultra-thin electrolyte and associated method
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl...
03/27/2007
7190579Data processing system with air purifying device
An air purifying data processing system includes a chassis, a planar, a microprocessor and an air purifier. The air purifier produces purified air that is exhausted exterior to the chassis to improve the air quality in the vicinity of the chassis. The air purifier p...
03/13/2007
7183716Charged particle source and operation thereof
A charged particle source utilizes a novel plasma processing chamber, RF coil and ion optics, to achieve high uniformity. The plasma processing chamber has a re-entrant vessel which is movable, and which includes extensions of adjustable shape or position, to make m...
02/27/2007
7183559Ion source with substantially planar design
In certain example embodiments of this invention, there is provide an ion source including an anode and a cathode. In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between...
02/27/2007
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