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| Number | Title | Issue Date |
| 8138678 | Charged particle beam decelerating device and method, and X-ray generating apparatus using the same A charged particle beam decelerating device includes a high-frequency cavity 34 provided on an orbit of a charged particle beam 1, and a phase synchronizing device 40 for synchronizing the charged particle beam 1 in the high-frequency cav... | 03/20/2012 |
| 7973485 | Particle controller A particle controller is disclosed. In some embodiments, a particle controller includes an input port configured to receive a particle stream and a set of cells configured to form a tube through which at least a portion of the particles comprising the particle strea... | 07/05/2011 |
| 7436122 | Helicon hall thruster Atoms of a propellant gas are ionized in a helicon plasma source, preferably in an annular area between inner and outer cylinders. The annular ionization area is aligned with an annular acceleration stage similar to the electrical-magnetic acceleration stage of a Ha... | 10/14/2008 |
| 7420182 | Combined radio frequency and hall effect ion source and plasma accelerator system This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces ... | 09/02/2008 |
| 7408303 | Pulsed plasma accelerator and method A pulsed plasma accelerator includes two electrodes (1) arranged between dielectric bars (2) made from an ablating material, a discharge channel with an open end part whose walls are defined by the surfaces of electrodes (1) and dielectric bars ... | 08/05/2008 |
| 7400094 | Standing wave particle beam accelerator having a plurality of power inputs A device for generating a particle beam includes a particle source, and a structure having a first section and a second section, the first section coupled to the particle source, the first section having a first power input, and the second section having a second po... | 07/15/2008 |
| 7381949 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 06/03/2008 |
| 7359177 | Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output A plasma reactor has a dual frequency plasma RF bias power supply furnishing RF bias power comprising first and second frequency components, f(1), f(2), respectively, and an RF power path having an input end coupled to the plasma RF bias power supply a... | 04/15/2008 |
| 7315140 | Cyclotron with beam phase selector Disclosed here is a cyclotron having a beam phase selector capable of controlling phase widths of beams and improving beam permeability for increasing beam current. The cyclotron contains an acceleration voltage applying section and a beam blocking section, at least... | 01/01/2008 |
| 7309961 | Driving frequency modulation system and method for plasma accelerator A plasma accelerator (300) is disclosed that has three separate sections of coils (301-316) disposed outside the plasma chamber (321). The separate sections of coils include an initial discharge section (309-316), an acceler... | 12/18/2007 |
| 7294969 | Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge Disclosed is a high-frequency discharge plasma generation-based two-stage Hall-effect plasma accelerator, which comprises an annular acceleration channel having a gas inlet port, a high-frequency wave supply section, an anode, a cathode, a neutralizing electron gene... | 11/13/2007 |
| 7276140 | Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a circular channel comprising an inner wall, an outer wall, and an end wall connected to an end of the inner wall and the outer wall to form an outlet... | 10/02/2007 |
| 7262564 | Electrostatic fluid accelerator for and a method of controlling fluid flow An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages. A single power supply or synchronized and phase controlled power supplies provide high voltage power to each of the stages such that both the phas... | 08/28/2007 |
| 7253572 | Electromagnetic induced accelerator based on coil-turn modulation An electromagnetic induced accelerator based on coil-turn modulation, including inner and outer cylinders with different diameters, the cylinders being coaxially disposed to form a channel which is a spatial portion therebetween; a discharging coil wound spirally in... | 08/07/2007 |
| 7247993 | Ion accelerator arrangement The invention relates to an ion accelerator arrangement which uses a combination of a magnetic field having a cusp structure and a cross-section of an ionisation chamber that is extended in one direction transversally in relation to the longitudinal axis. This enabl... | 07/24/2007 |
| 7247992 | Ion accelerator arrangement For an ion accelerator system having a special magnetic field structure with an alternating predominantly longitudinal and crosswise progression of the magnetic field, a geometry of the ionization chamber having a non-cylindrical shape of the chamber wall that is ad... | 07/24/2007 |
| 7247218 | Plasma density, energy and etch rate measurements at bias power input and real time feedback control of plasma source and bias power A plasma reactor process measurement instrument includes an input phase processor receiving wafer bias voltage, current and power and computing an input impedance, an input current and an input voltage to the transmission line; a transmission line processor for comp... | 07/24/2007 |
| 7220937 | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination A gas distribution ceiling electrode for use as a capacitive source power applicator and gas distribution showerhead in a plasma reactor includes a metal base and a process-compatible protective layer on the interior surface of he electrode having a dopant impurity ... | 05/22/2007 |
| 7196283 | Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface An overhead gas distribution electrode forming at least a portion of the ceiling of a plasma reactor has a bottom surface facing a processing zone of the reactor. The electrode includes a gas supply manifold for receiving process gas at a supply pressure at a top po... | 03/27/2007 |
| 7190108 | Methods and apparatus using pulsed and phased currents in parallel plates, including embodiments for electrical propulsion First and second parallel conducting plates include arrayed conducting segments, preferably with specific spacing relative to each other and to the separation of the plates. Currents through the conducting segments are pulsed and phased to produce constructive but u... | 03/13/2007 |
| 7186943 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression A plasma reactor for processing a semiconductor workpiece, includes a reactor chamber having a chamber wall and containing a workpiece support for holding the semiconductor support, the electrode comprising a portion of the chamber wall, an RF power generator for su... | 03/06/2007 |
| 7183515 | Systems and methods for plasma jets A plasma jet system includes a housing with an opening. A plasma generator is coupled to ionize a fluid in the housing. An electromagnetic accelerator is coupled to generate an electric field that accelerates ionized fluid in the housing toward the opening. A contro... | 02/27/2007 |
| 7180243 | Plasma accelerator with closed electron drift The closed electron drift plasma accelerator comprises an annular ionization chamber, an acceleration chamber on the same axis as the ionization chamber, an annular anode, a hollow cathode, a first DC voltage source, an annular gas manifold, a magnetic circuit, and ... | 02/20/2007 |
| 7174703 | Ion thrusting system An ion thrusting system is disclosed comprising an ionization membrane having at least one area through which a gas is passed, and which ionizes the gas molecules passing therethrough to form ions and electrons, and an accelerator element which accelerates the ions ... | 02/13/2007 |
| 7161158 | System and method for fast focal length alterations An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam. | 01/09/2007 |
| 7141757 | Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent A plasma reactor operable over a very wide process window of pressure, source power and bias power includes a resonant circuit consisting of an overhead electrode having a first impedance, a wafer support pedestal having a second impedance and a bulk plasma having a... | 11/28/2006 |
| 7119491 | Magnetic and electrostatic confinement of plasma with tuning of electrostatic field A system and method for containing plasma and forming a Field Reversed Configuration (FRC) magnetic topology are described in which plasma ions are contained magnetically in stable, non-adiabatic orbits in the FRC. Further, the electrons are contained electrostatica... | 10/10/2006 |
| 7084572 | Plasma-accelerator configuration The invention relates to various advantageous embodiments of a plasma-accelerator configuration, especially for the configuration and design of electron sources used for ionizing the working gas and/or neutralizing the discharged plasma jet. ... | 08/01/2006 |
| 7078852 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 07/18/2006 |
| 7053565 | Electrostatic fluid accelerator for and a method of controlling fluid flow An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages with final or rear-most electrodes of one stage maintained at substantially the same instantaneous voltage as the immediately adjacent initial or f... | 05/30/2006 |
| 7053389 | Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device The invention provides a charged particle therapy system capable of increasing the number of patients treated. An irradiation filed forming apparatus for irradiating a charged particle beam extracted from a charged particle beam generator to an irradiation target in... | 05/30/2006 |
| 7049736 | Method of trapping accelerating electrons in plasma Background plasma electrons in a laser wake field are trapped and accelerated using a sharp downward density transition. A short and intense laser pulse travels through low density plasma with a sharp downward density transition. The density transition scale length ... | 05/23/2006 |
| 7045793 | Multi-grid ion beam source for generating a highly collimated ion beam A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potenti... | 05/16/2006 |
| 7045792 | Charged particle buncher A charged particle buncher with a series of spaced apart electrodes 1 arranged to generate a shaped electric field, the series comprising a first electrode 1a, a last electrode 1b and one or more intermediate electrodes, wherein th... | 05/16/2006 |
| 7030576 | Multichannel hall effect thruster A Hall effect thruster for propelling spacecraft and satellites includes at least two acceleration channels, each of the channels has a closed end and an open end, and a plurality of flux guides adjacent each of the channels. The plurality of flux guides includes an... | 04/18/2006 |
| 7030398 | Laser driven ion accelerator A system and method of accelerating ions in an accelerator to optimize the energy produced by a light source. Several parameters may be controlled in constructing a target used in the accelerator system to adjust performance of the accelerator system. These paramete... | 04/18/2006 |
| 6982520 | Hall effect thruster with anode having magnetic field barrier An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution channel. The field-shaping structure includes magnetic material extending a... | 01/03/2006 |
| 6960888 | Method of producing and accelerating an ion beam A method of producing and accelerating an ion beam comprising the steps of: providing a magnetic field with a cusp that opens in an outward direction along a centerline that passes through a vertex of the cusp: providing an ionizing gas that sprays outward through a... | 11/01/2005 |
| 6929712 | Plasma processing apparatus capable of evaluating process performance A high-frequency current detector of a plasma processing apparatus detects a high-frequency current produced when high-frequency power in the range that does not cause generation of plasma in a chamber is supplied from a high-frequency power supply source to the cha... | 08/16/2005 |
| 6906453 | Method and apparatus for simultaneously depositing and observing materials on a target A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field a... | 06/14/2005 |
